CN203466164U - Mass spectrum analyzer with multi-reflected vacuum ultraviolet photoionzation source - Google Patents
Mass spectrum analyzer with multi-reflected vacuum ultraviolet photoionzation source Download PDFInfo
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- CN203466164U CN203466164U CN201320596179.2U CN201320596179U CN203466164U CN 203466164 U CN203466164 U CN 203466164U CN 201320596179 U CN201320596179 U CN 201320596179U CN 203466164 U CN203466164 U CN 203466164U
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- cavity
- electrode
- vacuum ultraviolet
- ultraviolet light
- focusing electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
- H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation
Abstract
The utility model relates to a mass spectrum analyzer with a multi-reflected vacuum ultraviolet photoionzation source, which comprises a photoionzation cavity body, a difference cavity body and a mass spectrum cavity body; the photoionzation cavity body is internally provided with a vacuum ultraviolet photoionzation source composed of a vacuum ultraviolet light source, a repulsion electrode and a focusing electrode; the difference cavity body is internally provided with an ion-optic system, and the mass spectrum cavity body is internally provided with a mass analyzer; the corresponding side faces of the repulsion electrode and the focusing electrode are conical surfaces or cambered surfaces, the conical surface or the cambered surface of the repulsion electrode and the conical surface or the cambered surface of the focusing electrode are respectively coated with a reflective layer; and the reflective layer is made of gold or aluminum or iridium. Therefore, outgoing light from the vacuum ultraviolet light source can be reflected multiple times between the repulsion electrode and the focusing electrode, the ionization possibility of a to-be-tested object is increased, the ionization efficiency can be improved to above two times to six times, sensitivity of the tested sample is greatly improved, and a wide application prospect of real-time and online monitoring on a plurality of trace gas components and volatile matters is provided.
Description
Technical field
The utility model belongs to mass spectrometer technical field, is specifically related to have the mass spectrometer of multiple reflections vacuum ultraviolet light ionization source.
Background technology
Mass-spectrometric technique is to identify the important method of molecular structure.Modern Mass Spectrometry instrument is mainly comprised of vacuum system, sampling system, ion source, mass analyzer, detector and data handling system.According to the difference of determinand structure, character, mass spectrum ionization mode is varied, as electron impact ionization, chemi-ionization, electron spray ionisation, substance assistant laser desorpted ionized etc.Vacuum ultraviolet ionized is that a kind of vacuum-ultraviolet light that utilizes wavelength to be less than 200nm makes the Ionized method of neutral molecule.This ionization mode is soft ionization process, does not almost have fragment ion to produce, and the ionization of molecular polarity is not discriminated against.Using vacuum-ultraviolet light as mass spectrographic ion source, the spectrogram obtaining is simple, can carry out fast qualitative and quantitative analysis according to the molecular weight information of compound, in fields such as process analysis procedure analysis and organic substance detections, obtains applying more and more widely.Recently, the people such as Hou Keyong, Li Haiyang utility model a kind of vacuum ultraviolet light ionization source of analyzing for gaseous sample.This ionization source utilizes commercially available vacuum UV lamp to produce vacuum-ultraviolet light, and the ionized region of neutral molecule between repulsion electrode and focusing electrode absorbs photon and be ionized, and through repulsion battery lead plate repulsion in the same way, focusing electrode plate enters mass spectrum district and detects after focusing on.Because photo ionization efficiency and vacuum-ultraviolet light light path are directly proportional, thus relatively narrow and small photoelectricity abscission zone, and the vacuum UV lamp emergent light of comparatively dispersing, cause a large amount of photons by neutral molecule, do not absorbed and lose, ionizing efficiency is not high.
Utility model content
In order to solve a large amount of photons of existing vacuum ultraviolet light ionization source existence, by neutral molecule, do not absorbed and lose, the problem that ionizing efficiency is not high, the utility model provides a kind of mass spectrometer with multiple reflections vacuum ultraviolet light ionization source.
Concrete improvement technical scheme is as follows:
The mass spectrometer with multiple reflections vacuum ultraviolet light ionization source comprises casing, is provided with successively photo ionization cavity, difference cavity and mass spectrum cavity in casing, on photo ionization cavity, difference cavity and mass spectrum cavity, offers respectively vacuum pump interface; In described photo ionization cavity, be provided with vacuum ultraviolet light ionization source, described vacuum ultraviolet light ionization source comprises vacuum ultraviolet light source, repulsion electrode and focusing electrode, and the middle part of repulsion electrode and the middle part of focusing electrode all offer through hole, and coaxial; On the sidewall of photo ionization cavity, be provided with capillary, one end capillaceous is positioned at the outside of photo ionization cavity, and the other end is between repulsion electrode and focusing electrode; In described difference cavity, be provided with ion-optic system, in described mass spectrum cavity, be provided with mass analyzer; Between described photo ionization cavity and difference cavity, be provided with the first sampling cone, between described difference cavity and mass spectrum cavity, be provided with the second sampling cone; Improvement is: repulsion electrode and the focusing electrode mutually side of correspondence are trumpet-shaped taper seat or arc surface, and the through hole of repulsion electrode is the smaller diameter end of taper seat or arc surface, and the through hole of focusing electrode is the smaller diameter end of taper seat or arc surface; On the taper seat of repulsion electrode or arc surface and on the taper seat of focusing electrode or arc surface, be coated with respectively reflector, make to come from the emergent light of vacuum ultraviolet light source can be between repulsion electrode and focusing electrode multiple reflections.
Described reflector material is gold or aluminium or iridium.
The utility model becomes taper seat or arc surface by the repulsion electrode of the ionization source lateral layout corresponding with focusing electrode, and be coated with vacuum ultraviolet (VUV) light reflecting material, thereby make the vacuum-ultraviolet light of dispersing in ionized region, realize multiple reflections, increased the ionization probability of determinand, thereby make ionizing efficiency improve more than 2～6 times, greatly improved the sensitivity that detects sample, some trace gaseous components and volatile matter in real time, have a wide range of applications in on-line monitoring.We find by experiment, and improved ionization source can be promoted to several ppm magnitudes by tens ppm magnitudes originally by the mass spectrometric detectability of self-control, has expanded the detection range of sample.
Accompanying drawing explanation
Fig. 1 is the structural representation of utility model.
Fig. 2 is the Photoionization Mass Spectrometry figure comparison that acetone and toluene gas obtain under identical sampling condition.Wherein: Fig. 2 (a) is the not acetone Photoionization Mass Spectrometry figure comparison of aluminizer and aluminizer of repulsion electrode taper seat relative to focusing electrode; Fig. 2 (b) is the not toluene Photoionization Mass Spectrometry figure comparison of aluminizer and aluminizer of repulsion electrode taper seat relative to focusing electrode.
Sequence number in Fig. 1: vacuum ultraviolet light ionization source 1, vacuum ultraviolet light source 2, repulsion electrode 3, capillary 4, focusing electrode 5, the first sampling cone 6, ion-optic system 7, the second sampling cone 8, mass analyzer 9, photo ionization cavity 10, difference cavity 11, mass spectrum cavity 12.
Embodiment
Below in conjunction with accompanying drawing, by embodiment, the utility model is further described.
Referring to Fig. 1, the mass spectrometer with multiple reflections vacuum ultraviolet light ionization source comprises casing (vacuum cavity), in casing, be provided with successively photo ionization cavity 10, difference cavity 11 and mass spectrum cavity 12, on photo ionization cavity 10, difference cavity 11 and mass spectrum cavity 12, offer respectively vacuum pump interface, make formation vacuum cavity in casing.In photo ionization cavity 10, be provided with vacuum ultraviolet light ionization source 1, vacuum ultraviolet light ionization source 1 comprises vacuum ultraviolet light source 2, repulsion electrode 3 and focusing electrode 5, and the middle part of the middle part of repulsion electrode 3 and focusing electrode 5 all offers through hole, and coaxial; On the sidewall of photo ionization cavity 10, be provided with capillary 4, one end of capillary 4 is positioned at the outside of photo ionization cavity 10, and the other end is between repulsion electrode 3 and focusing electrode 5.Ion-optic system 7 is installed in difference cavity 11, mass analyzer 9 is installed in mass spectrum cavity 12; The first sampling cone 6 is installed between photo ionization cavity 10 and difference cavity 11, the second sampling cone 8 is installed between difference cavity 11 and mass spectrum cavity 12.Improvement is: repulsion electrode 3 and focusing electrode 5 are trumpet-shaped taper seat, the smaller diameter end that the through hole of repulsion electrode 3 is taper seat, the smaller diameter end that the through hole of focusing electrode 5 is taper seat in the side of correspondence mutually; On the taper seat of repulsion electrode 3 and on the taper seat of focusing electrode 5, be coated with respectively reflector, reflector material is aluminium film, make to come from the emergent light of vacuum ultraviolet light source can be between repulsion electrode 3 and focusing electrode 5 multiple reflections.
During detection, gaseous sample to be measured, by capillary 4, enters in the photo ionization cavity 10 in vacuum state from atmospheric environment direct sample, and expansion diffuses between repulsion electrode 3 and focusing electrode 5; The vacuum-ultraviolet light that vacuum ultraviolet light source 2 sends enters ionized space by the through hole at repulsion electrode 3 centers, and neutral molecule is ionized; The vacuum-ultraviolet light that the molecule not being ionized is reflected back ionizes again.Repulsion electrode 3 and focusing electrode 5 apply direct voltage, the determinand ion that ionization produces is under repulsion electric field action, through hole through focusing electrode 5 centers, pass through successively coaxial direction setting and execute alive the first sampling cone 6, ion-optic system 7, the second sampling cone 8, finally entering mass spectrum mass analyzer 9 and be detected and record.
Naturally the gas gas-phase objects volatilizing with acetone and toluene carries out mass spectral analysis.
As shown in Fig. 2 (a), when the vacuum degree of photo ionization cavity 10 maintains 2.3Pa, repulsion electrode 3 and focusing electrode 5 be not during aluminizer, and mass-to-charge ratio is positioned at approximately 400 countings of acetone parent ion signal strength signal intensity of 58; Under identical experiment condition, approximately 1000 countings of acetone parent ion signal strength signal intensity when repulsion electrode 3 and focusing electrode 5 are all coated with aluminium film reflector, signal strength signal intensity increases approximately 2.5 times (fragment peaks that wherein, in mass spectrogram, m/z 43 is acetone).
In Fig. 2 (b), when the vacuum degree of photo ionization cavity 10 maintains 2.3Pa, repulsion electrode 3 and focusing electrode 5 be not during aluminizer, and mass-to-charge ratio is positioned at approximately 600 countings of toluene parent ion signal strength signal intensity of 92; Under identical experiment condition, approximately 1200 countings of toluene parent ion signal strength signal intensity when repulsion electrode 3 and focusing electrode 5 are all coated with aluminium film reflector, signal strength signal intensity increases approximately 2 times.
In addition, the efficiency that coated electrode absorbs photon to raising neutral molecule is relevant to the vacuum degree of photo ionization cavity 10, when vacuum degree improves, and the also corresponding raising of efficiency of coated electrode centering molecule absorption photon.
Claims (2)
1. the mass spectrometer with multiple reflections vacuum ultraviolet light ionization source, comprises casing, is provided with successively photo ionization cavity, difference cavity and mass spectrum cavity in casing, on photo ionization cavity, difference cavity and mass spectrum cavity, offers respectively vacuum pump interface; In described photo ionization cavity, be provided with vacuum ultraviolet light ionization source, described vacuum ultraviolet light ionization source comprises vacuum ultraviolet light source, repulsion electrode and focusing electrode, and the middle part of repulsion electrode and the middle part of focusing electrode all offer through hole, and coaxial; On the sidewall of photo ionization cavity, be provided with capillary, one end capillaceous is positioned at the outside of photo ionization cavity, and the other end is between repulsion electrode and focusing electrode; In described difference cavity, be provided with ion-optic system, in described mass spectrum cavity, be provided with mass analyzer; Between described photo ionization cavity and difference cavity, be provided with the first sampling cone, between described difference cavity and mass spectrum cavity, be provided with the second sampling cone; It is characterized in that:
Repulsion electrode and the focusing electrode mutually side of correspondence are trumpet-shaped taper seat or arc surface, and the through hole of repulsion electrode is the smaller diameter end of taper seat or arc surface, and the through hole of focusing electrode is the smaller diameter end of taper seat or arc surface; On the taper seat of repulsion electrode or arc surface and on the taper seat of focusing electrode or arc surface, be coated with respectively reflector, make to come from the emergent light of vacuum ultraviolet light source can be between repulsion electrode and focusing electrode multiple reflections.
2. the mass spectrometer with multiple reflections vacuum ultraviolet light ionization source according to claim 1, is characterized in that: described reflector material is gold or aluminium or iridium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320596179.2U CN203466164U (en) | 2013-09-26 | 2013-09-26 | Mass spectrum analyzer with multi-reflected vacuum ultraviolet photoionzation source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320596179.2U CN203466164U (en) | 2013-09-26 | 2013-09-26 | Mass spectrum analyzer with multi-reflected vacuum ultraviolet photoionzation source |
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| Publication Number | Publication Date |
|---|---|
| CN203466164U true CN203466164U (en) | 2014-03-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320596179.2U Withdrawn - After Issue CN203466164U (en) | 2013-09-26 | 2013-09-26 | Mass spectrum analyzer with multi-reflected vacuum ultraviolet photoionzation source |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103500696A (en) * | 2013-09-26 | 2014-01-08 | 中国科学技术大学 | Mass spectrum analyzer with multiple-reflection vacuum ultraviolet ionization source |
| CN111426739A (en) * | 2020-04-24 | 2020-07-17 | 中国科学院合肥物质科学研究院 | Mass spectrum device and method for quantitatively measuring free radicals |
-
2013
- 2013-09-26 CN CN201320596179.2U patent/CN203466164U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103500696A (en) * | 2013-09-26 | 2014-01-08 | 中国科学技术大学 | Mass spectrum analyzer with multiple-reflection vacuum ultraviolet ionization source |
| CN103500696B (en) * | 2013-09-26 | 2015-09-09 | 中国科学技术大学 | There is the mass spectrometer of multiple reflections vacuum ultraviolet light ionization source |
| CN111426739A (en) * | 2020-04-24 | 2020-07-17 | 中国科学院合肥物质科学研究院 | Mass spectrum device and method for quantitatively measuring free radicals |
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| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140305 Effective date of abandoning: 20150909 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20140305 Effective date of abandoning: 20150909 |
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| RGAV | Abandon patent right to avoid regrant |