CN203456462U - Mask plate and OLED transparent display panel - Google Patents
Mask plate and OLED transparent display panel Download PDFInfo
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- CN203456462U CN203456462U CN201320349475.2U CN201320349475U CN203456462U CN 203456462 U CN203456462 U CN 203456462U CN 201320349475 U CN201320349475 U CN 201320349475U CN 203456462 U CN203456462 U CN 203456462U
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- negative electrode
- display panel
- transparent display
- mask plate
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Abstract
The utility model provides a mask plate for manufacturing an OLED transparent display panel and the OLED transparent display panel, and relates to the field of display technologies, which have the advantages of shortening the time of cathode manufacturing, reducing cost and improving aperture ratios and transmittance. The mask plate comprises a substrate, a plurality of hollowed-out areas and a plurality of sheltering areas, wherein the hollowed-out areas and the sheltering areas are arranged on the substrate, and patterns of the hollowed-out areas correspond to cathode patterns on the OLED transparent display panel. The mask plate is characterized in that all the hollowed-out areas are communicated with one another.
Description
Technical field
The utility model relates to Display Technique field, relates in particular to a kind of mask plate and OLED transparent display panel.
Background technology
Organic electric exciting light-emitting diode (Organic Light Emitting Diode, OLED) owing to possessing self-luminous simultaneously, do not need that backlight, contrast are high, thin thickness, visual angle is wide, reaction speed is fast, can be used for song panel, serviceability temperature scope is wide, the characteristic of structure and the excellence such as processing procedure is simpler, is considered to be applicable to the emerging application technology of follow-on flat-panel screens.
The negative electrode of existing OLED transparent display panel, need could realize the conducting of each negative electrode through twice deposition.The mask plate adopting while as shown in Figure 1, making the negative electrode of OLED for prior art.In this mask plate, inverse-T-shaped region 101 is hollow out region, is used to form the region of the cathode material of OLED.Using this mask plate to deposit after a secondary cathode, mask plate need to be moved to a special side-play amount, with deposition cathode for the second time, and then form cathode pattern as shown in Figure 2, wherein, between each negative electrode, need mutual conduction.
Yet, from the negative electrode layout of existing OLED transparent display panel, in manufacture craft, need the conducting that twice deposition could realize negative electrode (need between each negative electrode overlapped could realize conducting).This sampling technology is more complicated, and expense is relatively high, and negative electrode area occupied is larger, causes that aperture opening ratio is less, transmitance is lower.
Utility model content
Embodiment of the present utility model provides a kind of mask plate and OLED transparent display panel for the preparation of organic electric exciting light-emitting diode (OLED) transparent display panel, can shorten negative electrode Production Time, reduces costs.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
The utility model embodiment provides a kind of mask plate for OLED transparent display panel, comprise substrate, be arranged at a plurality of hollow outs region and a plurality of occlusion area on described substrate, described vacancy section region pattern, corresponding to the negative electrode pattern of OLED transparent display panel, is interconnected between hollow out region described in each.
Described hollow out region be shaped as triangle, rhombus, circle or rectangle.
The utility model embodiment provides a kind of OLED transparent display panel, comprising:
Substrate;
Be arranged at the negative electrode on described substrate, described negative electrode comprises a plurality of cathode electrode units that are interconnected, and described negative electrode has for using that above-mentioned arbitrary mask plate is made.
Described cathode electrode unit be shaped as triangle, rhombus, circle or rectangle.
Described OLED transparent display panel, also comprises:
Be arranged at the first transport layer, luminescent layer, the second transport layer and anode on described substrate.
Described the first transport layer or the second transport layer sandwich construction for being formed by barrier layer, implanted layer and transport layer stack.
The material of described luminescent layer is single organic substance or the organic substance of doping.
The organic substance of described doping is fluorescent material or phosphor material.
The mask plate that the utility model embodiment provides and OLED transparent display panel, mask plate comprises substrate, be arranged at a plurality of hollow outs region and a plurality of occlusion area on described substrate, described hollow out region, corresponding to the negative electrode of OLED transparent display panel to be prepared, is interconnected between hollow out region described in each.By this scheme, because the negative electrode of OLED transparent display panel can be through a composition technique or an evaporation process formation, formed negative electrode comprises a plurality of cathode electrode units that are interconnected, compared with prior art reduced the number of times of making negative electrode, shorten negative electrode Production Time, reduced cost.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the mask plate layout schematic top plan view one of prior art;
Fig. 2 is the negative electrode layout schematic top plan view of the display floater of prior art;
The mask plate layout schematic top plan view that Fig. 3 provides for the utility model embodiment;
The negative electrode layout schematic top plan view one of the display floater that Fig. 4 provides for the utility model embodiment;
The negative electrode layout schematic top plan view two of the display floater that Fig. 5 provides for the utility model embodiment;
The structural representation of the display floater that Fig. 6 provides for the utility model embodiment;
The manufacture method schematic flow sheet one of a kind of display floater that Fig. 7 provides for the utility model embodiment;
The manufacture method schematic flow sheet two of the display floater that Fig. 8 provides for the utility model embodiment;
The manufacture method schematic flow sheet of the another kind of display floater that Fig. 9 provides for the utility model embodiment.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Embodiment based in the utility model, those of ordinary skills are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the utility model protection.
It should be noted that: of the present utility model " on " D score just describes the utility model with reference to accompanying drawing, as limiting term.
As shown in Figure 3, the utility model embodiment provides a kind of mask plate 2 for the preparation of OLED transparent display panel, comprise substrate 20, be arranged at a plurality of hollow outs region 21 and a plurality of occlusion area 22 on described substrate 20, described hollow out region 22, corresponding to the negative electrode of OLED transparent display panel to be prepared, is interconnected between hollow out region 22 described in each.
Further, described in each, the shape in hollow out region can be various suitable shapes, for example, be triangle, rhombus, circle or rectangle.Between light tight region, can in end, be connected to each other directly as shown in Figure 3, also can be connected to each other by connecting electrode.
These light tight regions for example, by deposit the film of Metal Cr for example or its oxide on substrate 20, then obtain by photoetching process.
The mask plate that the utility model embodiment provides, comprise substrate, be arranged at a plurality of hollow outs region and a plurality of occlusion area on described substrate, described hollow out, corresponding to the negative electrode of organic electric exciting light-emitting diode OLED transparent display panel, is interconnected between hollow out region described in each.By this scheme, because the negative electrode of OLED transparent display panel can be through a composition technique or an evaporation process formation, formed negative electrode comprises a plurality of cathode electrode units that are interconnected, therefore compared with prior art reduced the number of times of making negative electrode, shorten negative electrode Production Time, reduced cost.And negative electrode area occupied is less, aperture opening ratio and transmitance have been improved.
The utility model embodiment provides a kind of OLED transparent display panel, comprising:
Substrate;
Be arranged at the negative electrode on described substrate, described negative electrode comprises a plurality of cathode electrode units that are interconnected, and described negative electrode is to use the mask plate with above-mentioned arbitrary characteristics to be made.Corresponding with the mask plate shown in Fig. 3, the shape of cathode electrode unit can be triangle, and is connected to one another.
As shown in Figure 4, Figure 5, the shape in the hollow out region of the mask plate proposing due to above-described embodiment can be triangle, rhombus, circle or other shapes (for example rectangle), and the shape of the cathode electrode unit 110 that the negative electrode 11 of the display floater 1 being made by this mask plate is so included can be also triangle, rhombus, circle or rectangle etc.
It should be noted that, if cathode electrode unit be shaped as circle, the effect of the transparent demonstration of display floater is compared weakerly with triangle, rhombus, rectangle because from figure, the area of negative electrode is larger, the transmitance of display floater is lower.Triangle, rhombus, rectangular cathode area all can reach 50% transmitance, and transparent effect is better, and it is all better than the transmitance of the display floater of prior art.But, if desired combine with the color film of prior art, can preferably adopt rectangular design, if by Mask region with above-mentioned in each cathode electrode unit and each pixel cell to see through window (transmissive window) corresponding, and then reach the object of the transmitance that improves display floater.
In addition, as shown in Figure 5, the shape of cathode electrode unit of the present utility model can also be the figure except circle (it mainly changes according to the layout change of mask plate), the transmitance of display floater will have one significantly to improve so, but from the viewpoint of existing technique and material, dwindling of cathode area will bring the decline of display floater driving force, embodiment is in the demonstration of display floater time, may be that contrast is lower, the phenomenons such as color exception, if following, at negative electrode, make aspect material and display floater characteristic and can get a promotion, that is to say compared with the negative electrode of small size and can realize driven completely, adopting so the figure except circle can be also good means that improve the transmitance of display floater.
Further, the display floater of the utility model embodiment, can also comprise the first transport layer, luminescent layer, the second transport layer and the anode that are arranged on described substrate.
As a kind of execution mode of the present utility model, as shown in Figure 6, the display floater 1 of the utility model embodiment comprises:
Be arranged at the anode 12 on substrate 10;
Be arranged at the first transport layer 13 on anode 12;
Be arranged at the luminescent layer 14 in the first transport layer 13;
Be arranged at the second transport layer 15 on luminescent layer 14;
Be arranged at the negative electrode 11 in the second transport layer 15, wherein, negative electrode 11 comprises a plurality of cathode electrode units that are interconnected, and described negative electrode is to use the mask plate with above-mentioned arbitrary embodiment to be made.
This luminescent layer can be various available luminescent layers, such as sending out red, green, blue or white light etc.
Wherein, the first transport layer is hole transmission layer, the second transport layer can also be electron transfer layer, in the utility model embodiment, between two electrodes of negative and positive, apply after suitable bias voltage, electronics and hole are injected from negative electrode and anode respectively, because the mobility in hole in organic layer is higher than electronics, therefore it is compound that hole and electronics occur at the interface of the luminescent layer near negative electrode conventionally, and then it is luminous to realize display floater.
It should be noted that; the OLED transparent display panel that the display floater of above-mentioned conduct a kind of execution mode of the present utility model is top light emitting; and can be the OLED transparent display panel of bottom-emission as the display floater of another kind of execution mode of the present utility model; particularly; negative electrode can be arranged between substrate and the first transport layer; anode can be arranged in the second transport layer, and the structure of negative electrode is same as the previously described embodiments, therefore also in protection range of the present utility model.
Further, the first transport layer or the second transport layer can also be the sandwich construction being formed by barrier layer, implanted layer and transport layer stack.
Further, the material of luminescent layer can be single organic substance or the organic substance of doping.
Further, the organic substance of doping can be fluorescent material or phosphor material.
The display floater that the utility model embodiment provides, comprises substrate, is arranged at the negative electrode on substrate, and negative electrode comprises a plurality of cathode electrode units that are interconnected.By this scheme, because negative electrode can form through a composition technique or an evaporation process, formed negative electrode comprises a plurality of cathode electrode units that are interconnected, compared with prior art reduced the number of times of making negative electrode, shortened negative electrode Production Time, reduced cost, and negative electrode area occupied is less, has improved aperture opening ratio and transmitance.
The manufacture method of the OLED transparent display panel that the utility model embodiment provides is as follows, comprising:
Adopt a composition technique on substrate, to form negative electrode, described negative electrode comprises a plurality of cathode electrode units that are interconnected.
Here composition technique is method of photolithographic patterning, comprise on structure sheaf to be patterned and apply photoresist, photoresist is used to mask board to explosure, photoresist developing after exposure is obtained to photoresist mask, and use the photoresist mask obtaining, as etching mask, structure sheaf is carried out to etching formation pattern, remove afterwards photoresist mask.The for example positive photoresist using.In a same composition technique, for the photoresist applying on structure sheaf to be patterned, can adopt the mode in the each exposed portion of mask plate region progressively by whole photoresist exposures, after developing, carry out same etching technics and structure sheaf is formed to the pattern needing.
As shown in Figure 7, the manufacture method of the OLED transparent display panel that the utility model embodiment provides is as follows, and the method comprises:
S101, choose substrate.
Wherein, can choose glass, quartz plate, silicon chip, sheet metal, polyethylene terephthalate (Polyethylene Terephthalate, PET) or surface polymer mantle after treatment as substrate.
S102, on substrate, form anode.
Wherein, the anode of OLED adopts the materials such as indium tin oxide (Indi um Tin Oxide, ITO), indium-zinc oxide (Indium Zinc Oxide, IZO) or zinc oxide aluminum (Al-doped ZnO, AZO) conventionally.
The method of S103, employing chemical vapour deposition (CVD), physical vapour deposition (PVD) (Physical Vapor Deposition, PVD) or spin coating forms the first transport layer on the substrate that forms anode.
Wherein, the first transport layer is hole transmission layer, hole transmission layer can adopt take the triaromatic amine that biphenyl is core, as N, N '-bis (naphthalen-1-y)-N, N '-bis (phenyl) benzidin (NPB), the materials such as diamines biphenyl derivatives, thickness is generally in the scope of 10nm to 50nm.
The method of S104, employing evaporation, spin coating or inkjet printing forms luminescent layer on the substrate that forms the first transport layer.
Luminescent layer can be single organic substance, as 8 hydroxyquinoline aluminums (Alq3), rubrene (Rubrene) etc., also can be alloy, as 4,4 '-N, N '-bis-carbazole-biphenyl (CBP) mixes rubrene (Rubrene) etc., or phosphor material, as fac-tri-(2-phenylpyridine) iridium [Ir (ppy) 3] etc., or fluorescent material, the thickness of this luminescent layer is generally in the scope of 1nm to 50nm.
When each pixel of prepared OLED display floater for example consists of red, green and blue sub-pixels, can use mask plate to carry out depositing operation, for example on substrate, deposition forms emitting red light layer material, green emitting layer material and blue-light-emitting layer material successively.
The method of S105, employing chemical vapour deposition (CVD), PVD or spin coating forms the second transport layer on the substrate that forms luminescent layer.
In the utility model embodiment, the second transport layer forming in step 105 can be electron transfer layer, for example, this electron transfer layer can be Alq3,2,2 ', 2 " (1; 3,5-benzenetriyl) tris[1-phenyl-1H-benzimidazole] (TPBI), 4,7-dipheny1-1; 10-phenanthroline (Bphen) mixes the materials such as metal caesium (Cs), and its thickness is generally in the scope of 10nm to 100nm.
S106, adopt composition technique to form negative electrode on the substrate that forms the second transport layer, negative electrode comprises a plurality of cathode electrode units that are interconnected.
Wherein, as shown in Figure 8, S106 specifically comprises sub-step S106a-S106d:
S106a, on described substrate, form cathode thin film.
S106b, on described cathode thin film, form photoresist.
S106c, described photoresist is exposed, form photoresist reserve area and photoresist is removed region after developing, described photoresist reserve area is corresponding to described negative electrode.
Particularly, utilize the mask plate of above-described embodiment, described photoresist is exposed, form photoresist reserve area and photoresist removal region after developing, described photoresist reserve area is corresponding to described negative electrode.
In this step, in exposure process, adopt negative photoresist, after exposure, mask plate hollow out region corresponds to photoresist reserve area, and what occlusion area was corresponding is photoresist removal region.
Described in S106d, etching, photoresist is removed described cathode thin film corresponding to region, to form described negative electrode.The etching technics adopting can be for example dry carving technology, can be also wet-etching technique.
Want effectively in organic material, to inject electronics, the work function of cathode material must be enough low, and the response of OLED device of making negative electrode by low workfunction metal is faster.At present, in OLED device, obtain the single-layer metal negative electrode of applying and have Mg (3.7eV), Li (2.9eV), Ca (2.9eV), Sr (2.4eV), Na (2.3eV), Cs (2.1eV), Gd etc.For anti-sealing and oxygen have a negative impact to low workfunction metal negative electrode, can also adopt alloy cathode Ca/Al, Mg/Ag, Mg/MgAg, Gd/Al, Al/Li, Sn/Al and Ag/Al etc.The negative electrode of OLED in this embodiment can be magnadure, magnesium silver alloy, calcium silver alloy etc., and its thickness is generally in 10nm to 200nm scope.
If there is the situation of poor flow between the cathode electrode unit preparing, can use the method for a connection, by existing the cathode electrode unit of the situation of poor flow to be connected with other normal cathode electrode units, to guarantee that display floater can work on the whole.
So far, manufactured display floater as shown in Figure 6.
Finally, utilize capping or thin-film encapsulation layer that above-mentioned whole display unit is encapsulated, in order to anti-sealing and oxygen, organic layer is caused to erosion.
The transparent display panel that the utility model provides can also adopt another kind of manufacture method, is with the difference of above-mentioned manufacture method:
S106 step also can adopt an evaporation process to form, only need when evaporation, adopt above-mentioned mask plate, a plurality of cathode electrode units of the corresponding oled panel in a plurality of hollow outs region, simultaneously, because a plurality of hollow outs region communicates with each other, therefore each cathode electrode unit on the substrate after evaporation also communicates with each other, and forms the negative electrode of integrated connection.Concrete fabrication processing as shown in Figure 9.
Want effectively in organic material, to inject electronics, the work function of cathode material must be enough low, and the response of OLED device of making negative electrode by low workfunction metal is faster.At present, in OLED device, obtain the single-layer metal negative electrode of applying and have Mg (3.7eV), Li (2.9eV), Ca (2.9eV), Sr (2.4eV), Na (2.3eV), Cs (2.1eV), Gd etc.For anti-sealing and oxygen have a negative impact to low workfunction metal negative electrode, can also adopt alloy cathode Ca/Al, Mg/Ag, Mg/MgAg, Gd/Al, Al/Li, Sn/Al and Ag/Al etc.The negative electrode of OLED in this embodiment can be magnadure, magnesium silver alloy, calcium silver alloy etc., and its thickness is generally in 10nm to 200nm scope.
Finally, utilize capping or thin-film encapsulation layer that above-mentioned whole display unit is encapsulated, in order to anti-sealing and oxygen, organic layer is caused to erosion.
The display floater that the utility model embodiment provides, adopts a composition technique on substrate, to form negative electrode, and negative electrode comprises a plurality of cathode electrode units that are interconnected.By this scheme, because negative electrode forms through a composition technique or an evaporation process, formed negative electrode comprises a plurality of cathode electrode units that are interconnected, and has compared with prior art reduced the number of times of making negative electrode, shorten negative electrode Production Time, reduced cost.
In the utility model embodiment, between two electrodes of negative and positive, apply after suitable bias voltage, electronics and hole are injected from negative electrode and anode respectively, because the mobility in hole in organic layer is higher than electronics, therefore it is compound that hole and electronics occur at the interface of the luminescent layer near negative electrode conventionally, and then it is luminous to realize display floater.The display floater that the utility model provides, its negative electrode can be realized once-forming, reduces the area of negative electrode and still can realize the conducting of negative electrode, and the method greatly reduces the cost of manufacture of OLED negative electrode, single makes negative electrode leveling more without overlapping deposition, has realized better conducting effect.
The above; it is only embodiment of the present utility model; but protection range of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, within all should being encompassed in protection range of the present utility model.Therefore, protection range of the present utility model should be as the criterion with the protection range of described claim.
Claims (8)
1. the mask plate for the preparation of OLED transparent display panel, comprise substrate, be arranged at a plurality of hollow outs region and a plurality of occlusion area on described substrate, described vacancy section region pattern is corresponding to the negative electrode pattern of OLED transparent display panel to be prepared, it is characterized in that, described in each, between hollow out region, be interconnected.
2. mask plate according to claim 1, is characterized in that, described hollow out region be shaped as triangle, rhombus, circle or rectangle.
3. an OLED transparent display panel, is characterized in that, comprising:
Substrate;
Be arranged at the negative electrode on described substrate, described negative electrode comprises a plurality of cathode electrode units that are interconnected, and described negative electrode is to use the mask plate as described in any one in claim 1 or 2 to be made.
4. OLED transparent display panel according to claim 3, is characterized in that, described cathode electrode unit be shaped as triangle, rhombus, circle or rectangle.
5. according to the OLED transparent display panel described in claim 3 or 4, it is characterized in that, also comprise:
Be arranged at the first transport layer, luminescent layer, the second transport layer and anode on described substrate.
6. OLED transparent display panel according to claim 5, is characterized in that, described the first transport layer or the second transport layer sandwich construction for being formed by barrier layer, implanted layer and transport layer stack.
7. OLED transparent display panel according to claim 6, is characterized in that, the material of described luminescent layer is single organic substance or the organic substance of doping.
8. OLED transparent display panel according to claim 7, is characterized in that, the organic substance of described doping is fluorescent material or phosphor material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320349475.2U CN203456462U (en) | 2013-03-20 | 2013-06-18 | Mask plate and OLED transparent display panel |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320127246 | 2013-03-20 | ||
| CN201320127246.6 | 2013-03-20 | ||
| CN201320349475.2U CN203456462U (en) | 2013-03-20 | 2013-06-18 | Mask plate and OLED transparent display panel |
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| CN203456462U true CN203456462U (en) | 2014-02-26 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103346271A (en) * | 2013-03-20 | 2013-10-09 | 北京京东方光电科技有限公司 | Mask plate, OLED transparent display panel and manufacturing method of OLED transparent display panel |
| CN109136833A (en) * | 2018-08-29 | 2019-01-04 | 上海天马有机发光显示技术有限公司 | The production method and display device of display panel, mask plate, display panel |
| CN110611054A (en) * | 2019-08-26 | 2019-12-24 | 武汉华星光电半导体显示技术有限公司 | Mask plate, display panel and preparation method of display panel |
| CN110993662A (en) * | 2019-12-03 | 2020-04-10 | 武汉华星光电半导体显示技术有限公司 | Display panel and mask plate |
-
2013
- 2013-06-18 CN CN201320349475.2U patent/CN203456462U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103346271A (en) * | 2013-03-20 | 2013-10-09 | 北京京东方光电科技有限公司 | Mask plate, OLED transparent display panel and manufacturing method of OLED transparent display panel |
| CN103346271B (en) * | 2013-03-20 | 2016-01-06 | 北京京东方光电科技有限公司 | A kind of mask plate, OLED transparent display panel and manufacture method thereof |
| US9627645B2 (en) | 2013-03-20 | 2017-04-18 | Beijing Boe Optoelectronics Technology Co., Ltd. | Mask plate, organic light-emitting diode (OLED) transparent display panel and manufacturing method thereof |
| CN109136833A (en) * | 2018-08-29 | 2019-01-04 | 上海天马有机发光显示技术有限公司 | The production method and display device of display panel, mask plate, display panel |
| CN109136833B (en) * | 2018-08-29 | 2021-01-19 | 上海天马有机发光显示技术有限公司 | Display panel, mask plate, manufacturing method of display panel and display device |
| CN110611054A (en) * | 2019-08-26 | 2019-12-24 | 武汉华星光电半导体显示技术有限公司 | Mask plate, display panel and preparation method of display panel |
| CN110993662A (en) * | 2019-12-03 | 2020-04-10 | 武汉华星光电半导体显示技术有限公司 | Display panel and mask plate |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20140226 Effective date of abandoning: 20160106 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |