CN203373420U - Vacuum pumping device of vacuum coating equipment with heating structure - Google Patents

Vacuum pumping device of vacuum coating equipment with heating structure Download PDF

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Publication number
CN203373420U
CN203373420U CN201320299148.0U CN201320299148U CN203373420U CN 203373420 U CN203373420 U CN 203373420U CN 201320299148 U CN201320299148 U CN 201320299148U CN 203373420 U CN203373420 U CN 203373420U
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China
Prior art keywords
self
temperature
vacuum
limiting
vacuum pumping
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Expired - Lifetime
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CN201320299148.0U
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Chinese (zh)
Inventor
郑芳平
张迅
易伟华
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WG Tech Jiangxi Co Ltd
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JIANGXI WOGE OPTOELECTRONIC TECHNOLOGY Co Ltd
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Abstract

The utility model relates to a vacuum pumping device of vacuum coating equipment with a heating structure. The vacuum pumping device of the vacuum coating equipment comprises a self-temperature-limiting heat tracing band, wherein the self-temperature-limiting heat tracing band is fitted at the end part of the vacuum pumping device of the vacuum coating equipment; a heating resistor is arranged on the self-temperature-limiting heat tracing band. The self-temperature-limiting heat tracing band is wound at the end part of an air exhausting pipeline, so that the self-temperature-limiting heat tracing band is electrified and emits heat; then the heat is transmitted to the end part of the air exhausting pipeline, contacted with the self-temperature-limiting heat tracing band, of the vacuum pumping device, so that temperatures in an inlet chamber and an outlet chamber at the end part of the air exhausting pipeline of the vacuum pumping device are increased, moisture exhausted in a vacuum pumping and air releasing process can not freeze the inlet chamber and the outlet chamber at the end part of the air exhausting pipeline of the vacuum pumping device, and vacuum pumping efficiency is improved; meanwhile, power consumed by the self-temperature-limiting heat tracing band is generally several watts to dozens of watts, consumed power is low, and electrical energy can be saved; after resistance of the heated self-temperature-limiting heat tracing band is maximized, and a constant appropriate temperature can be maintained, so that heating stability is enhanced, and safety of the vacuum pumping device is guaranteed.

Description

Vacuum plating unit vacuum extractor with heating arrangements
Technical field
The utility model relates to technical field of vacuum plating, particularly relates to the vacuum plating unit vacuum extractor with heating arrangements of vacuum plating.
Background technology
Vacuum plating refers under vacuum environment, and certain metal or metallic compound are deposited to material surface with the form of gas phase, forms conducting film.In the vacuum plating process, inlet chamber owing to often contacting with atmosphere, in repeatedly vacuumizing the process of amplifying gas, icing phenomenon easily occurs with downstream chamber in the pump-line end, have influence on the efficiency vacuumized, and has even stopped up pump-line.
General, the heater strip that is covered with similar plated film main chamber in inlet chamber and the downstream chamber of vacuum plating, in the vacuum plating process, start the heating function of heater strip, make heater strip self produce heat, and transfer heat to inlet chamber and the downstream chamber contacted with heater strip, the temperature of inlet chamber and downstream chamber is raise, vacuumize amplify gas process institute expellant gas can not make inlet chamber and the Yin Wendu of downstream chamber low and icing, improved the efficiency vacuumized.
But, at inlet chamber and downstream chamber, heater strip being set, the power of heater strip is higher, can cause the waste of the energy; And the heater strip heater voltage is higher, and potential safety hazard is arranged.
Summary of the invention
Based on this, be necessary higher for existing heater strip power, waste energy, have the problem of potential safety hazard that a kind of vacuum plating unit vacuum extractor with heating arrangements is provided.
A kind of vacuum plating unit vacuum extractor with heating arrangements, comprise self-limiting heating cable, and described self-limiting heating cable fits in the pump-line end of vacuum plating unit vacuum extractor; Described self-limiting heating cable is provided with heating resistor.
In embodiment, described self-limiting heating cable evenly fits in the pump-line end of described vacuum extractor therein.
Therein in embodiment, the described self-limiting heating cable one deck of evenly fitting in the pump-line end of described vacuum extractor.
In embodiment, described self-limiting heating cable is wound in the pump-line end of described vacuum extractor therein.
In embodiment, described self-limiting heating cable is glued at the pump-line end of described vacuum extractor therein.
In embodiment, described self-limiting heating cable is sticked in the pump-line end of described vacuum extractor therein.
In embodiment, the Heating temperature of described self-limiting heating cable is 60 ℃~80 ℃ therein.
In embodiment, the power of described self-limiting heating cable is 8W/m~65W/m therein.
In embodiment, the power of described self-limiting heating cable is 35W/m therein.
The above-mentioned vacuum plating unit vacuum extractor with heating arrangements, be wound around self-limiting heating cable by the pump-line end at the vacuum plating unit vacuum extractor, make the self-limiting heating cable heating power, transfer heat to again the pump-line end of the vacuum extractor of contact with it, the temperature of pump-line end in its inlet chamber and downstream chamber of vacuum extractor raise, make to vacuumize and amplify inlet chamber and the downstream chamber that the aqueous vapor of discharging in the gas process can freezing vacuum extractor pump-line end, thereby improved, vacuumize efficiency; Simultaneously, the power that self-limiting heating cable consumes is generally between several watts to tens watts, and consumed power is little, but the conservation of power energy; Self-limiting heating cable after heating, after resistance reaches maximum value, can keep suitable temperature-resistant, has increased the stability of heating, has guaranteed the security of vacuum extractor.
The accompanying drawing explanation
Fig. 1 is for originally having the structural representation of the vacuum plating unit vacuum extractor of heating arrangements;
Fig. 2 is for originally having the vacuum plating unit vacuum extractor pump-line structural representation of heating arrangements.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described further.
As shown in Figure 1, a kind of vacuum plating unit vacuum extractor with heating arrangements, comprise self-limiting heating cable 110, and described self-limiting heating cable 110 fits in pump-line 120 ends of vacuum plating unit vacuum extractor 100; Described self-limiting heating cable 110 is provided with heating resistor.
Self-limiting heating cable 110 can be heat energy by electric energy conversion, by direct or indirect heat exchange, prevent from being accompanied hot equipment heat too lost, and adopt temperature to control, reach the temperature of following the tracks of and control medium in the hot equipment of companion, make it to maintain on a reasonable and economic level.After self-limiting heating cable 110 switches on power, electric current forms loop through the ptc material conducted electricity to another core by the single line core.Electric energy heats up electro-conductive material, and its resistance increases immediately, and after core band temperature rises to certain value, resistance is large, and to the degree of almost blocking electric current, its temperature no longer raises, and the system that is heated that meanwhile self-limiting heating cable 110 is lower to temperature is conducted heat.
By the pump-line 120 end laminating self-limiting heating cables 110 at vacuum plating unit vacuum extractor 100, make self-limiting heating cable 110 heating powers, transfer heat to again pump-line 120 ends of the vacuum extractor 100 of contact with it, the temperature of pump-line 120 ends in its inlet chamber and downstream chamber of vacuum extractor 100 raise, make to vacuumize and amplify inlet chamber and the downstream chamber that the cold air of discharging in the gas process can freezing vacuum extractor 100 pump-line 120 ends, thereby improved, vacuumize efficiency.Simultaneously, if prevent that vacuum extractor 100 pump-line 120 ends from freezing, generally, the temperature of coating chamber is raise and needs to consume the power of 15KW; And the power consumed at pump-line 120 ends laminatings self-limiting heating cables 110 is generally between several watts to tens watts, consumed power is little, but the conservation of power energy; Self-limiting heating cable 110 after heating reaches maximum because of resistance, and the temperature of self-limiting heating cable 110 no longer changes, and can keep suitable temperature-resistant, has increased the stability of heating, has guaranteed the security of vacuum extractor 100.
Therein in embodiment, described self-limiting heating cable 110 evenly fits in pump-line 120 ends of described vacuum extractor 100, can guarantee the homogeneity that vacuum extractor 100 pump-lines 120 of vacuum plating unit are heated, avoid the situation that occurs that the bleeding point place of not being heated freezes, impact vacuumizes efficiency.Certainly, self-limiting heating cable 110 can transfer heat to pump-line 120 and the pump-line 120 of vacuum extractor 100 self can locate heat diffusion peripheral position to being heated, so described self-limiting heating cable 110 uniform winding in pump-line 120 ends of described vacuum extractor 100 not necessarily.
As shown in Figure 2, therein in embodiment, described self-limiting heating cable 110 one deck of evenly fitting in pump-line 120 ends of described vacuum extractor 100.At surface uniform laminating one deck self-limiting heating cable 110, can avoid repeating being wound around self-limiting heating cable 110 may cause be heated inhomogeneous; And laminating one deck self-limiting heating cable 110 can reduce the consumption of self-limiting heating cable 110, can, when guaranteeing vacuum extractor 100 normal operations, reduce the consumption of power.Certainly, the pump-line 120 of vacuum extractor 100 can be by heat diffusion, so described self-limiting heating cable 110 at pump-line 120 end uniform winding one decks of described vacuum extractor 100 not necessarily.
In embodiment, described self-limiting heating cable 110 is wound in pump-line 120 ends of described vacuum extractor 100 therein.Adopt the mode be wound around self-limiting heating cable 110 to be fitted in to pump-line 120 ends of vacuum extractor 100, fixed form is simple, and, can guarantee that self-limiting heating cable 110 is better with the laminating effect of pump-line 120 ends, make thermal conduction effect better.
In embodiment, described self-limiting heating cable 110 is glued at pump-line 120 ends of described vacuum extractor 100 therein.Adopt the mode of gummed self-limiting heating cable 110 to be fitted in to pump-line 120 ends of vacuum extractor 100, can keep self-limiting heating cable 110 to be fixed in somewhere and not move, guaranteed the stability of heating region.
In embodiment, described self-limiting heating cable 110 is sticked in pump-line 120 ends of described vacuum extractor 100 therein.Can preset in pump-line 120 ends the engaging position, self-limiting heating cable 110 is sticked in to default engaging position to be got final product, can be also after self-limiting heating cable 110 fits in pump-line 120 ends, then by self-limiting heating cable 110 fixing or whole engaging and engage cover separately.Certainly, can also be other laminating type, as long as self-limiting heating cable 110 evenly can be fitted in to pump-line 120 ends.
In embodiment, the Heating temperature of described self-limiting heating cable 110 is 60 ℃~80 ℃ therein.Because self-limiting heating cable 110 is wrapped in pump-line 120 peripheries, end, contact and can dissipate the part heat with atmosphere on the one hand, temperature due to self-limiting heating cable 110 need to pass to pump-line 120 ends by heat conducting mode on the one hand, and the heat that pump-line 120 ends absorb can reduce; And temperature low effect poor, the temperature height can waste electric power, and touch because of carelessness easy scald, so the Heating temperature of self-limiting heating cable 110 is 60 ℃~80 ℃ can keep anti-freeze effect preferably, and can not waste electric power, can when mistake is touched, not scald; And the temperature of 70 ℃ is the most suitable.Certainly, if other temperature also can realize anti-freeze.
In embodiment, the power of described self-limiting heating cable 110 is 8W/m~65W/m therein.The power of 8W/m~65W/m can guarantee self-limiting heating cable 110 evolution of heat in the short period of time, reaches 60 ℃~80 ℃, and remains on this temperature.Heating power is little, has saved electric power energy.
In embodiment, the power of described self-limiting heating cable 110 is 35W/m therein.35W/m can guarantee the heating time faster, less energy intensive, save energy.
Described self-limiting heating cable 110 by with the 24V power connection, without high pressure, guaranteed the safety of circuit; The Heating temperature of self-limiting heating cable 110 is that 60 ℃~80 ℃, optimum are 70 ℃, all less on the impact of human body and environment; Have temperature evenly, can not be overheated, saves energy, intensification be quick, safe and reliable, the advantage such as free from environmental pollution.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.

Claims (9)

1. the vacuum plating unit vacuum extractor with heating arrangements, is characterized in that, comprises self-limiting heating cable, and described self-limiting heating cable fits in the pump-line end of vacuum plating unit vacuum extractor; Described self-limiting heating cable is provided with heating resistor.
2. the vacuum plating unit vacuum extractor with heating arrangements according to claim 1, is characterized in that, described self-limiting heating cable evenly fits in the pump-line end of described vacuum extractor.
3. the vacuum plating unit vacuum extractor with heating arrangements according to claim 2, is characterized in that, the described self-limiting heating cable one deck of evenly fitting in the pump-line end of described vacuum extractor.
4. according to the described vacuum plating unit vacuum extractor with heating arrangements of claim 1~3 any one, it is characterized in that, described self-limiting heating cable is wound in the pump-line end of described vacuum extractor.
5. according to the described vacuum plating unit vacuum extractor with heating arrangements of claim 1~3 any one, it is characterized in that, described self-limiting heating cable is glued at the pump-line end of described vacuum extractor.
6. according to the described vacuum plating unit vacuum extractor with heating arrangements of claim 1~3 any one, it is characterized in that, described self-limiting heating cable is sticked in the pump-line end of described vacuum extractor.
7. the vacuum plating unit vacuum extractor with heating arrangements according to claim 3, is characterized in that, the Heating temperature of described self-limiting heating cable is 60 ℃~80 ℃.
8. the vacuum plating unit vacuum extractor with heating arrangements according to claim 3, is characterized in that, the power of described self-limiting heating cable is 8W/m~65W/m.
9. the vacuum plating unit vacuum extractor with heating arrangements according to claim 8, is characterized in that, the power of described self-limiting heating cable is 35W/m.
CN201320299148.0U 2013-05-28 2013-05-28 Vacuum pumping device of vacuum coating equipment with heating structure Expired - Lifetime CN203373420U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320299148.0U CN203373420U (en) 2013-05-28 2013-05-28 Vacuum pumping device of vacuum coating equipment with heating structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320299148.0U CN203373420U (en) 2013-05-28 2013-05-28 Vacuum pumping device of vacuum coating equipment with heating structure

Publications (1)

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CN203373420U true CN203373420U (en) 2014-01-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107043909A (en) * 2017-04-13 2017-08-15 江阴市光科真空机械有限公司 Vacuumize the operating method that the optics of efficiency high is vacuumized with vacuum cavity and to it
CN114196933A (en) * 2021-12-10 2022-03-18 佛山市佛欣真空技术有限公司 Air exhaust opening structure for vacuum coating machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107043909A (en) * 2017-04-13 2017-08-15 江阴市光科真空机械有限公司 Vacuumize the operating method that the optics of efficiency high is vacuumized with vacuum cavity and to it
CN114196933A (en) * 2021-12-10 2022-03-18 佛山市佛欣真空技术有限公司 Air exhaust opening structure for vacuum coating machine

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C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: JIANGXI WG PHOTOELECTRIC CO., LTD.

Free format text: FORMER NAME: JIANGXI WG PHOTOELECTRIC TECHNOLOGY CO., LTD.

CP03 Change of name, title or address

Address after: 338004 Xinyu City, Jiangxi Province High - tech Industrial Development Zone Xicheng Avenue Vogg Industrial Park

Patentee after: WGTECH (JIANGXI) Co.,Ltd.

Address before: 338004 Xinyu City, Jiangxi Province High - tech Development Zone Xicheng Road Vogg Industrial Park

Patentee before: Jiangxi Woge Photoelectric Technology Co.,Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20140101