CN203465612U - Temperature control system of hardening oven - Google Patents
Temperature control system of hardening oven Download PDFInfo
- Publication number
- CN203465612U CN203465612U CN201320467689.XU CN201320467689U CN203465612U CN 203465612 U CN203465612 U CN 203465612U CN 201320467689 U CN201320467689 U CN 201320467689U CN 203465612 U CN203465612 U CN 203465612U
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- China
- Prior art keywords
- temperature
- control system
- time relay
- power
- temperature controller
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Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 241000283086 Equidae Species 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Abstract
The utility model provides a temperature control system of a hardening oven. The temperature control system comprises a heater, a temperature controller with PID control, a solid-state relay and a 24V direct current power supply, wherein a power end of the heater is connected to a 220V alternating current power supply through the output end of the solid-state relay and a contact point of a contactor, the input end of the solid-state relay is connected to the output end of the temperature controller, and the input end of the temperature controller is connected to a temperature sensor located in the oven. The temperature control system of the hardening oven has the advantages that the temperature is controlled by using the digital temperature controller with the PID control, the solid-state relay and the 24V direct current power supply, and the repeatability and the stability of the temperature in the oven are enabled to be good by using the novel heater, thereby being conducive to stabilizing the product quality.
Description
Technical field
The utility model relates to a kind of semi-conductor industry control system, specifically a kind of post bake oven temperature control system.
Background technology
Existing post bake baking oven programming rate is very slow: when oven temperature is stabilized in setting value (145 degree left and right), door is opened, the wafer that taking-up is handled well, install after pending wafer and close and visit, will be through within about 15 minutes, just reaching technological temperature lower limit (140 degree), and this is in the situation that only putting 2 horse wafer, if put 4 horses (this baking oven once multipotency is put 4 horses), to just can reach technological temperature lower limit through about 25 minutes.In whole production run, temperature is always in temperature-rise period.Produce while finishing, it is stable that oven temperature does not also reach.Cause under current condition, it is qualified can only processing at most 2 horse wafer guarantees product out at every turn, and the each maximum processing capability of this equipment is 4 horses, and obviously, the productive capacity of equipment is underutilized.This situation is very large on product quality and production efficiency impact.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, and a kind of post bake oven temperature control system is provided, and improves programming rate and the temperature of post bake baking oven and controls, and guarantees the productive capacity of stablizing and make full use of this baking oven of technique.
The technical scheme providing according to the utility model, described post bake oven temperature control system comprises well heater, the power end of described well heater is connected to 220V AC power by the output terminal of solid-state relay and the contact of contactor, the input end of described solid-state relay connects the output terminal of temperature controller, the input end of temperature controller connects the temperature sensor that is positioned at baking oven, the power supply termination 220V AC power of temperature controller, coil one termination of described contactor publicly, the coil other end of contactor connects respectively the first input end of very first time relay, the first input end of second time relay, the coil other end of described contactor is also through the normally opened contact of second time relay, the output plus terminal of the normally closed contact of very first time relay and stop button connecting valve power supply, the coil other end of described contactor also connects publicly through the normally opened contact of start button and very first time relay, the output negative terminal of described Switching Power Supply connects publicly, the input termination 220V AC power of Switching Power Supply, the second input termination of the second input end of described very first time relay and second time relay publicly.
Described temperature controller adopts the temperature controller that the model of Yuyao Temperature Instrument and Meters Factory Limited Liability Co., Ltd is XMTA-7532, is the digital display temperature controller of controlling with PID.
Described well heater comprises heater strip and support ceramic frame, and described heater strip is wrapped in and supports on ceramic frame, and heater strip power is 2KW.
The utility model has the advantages that:
(1) can make 4 horses after using new temperature control system, production efficiency is largely increased at every turn.
(2) programming rate is accelerated greatly, even and have external disturbance, new control system also can automatically make actual temperature be stabilized in rapidly setting value, therefore the repeatability of temperature and stability are better, thereby the stability of product quality is better.
(3) low to original system improvement cost, need equipment downtime short.
Accompanying drawing explanation
Fig. 1 is the utility model circuit theory diagrams.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Through the analysis to existing system, in the situation that oven main body structure is constant, the factor that affects programming rate mainly contains following several:
(1) heater power;
(2) control mode of temperature control system;
(3) N
2(nitrogen) flow;
(4) ventilation velocity.
Above in several factors, (3) " N wherein
2(nitrogen) flow " owing to being defined as 50 ± 5 SCFH in technique, adjustable extent is very little, and limited on the impact of programming rate, therefore do not consider to adjust.(4) " ventilation velocity " because exhaust air rate is non-adjustable at present, even if repack into adjustablely, affects also not quite, and exhaust air rate can not be adjusted too littlely still more, does not therefore also consider.As for (2) " control mode of temperature control system ", the design temperature of this baking oven is set with potentiometer, by a deblocking temperature control panel, control temperature again: when actual temperature is during than design temperature low more (approximately 5 degree left and right), temperature control system makes well heater heat with peak power, and now temperature rises with maximum rate; When actual temperature is lower but while approaching design temperature, control system makes well heater heat with Partial Power than design temperature, actual temperature more approaches design temperature, and heating power is just lower, so just can make temperature finally be stabilized in setting value.As can be seen here, under the constant condition of heater power, the programming rate not impact of this temperature control system when being less than technological temperature lower limit when oven temperature, but very large to the programming rate impact of this section of technological temperature setting value on technological temperature lower limit.Obviously, heater power has the greatest impact to programming rate, and heater power is larger, and programming rate is faster.
According to above-mentioned analysis, we adopt new temperature control system, and one increases heater power, to improve the programming rate when oven temperature is less than technological temperature lower limit, makes temperature reach fast in processing range; Its two, improve the control mode of temperature control system, to accelerate technological temperature lower limit to the programming rate of this section of technological temperature setting value, make the fast and stable that heats up.
As shown in Figure 1, post bake oven temperature control system described in the utility model comprises heater H EATER, the power end of heater H EATER is connected to 220V AC power by the output terminal of solid-state relay SSR and the contact of contactor Contacter, the input end of described solid-state relay SSR connects the output terminal of temperature controller XMTA-7532, the input end of temperature controller connects the temperature sensor (adopting platinum resistance thermometer sensor, Pt100) that is positioned at baking oven, the power supply termination 220V AC power of temperature controller, coil one termination of described contactor Contacter is 24V COMMON publicly, the coil other end of contactor Contacter connects respectively the first input end of very first time relay Timer Relay1, the first input end of the second time relay Timer Relay2, the coil other end of described contactor Contacter is also through the normally opened contact of the second time relay Timer Relay2, the output plus terminal of the normally closed contact of very first time relay Timer Relay1 and stop button STOP connecting valve power supply 24V DC POWER SUPPLY, the coil other end of described contactor Contacter also meets 24V COMMON publicly through the normally opened contact of start button START and very first time relay Timer Relay1, the output negative terminal of described Switching Power Supply meets 24V COMMON publicly, the input termination 220V AC power of Switching Power Supply, the second input termination of the second input end of described very first time relay Timer Relay1 and the second time relay Timer Relay2 is 24V COMMON publicly.
The concrete parts that adopt comprise:
1. heater strip (well heater comprise heater strip and support ceramic frame, new heater strip is directly wrapped on the support ceramic frame of former well heater):
2KW, 220VAC, diameter 5MM, resistance to oxidation, dustless.
2. temperature controller:
Model: XMTA-7532, specification: Pt100,0～200.0 degree.
The double digital demonstration of desired temperature and actual value, band drives the PID of solid-state relay to control.
Manufacturing firm: Yuyao Temperature Instrument and Meters Factory Limited Liability Co., Ltd.
3. solid-state relay:
Input voltage: 24VDC;
Output power: 220VAC, 40A.
4. heating radiator and heat-conducting silicone grease for solid-state relay.
5. Switching Power Supply:
Input voltage: 220VAC;
Output voltage: 24VDC;
Output current: 5A.
In a word, the digital display temperature controller of controlling with PID for the utility model, solid-state relay and 24V DC power control temperature, used new well heater (voltage is 220V, and power is 25 ohm of left and right > of 2KW <).Fan power is still used 120V AC power, and well heater and temperature controller are used 220V AC power.
Improved temperature control system is a kind of digital, there is the temperature control system that close-loop feedback is controlled and PID regulates, technological temperature can directly be set and show with digital form, and during temperature stabilization, be no more than ± 0.1 degree of the temperature deviation of actual temperature value and setting value, even and external condition, as N
2(nitrogen) flow, ventilation velocity, the factor that environment temperature etc. affect oven temperature changes, and this temperature control system also can be adjusted automatically, makes actual temperature value finally be stabilized in design temperature.Therefore, use this temperature control system, repeatability and the stability of temperature are better, are conducive to the stable of product quality.
Claims (3)
1. post bake oven temperature control system, comprise well heater, it is characterized in that: the power end of described well heater is connected to 220V AC power by the output terminal of solid-state relay and the contact of contactor, the input end of described solid-state relay connects the output terminal of temperature controller, the input end of temperature controller connects the temperature sensor that is positioned at baking oven, the power supply termination 220V AC power of temperature controller, coil one termination of described contactor publicly, the coil other end of contactor connects respectively the first input end of very first time relay, the first input end of second time relay, the coil other end of described contactor is also through the normally opened contact of second time relay, the output plus terminal of the normally closed contact of very first time relay and stop button connecting valve power supply, the coil other end of described contactor also connects publicly through the normally opened contact of start button and very first time relay, the output negative terminal of described Switching Power Supply connects publicly, the input termination 220V AC power of Switching Power Supply, the second input termination of the second input end of described very first time relay and second time relay publicly.
2. post bake oven temperature control system as claimed in claim 1, is characterized in that, described temperature controller adopts the temperature controller that the model of Yuyao Temperature Instrument and Meters Factory Limited Liability Co., Ltd is XMTA-7532.
3. post bake oven temperature control system as claimed in claim 1, is characterized in that, described well heater comprises heater strip and support ceramic frame, and described heater strip is wrapped in and supports on ceramic frame, and heater strip power is 2KW.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320467689.XU CN203465612U (en) | 2013-08-01 | 2013-08-01 | Temperature control system of hardening oven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320467689.XU CN203465612U (en) | 2013-08-01 | 2013-08-01 | Temperature control system of hardening oven |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203465612U true CN203465612U (en) | 2014-03-05 |
Family
ID=50177963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320467689.XU Expired - Lifetime CN203465612U (en) | 2013-08-01 | 2013-08-01 | Temperature control system of hardening oven |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203465612U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974961A (en) * | 2016-07-19 | 2016-09-28 | 泉州市汉威机械制造有限公司 | Temperature controller |
| CN108594898A (en) * | 2018-04-26 | 2018-09-28 | 广东美的厨房电器制造有限公司 | Oven temperature control method, device and computer readable storage medium |
| CN109032206A (en) * | 2018-08-07 | 2018-12-18 | 中国原子能科学研究院 | A kind of automatic temperature-controlled circuit based on jump type temperature switch |
| CN111024764A (en) * | 2019-12-26 | 2020-04-17 | 湛江卷烟包装材料印刷有限公司 | Cigarette packet adhesion tester and test method |
-
2013
- 2013-08-01 CN CN201320467689.XU patent/CN203465612U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974961A (en) * | 2016-07-19 | 2016-09-28 | 泉州市汉威机械制造有限公司 | Temperature controller |
| CN108594898A (en) * | 2018-04-26 | 2018-09-28 | 广东美的厨房电器制造有限公司 | Oven temperature control method, device and computer readable storage medium |
| CN109032206A (en) * | 2018-08-07 | 2018-12-18 | 中国原子能科学研究院 | A kind of automatic temperature-controlled circuit based on jump type temperature switch |
| CN111024764A (en) * | 2019-12-26 | 2020-04-17 | 湛江卷烟包装材料印刷有限公司 | Cigarette packet adhesion tester and test method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Temperature control system of hardening oven Effective date of registration: 20140820 Granted publication date: 20140305 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: 2014990000678 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20160927 Granted publication date: 20140305 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: 2014990000678 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Temperature control system of hardening oven Effective date of registration: 20160927 Granted publication date: 20140305 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: 2016990000819 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191021 Granted publication date: 20140305 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: 2016990000819 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Temperature control system of hardening oven Effective date of registration: 20191021 Granted publication date: 20140305 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: Y2019990000381 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20221103 Granted publication date: 20140305 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: Y2019990000381 |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140305 |