CN203530509U - Single crystal furnace and thermal field device thereof - Google Patents
Single crystal furnace and thermal field device thereof Download PDFInfo
- Publication number
- CN203530509U CN203530509U CN201320665150.5U CN201320665150U CN203530509U CN 203530509 U CN203530509 U CN 203530509U CN 201320665150 U CN201320665150 U CN 201320665150U CN 203530509 U CN203530509 U CN 203530509U
- Authority
- CN
- China
- Prior art keywords
- graphite
- field device
- well heater
- thermal
- foot section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 91
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 81
- 239000010439 graphite Substances 0.000 claims abstract description 81
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000001816 cooling Methods 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 208000037656 Respiratory Sounds Diseases 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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Abstract
The utility model provides a single crystal furnace and a thermal field device thereof. The thermal field device comprises heaters, a graphite electrode and a graphite gasket, wherein one heater is connected with the graphite electrode; the graphite gasket is mounted between the heater and the graphite electrode. As the graphite gasket is mounted between the heater and the graphite electrode, when the heaters stop heating, the graphite gasket can replace the heater to bear rapid cooling and rapid heating, that is, cracks can be formed on the graphite gasket instead of the heater, and the damage of the heaters is avoided effectively.
Description
Technical field
The utility model relates to silicon material manufacture field, more specifically, relates to a kind of single crystal growing furnace and thermal-field device thereof.
Background technology
At present, the well heater in thermal-field device is connected with Graphite Electrodes, and Graphite Electrodes is connected with copper electrode again, and the inside of copper electrode is provided with recirculated cooling water.After well heater quits work, because the temperature of whole thermal field inside is higher, and the part being connected with Graphite Electrodes of the heating part of well heater is lower owing to being subject to the operative temperature of copper electrode circulate cooling water inside, so, this part will crack under the effect of suddenly cold and hot, when serious, crackle can extend to the upper surface of heating part, finally causes well heater to use.
Utility model content
The utility model aims to provide a kind of single crystal growing furnace and heating unit thereof, the problem being easily damaged under the effect of suddenly cold and hot with the well heater solving in the thermal-field device of prior art.
For solving the problems of the technologies described above, according to an aspect of the present utility model, provide a kind of thermal-field device,, comprising: well heater; Graphite Electrodes, well heater is connected with Graphite Electrodes; Graphite pad, Graphite pad is arranged between well heater and Graphite Electrodes.
Further, thermal-field device also comprises foot section, and one end of foot section is connected with well heater, and the other end of foot section is removably mounted on Graphite Electrodes.
Further, foot section is L shaped.
Further, well heater and foot section are structure as a whole, and Graphite pad is arranged between foot section and Graphite Electrodes.
Further, well heater and foot section are Split type structure, and Graphite pad is arranged between foot section and well heater.
Further, foot section is bolted on Graphite Electrodes.
Further, thermal-field device also comprises: graphite carbon paper, graphite carbon paper is arranged between Graphite pad and well heater.
Further, graphite carbon paper is also installed between Graphite pad and Graphite Electrodes.
Further, thermal-field device comprises a plurality of Graphite pads.
Another aspect of the present utility model, provides a kind of single crystal growing furnace, comprising: above-mentioned thermal-field device.
The utility model is installed Graphite pad between well heater and Graphite Electrodes, like this, when well heater quits work, Graphite pad will replace well heater to bear suddenly cold and hot, be that crackle will appear on Graphite pad, thereby effectively prevented that well heater from cracking so that damaging.
Accompanying drawing explanation
The accompanying drawing that forms the application's a part is used to provide further understanding of the present utility model, and schematic description and description of the present utility model is used for explaining the utility model, does not form improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 has schematically shown the structural representation of the thermal-field device in the utility model; And
Fig. 2 has schematically shown the A portion enlarged view in Fig. 1.
Reference numeral in figure: 10, well heater; 12, foot section; 20, Graphite Electrodes; 30, Graphite pad; 40, graphite carbon paper; 50, bolt.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is elaborated, but the multitude of different ways that the utility model can be defined by the claims and cover is implemented.
Of the present utility modelly provide a kind of thermal-field device, please refer to Fig. 1 and Fig. 2, this thermal-field device comprises: well heater 10; Graphite Electrodes 20, well heater 10 is connected with Graphite Electrodes 20; Graphite pad 30, Graphite pad 30 is arranged between well heater 10 and Graphite Electrodes 20.
In conjunction with Fig. 1 and Fig. 2, the utility model is installed Graphite pad 30 between well heater 10 and Graphite Electrodes 20, like this, when well heater 10 quits work, Graphite pad 30 will replace well heater 10 to bear suddenly cold and hot, be that crackle will appear on Graphite pad 30, thereby effectively prevented that well heater 10 from cracking so that damaging.
Preferably, thermal-field device also comprises foot section 12, and one end of foot section 12 is connected with well heater 10, and the other end of foot section 12 is removably mounted on Graphite Electrodes 20.At well heater 10, foot section 12 is set, is conducive to being connected of well heater 10 and Graphite Electrodes 20.Preferably, foot section 12 is L shaped.
Preferably, well heater 10 is structure as a whole with foot section 12, and Graphite pad 30 is arranged between foot section 12 and Graphite Electrodes 20.When well heater 10 and foot section 12 are structure as a whole, suddenly cold and hot mainly occurs in foot section 12, in foot section 12, easily crack, so time Graphite pad 30 is arranged between foot section 12 and Graphite Electrodes.
Preferably, well heater 10 is Split type structure with foot section 12, and Graphite pad 30 is arranged between foot section 12 and well heater 10.When well heater 10 and foot section 12 are Split type structure, suddenly cold and hot mainly occurs in well heater 10 and junction foot section 12, the junction with foot section 12 that is well heater 10 easily cracks, so time Graphite pad 30 is arranged on to the junction of well heater 10 and foot section 12.
Preferably, foot section 12 is fixed on Graphite Electrodes 20 by bolt 50.
Preferably, thermal-field device also comprises: graphite carbon paper 40, graphite carbon paper 40 is arranged between Graphite pad 30 and well heater 10.Like this, can avoid Graphite pad 30 and well heater 10 to be sticked together.
Preferably, between Graphite pad 30 and Graphite Electrodes 20, graphite carbon paper 40 is also installed.Can avoid like this, equally Graphite pad 30 and well heater 10 to be sticked together.
Preferably, thermal-field device comprises a plurality of Graphite pads 30.Preferably, thermal-field device comprises two Graphite pads.Like this, can strengthen the protection effect to well heater 10.
Another aspect of the present utility model, provides a kind of single crystal growing furnace, comprising: above-mentioned thermal-field device.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (10)
1. a thermal-field device, is characterized in that, comprising:
Well heater (10);
Graphite Electrodes (20), described well heater (10) is connected with described Graphite Electrodes (20);
Graphite pad (30), described Graphite pad (30) is arranged between described well heater (10) and described Graphite Electrodes (20).
2. thermal-field device according to claim 1, it is characterized in that, described thermal-field device also comprises foot section (12), and one end of described foot section (12) is connected with described well heater (10), and the other end of described foot section (12) is removably mounted on described Graphite Electrodes (20).
3. thermal-field device according to claim 2, is characterized in that, described foot section (12) is L shaped.
4. thermal-field device according to claim 2, is characterized in that, described well heater (10) is structure as a whole with described foot section (12), and described Graphite pad (30) is arranged between described foot section (12) and described Graphite Electrodes (20).
5. thermal-field device according to claim 2, is characterized in that, described well heater (10) is Split type structure with described foot section (12), and described Graphite pad (30) is arranged between described foot section (12) and described well heater (10).
6. thermal-field device according to claim 2, is characterized in that, described foot section (12) is fixed on described Graphite Electrodes (20) by bolt (50).
7. thermal-field device according to claim 1, is characterized in that, described thermal-field device also comprises:
Graphite carbon paper (40), described graphite carbon paper (40) is arranged between described Graphite pad (30) and described well heater (10).
8. thermal-field device according to claim 7, is characterized in that, between described Graphite pad (30) and described Graphite Electrodes (20), described graphite carbon paper (40) is also installed.
9. thermal-field device according to claim 1, is characterized in that, described thermal-field device comprises a plurality of described Graphite pads (30).
10. a single crystal growing furnace, is characterized in that, comprising: the thermal-field device described in any one in claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320665150.5U CN203530509U (en) | 2013-10-25 | 2013-10-25 | Single crystal furnace and thermal field device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320665150.5U CN203530509U (en) | 2013-10-25 | 2013-10-25 | Single crystal furnace and thermal field device thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203530509U true CN203530509U (en) | 2014-04-09 |
Family
ID=50416739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320665150.5U Expired - Fee Related CN203530509U (en) | 2013-10-25 | 2013-10-25 | Single crystal furnace and thermal field device thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203530509U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794571A (en) * | 2017-10-30 | 2018-03-13 | 扬中市惠丰包装有限公司 | One kind is used for czochralski crystal growing furnace electrode assembly |
-
2013
- 2013-10-25 CN CN201320665150.5U patent/CN203530509U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794571A (en) * | 2017-10-30 | 2018-03-13 | 扬中市惠丰包装有限公司 | One kind is used for czochralski crystal growing furnace electrode assembly |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 |