CN203480076U - MEMS Fabry-Perot cavity tunable filter - Google Patents
MEMS Fabry-Perot cavity tunable filter Download PDFInfo
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- CN203480076U CN203480076U CN201320319386.3U CN201320319386U CN203480076U CN 203480076 U CN203480076 U CN 203480076U CN 201320319386 U CN201320319386 U CN 201320319386U CN 203480076 U CN203480076 U CN 203480076U
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Abstract
The utility model discloses an MEMS Fabry-Perot cavity tunable filter. The MEMS Fabry-Perot cavity tunable filter is characterized by comprising a thermal-insulation external box (1), a sealed internal box (2), thermal-insulation materials (3) filled between the thermal-insulation external box (1) and the sealed internal box (2), damping materials (4) surrounding the sealed internal box (2), a metal fixing base (5) fixed on the undersurface of the sealed internal box (2), an incidence end double optical fiber contact pin (6), an incidence end collimating lens (7), a first heating power resistor (8), an MEMS Fabry-Perot cavity chip (9), a second heating power resistor (11), an outgoing end collimating lens (12), an outgoing end double optical fiber base pin (13) and a thermal resistor (10), wherein the incidence end double optical fiber base pin (6), the incidence end collimating lens (7), the first heating power resistor (8), the MEMS Fabry-Perot cavity chip (9), the second heating power resistor (11), the outgoing end collimating lens (12) and the outgoing end double optical fiber base pin (13) are fixed on the metal fixing seat (5), and the thermal resistor (10) is fixed on the MEMS Fabry-Perot cavity chip (9). The MEMS Fabry-Perot cavity tunable filter has the advantages of being small in size, fast in tuning, continuously-adjustable, high in fineness, narrow in bandwidth, wide in free spectral domain and tuning range, good in thermal stability, low in cost and the like.
Description
Technical field
The utility model relates to a kind of MEMS Fabry-Perot cavity tunable filter, belongs to optical communication and technical field of optical fiber sensing.
Background technology
Fibre Optical Communication Technology has now become the important component part of modern communications, along with developing rapidly of network and data communication, to the large volume transport of optical communication high speed degree require increasing.Dense wave division multipurpose (DWDM) technology, it can make the transfer efficiency of optical communication be improved, and tunable optic filter is indispensable device in light WDM technology, is also one of optical communication Key Technologies of All-optical Network.Superior in quality optic tunable filter should have free spectral domain, and wide to hold more channel, narrow bandwidth, to allow, channel spacing is little, wavelength exchange velocity is fast while exchanging fast for multichannel in packet switch, wavelength stability good and precision advantages of higher, and has potential cost price advantage.
MEMS(Micro Electro Mechanical systems, be microelectromechanical systems) technology with cheap, volume is small, be easy to batch production, be easy to the advantages such as control, become one of study hotspot of the industries such as domestic and international automobile, electronics, household electrical appliances, electromechanics and military field.A kind of Fabry-Perot-type cavity adjustable filter based on MEMS technology, it adopts the surface micromachined technology such as photoetching, etching, deposition to make chamber length and is subject to voltage-controlled Fabry-Perot-type cavity, utilize the principle of multiple-beam interference to carry out frequency selection to light, have that volume is small, degree of regulation is high, governing speed is fast, an adjusting continuously, high resolving power, high-fineness, wide free spectral domain, Heat stability is good, low cost and other advantages.
Other optic tunable filter manufacturing technologies that occur at present roughly can be divided into following a few class:
1, optical-fiber type FP chamber (FFP) wave filter
Optical-fiber type FP cavity filter consists of two optical fiber and piezoelectric ceramics.Optical fiber tail end all plates film, increases its reflectivity.Optical fiber is being fixed on piezoelectric ceramics, tail end end face parallel over against, form FP chamber.Voltage is added on piezoelectric ceramics, changes voltage and just can change the length of piezoelectric ceramics, cause that the distance of optical fiber tail end end face changes, changed chamber, FP chamber long, thereby reach, regulate the object that sees through wavelength.Optical-fiber type FP cavity filter tuning range is no more than 500nm, and the response time is slower, is millisecond magnitude.
2, liquid crystal FP chamber (LCFP) adjustable filter
Two parallel placements of sheet glass form FP chamber, and the inner side of glass plate is all coated with nesa coating, high reflection film and oriented film, is full of the liquid crystal that refractive index changes with voltage in chamber.The both positive and negative polarity of voltage is added in respectively on two conducting films on glass plate and liquid crystal formation loop, on liquid crystal, there is electric current to pass through, change the size of voltage, modulation is by the size of current of liquid crystal, changed the size of the refractive index of liquid crystal, changed the refractive index of optical medium in chamber, FP chamber, the optical wavelength that therefore sees through FP chamber also changes thereupon.Liquid crystal FP chamber adjustable filter volume is little, simple in structure, tuned speed reaches microsecond magnitude soon, but tuning range is limited, and maximum can only reach 30nm.
3, Mach-Zehnder is interfered (MZI) adjustable filter
Mach-Zehnder interferes adjustable filter generally with semiconductor material or electrooptical material, to be made.The Mach-Zehnder of making of LiNbO3 material is interfered adjustable filter, two three-dB couplers and two optical waveguides, consists of.Input optical signal, after first three-dB coupler, is divided into the signal of two light intensity equalizations, enters respectively two optical waveguides.Phase-modulator is made with electrooptical material, and the voltage swing that its refractive index applies with outside changes, thereby while causing two ways of optical signals to arrive second three-dB coupler, phase delay is different.If the optical path difference of two-beam is the integral multiple of a certain wavelength, two-beam is relevant to be strengthened; If the optical path difference of two-beam is 1/2 of this wavelength, two-beam is relevant offsets, and reaches like this object of voltage tuning wavelength.Mach-Zehnder interferes adjustable filter passband wider, and selectivity is poor, if its cascade just can be obtained to good performance.Mach-Zehnder after cascade interferes adjustable filter tuning speed to reach 50ns, but tuning range 4nm only.
4, acousto-optic (AOTF) adjustable filter
Acousto-optic tunable filter is comprised of the wavelength filter of two single substrates.Each wave filter is comprised of an acousto-optic Polarization Controller and two polarization beam apparatus.Suprabasil first polarization beam apparatus is divided into TE and TM polarization mode by input light, enters respectively different optical waveguides.Optical waveguide all embeds in an identical acoustic waveguide, and this acoustic waveguide is the Yi Ge branch of an audio frequency guiding coupling mechanism.In another branch, by a RF signal application to excitating surface sound wave (SAW:Surface Acoustic Wave) on the electrode of interdigital frequency converter.SAW is coupled in adjacent acoustic waveguide again, has produced favourable acousto-optic interaction.This has produced the wavelength correlative coupling between TE and TM pattern.Meet the wavelength generation pattern conversion of certain phase-matching condition.
After sound optical mode conversion, signal is coupled by second polarization beam apparatus.Because phase matching wave polarization state is changed, they and do not have the light wave of conversion to separate, and entered second substrate, and the light wave not being converted feeds back in waveguide, the interactional matrix that ends at second substrate is outside.The tuning range of acousto-optic tunable filter is very wide, can reach 250nm, and speed is Microsecond grade.But its other peak is very large on the impact of main peak; , may there are some frequency displacements in the nonlinear effect due to device; Bandwidth is not narrow is also a problem.
5, fiber grating (FGB) adjustable filter
Fiber grating adjustable filter method for making is that fiber core is exposed under ultraviolet band interference of light striped, the fiber core refractive index of making cyclical variation vertically.The light beam that wavelength meets relational expression λ=2neff Λ will be reflected maximum, and neff is effective refractive index, the cycle that Λ is fiber grating.By the mode that heats or stretch, fiber grating is extended or shorten, so just changed Λ, the optical wavelength therefore reflecting through fiber grating also changes thereupon.The about 15nm of tuning range of fiber grating, tuned speed is millisecond magnitude.
6, electric light (EOTF) adjustable filter
Electric light adjustable filter belongs to grating type acceptance filter, and the equally spaced crystal that is arranged in of electrode adds voltage around, and due to the effect of electric field, crystals is the refractive index of generation cycle variation.So just form Bragg diffraction grating, utilized the principle of Bragg diffraction grating to select the wavelength seeing through.Once voltage swing changes, refractive index also changes accordingly thereupon, therefore sees through wavelength and also can regulate.In the cleavage plane at its crystal two ends, be coated with anti-reflection film to stop Crystallization FP chamber to cause vibration.The scope maximum of electro-optical tuning can reach 16nm, and tuned speed is very fast, can reach nanosecond.
The various mechanism wave filters that more than relate to, its producing principle is different, and performance also has very large difference, is summarized as follows table:
To sum up, optical fiber interference type Fabry-perot filter is to utilize piezoelectric effect, device volume is excessive, acousto-optic tunable filter is to utilize acoustooptic effect, switch speed is slow, there is the narrow problem of tuning range in fiber grating filter, M-Z Structure Filter and liquid crystal FP chamber adjustable filter, cannot meet the growing requirement of optical communication.
Summary of the invention
The purpose of this utility model is, overcome the above-mentioned shortcoming and defect that first has wave filter technology, provide that a kind of volume is little, tuning, adjustable, high-fineness, narrow bandwidth, wide free spectral domain and tuning range, Heat stability is good continuously fast, with low cost, the MEMS Fabry-Perot cavity tunable filter that can be mass.
The technical solution of the utility model.MEMS Fabry-Perot cavity tunable filter, structure comprises:
Be incubated outer box;
Sealing inner box;
Be filled in the insulation material between the outer box of insulation and sealing inner box;
Be surrounded on sealing inner box damping material around;
Be fixed on the metal firm banking of sealing inner box bottom surface;
Be fixed on the two optical fiber contact pins of incident end on metal firm banking, incident end collimation lens, the first heating power resistance, MEMS Fabry-Perot cavity chip, the second heating power resistance, exit end collimation lens, the two optical fiber contact pins of exit end;
Be fixed on the thermistor on MEMS Fabry-Perot cavity chip.
Aforesaid MEMS Fabry-Perot cavity tunable filter, described MEMS Fabry-Perot cavity chip is the long variable air-gap Fabry-Perot-type cavity in chamber, described Fabry-Perot-type cavity comprises the lower catoptron being plated in silicon base, the upper reflector parallel with lower catoptron, the air-gap dielectric layer between two parallel mirrors.
Aforesaid MEMS Fabry-Perot cavity tunable filter, the two optical fiber contact pins of described incident end collimation lens, exit end collimation lens and incident end, the two optical fiber contact pins of exit end adopt respectively ultraviolet glue bonding, 8 °, bonding plane angle of inclination.
Aforesaid MEMS Fabry-Perot cavity tunable filter, the optical fiber (6-b) of the two optical fiber contact pins of described incident end is connected in series with the optical fiber (13-a) of the two optical fiber contact pins of exit end.
Aforesaid MEMS Fabry-Perot cavity tunable filter, the Gaussian beam of the two optical fiber contact pins of described incident end tilts to inject Fabry-Perot-type cavity.
Aforesaid MEMS Fabry-Perot cavity tunable filter, described angle of inclination is 1.8 °.
Aforesaid MEMS Fabry-Perot cavity tunable filter, the gauss light beam waist diameter of described Fabry-Perot-type cavity chip center is 65um, Gaussian beam operating distance is 5mm, and the distance of beam waist position and incident end collimation lens, exit end collimation lens is respectively 2.5mm.
Aforesaid MEMS Fabry-Perot cavity tunable filter, described the first heating power resistance, the second heating power resistance, thermistor connects temperature control circuit module.
Aforesaid MEMS Fabry-Perot cavity tunable filter, described the first heating power resistance, the second heating power resistance generates heating power resistive layer by semiconductor technology, integrated with Fabry-Perot-type cavity.
Aforesaid MEMS Fabry-Perot cavity tunable filter, the outer box of described insulation consists of teflon; Described sealing inner box forms by cutting down material; In described sealing inner box, after inflated with nitrogen, seal; Described insulation material is fire-resistant silica wool; Described damping material is silicon rubber hose; Described metal firm banking is adhered to sealing inner box bottom by heat conductive silica gel; Within described MEMS Fabry-Perot cavity chip employing epoxy glue is fixed on the U-shaped groove of metal firm banking.
MEMS Fabry-Perot cavity tunable filter of the present utility model, the acp chip of employing---MEMS Fabry-Perot cavity chip is the long variable air-gap Fabry-Perot-type cavity in a chamber.This Fabry-Perot-type cavity is by being plated in the lower catoptron in silicon base, the upper reflector parallel with lower catoptron, and the cavity air-gap dielectric layer between two parallel mirrors forms.Distributed bragg reflector mirror (the Distributed Bragg reflector that wherein upper and lower catoptron is alternately comprised of the high low refractive index film layer of odd-level, DBR) form, its manufacture craft is for alternately plate the oxide layer of the nitration case of silicon and the silicon of low-refraction of high index of refraction on silicon face, the optical thickness of every thin film be Fabry-Perot-type cavity see through spectral centroid wavelength 1/4.By etching technics, upper reflector DBR is made to the movable spring film of cruciform cantilever design.Utilize electron beam transpiration technique that tungsten silicide (SiW) is deposited on upper and lower DBR respectively to positive pole, the negative pole as MEMS.And the thickness of air chamber is generally 3/4 wavelength.When applying voltage to the both positive and negative polarity of MEMS, the electrostatic force tracting film that impressed voltage produces is drawn close to substrate direction, and the linear enhancing reverse with electrostatic force with the stretching of film of film self tension force.When two power sizes when identical film static, the thickness of air chamber can change between 1/2 to 3/4 wavelength like this, the chamber long hair of Fabry-Perot-type cavity has been given birth to variation, reaches the object of selection wavelength.
Conventional tunable optic filter incident light vertical incidence Fabry-Perot-type cavity, because MEMS fabry-perot tunable filter is a kind of wavelength selector part, only allow the light transmission of certain wavelength, and the light of other wavelength is not depleted or sponges, by MEMS-FP cavity reflection, gone back on the contrary, be again coupled into light inlet transmitting collimating apparatus, result has caused device return loss low, the work of severe jamming system stability, this is extremely disadvantageous to optical communication.Certainly can between wave filter and other devices, insert isolator the light reflecting is depleted, but the use of isolator is except increasing use cost, also causes the light path nonreversibility of wave filter.
For overcoming the low shortcoming of conventional tunable optic filter return loss, MEMS Fabry-Perot cavity tunable filter of the present utility model is taked the mode of incident ray oblique incidence, incident light enters Fabry-Perot-type cavity along incident optical 6-a road with incident angle, the reflected light Gaussian beam reflecting from first reflecting surface high-reflecting film of Fabry-Perot-type cavity and the coupling efficiency of incident ray Gaussian beam only 0.01%, reach-40dB of return loss, thereby by the mode of Gaussian beam oblique incidence, realize the MEMS Fabry-Perot cavity tunable filter of high return loss.
By above-mentioned technology, make a kind of MEMS Fabry-Perot cavity tunable filter have that volume is little, tuning, adjustable, high-fineness, narrow bandwidth, high return loss, wide free spectral domain and tuning range, Heat stability is good continuously fast, characteristic with low cost, to can be mass, the optical channel monitoring in the ROADM in optical communication technique field system, EDFA light place system, dwdm system has great application prospect and advantage:
1, the application of tunable optic filter in ROADM system
ROADM is positioned at the intermediate node place of multinode Networks of Fiber Communications, its effect is on request at the optical wavelength signal of the one or more multiplex channels of intermediate node up/down, remaining optical wavelength signal continues to transmit, when containing multi-wavelength λ 1, λ 2...... λ n light signal and enter tunable optic filter, user can regulate this tuned filter to leach needed a certain wavelength X i, the light beam of other wavelength enters coupling mechanism, user can be also the signal of λ i to input wavelength in coupling mechanism, by single wavelength light signal coupling in multi-wavelength signals.Due to the quick tuning and lock function of MEMS Fabry-Perot cavity tunable filter, the light signal that makes flexibly to download dynamically or upload wavelength and be λ i is achieved, thereby realize in dynamic optical network, reliable channel is selected and up/down is divided application.
2, the optical noise filtering of EDFA light place system and dynamics of channels locking
A kind of MEMS Fabry-Perot cavity tunable filter is for optical noise filtering and the dynamics of channels locking of EDFA prime amplifier.Its determinant attribute is extremely low insertion loss (<3dB) characteristic and reliable denoising and locking ability, filter the ASE noise that EDFA prime amplifier produces, make system reach the extremely low bit error rate and the high sensitivity of network receptacle.
3, for the optical channel of dwdm system, monitor
As previously mentioned, a kind of MEMS Fabry-Perot cavity tunable filter is the light path design through Fabry-Perot-type cavity by twice transmission, makes three dB bandwidth <0.05nm, and side mode suppression ratio reaches 65dB; Tunable technology by high resolving power, great dynamic range and continuously smooth combines, light signal index in dynamic scan detection system, dwdm system is screened channel wavelength to be processed, the wavelength of each passage in dwdm system, optical power value and relevant other indexs are carried out to dynamic monitoring, realize the monitoring management of high-precision intensive Multiple Channel Analysis and wavelength, luminous power.
In Fibre Optical Sensor demodulation techniques field, for MEMS Fabry-Perot cavity tunable filter, regulate chamber length can select the different wavelength that sees through, it is applied to periodic voltage long in order to change chamber, can realize the wavelength of definite area is carried out to periodic filter scan.MEMS Fabry-Perot cavity tunable filter possesses the bandwidth that FBG is suitable, the voltage signal applying is the periodic sawtooth wave of Uniform Scanning, modulated by it, whole Bragg wavelengths that the wavelength coverage of wave filter when carrying out length scanning in free path can cover sensing grating and drift about after induction, and the signal filtering from sensing grating converts electric signal to by linear photoconductor converter, the oscillographic Y terminal of input after amplifying, the shown timing distribution of oscillograph is sensing grating reflectance spectrum.Photoelectric commutator now, the detection system that MEMS Fabry-Perot cavity tunable filter and Saw-tooth Signal Waveform Generator and oscillograph form will be carried out the function of fiber spectrometer, it not only can be inquired about successively to the wavelength information of each bragg grating sensing element in measurement range, and the front wavelength information of surveyed wavelength information and drift is compared, obtain the wavelength shift of each sensing element grating, utilize drift value and measured 's variation relation, just can judge the size that corresponding sensing element fiber grating institute sensing physical quantity changes, realize Fibre Optical Sensor demodulation object.
Accompanying drawing explanation
Fig. 1 is MEMS Fabry-Perot cavity tunable filter structural representation of the present utility model;
Fig. 2 is MEMS Fabry-Perot-type cavity schematic diagram of the present utility model;
Fig. 3 is the light path principle schematic diagram of the utility model MEMS Fabry-Perot cavity tunable filter.
Embodiment
Embodiment of the present utility model.MEMS Fabry-Perot cavity tunable filter, as shown in Figure 1, structure comprises:
Be incubated outer box 1, can adopt teflon to form;
Sealing inner box 2, can adopt and can cut down metal material formation;
Be filled in the insulation material 3 between the outer box 1 of insulation and sealing inner box 2, can adopt insulation silica wool;
Be surrounded on sealing inner box 2 damping material 4 around, can adopt silicon rubber hose;
Be fixed on the metal firm banking 5 of sealing inner box 2 bottom surfaces;
Be fixed on the two optical fiber contact pins 6 of incident end on metal firm banking 5, incident end collimation lens 7, the first heating power resistance 8, MEMS Fabry-Perot cavity chip 9, the second heating power resistance 11, exit end collimation lens 12, the two optical fiber contact pins 13 of exit end;
Be fixed on the thermistor 10 on MEMS Fabry-Perot cavity chip 9.
As shown in Fig. 2, MEMS Fabry-Perot cavity chip 9 is the long variable air-gap Fabry-Perot-type cavity in chamber, described Fabry-Perot-type cavity comprises the air-gap dielectric layer 17 between the lower catoptron 15 that is plated in silicon base 14, upper reflector 16, two parallel mirrors parallel with lower catoptron 15.Distributed bragg reflector mirror (the Distributed Bragg reflector that wherein upper and lower catoptron is alternately comprised of the high low refractive index film layer of odd-level, DBR) form, its manufacture craft for alternately plating the oxide layer of the nitration case of silicon and the silicon of low-refraction of high index of refraction on silicon face, the optical thickness of every thin film be FP chamber see through spectral centroid wavelength 1/4th, the thickness of air dielectric is 1/2nd of centre wavelength.Utilize electron beam transpiration technique that tungsten silicide (SiW) is deposited on upper and lower DBR respectively as anodal, negative pole.
Select air dielectric can respectively voltage be added in to upper DBR and the lower DBR of Fabry-Perot-type cavity as MEMS-FP chamber cavity medium, make to produce electrostatic force between them, with static type of drive, change air dielectric length and control centre of homology wavelength.
The present embodiment is used 21 floor height low-refraction alternate multiple thin layers as two catoptrons of Fabry-Perot-type cavity, make Fabry-Perot-type cavity catoptron obtain the reflectivity up to 98%, therefore this MEMS Fabry-Perot cavity tunable filter has narrow full width at half maximum (FWHM), and three dB bandwidth is 0.2nm only.
Optical thin film design can be taken into account C-band and L-band simultaneously, thereby has more extensively, wider spectral range, can cover C-band and L-band simultaneously.
Incident end collimation lens 7, exit end collimation lens 12 adopt respectively ultraviolet glue bonding with the two optical fiber contact pins 6 of incident end, the two optical fiber contact pins 13 of exit end, 8 °, bonding plane angle of inclination.
As shown in Figure 3, the optical fiber 6-a of the two optical fiber contact pins 6 of described incident end is connected in series with the optical fiber 13-a of the two optical fiber contact pins 13 of exit end.Incident light enters Fabry-Perot cavity chip 9 from the two optical fiber contact pins of incident end 6 6-a roads through incident end collimation lens 7 collimations, and wavelength meets
the light of relation in chamber after relevant constructive interference, transmitted light enters the 13-a road of the two optical fiber contact pins of exit end after exit end collimation lens 12 collimations, adopt burning-on method to be connected in series on the optical fiber 6-b road of the optical fiber 13-a road of the two optical fiber contact pins 13 of exit end and the two optical fiber contact pins of incident end, from the light of the two optical fiber contact pins 13-b road outgoing of exit end, again from incident end optical fiber 6-b road, enter Fabry-Perot cavity chip 9, through the long secondary interference transmission of coherent phase, again through exit end collimation lens 12 collimations, from the optical fiber 13-b road outgoing of the two optical fiber contact pins 13 of exit end.
When light beam enters after Fabry-Perot-type cavity, will carry out multiple reflections and refraction, amplitude and intensity are cut apart again and again.Because the both sides medium of reflectance coating is all air, refractive index equates, the reflectivity on the two sides of film is
, ignore additional absorption loss.
In order to calculate the net amplitude of reflected light and transmitted light, must first obtain optical path difference and phasic difference between light beam.In the situation that the upper and lower surface of film is parallel, the optical path difference between every pair of adjacent ray all equates, does not consider that the optical path difference of half-wave loss is:
In formula
for the thickness of film,
for the refractive index of intermembranous medium,
for the inclination angle of light in film.The phasic difference of every light falls behind than last light
:
According to the analysis of the amplitude of each light beam and phasic difference, to each reflection and transmitted light beam complex amplitude stack sue for peace after, can obtain the beam intensity ratio of reflected light and transmitted light, transmitted light intensity than formula is:
The technical indicator of tunable optic filter mainly contains free spectrum territory, three dB bandwidth, 20dB bandwidth and fineness, these indexs determine not only the relating to parameters with wave filter itself, and closely related with the system feature of applying.Utilize the transmitted light intensity of Fabry-Perot multiple-beam interference than formula, can obtain that incident angle, chamber are long, refractive index and
,
relation with spectrum moving range.
Free spectrum territory is that the maximum wavelength that can measure of etalon is poor, refers to the spacing of adjacent two resonance frequencies, due to the multi resonant in F-P chamber, so the spectrum width of input light wave can not be greater than free spectrum territory, in order to avoid make signal overlap, causes and crosstalks:
Three dB bandwidth refers to that transmitted light intensity ratio reduces to the corresponding frequency span of a peaked half (full width at half maximum FWHM), has described the acutance of F-P chamber tuning curve:
20dB bandwidth refers to that transmitted light intensity ratio reduces to peaked percent corresponding frequency span for the moment.
Fineness F explanation has how many passages to select for wave filter:
In order to hold more channel in a free spectral domain, require channel separation little, particularly, in dense wave division multipurpose optical fiber telecommunications system, channel separation is less than 1nm, is even several GHz, and this just requires F-P chamber to have narrower bandwidth.Free spectrum territory is wider, and three dB bandwidth is narrower, and fineness is just higher, and free spectral domain just can hold more channel.
The transmission of light path single is subject to many-sided restriction by the raising of the fineness of Fabry-Perot-type cavity, in order to improve fineness
value, EMS Fabry-Perot cavity tunable filter of the present utility model by burning-on method by a wherein road cascade of incident, outgoing twin-core fiber, make the double transmission of light path through Fabry-Perot-type cavity, at reflectivity R=96, under the long 20um condition in chamber, the widest 90nm that reaches of FSR, three dB bandwidth can reach 0.05nm, fineness significantly improves than a transmitted light path, and side mode suppression ratio can reach 65dBm.
The Gaussian beam of the two optical fiber contact pins 6 of incident end tilts to inject Fabry-Perot-type cavity, and described angle of inclination is 1.8 °.Angle between two holes of twin-core contact pin is 1.8 °, return loss, cross talk effects are had to optimization function, for the MEMS clear aperature of this model, the coupling efficiency in the time of 1.8 °, insertion loss the best, if but the aperture of change chip, this angular range also can increase.Incident light enters Fabry-Perot cavity chip 9 along incident optical 6-a road with 1.8 ° of incident angles, the reflected light Gaussian beam reflecting from Fabry-Perot cavity chip 9 first reflecting surface high-reflecting films and the coupling efficiency of incident ray Gaussian beam only 0.01%, reach-40dB of return loss, thereby by the mode of Gaussian beam oblique incidence, realize the MEMS Fabry-Perot cavity tunable filter of high return loss.
The gauss light beam waist diameter at Fabry-Perot cavity chip 9 centers is 65um, and Gaussian beam operating distance is 5mm, and the distance of beam waist position and incident end collimation lens 7, exit end collimation lens 12 is respectively 2.5mm.
The first heating power resistance 8, the second heating power resistance 11, thermistor 10 connects temperature control circuit module 18, forms temperature control circuit, adds the outer box 1 of insulation, sealing inner box 2, insulation material 3, heat radiating metal firm banking 5 forms temperature control system.The first heating power resistance 8, the second heating power resistance 11 generate heating power resistive layer by semiconductor technology, integrated with Fabry-Perot-type cavity.The electrode of heating power resistance connects by parallel way, rear resistance approximately 2 Ω in parallel.By two pins of heating power resistance, it applies electric current, P=I2R, resistance heating, the function of realization to the heating of MEMS Fabry-Perot-type cavity, due to heating power resistance and MEMS Fabry-Perot-type cavity integrated, firing rate response is very fast, and the efficiency of heating surface is high, and this is also a stable key factor of thermal field.
Thermistor 10 adopts glass envelope type thermistor, and resolution is ± 0.1%, and its effect is accurately to survey and feed back in real time the true temperature of MEMS chip.
Being incubated outer box 1 material is teflon, and sealing sealing inner box 2 adopts electric current to weld parallel sealing technique encapsulation, and interior inflated with nitrogen, isolates extraneous steam moisture, further guarantees that the inner thermal field of moisture-proof role and wave filter is stable; Between outer box 1 and inner box 2, fill silica wool insulation material 3.
Within MEMS Fabry-Perot cavity chip 9 employing epoxy glues are fixed on the U-shaped groove of metal firm banking 5, the metal firm banking 5 of fixed optics parts plays thermolysis in temperature control system simultaneously, regulate the thermal field balance of temperature control system, when wave filter is worked under hot environment, the waste heat of conduct accumulated makes thermal field balance, impels MEMS Fabry-Perot-type cavity environment temperature to maintain constant temperature level.
Claims (10)
1. a MEMS Fabry-Perot cavity tunable filter, is characterized in that: structure comprises:
Be incubated outer box (1);
Sealing inner box (2);
Be filled in the insulation material (3) between insulation outer box (1) and sealing inner box (2);
Be surrounded on sealing inner box (2) damping material (4) around;
Be fixed on the metal firm banking (5) of sealing inner box (2) bottom surface;
Be fixed on the two optical fiber contact pins (6) of incident end on metal firm banking (5), incident end collimation lens (7), the first heating power resistance (8), MEMS Fabry-Perot cavity chip (9), the second heating power resistance (11), exit end collimation lens (12), the two optical fiber contact pins (13) of exit end;
Be fixed on the thermistor (10) on MEMS Fabry-Perot cavity chip (9).
2. MEMS Fabry-Perot cavity tunable filter according to claim 1, it is characterized in that: described MEMS Fabry-Perot cavity chip (9) is the long variable air-gap Fabry-Perot-type cavity in chamber, described Fabry-Perot-type cavity comprises the lower catoptron (15) being plated in silicon base (14), the upper reflector (16) parallel with lower catoptron (15), the air-gap dielectric layer (17) between two parallel mirrors.
3. MEMS Fabry-Perot cavity tunable filter according to claim 1, it is characterized in that: described incident end collimation lens (7), exit end collimation lens (12) adopt respectively ultraviolet glue bonding with the two optical fiber contact pins (6) of incident end, the two optical fiber contact pins (13) of exit end, 8 °, bonding plane angle of inclination.
4. MEMS Fabry-Perot cavity tunable filter according to claim 1, is characterized in that: the optical fiber (6-b) of the two optical fiber contact pins (6) of described incident end is connected in series with the optical fiber (13-a) of the two optical fiber contact pins (13) of exit end.
5. MEMS Fabry-Perot cavity tunable filter according to claim 1, is characterized in that: the Gaussian beam of the two optical fiber contact pins (6) of described incident end tilts to inject Fabry-Perot-type cavity.
6. MEMS Fabry-Perot cavity tunable filter according to claim 5, is characterized in that: described angle of inclination is 1.8 °.
7. MEMS Fabry-Perot cavity tunable filter according to claim 1, it is characterized in that: the gauss light beam waist diameter at described Fabry-Perot cavity chip (9) center is 65um, Gaussian beam operating distance is 5mm, and the distance of beam waist position and incident end collimation lens (7), exit end collimation lens (12) is respectively 2.5mm.
8. MEMS Fabry-Perot cavity tunable filter according to claim 1, is characterized in that: described the first heating power resistance (8), the second heating power resistance (11), thermistor (10) connection temperature control circuit module (18).
9. MEMS Fabry-Perot cavity tunable filter according to claim 1, it is characterized in that: described the first heating power resistance (8), the second heating power resistance (11) generates heating power resistive layer by semiconductor technology, integrated with Fabry-Perot-type cavity.
10. MEMS Fabry-Perot cavity tunable filter according to claim 1, is characterized in that: the outer box (1) of described insulation consists of teflon; Described sealing inner box (2) forms by cutting down material; After the interior inflated with nitrogen of described sealing inner box (2), seal; Described insulation material (3) is fire-resistant silica wool; Described damping material (4) is silicon rubber hose; Described metal firm banking (5) is adhered to sealing inner box (2) bottom by heat conductive silica gel; Within described MEMS Fabry-Perot cavity chip (9) employing epoxy glue is fixed on the U-shaped groove of metal firm banking (5).
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257404A (en) * | 2013-06-04 | 2013-08-21 | 贵阳恒浩光电科技有限公司 | MEMS Fabry-Perot cavity tunable filter |
| CN109901264A (en) * | 2019-03-05 | 2019-06-18 | 中国科学技术大学 | Miniature FP chamber narrow band filter |
| CN111198419A (en) * | 2020-03-05 | 2020-05-26 | 兰州奥普信息技术有限公司 | Tunable filter of optical fiber F-P cavity |
| CN113566962A (en) * | 2021-07-27 | 2021-10-29 | 中国科学院国家天文台南京天文光学技术研究所 | Temperature-controllable optical fiber input and output optical filtering system |
| CN114034300A (en) * | 2021-11-09 | 2022-02-11 | 中国电子科技集团公司信息科学研究院 | Optical accelerometer and inertial navigation system |
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2013
- 2013-06-04 CN CN201320319386.3U patent/CN203480076U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257404A (en) * | 2013-06-04 | 2013-08-21 | 贵阳恒浩光电科技有限公司 | MEMS Fabry-Perot cavity tunable filter |
| CN103257404B (en) * | 2013-06-04 | 2016-01-13 | 贵阳恒浩光电科技有限公司 | A kind of MEMS Fabry-Perot cavity tunable filter |
| CN109901264A (en) * | 2019-03-05 | 2019-06-18 | 中国科学技术大学 | Miniature FP chamber narrow band filter |
| WO2020177350A1 (en) * | 2019-03-05 | 2020-09-10 | 中国科学技术大学 | Miniature fp cavity narrowband filter |
| CN111198419A (en) * | 2020-03-05 | 2020-05-26 | 兰州奥普信息技术有限公司 | Tunable filter of optical fiber F-P cavity |
| CN113566962A (en) * | 2021-07-27 | 2021-10-29 | 中国科学院国家天文台南京天文光学技术研究所 | Temperature-controllable optical fiber input and output optical filtering system |
| CN114034300A (en) * | 2021-11-09 | 2022-02-11 | 中国电子科技集团公司信息科学研究院 | Optical accelerometer and inertial navigation system |
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