CN203393225U - Chemical vapor deposition furnace - Google Patents
Chemical vapor deposition furnace Download PDFInfo
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- CN203393225U CN203393225U CN201320444384.7U CN201320444384U CN203393225U CN 203393225 U CN203393225 U CN 203393225U CN 201320444384 U CN201320444384 U CN 201320444384U CN 203393225 U CN203393225 U CN 203393225U
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- vapor deposition
- chemical vapor
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 53
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 238000001816 cooling Methods 0.000 claims abstract description 21
- 238000009413 insulation Methods 0.000 claims description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 claims description 2
- 230000000630 rising effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 4
- 239000013049 sediment Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model provides a chemical vapor deposition furnace which comprises a furnace body, an upper furnace cover, a lower furnace cover and a lower furnace cover lifting mechanism, wherein the upper furnace cover is arranged on the upper part of the furnace body, and is hermetically, detachably and fixedly connected with the furnace body, the lower furnace cover is arranged on the lower part of the furnace body, and is hermetically, detachably and fixedly connected with the furnace body, and the lower furnace cover lifting mechanism is fixedly connected with the lower furnace cover, so that after the lower furnace cover is separated from the fixed furnace body, the lower furnace cover is driven to fall to carry out bottom discharge and drive the discharged lower furnace cover to lift to be combined with the furnace body. The chemical vapor deposition furnace further comprises a front and back propelling mechanism arranged under the lower furnace cover, so that the lower furnace cover lifting mechanism drives the falling lower furnace cover to fall on the front and back propelling mechanism and move front and back to the periphery so as to charge and discharge. The furnace body, the upper furnace cover and the lower furnace cover can adopt a water-cooling interlay and an insulating layer. Therefore, mutual dislocation of the furnace body in a repeated disassembling process can be avoided. The chemical vapor deposition furnace is safe and reliable to charge and discharge, and convenient to operate. The thermal field in the furnace is stable, and the high-temperature working safety is improved.
Description
Technical field
The utility model relates to a kind of equipment for Heating Processing, relates in particular to a kind of chemical vapor deposition stove.
Background technology
The equipment that is applied at present chemical vapour deposition mainly adopts middle part to come out of the stove or come out of the stove in top.For example, on December 7th, 2011, the Chinese patent CN202063992U of Granted publication disclosed a kind of chemical vapor deposition stove, wherein the outer side of the upper furnace body in furnace body is connected with body of heater lifting mechanism and the upper end of bell is connected with the hositing mechanism of furnace roof that is arranged on upper furnace body side, because furnace body adopts bell, upper furnace body, lower furnace body, bottom construction, therefore this chemical vapor deposition stove is middle part blow-on mode, the furnace binding of this kind of middle part blow-on mode is all inconvenient for going out charging, operation easier is large, and safety hazard is high.In addition, upper furnace body and bell easily cause body of heater mutual dislocation in the process of repeated disassembled and assembled.
In addition, the temperature of the use that chemical vapor deposition stove is general is all higher, and generally can have two different thermal fields in use procedure, and one is namely said crucible region of melt thermal field, and one is deposition thermal field ，Ji sedimentary province.The technique of chemical vapour deposition has determined that chemical vapor deposition stove has two different thermal fields, and temperature is higher, and this is to guarantee the stable thermal field in stove and guarantee that its hot operation security has proposed challenge simultaneously.Therefore, the further improvement on chemical vapor deposition stove can be appreciated by some colony.
Utility model content
In view of the problem existing in background technology, the purpose of this utility model is to provide a kind of chemical vapor deposition stove, and it is convenient to charging, processing ease, operational safety.
Another object of the present utility model is to provide a kind of chemical vapor deposition stove, and it can avoid the mutual dislocation of body of heater in the process of repeated disassembled and assembled.
An object more of the present utility model is to provide a kind of chemical vapor deposition stove, and it can be guaranteed the stable thermal field in stove and improve hot operation security simultaneously.
To achieve these goals, the utility model provides a kind of chemical vapor deposition stove, and it comprises: body of heater; Upper bell, is arranged on upper of furnace body, with furnace sealing and dismountable being fixedly connected with; Lower bell, is arranged on lower portion of furnace body, is fixedly connected with furnace sealing is dismountable; And lower furnace cover lifting mechanism, be fixedly connected with lower bell so that lower bell after throwing off fixing body of heater, drive under bell land to carry out bottom discharge and drive the lower bell after discharging to rise to be combined with body of heater.
Preferably, described chemical vapor deposition stove also can comprise: front and back delivery device, be arranged at lower bell under, the lower bell that front and back delivery device Shi Xia furnace cover lifting mechanism drive to decline falls thereon and moves forward and backward to peripheral, to go out charging.
Preferably, body of heater comprises body of heater shell, water-cooling sandwich, thermal insulation layer, thermal insulation layer set casing; Upper bell comprises bell shell, water-cooling sandwich, thermal insulation layer, thermal insulation layer set casing; And lower bell comprises lower bell shell, water-cooling sandwich, thermal insulation layer, thermal insulation layer set casing.
The beneficial effects of the utility model are as follows:
The mode that adopts bottom to come out of the stove, can avoid the mutual dislocation of body of heater in the process of repeated disassembled and assembled;
Delivery device before and after ground is provided with, before and after lower bell is adopted, delivery device moves to periphery, goes out charging, safety, reliable, easy to operate.
Body of heater, upper bell, lower bell all can adopt water-cooling sandwich, thermal insulation layer, can guarantee the stable thermal field in stove and improve hot operation security simultaneously.
Accompanying drawing explanation
Fig. 1 is the stereographic map according to chemical vapor deposition stove of the present utility model;
Fig. 2 is body of heater shell, water-cooling sandwich, the thermal insulation layer of body of heater, the schematic diagram of thermal insulation layer set casing;
Fig. 3 is upper bell shell, water-cooling sandwich, the thermal insulation layer of upper bell, the schematic diagram of thermal insulation layer set casing;
Fig. 4 is lower bell shell, water-cooling sandwich, the thermal insulation layer of lower bell, the schematic diagram of thermal insulation layer set casing;
The distribution schematic diagram of three well heaters of Tu5Wei Ge heating zone.
Wherein, description of reference numerals is as follows:
1 body of heater 5 times furnace cover lifting mechanism
11 body of heater shell 51 driving mechanisms
12 water-cooling sandwich 52 ball screws
13 thermal insulation layer 53 guide blocks
14 thermal insulation layer set casing 54 cross reversers
15 well heater 55 anchors
16 water cooled electrode 551 position adjustment blocks
Bell 56 connecting rods on 2
21 hanger 57 step-down gears
23 water-cooling sandwich 581 guide rails
24 thermal insulation layer 582 slide blocks
25 thermal insulation layer set casing 583 stop blocks
26 tail gas export 59 reversers
3 times bell 6 front and back delivery devices
31 times bell shell 61 bases
32 water-cooling sandwich 62 guide rails
33 thermal insulation layer 63 driving mechanisms
34 thermal insulation layer set casing 64 ball screws
35 take turns 65 feed screw nuts
36 clamping part 66 step-down gears
4 bracing frame 67 limited blocks
41 side stand 68 shaft couplings
411 crossbeam 7 hydraulic clamping devices
412 column 8 web members
42 tie-beam 9 web members
Embodiment
Describe in detail with reference to the accompanying drawings according to chemical vapor deposition stove of the present utility model.
With reference to Fig. 1, according to chemical vapor deposition stove of the present utility model, comprise: body of heater 1; Upper bell 2, is arranged on body of heater 1 top, with body of heater 1 sealing and dismountable being fixedly connected with; Lower bell 3, is arranged on body of heater 1 bottom, with dismountable being fixedly connected with of body of heater 1 sealing; And lower furnace cover lifting mechanism 5, be fixedly connected with lower bell 3 so that lower bell 3 throw off bell 3 under the fixing rear drive of body of heater 1 land to carry out bottom discharge and drive lower bell 3 after discharging rise with body of heater 1 combination.This body of heater 1 adopts the mode of bottom discharge, safely, reliably, easy to operate, and can avoid the mutual dislocation of body of heater in the process of repeated disassembled and assembled.
In an embodiment of body of heater 1, with reference to Fig. 2, body of heater 1 comprises body of heater shell 11, water-cooling sandwich 12, thermal insulation layer 13, thermal insulation layer set casing 14.The temperature of the use that chemical vapor deposition stove is general is all higher, and generally can have two different thermal fields in use procedure, and one is namely said crucible region of melt thermal field, and one is deposition thermal field ，Ji sedimentary province.The technique of chemical vapour deposition has determined to have two different thermal fields, and temperature is higher, body of heater 1 adopts the structure of water-cooling sandwich 12, thermal insulation layer 13, can can guarantee that again body of heater 1 is not melted so that chemical vapor deposition stove can guarantee high temperature, guarantee the high temperature safety of chemical vapor deposition stove.
In an embodiment of body of heater 1, preferably, body of heater 1 is provided with the interface (not shown) of water inlet pipe and water outlet pipe, and water inlet pipe and water outlet pipe interface is communicated in water-cooling sandwich 12, and water inlet pipe and water outlet pipe interface adopts the mode connecting water pipe of low in and high out.Preferably, on body of heater 1, be provided with reserved opening.
In an embodiment of body of heater 1, preferably, body of heater 1 is divided into He Xia heating zone, heating zone, so that control the temperature of different sites.More preferably, with reference to Tu5，Ge heating zone, be provided with three well heaters 15.Further preferably three of ，Ge heating zone well heaters 15 are arranged with decile 360 degree circles.
In an embodiment of well heater 15, preferably, well heater 15 is graphite heater.More preferably, each well heater 15 communicates to connect respectively in temperature detector (not shown).The independent control of each well heater can make heating more even.More preferably, temperature detector is thermopair.
According in chemical vapor deposition stove of the present utility model, with reference to Fig. 1, each well heater 15 connects two water cooled electrodes 16.More preferably, water cooled electrode 16 is water-cooled copper electrode.
According in chemical vapor deposition stove of the present utility model, two corresponding water cooled electrodes 16 are connected in transformer (not shown), and transformer is arranged on described below upper bracket.Transformer is arranged on described upper bracket, can reduces transformer area occupied.
According in chemical vapor deposition stove of the present utility model, upper bell 2 is connected with the dismountable bolt that is fixedly connected as between body of heater 1.
According in chemical vapor deposition stove of the present utility model, upper bell 2 is provided with tail gas air outlet 26.In addition, at the upper bell 2 of body of heater 1, can be provided with steam output interface and the reserved opening of temperature survey interface, gas inlet, interface of pressure measurement, measurement reactive material, wherein in the quantity of each mouthful and chemical vapor deposition stove, the quantity of set sediment chamber is supporting, general Shi Yige sediment chamber correspondence two temperature survey interfaces, the steam output measurement interface of a reactive material, wherein the quantity of inlet mouth determines according to processing requirement, general one to two of reserved opening.
According in chemical vapor deposition stove of the present utility model, with reference to Fig. 1, upper bell 2 is provided with hanger 21, for lifting.
According in chemical vapor deposition stove of the present utility model, with reference to Fig. 3, upper bell 2 comprises bell shell 22, water-cooling sandwich 23, thermal insulation layer 24, thermal insulation layer set casing 25.
In an embodiment of upper bell 2, preferably, upper bell 2 is provided with the interface (not shown) of water inlet pipe and water outlet pipe, and water inlet pipe and water outlet pipe interface is communicated in water-cooling sandwich 23, and water inlet pipe and water outlet pipe interface adopts the mode connecting water pipe of low in and high out.
In an embodiment of upper bell 2, preferably, upper bell 2 is tightly connected and adopts sealing-ring (not shown) to be connected and sealed with body of heater 1.
According in chemical vapor deposition stove of the present utility model, with reference to Fig. 1, lower bell 3 adopts hydraulic clamping device 7 to realize with dismountable being fixedly connected with between body of heater 1.Hydraulic clamping device 7 can be along circumferentially uniformly-spaced arranging, thereby when by the flange clamping of the flange of lower bell 3 and body of heater 1, chuck force is evenly distributed.In addition hydraulic clamping device 7 can be connected in same control device (not shown) by Unified Communication, thereby unified control while making to apply hydraulic clamp power, thereby the synchronism while having improved the homogeneity of clamping force and open and close, thereby the balance when being conducive to lower bell 3 and opening.
In an embodiment of lower bell 3, with reference to Fig. 4, lower bell 3 comprises lower bell shell 31, water-cooling sandwich 32, thermal insulation layer 33, thermal insulation layer set casing 34.
In an embodiment of lower bell 3, preferably, lower bell 3 is provided with the interface (not shown) of water inlet pipe and water outlet pipe, and water inlet pipe and water outlet pipe interface is communicated in water-cooling sandwich 32, and water inlet pipe and water outlet pipe interface adopts the mode connecting water pipe of low in and high out.Lower bell 3 at body of heater 1 can be provided with temperature survey interface, gas inlet, reserved opening.Wherein the quantity of the interior set crucible of the quantity of each mouthful and chemical vapor deposition stove and sediment chamber is supporting, generally that a crucible correspondence three temperature survey interfaces, corresponding 2 the temperature survey interfaces in Yi Ge sediment chamber, wherein the quantity of inlet mouth determines according to processing requirement, general one to two of reserved opening.
In an embodiment of lower bell 3, preferably, between lower bell 3 and body of heater 1, the sealing of sealing adopts sealing-ring (not shown) to realize.
According in an embodiment of chemical vapor deposition stove described in the utility model, with reference to Fig. 1, described chemical vapor deposition stove also can comprise bracing frame 4.Bracing frame 4 can comprise two side stands 41 and two tie-beams 42.Two side stands 41 are arranged at body of heater 1 two opposite sides, and each side stand 41 comprises: a crossbeam 411; And at least two columns 412, be fixedly connected on this crossbeam 411.Two tie-beams 42 are connected between the crossbeam 411 of two side stands 41; Wherein, the crossbeam 411 of two side stands 41 and two tie-beams 42 form upper bracket, and body of heater 1 is fixedly connected with (for example, by web member 8) with described upper bracket.Correspondingly ，Xia furnace cover lifting mechanism 5 can comprise: driving mechanism 51, is arranged at described upper bracket; At least two ball screws 52; At least two guide blocks 53, each guide block 53 wears corresponding ball screw 52 and is (not shown with corresponding feed screw nut, feed screw nut is arranged at corresponding ball screw 52 and wears this guide block 53 position) be fixedly connected with to form and be in transmission connection with ball screw 52, each guide block 53 is fixedly connected on lower bell 3(for example by web member 9); At least two cross reversers 54, are arranged on described upper bracket, connect driving mechanism 51 and corresponding ball screw 52 one end; At least two anchors 55, are fixedly connected on the other end of corresponding ball screw 52; And at least two connecting rods 56, be arranged on the top of described upper bracket and connect driving mechanism 51, corresponding cross reverser 54, and corresponding ball screw 52.Preferably, driving mechanism 51 is servomotor.
In one embodiment of Xia furnace cover lifting mechanism 5, with reference to Tu1，Xia furnace cover lifting mechanism 5, also can comprise: step-down gear 57, to adjust the output of driving mechanism 51; And reverser 59, be arranged on described upper bracket and with step-down gear 57 and be connected, and connect with corresponding connecting rod 56.With reference to Fig. 1, reverser 59 can be arranged on a tie-beam 42 in described upper bracket.
According in an embodiment of chemical vapor deposition stove of the present utility model, with reference to Fig. 1, column 412 is four, and every two columns 412 lay respectively at place, respective side support 41 two ends; Ball screw 52 is four, and body of heater 1 two opposite sides is respectively two ball screws 52; Guide block 53 is two, and two ball screws 52 that are positioned at body of heater 1 the same side wear a corresponding guide block 53; Cross reverser 54 is six, and each ball screw 52 one end correspondence is connected in a cross reverser 54; Connecting rod 56 is six, six connecting rods 56 and corresponding cross reverser 54, and wherein two connecting rods 56 are also connected with reverser 59.
In one embodiment of Xia furnace cover lifting mechanism 5, with reference to Tu1，Xia furnace cover lifting mechanism 5, also can comprise guiding mechanism 58, guiding mechanism 58 can comprise: guide rail 581, is arranged on corresponding column 42; And slide block 582, be arranged on corresponding guide rail 581 and the guide rail 581 corresponding with this is slidably connected and be fixedly connected with corresponding guide block 53.
In an embodiment of guiding mechanism 58, with reference to Fig. 1, guiding mechanism 58 also can comprise: stop block 583, is arranged on the end of corresponding guide rail 581.
In an embodiment of anchor 55, with reference to Fig. 1, anchor 55 is provided with the described the other end that adjustment block 551， position, position adjustment block 551 is fixedly connected on corresponding ball screw 52, with adjustment roll ballscrew 52 position when mounted, vertical to guarantee ball screw 52.
In an embodiment of column 42, on each column 42, travel switch (not shown) is installed, communicate to connect in driving mechanism 51(with driving mechanism 51 in controller (not shown) communication connection), be used for controlling the lifting travel of lower bell 3.
According in chemical vapor deposition stove of the present utility model, with reference to Fig. 1, chemical vapor deposition stove also can comprise: front and back delivery device 6, be arranged at lower bell 3 under, delivery device 6 Shi Xia furnace cover lifting mechanisms 5 in front and back drive the lower bell 3 declining to fall thereon and move forward and backward to peripheral, to go out charging.
According in chemical vapor deposition stove of the present utility model, with reference to Fig. 1, wherein descend bell 3 belows that a plurality of rollers 35 and clamping part 36 are installed.In an embodiment of front and back delivery device 6, front and back delivery device 6 can comprise: base 61; Guide rail 62, is arranged on base 61, and when the respective roller 35 below lower bell 3 drops on guide rail 62, roller 35 is on guide rail 62 and along guide rail 62 rolling movements; Driving mechanism 63, is arranged on base 61; Ball screw 64， one end is connected in driving mechanism 63 and the other end is connected in base 61 rotationally; And feed screw nut 65, forming and be in transmission connection with ball screw 64, the roller 35 below lower bell 3 is across in respective track 62 time, and the clamping part 36 of lower bell 3 belows is combined with feed screw nut's 65 buckles.Preferably, driving mechanism 63 is servomotor.Preferably, the roller 35 of corresponding same guide rail 62 is for arranging in line a plurality of.
In an embodiment of front and back delivery device 6, with reference to Fig. 1, front and back delivery device 6 also can comprise: step-down gear 66, one sides are connected with driving mechanism 63 and opposite side is connected with ball screw 64.Front and back delivery device 6 also can further comprise: limited block 67, is arranged at guide rail 62 two ends.Wherein, step-down gear 66 can be connected by shaft coupling 68 with ball screw 64.
In an embodiment of front and back delivery device 6, base 61 can be provided with photo-sensor (not shown), described photo-sensor communicates to connect in motion controller (not shown), motion controller is controlled driving mechanism 63(motion controller and the interior (not shown) communication connection of driving mechanism 63 according to the photo-sensor signal will collecting), be used for controlling the front and back driving of lower bell 3.
Claims (10)
1. a chemical vapor deposition stove, comprising:
Body of heater (1);
Upper bell (2), is arranged on body of heater (1) top, with body of heater (1) sealing and dismountable being fixedly connected with; And
Lower bell (3), is arranged on body of heater (1) bottom, seals dismountable being fixedly connected with body of heater (1);
It is characterized in that, described chemical vapor deposition stove also comprises:
Lower furnace cover lifting mechanism (5), be fixedly connected with lower bell (3) so that lower bell (3) after throwing off fixing body of heater (1), drive lower bell (3) landing with carry out bottom discharge and drive lower bell (3) rising after discharging with body of heater (1) combination.
2. chemical vapor deposition stove according to claim 1, is characterized in that,
Body of heater (1) comprises body of heater shell (11), water-cooling sandwich (12), thermal insulation layer (13), thermal insulation layer set casing (14);
Upper bell (2) comprises bell shell (22), water-cooling sandwich (23), thermal insulation layer (24), thermal insulation layer set casing (25); And
Lower bell (3) comprises lower bell shell (31), water-cooling sandwich (32), thermal insulation layer (33), thermal insulation layer set casing (34).
3. chemical vapor deposition stove according to claim 1, is characterized in that, lower bell (3) adopts hydraulic clamping device (7) to realize with dismountable being fixedly connected with between body of heater (1).
4. chemical vapor deposition stove according to claim 1, is characterized in that,
Described chemical vapor deposition stove also comprises bracing frame (4), and bracing frame (4) comprising:
Two side stands (41), are arranged at body of heater (1) two opposite sides, and each side stand (41) comprising: a crossbeam (411): and at least two columns (412), be fixedly connected on this crossbeam (411); And
Two tie-beams (42), are connected between the crossbeam (411) of two side stands (41);
Wherein, the crossbeam (411) of two side stands (41) and two tie-beams (42) form upper bracket;
Lower furnace cover lifting mechanism (5) comprising:
Driving mechanism (51), is arranged at described upper bracket;
At least two ball screws (52);
At least two guide blocks (53), each guide block (53) wears corresponding ball screw (52) and is fixedly connected with to form and be in transmission connection with ball screw (52) with corresponding feed screw nut, and each guide block (53) is fixedly connected on lower bell (3);
At least two cross reversers (54), are arranged on described upper bracket, connect one end of driving mechanism (51) and corresponding ball screw (52);
At least two anchors (55), are fixedly connected on the other end of corresponding ball screw (52);
And
At least two connecting rods (56), are arranged on described upper bracket and connect driving mechanism (51), corresponding cross reverser (54), and corresponding ball screw (52).
5. chemical vapor deposition stove according to claim 4, is characterized in that ，Xia furnace cover lifting mechanism (5) also comprises:
Step-down gear (57), is connected with driving mechanism (51), to adjust the output of driving mechanism (51); And
Reverser (59), is arranged on described upper bracket and with step-down gear (57) and is connected, and connects with corresponding connecting rod (56).
6. chemical vapor deposition stove according to claim 4, is characterized in that ，Xia furnace cover lifting mechanism (5) also comprises guiding mechanism (58), and guiding mechanism (58) comprising:
Guide rail (581), is arranged on corresponding column (412); And
Slide block (582), is arranged on that corresponding guide rail (581) is upper and the guide rail (581) corresponding with this is slidably connected and is fixedly connected with corresponding guide block (53).
7. chemical vapor deposition stove according to claim 4, it is characterized in that, body of heater (1) is divided into He Xia heating zone, heating zone, so that control the temperature of different sites, each heating zone is provided with three well heaters (15) of three well heaters (15) ，Ge heating zone and arranges with decile 360 degree circles.
8. chemical vapor deposition stove according to claim 7, it is characterized in that, each well heater (15) connects two water cooled electrodes (16), and water cooled electrode (16) is water-cooled copper electrode, corresponding two water cooled electrodes (16) are connected in transformer, and transformer is arranged on described upper bracket.
9. chemical vapor deposition stove according to claim 1, is characterized in that, chemical vapor deposition stove also comprises:
Before and after delivery device (6), be arranged at lower bell (3) under, the lower bell (3) that front and back delivery device (6) Shi Xia furnace cover lifting mechanism (5) drive to decline falls thereon and moves forward and backward to peripheral, to go out charging.
10. chemical vapor deposition stove according to claim 9, is characterized in that,
Lower bell (3) below is provided with a plurality of rollers (35) and clamping part (36);
Front and back delivery devices (6) comprising:
Base (61);
Guide rail (62), is arranged on base (61), and when the respective roller (35) of lower bell (3) below is fallen on guide rail (62), roller (35) is on guide rail (62) and along guide rail (62) rolling movement;
Driving mechanism (63), is arranged on base (61);
Ball screw (64), one end is connected in driving mechanism (63) and the other end is connected in base (61) rotationally; And
Feed screw nut (65), forms and is in transmission connection with ball screw (64), and when the roller (35) of bell (3) below is upper across respective track (62) instantly, the clamping part (36) of lower bell (3) below is combined with feed screw nut (65) buckle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320444384.7U CN203393225U (en) | 2013-07-24 | 2013-07-24 | Chemical vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320444384.7U CN203393225U (en) | 2013-07-24 | 2013-07-24 | Chemical vapor deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203393225U true CN203393225U (en) | 2014-01-15 |
Family
ID=49904771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320444384.7U Expired - Lifetime CN203393225U (en) | 2013-07-24 | 2013-07-24 | Chemical vapor deposition furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN203393225U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104342631A (en) * | 2013-07-24 | 2015-02-11 | 广东先导稀材股份有限公司 | Chemical vapor deposition furnace |
| CN115010134A (en) * | 2022-06-21 | 2022-09-06 | 浙江六方碳素科技有限公司 | Device for preparing silicon carbide sponge by chemical vapor deposition |
-
2013
- 2013-07-24 CN CN201320444384.7U patent/CN203393225U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104342631A (en) * | 2013-07-24 | 2015-02-11 | 广东先导稀材股份有限公司 | Chemical vapor deposition furnace |
| CN104342631B (en) * | 2013-07-24 | 2016-12-07 | 广东先导稀材股份有限公司 | Chemical vapor deposition stove |
| CN115010134A (en) * | 2022-06-21 | 2022-09-06 | 浙江六方碳素科技有限公司 | Device for preparing silicon carbide sponge by chemical vapor deposition |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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