CN203548125U - Combined cold plate in vacuum low-temperature pump - Google Patents
Combined cold plate in vacuum low-temperature pump Download PDFInfo
- Publication number
- CN203548125U CN203548125U CN201320647676.0U CN201320647676U CN203548125U CN 203548125 U CN203548125 U CN 203548125U CN 201320647676 U CN201320647676 U CN 201320647676U CN 203548125 U CN203548125 U CN 203548125U
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- plate
- cold plate
- connecting tube
- liquid inlet
- array
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Abstract
The utility model discloses a combined cold plate in a vacuum low-temperature pump. A through slotted hole is formed in the center of each array plate of the combined cold plate; longitudinal fixed plates are formed on each array plate on the opposite sides of the corresponding slotted hole; the array plates are spliced and sheathed on a cold plate bracket; the fixed plates of the array plates lean against the two side plates of the cold plate bracket; the fixed plates of each array plate and the side plates of the cold plate bracket are spliced with two groups of opposite bends; a horizontal pipe in the middle of each bend is pressed on the corresponding fixed plate; opposite ends on each two groups of bends are respectively in screw joint on two ends of connecting pipes; the connecting pipes are fixedly provided with liquid inlet pipes communicated with the connecting pipes; the upper ends of the liquid inlet pipes pass through the upper plate of the cold plate bracket and the top plate of the cold plate and are in screw joint with nuts; the top plate is fixedly arranged on the cold plate bracket by the nuts. According to the combined cold plate in the vacuum low-temperature pump, which is disclosed by the utility model, the array plates and the top plate can be effectively fixedly arranged on the cold plate bracket. In addition, the liquid inlet pipes can be communicated with a compressor so as to increase the cooling speed of the cold plate, and therefore the air condensation speed is improved.
Description
Technical field:
The utility model relates to the technical field of vacuum and low temperature pump, more specifically to the combination cold plate of architecture advances in a kind of vacuum and low temperature pump.
Background technique:
Cryopump, claims again condensate extractionpump, is the vacuum pump that utilizes low-temperature surface condensed gas.It can obtain speed of exhaust maximum, clean vacuum that ultimate pressure is minimum, be widely used in research and the production of semiconductor and IC, and the aspect such as molecular rays research, vacuum coating equipment, vacuum surface analytical instrument, ion implantation apparatus and space simulation facility.As its condensed gas cold drawing used, be its crucial parts.The cold drawing that is generally provided with an array combination in the secondary cold drawing of existing cryopump increases the object of condensation air, the cold drawing of existing array combination as shown in Figure 1, its top board 1 and array board 2 are fixed on cold drawing support 3 by bolt 8, the sidewall of existing cold drawing support 3 is generally thinner, the tooth of the screw thread on it is generally less, the general red copper that adopts of its cold drawing support 3 is made simultaneously, copper material material is softer, so stripped thread easily occurs its bolt 8, thereby top board 1 and array board 2 are failed firm being fixed on cold drawing support 3.
Model utility content:
The purpose of this utility model is exactly the deficiency for prior art, and the combination cold plate in a kind of vacuum and low temperature pump of architecture advances is provided, and it is enough is fixed on array board and top board on cold drawing support effectively.
For achieving the above object, combination cold plate in vacuum and low temperature pump of the present utility model includes top board and array board, wherein, the center of array board forms the slotted eye running through, on the array board of slotted eye opposite side-edge, form fixed plate longitudinally, described array board sleeve is on cold drawing support, the fixed plate of array board leans against on the biside plate of cold drawing support, the side plate of the fixed plate of array board and cold drawing support is plugged with two groups of relative bend pipes, the middle part transverse tube of bend pipe is pressed against on fixed plate, on two groups of bend pipes, relative one end is screwed onto respectively the two ends of connecting tube, connecting tube is fixed with the liquid inlet pipe being connected with connecting tube, liquid inlet pipe upper end is through the upper plate of cold drawing support and the top board of cold drawing and be bolted with nut, top board is fixed on cold drawing support by nut.
As technique scheme preferably, on described connecting tube, form the tapped hole that runs through connecting tube outer wall, on liquid inlet pipe, form outside thread, connecting tube is screwed onto on liquid inlet pipe, liquid inlet pipe forms counterbore and is connected with connecting tube.
As technique scheme preferably, on the inner tube wall at described connecting tube two ends, form the screw thread that Hand of spiral is contrary, bend pipe two ends form outside thread, the outside thread of relative bend pipe is the screw thread that Hand of spiral is contrary.
As technique scheme preferably, on the fixed plate of described array board, form through hole, the vertical tube of bend pipe both sides interts in the through hole of fixed plate.
The beneficial effects of the utility model are: it utilizes bend pipe and liquid inlet pipe to fix to be connected top board and array board, effectively array board and top board are fixed on to the phenomenon of having avoided bolt stripped thread on cold drawing support and having caused top board and array board to come off from cold drawing support.In addition, its liquid inlet pipe can be connected with compressor, thereby increases the speed that cold drawing cools, thereby has improved the speed of condensation air.
Accompanying drawing explanation:
Below in conjunction with accompanying drawing, the utility model is described further:
Fig. 1 is the structural representation of existing combination cold plate;
Fig. 2 is structural representation of the present utility model;
Fig. 3 is the structural representation that the utility model changes angle;
Fig. 4 is the structural representation of array board of the present utility model.
Symbol description in figure:
1-top board; 2-array board; 3-cold drawing support; 4-bend pipe; 5-connecting tube; 6-liquid inlet pipe; 7-nut; 8-bolt; 21-slotted eye; 22-fixed plate; 23-through hole.
Embodiment:
Therefore the following stated only, for embodying the preferred embodiment of the utility model principle, does not limit protection domain of the present utility model.
See shown in Fig. 2 to Fig. 4: the combination cold plate in a kind of vacuum and low temperature pump of the present utility model comprises top board 1 and the array board 2 of cold drawing, and the center of array board 2 forms the slotted eye 21 running through, on the array board 2 of slotted eye 21 opposite side-edges, become to have fixed plate 22 longitudinally; Array board 2 sleeves are on the cold drawing support 3 of ' Contraband ' font, on the biside plate that leans against cold drawing support 3 of the fixed plate 22 of array board 2, the fixed plate 22 of array board 2 and the side plate of cold drawing support 3 are plugged with the bend pipe 4 of two groups of relative ' Contraband ' fonts, and the middle part transverse tube of bend pipe 4 is pressed against on fixed plate 22; On two groups of bend pipes 4, relative one end is screwed onto respectively the two ends of connecting tube 5, connecting tube 5 be fixed with connecting tube 5 together with liquid inlet pipe 6, the upper end of liquid inlet pipe 6 is bolted with nut 7 through the upper plate of cold drawing support 3 and the top board of cold drawing 1, and top board 1 is fixed on cold drawing support 3 by nut 7.
On connecting tube 5, form the tapped hole that runs through connecting tube 5 outer walls, on described liquid inlet pipe 6, form outside thread, described connecting tube 5 is screwed onto on liquid inlet pipe 6, and liquid inlet pipe 6 forms counterbore and is connected with connecting tube 5.
On the inner tube wall at connecting tube 5 two ends, form the screw thread that Hand of spiral is contrary, the two ends of bend pipe 4 form outside thread, and the outside thread of relative bend pipe 4 is the screw thread that Hand of spiral is contrary.
On the fixed plate 22 of array board 2, form through hole 23, the vertical tube of bend pipe 4 both sides interts in the through hole 23 of fixed plate 22.
Working principle of the present utility model is as follows: during assembling, bend pipe 4 interts on array board 2 and cold drawing support 3, on two bend pipes 4, screw thread is connected to connecting tube 5, by connecting tube 5 rotations, can reduce the distance between two relative bend pipes 4, thereby can be by firm being fixed on cold drawing support 3 of array board 2, make it be not easy to come off, utilize liquid inlet pipe 6 to be communicated with bend pipe 4, again liquid inlet pipe 6 is connected to compressor, thereby the cooled gas that can make low temperature entered on the cold drawing of array combination, increase the speed that cold drawing cools, thereby improved the speed of condensation air.
Claims (4)
1. the combination cold plate in a vacuum and low temperature pump, it includes top board (1) and array board (2), wherein, the center of array board (2) forms the slotted eye (21) running through, on the array board (2) of slotted eye (21) opposite side-edge, form fixed plate (22) longitudinally, described array board (2) sleeve is on cold drawing support (3), the fixed plate (22) of array board (2) leans against on the biside plate of cold drawing support (3), it is characterized in that: the fixed plate (22) of array board (2) is plugged with two groups of relative bend pipes (4) with the side plate of cold drawing support (3), the middle part transverse tube of bend pipe (4) is pressed against on fixed plate (22), the upper relative one end of two groups of bend pipes (4) is screwed onto respectively the two ends of connecting tube (5), connecting tube (5) is fixed with the liquid inlet pipe (6) being connected with connecting tube (5), liquid inlet pipe (6) upper end is through the upper plate of cold drawing support (3) and the top board (1) of cold drawing and be bolted with nut (7), top board (1) is fixed on cold drawing support (3) by nut (7).
2. the combination cold plate in a kind of vacuum and low temperature pump according to claim 1, it is characterized in that: on described connecting tube (5), form the tapped hole that runs through connecting tube (5) outer wall, liquid inlet pipe forms outside thread on (6), it is upper that connecting tube (5) is screwed onto liquid inlet pipe (6), and liquid inlet pipe (6) forms counterbore and is connected with connecting tube (5).
3. the combination cold plate in a kind of vacuum and low temperature pump according to claim 1, it is characterized in that: on the inner tube wall at described connecting tube (5) two ends, form the screw thread that Hand of spiral is contrary, bend pipe (4) two ends form outside thread, and the outside thread of relative bend pipe (4) is the screw thread that Hand of spiral is contrary.
4. the combination cold plate in a kind of vacuum and low temperature pump according to claim 1, it is characterized in that: on the fixed plate (22) of described array board (2), form through hole (23), the vertical tube of bend pipe (4) both sides interts in the through hole (23) of fixed plate (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320647676.0U CN203548125U (en) | 2013-10-18 | 2013-10-18 | Combined cold plate in vacuum low-temperature pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320647676.0U CN203548125U (en) | 2013-10-18 | 2013-10-18 | Combined cold plate in vacuum low-temperature pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203548125U true CN203548125U (en) | 2014-04-16 |
Family
ID=50466252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320647676.0U Expired - Fee Related CN203548125U (en) | 2013-10-18 | 2013-10-18 | Combined cold plate in vacuum low-temperature pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203548125U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103742389A (en) * | 2013-10-18 | 2014-04-23 | 昆山珍实复合材料有限公司 | Combined cold plate in vacuum cryogenic pump |
-
2013
- 2013-10-18 CN CN201320647676.0U patent/CN203548125U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103742389A (en) * | 2013-10-18 | 2014-04-23 | 昆山珍实复合材料有限公司 | Combined cold plate in vacuum cryogenic pump |
| CN103742389B (en) * | 2013-10-18 | 2015-12-23 | 石狮市台瑞精密机械有限公司 | Combination cold plate in a kind of vacuum low-temperature pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140416 Termination date: 20151018 |
|
| EXPY | Termination of patent right or utility model |