The MEMS microphone
Technical field
The utility model relates to the acoustic-electric product technical field, particularly a kind of MEMS microphone.
Background technology
Along with the develop rapidly of portable electronic terminal, as the microphone of the important acoustic element of portable electronic terminal, also constantly doing and improving.Be applied at present the MEMS(Micro-Electro-Mechanic System in portable electronic terminal) microphone mainly contains Bottom(sound hole and is positioned at bottom) type MEMS microphone and TOP(sound hole be positioned at top) type MEMS microphone.
As shown in Figure 1, Bottom type MEMS microphone comprises shell 20a and the base plate 10a be combined as a whole, the inboard of base plate 10a is provided with MEMS chip 30, the position of the inner chamber of the upper corresponding MEMS chip 30 of base plate 10a has sound hole 50a, and the outside of base plate 10a is provided with for being electrically connected to the pad 40 of MEMS chip 30 and end product circuit board.The rear operatic tunes of the MEMS microphone of this type is large, and the front operatic tunes is little, highly sensitive, and acoustical behavior is good.But the structural requirement to end product that it is installed is higher, needs the circuit board of end product also to be provided with perforate, for sound wave provides passage, therefore can not meet the topology requirement of some end products.
As shown in Figure 2, Top type MEMS microphone comprises shell 20b and the base plate 10b be combined as a whole, the inboard of base plate 10b is provided with MEMS chip 30, and the top of shell 20b is provided with sound hole 50b, and the outside of base plate 10b is provided with for being electrically connected to the pad 40 of MEMS chip 30 and end product circuit board.The front operatic tunes of the MEMS microphone of this type is large, and the rear operatic tunes is little, and its acoustical behavior is poorer than Bottom type MEMS microphone, but its structural requirement to end product need to not offered channel of acoustic wave the end of than on the circuit board of end product.
At present, some portable electronic terminal requires the MEMS microphone to have the acoustical behavior of Bottom type MEMS microphone, above-mentioned two kinds of MEMS microphones require again the MEMS microphone consistent with combination and the Top type MEMS microphone of end product, therefore all can't meet the requirement of this kind of portable electronic terminal.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of MEMS microphone, this MEMS microphone had both had the acoustical behavior of Bottom type MEMS microphone, the mounting means that there is again Top type MEMS microphone, can meet the requirement of the high acoustical behavior of portable electronic terminal, meet again its requirement easy to assembly simultaneously.
For solving the problems of the technologies described above, the technical solution of the utility model is:
A kind of MEMS microphone comprises base plate and be located in the MEMS chip on described base plate that the side that described base plate is provided with described MEMS chip is covered with shell, and on described base plate, the position of corresponding described MEMS chip inner chamber is provided with the sound hole; The outside of described cover top portion is provided with first circuit board, and described first circuit board is provided with for being electrically connected to the pad of described MEMS microphone and end product circuit board away from a side of described shell; The top of described shell is provided with perforate, in described shell, is provided with electrical connector, and described electrical connector is electrically connected to described base plate and described first circuit board through described perforate.
Wherein, between described electrical connection module and described shell, leave for being communicated with the space of the described electrical connector two rear flank operatic tunes.
Wherein, described electrical connector is provided with for being communicated with the through hole of the described electrical connector two rear flank operatic tunes.
As a kind of execution mode, described electrical connector is second circuit board, and the two ends of described second circuit board are electrically connected to described base plate and described first circuit board respectively.
As another kind of execution mode, described electrical connector is the first extension that described base plate stretches out to described first circuit board, and the end of described the first extension is electrically connected to described first circuit board.
As another execution mode, described electrical connector is the second extension that described first circuit board stretches out to described base plate, and the end of described the second extension is electrically connected to described base plate.
After having adopted technique scheme, the beneficial effects of the utility model are:
Because the outside of the cover top portion of the utility model MEMS microphone is provided with first circuit board, first circuit board is provided with for being electrically connected to the pad of MEMS microphone and end product circuit board away from a side of shell; The top of shell is provided with perforate, is provided with electrical connector in shell, and electrical connector is electrically connected to base plate and first circuit board through perforate.The pad be arranged on base plate in existing Bottom type MEMS microphone has been moved on on the first circuit board that is positioned at cover top portion, and be provided with perforate on shell, be provided with electrical connector in shell, by electrical connector, the base plate of MEMS microphone is electrically connected to pad, when the utility model MEMS microphone is installed, the circuit board of pad and end product is welded, now the sound hole of MEMS microphone is positioned at the end of MEMS microphone away from pad, so need on the circuit board of terminal, perforate not provide channel of acoustic wave, therefore consistent with the mounting means of Top type MEMS microphone, and structure and the acoustical behavior of Bottom type MEMS microphone have been retained, facilitated and being connected of end product, and met the requirement of the high acoustical behavior of end product.
Visible, the utility model MEMS microphone solved in the prior art MEMS microphone be difficult to meet simultaneously conveniently install, the high technical problem of acoustical behavior again.The utility model MEMS microphone is convenient to be connected with end product, has again higher acoustical behavior simultaneously.
The accompanying drawing explanation
Fig. 1 is the structural representation of Bottom type MEMS microphone in background technology;
Fig. 2 is the structural representation of Top type MEMS microphone in background technology;
Fig. 3 is the structural representation of the utility model MEMS microphone embodiment mono-;
Fig. 4 is the vertical view of Fig. 3;
Fig. 5 is the upward view of Fig. 3;
Fig. 6 is the A-A line cutaway view of Fig. 3;
Fig. 7 is the structural representation of the utility model MEMS microphone embodiment bis-;
Fig. 8 is the structural representation of the utility model MEMS microphone embodiment tri-;
In figure: 10a, base plate, 10b, base plate, 10c, base plate, 10d, base plate, the 12, first extension, 20a, shell, 20b, shell, 20c, shell, 30, the MEMS chip, 40, pad, 50a, sound hole, 50b, sound hole, 50c, sound hole, 60a, first circuit board, 60b, first circuit board, 62, the second extension, 70, second circuit board, 80, space.
Embodiment
Below in conjunction with drawings and Examples, further set forth the utility model.
Embodiment mono-:
As shown in Fig. 3, Fig. 4 and Fig. 5 are common, a kind of MEMS microphone, for rectangular configuration, comprise base plate 10c and be located in the MEMS chip 30 on base plate 10c, the side that base plate 10c is provided with MEMS chip 30 is covered with shell 20c, the tubular structure that shell 20c is an end opening, and the openend of shell 20c combines with base plate 10c, MEMS chip 30 is electrically connected to base plate 10c by two gold threads, and the position of upper corresponding MEMS chip 30 inner chambers of base plate 10c is provided with sound hole 50c.The outside at shell 20c top is provided with first circuit board 60a, and first circuit board 60a is provided with for being electrically connected to the pad 40 of MEMS microphone and end product circuit board away from the side of shell 20c.The position that MEMS chip 30 is avoided at the top of shell 20c is provided with perforate, be provided with electrical connector in shell 20c, electrical connector is second circuit board 70, one end of second circuit board 70 is fixed on base plate 10c, and be electrically connected to base plate 10c, the other end of second circuit board 70 is fixed through the perforate and the first circuit board 60a that are located at shell 20c top, and is electrically connected to first circuit board 60a.
As shown in Figure 6, leaving 80, space, space 80 between second circuit board 70 and shell 20c can be communicated with the rear operatic tunes of second circuit board 70 both sides, has guaranteed that the rear operatic tunes still has larger volume, thereby guarantees that the acoustical behavior of MEMS microphone is constant.Fig. 6 only shows a kind of structure of electrical connector, in practical application, electrical connector can have the various structures form, as offered through hole or offer groove etc. in the end of electrical connector in the centre position at electrical connector, as long as the rear operatic tunes of electrical connector both sides can be communicated with.
As shown in Figure 3, shell 20c is metal shell, and metal shell has good shield effectiveness, can reduce interference, promotes the acoustical behavior of MEMS microphone.
As shown in Figure 3, base plate 10c and first circuit board 60a are PCB(Printed Circuit Board), second circuit board 70 is PCB or FPCB(Flexible Printed Circuit Board).
As shown in Figure 3, be equipped with circuit structure on base plate 10c, first circuit board 60a and second circuit board 70, as for concrete circuit structure, be not invention main points of the present utility model, and circuit those skilled in the art of this kind of simple electric connection mode can design multiple easily, therefore no longer describe in detail inferior.
As shown in Figure 3, the operation principle of the present embodiment MEMS microphone is as follows:
Sound wave enters through sound hole 50c, and act on the vibrating diaphragm of MEMS chip 30, vibrating diaphragm vibrates along with the power of sound wave, MEMS chip 30 is converted to the vibration of the different amplitudes of vibrating diaphragm the signal of telecommunication of variation, the signal of telecommunication is transferred to end product by gold thread, base plate 10c, second circuit board 70, first circuit board 60a and pad 40, thereby completes the conversion of acoustic-electric.After the utility model MEMS microphone is installed on end product, its sound hole 50c is away from the circuit board of end product, end product need to perforate not provide channel of acoustic wave for it on circuit board, therefore its mounting means is consistent with the mounting means of Top type MEMS microphone of the prior art, can be connected with end product very easily; Because the utility model MEMS microphone has the little design feature of large, the front operatic tunes of the rear operatic tunes, therefore have equally the acoustical behavior of Bottom type MEMS microphone, have the advantages such as sensitivity height again, acoustical behavior is high.Thereby the utility model MEMS microphone has the acoustical behavior technical characterstic high, easy for installation of portable electronic terminal requirement.
Embodiment bis-:
As shown in Figure 7, present embodiment and embodiment mono-are basic identical, and its difference is:
Electrical connector is that the first extension 12, the first extensions 12 of stretching out to first circuit board 60a of base plate 10d are perpendicular with base plate 10d, and the end of the first extension 12 and first circuit board 60a are fixed as one, and are electrically connected to first circuit board 60a.
Present embodiment is compared with embodiment mono-, and its structure is more simple, and processing technology thereof is easy.
Embodiment tri-:
As shown in Figure 8, present embodiment and embodiment mono-are basic identical, and its difference is:
Electrical connector is that the second extension 62, the second extensions 62 of stretching out to base plate 10c of first circuit board 60b are vertical with first circuit board 60b, and the end of the second extension 62 and base plate 10c are fixed as one, and are electrically connected to base plate 10c.
Present embodiment is compared with embodiment mono-, and its structure is more simple, and processing technology thereof is easy.
Base plate and second circuit board in the utility model, second circuit board and first circuit board, base plate and fixed form between first circuit board can adopt welding, bonding, joggle or buckle to be connected etc.
" first circuit board " named in the utility model and " second circuit board " are just the difference technical characterictic, do not represent erection sequence between the two and job order etc.
" the first extension " named in the utility model and " the second extension " are just the difference technical characterictic, do not represent erection sequence between the two and job order etc.
The technical scheme that the utility model is converted to Top type MEMS microphone by Bottom type MEMS microphone not merely is applicable to above-described embodiment, above-described embodiment just describes in detail for the MEMS microphone of rectangle, in practical application, this technical scheme is equally applicable in the MEMS microphone of circle, track type or round rectangle, those skilled in the art do not need to pay creative work and just the technical program can be transplanted in the MEMS microphone of above-mentioned shape, therefore be not described in detail in this.
The utility model is not limited to above-mentioned concrete execution mode, and those of ordinary skill in the art is from above-mentioned design, and without performing creative labour, all conversion of having done, within all dropping on protection range of the present utility model.