CN203338332U - Capacitive touch screen - Google Patents
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- CN203338332U CN203338332U CN201320368399XU CN201320368399U CN203338332U CN 203338332 U CN203338332 U CN 203338332U CN 201320368399X U CN201320368399X U CN 201320368399XU CN 201320368399 U CN201320368399 U CN 201320368399U CN 203338332 U CN203338332 U CN 203338332U
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Abstract
The utility model belongs to the field of displaying technology, and relates to a capacitive touch screen. The capacitive touch screen comprises a substrate and a sensor electrode arranged on the substrate, wherein the sensor electrode comprises multiple lines of parallel first electrode sets and multiple columns of parallel second electrode sets, each first electrode set comprises a plurality of first electrodes electrically connected in sequence, each second electrode set comprises a plurality of second electrodes electrically connected in sequence, the first electrodes and/or the second electrodes comprise peripheral electrodes distributed at the peripheries and central electrodes electrically separated from the peripheral electrodes, and the adjacent peripheral electrodes in the same line/column are mutually and electrically connected. The capacitive touch screen has the advantages that the coupling between the sensor electrode of the capacitive touch screen and a public electrode is smaller, the RC load is lowered, the sensor electrode is charged more quickly, and touch sensing flexibility of the touch screen is guaranteed.
Description
Technical field
The utility model belongs to the display technique field, relates to a kind of capacitive touch screen.
Background technology
Touch-screen is current up-to-date information input equipment, it can realize man-machine interaction simply, conveniently, naturally, for people provide a kind of brand-new multimedia human-computer interaction method, touch because it has advantages such as being quick on the draw, supporting multiple point touching, greatly met people's vision and the enjoyment of sense of touch.
According to the difference of principle of work and transmission medium, touch-screen can be divided into resistance-type, condenser type, surface acoustic wave type and infrared type, and wherein, antijamming capability high with the capacitive touch screen accuracy is widely adopted by force.
, for slimming and the lightweight that realizes touch-screen, occurred touch panel function and the integrated method of liquid crystal panel simultaneously, specifically comprised " In-cell " method and " On-cell " method." In-cell " method is that touch panel function is embedded into to the method in pixel region, and " On-cell " method is that touch panel function is embedded into to the method between color membrane substrates and Polarizer.Restriction in view of current semiconductor fabrication process, pixel region in very difficult realization " In-cell " method on array base palte is embedded in the processing procedure of touch sensor, also be difficult to solve pixel region and be embedded in the problem that the effective display area that causes after touch sensor reduces, be difficult to guarantee yield rate and display performance, therefore not yet practical.And " On-cell " method is more ripe due to the processing procedure that forms simple sensor electrode pattern between color membrane substrates and Polarizer, nor the problem that can cause the effective display area in pixel region to reduce, easily guarantee yield rate and display performance, therefore obtained extensive employing.
According to the difference that drives electric field, liquid crystal display (TFT-LCD) can be divided into horizontal electric field type and the large class of vertical electric field type two.Wherein, vertical electric field type mainly comprises vertical nematic (Vertical Alignment is called for short VA) and twisted nematic (Twisted Nematic is called for short TN) two classes.Be illustrated in figure 1 the structural representation of vertical electric field type liquid crystal display, it comprises color membrane substrates 1(CF), array base palte 2(TFT) and color membrane substrates 1 and array base palte 2 between liquid crystal 3, be provided with public electrode 11(COM ITO at color membrane substrates 1 near liquid crystal 3 sides), be provided with pixel electrode 21(PXL ITO in array base palte), public electrode 11 forms vertical electric field to drive liquid crystal 3 to carry out the image demonstration with pixel electrode 21.
In " On-cell " capacitive touch screen that adopts the vertical electric field type liquid crystal display, also be provided with transparent sensor (Sensor) electrode on color membrane substrates, realize touch sensible by sensor electrode.As shown in Figure 2,3, sensor electrode 4 comprises parallel, spaced the first electrode group 41 of multirow, and parallel, spaced the second electrode group 42, the first electrode groups 41 of multiple row, the second electrode group 42 comprise the rhombus electrode be electrically connected in series successively.Wherein, each Rhombus in the first electrode group 41 is horizontal orientation (being left and right directions or the horizontal direction in Fig. 2) very, each Rhombus in the second electrode group 42 very machine-direction oriented (being above-below direction or the vertical direction in Fig. 2), in the first electrode group 41, in each first electrode and the second electrode group 42, the electrical connections between each second electrode is by insulation course 6 insulation isolation and partly overlap on the orthogonal projection direction, and overlapping region forms node capacitor.
" On-cell " capacitive touch screen structure of the vertical electric field type liquid crystal display based on above-mentioned, in preparation process, first on color membrane substrates, successively deposit double layer of metal, wherein layer of metal forms the bridging part be electrically connected between sensor electrode 4 and row/column sensor electrode, and another layer of metal forms the bridging part be electrically connected between the column/row sensor electrode.As shown in Figure 3,4, the electrode in the second electrode group 42 is electrically connected to the second conducting portion 425 than small vias 426 by being opened in a plurality of in insulation course 6.
Prove after tested, directly make conventional touch sensing panel (Touch Sensor Panel in the vertical electric field type liquid crystal display, be called for short TSP), coupling between public electrode in sensor electrode and liquid crystal display is very large,, the whole useful area of single-sensor electrode is a polar plate area of electric capacity, cause RC load (loading) overweight, further cause sensor electrode the bad of undercharge may occur when sampling, affect the touch sensible sensitivity of touch-screen.
The utility model content
Technical problem to be solved in the utility model is for above shortcomings in prior art, a kind of capacitive touch screen is provided, sensor electrode and the coupling between public electrode of this capacitive touch screen are less, reduced the RC load, make the sensor electrode charging faster, guaranteed the touch sensible sensitivity of touch-screen.
The technical scheme that solution the utility model technical matters adopts is this capacitive touch screen, comprise substrate and be arranged at the sensor electrode on described substrate, described sensor electrode comprises the first electrode group that multirow is arranged in parallel, the second electrode group that multiple row is arranged in parallel, described the first electrode group comprises a plurality of the first electrodes that are electrically connected to successively, described the second electrode group comprises a plurality of the second electrodes that are electrically connected to successively, described the first electrode and/or described the second electrode comprise be distributed in peripheral peripheral electrode and with the central electrode of described peripheral electrode electrical isolation, described peripheral electrode adjacent in same row/column is electrically connected to mutually.
Preferably, offer the first isolated groove of sealing in described the first electrode, the inboard of described the first isolated groove is the first central electrode, and the described first isolated groove outside is the first peripheral electrode, and adjacent described the first peripheral electrode is electrically connected to mutually; And/or, offering the second isolated groove of sealing in described the second electrode, described the second isolated groove inboard is the second central electrode, and the described second isolated groove outside is the second peripheral electrode, and adjacent described the second peripheral electrode is electrically connected to mutually.
Preferably, the shape of described the first isolated groove is similar to the contour shape of described the first electrode, and the degree of depth of described the first isolated groove equals the thickness of described the first electrode; And/or the shape of described the second isolated groove is similar to the contour shape of described the second electrode, the degree of depth of described the second isolated groove equals the thickness of described the second electrode.
Preferably, described the first electrode is the rhombus that size is identical with described the second electrode, and described the first isolated groove is the rhombus groove, and the width of described the first isolated groove is 5-30 μ m; And/or described the second isolated groove is the rhombus groove, the width of described the second isolated groove is 5-30 μ m.
Preferably, the 30-70% of the area that the area of described the first central electrode is described the first electrode, the 30-70% of the area that the area of described the second central electrode is described the second electrode.
Further preferably, adjacent described the first peripheral electrode is provided with the first conducting portion between the water caltrop of described the first electrode group orientation, and adjacent described the first peripheral electrode is electrically connected to by described the first conducting portion; Adjacent described the second peripheral electrode is provided with the second conducting portion between the water caltrop of described the second electrode group orientation, adjacent described the second peripheral electrode is electrically connected to by described the second conducting portion, described the first conducting portion and described the second conducting portion are arranged on different layers, and the two part quadrature on the orthogonal projection direction is overlapping.
Preferably, be provided with insulation course between described the first conducting portion and described the second conducting portion, described the first conducting portion and described the first electrode, described the second electrode form with layer, described the second conducting portion is arranged at the below of described the first conducting portion, be provided with via hole in described insulation course, described the second conducting portion is electrically connected to by described via hole with described the second electrode;
Perhaps, described the second conducting portion and described the first electrode, described the second electrode form with layer, described the first conducting portion is arranged at the below of described the second conducting portion, in described insulation course, is provided with via hole, and described the first conducting portion is electrically connected to by described via hole with described the first electrode.
Preferably, described the first conducting portion is strip, the width of described the first conducting portion is less than adjacent described the second electrode along the spacing in described the second electrode group orientation, and the length of described the first conducting portion is more than or equal to adjacent described the first electrode along the spacing in described the first electrode group orientation;
Described the second conducting portion is strip, the width of described the second conducting portion is less than adjacent described the first electrode along the spacing in described the first electrode group orientation, and the length of described the second conducting portion is more than or equal to adjacent described the second electrode along the spacing in described the second electrode group orientation.
Preferably, described the first electrode, described the second electrode and adopt tin indium oxide to form with described the first conducting portion or described the second conducting portion that described the first electrode, described the second electrode arrange with layer;
Described the second conducting portion or described the first conducting portion that are arranged on different layers with described the first electrode, described the second electrode adopt at least one material in molybdenum, molybdenum niobium alloy, aluminium, aluminium neodymium alloy, titanium and copper to form.
In addition, described substrate with the opposing another side of described the first electrode group, described the second electrode group on also be provided with color rete.
The beneficial effects of the utility model are: in vertical electric field type liquid crystal display of the present utility model " On-cell " capacitive touch screen, owing to having adopted Floating central electrode in sensor electrode, make the coupling between sensor electrode and public electrode diminish, reduced the RC load, make the sensor electrode charging faster, antijamming capability is stronger, and touch sensitivity is higher, make display device when possessing higher display quality, also possessed good touch effect.
The accompanying drawing explanation
The structural representation that Fig. 1 is vertical electric field type liquid crystal display in prior art;
The vertical view that Fig. 2 is the sensor electrode of capacitive touch screen in Fig. 1;
The local amplification plan view of the sensor electrode that Fig. 3 is capacitive touch screen in Fig. 2;
Fig. 4 is the local amplification plan view that in Fig. 2, the capacitive touch screen signal is put up a bridge;
The structural representation that Fig. 5 is vertical electric field type liquid crystal display in the utility model embodiment 1;
The vertical view that Fig. 6 is the sensor electrode of capacitive touch screen in Fig. 5;
The local amplification plan view of the sensor electrode that Fig. 7 is capacitive touch screen in Fig. 6;
Fig. 8 is the local amplification plan view that in Fig. 6, the capacitive touch screen signal is put up a bridge;
Fig. 9 is A-A sectional elevation in Fig. 6;
Figure 10 is B-B sectional elevation in Fig. 6;
Figure 11 (Figure 11 A-Figure 11 F) is the cut-open view in the capacitive touch screen preparation process in Fig. 5;
In figure: the 1-color membrane substrates; The 11-public electrode; The color rete of 12-; The 2-array base palte; The 21-pixel electrode; The 3-liquid crystal; The 4-sensor electrode; 41-the first electrode group; 411-the first electrode; 412-the first isolated groove; 413-the first central electrode; 414-the first peripheral electrode; 415-the first conducting portion; 42-the second electrode group; 421-the second electrode; 422-the second isolated groove; 423-the second central electrode; 424-the second peripheral electrode; 425-the second conducting portion; The 426-via hole; The 5-substrate; The 6-insulation course; The 7-passivation layer.
Embodiment
For making those skilled in the art understand better the technical solution of the utility model, below in conjunction with the drawings and specific embodiments, the utility model capacitive touch screen is described in further detail.
A kind of capacitive touch screen, comprise substrate and be arranged at the sensor electrode on described substrate, described sensor electrode comprises the second electrode group that the first electrode group, multiple row that multirow is arranged in parallel are arranged in parallel, described the first electrode group comprises a plurality of the first electrodes that are electrically connected to successively, described the second electrode group comprises a plurality of the second electrodes that are electrically connected to successively, described the first electrode and/or described the second electrode comprise be distributed in peripheral peripheral electrode and with the central electrode of described peripheral electrode electrical isolation, described peripheral electrode adjacent in same row/column is electrically connected to mutually.
Embodiment 1:
As shown in Fig. 5-7, capacitive touch screen comprises substrate and is arranged at the sensor electrode 4 on substrate, sensor electrode 4 comprises the second electrode group 42 that the first electrode group 41, multiple row that multirow is arranged in parallel are arranged in parallel, the first electrode group 41 comprises that a plurality of the first electrode 411, the second electrode groups 42 that are electrically connected to successively comprise a plurality of the second electrodes 421 that are electrically connected to successively.In the present embodiment, the first electrode 411 and the second electrode 421 include be distributed in peripheral peripheral electrode and with the central electrode of peripheral electrode electrical isolation, peripheral electrode adjacent in same row/column is electrically connected to mutually.
As shown in Figure 7, offer the first isolated groove 412 of sealing in the first electrode 411, the inboard of the first isolated groove 412 is that first central electrode 413, the first isolated groove 412 outsides are the first peripheral electrode 414, and the first adjacent peripheral electrode 414 is electrically connected to mutually; Simultaneously, the second isolated groove 422, the second isolated groove 422 inboards that offer sealing in the second electrode 421 are that second central electrode 423, the second isolated groove 422 outsides are the second peripheral electrode 424, and the second adjacent peripheral electrode 424 is electrically connected to mutually.
In order to reach the purpose of peripheral electrode and the complete electrical isolation of central electrode, preferably, the shape of the first isolated groove 412 is similar to the contour shape of the first electrode 411, and the degree of depth of the first isolated groove 412 equals the thickness of the first electrode 411; The shape of the second isolated groove 422 is similar to the contour shape of the second electrode 421, and the degree of depth of the second isolated groove 422 equals the thickness of the second electrode 421.
In the present embodiment, the first electrode 411 is the rhombus that size is identical with the second electrode 421, and the first isolated groove 412 is the rhombus groove, and the width of the first isolated groove 412 is 5-30 μ m; The second isolated groove 422 is the rhombus groove, and the width of the second isolated groove 422 is 5-30 μ m.Isolated groove in this width range, can effective electric quarantine center electrode and peripheral electrode, is unlikely to again the visual effect of touch-screen is impacted.
Preferably, the 30-70% of the area that the area of the first central electrode 413 is the first electrode 411, for example: when outside the rhombus of the first peripheral electrode 414, the length of side is 5mm, the rhombus length of side of the first central electrode 413 is 2-3mm; The 30-70% of the area that the area of the second central electrode 423 is the second electrode 421.In above-mentioned Area Ratio scope, can effectively reduce the coupling between public electrode on sensor electrode 4 and color membrane substrates, thereby effectively reduce the RC load, be unlikely to again to affect the sensitivity of touch-screen.
As shown in Figure 7,8, in order to guarantee the electrical connection of each first electrode 411 between the first electrode group 41, the first adjacent peripheral electrode 414 is provided with the first conducting portion 415 along between the water caltrop of the first electrode group 41 orientations, and the first adjacent peripheral electrode 414 is electrically connected to by the first conducting portion 415; Accordingly, in order to guarantee the electrical connection of each second electrode 421 between the second electrode group 42, the second adjacent peripheral electrode 424 is provided with the second conducting portion 425 along between the water caltrop of the second electrode group 42 orientations, the second adjacent peripheral electrode 424 is electrically connected to by the second conducting portion 425, the first conducting portion 415 and the second conducting portion 425 are arranged on different layers, and the two part quadrature on the orthogonal projection direction is overlapping.
As shown in Figure 5, and simultaneously with reference between figure 7, the first conducting portions 415 and the second conducting portion 425, being provided with insulation course 6.In the present embodiment, the first conducting portion 415 and the first electrode 411, the second electrode 421 form with layer, the second conducting portion 425 is arranged at the below of the first conducting portion 415, is provided with via hole 426, the second conducting portions 425 in insulation course 6 and is electrically connected to by via hole 426 with the second electrode 421.
Preferably, insulation course 6 adopts at least one material in Si oxide, silicon nitride, hafnium oxide, silicon oxides of nitrogen, aluminum oxide to form.
Here it should be understood that the first conducting portion 415, the first peripheral electrode 414 and the second peripheral electrode 424 in Fig. 8 are set to have certain transparency in order can illustrate more highlightedly the position relationship of the first conducting portion 415 and the second conducting portion 425 in the present embodiment; For illustrating more highlightedly the electric connection structure of the second conducting portion 425 and the second electrode 421 in the present embodiment, also be set to have certain transparency in the signal of via hole 426; Simultaneously, it should be understood that, because the general transparent material (Si oxide, silicon nitride, hafnium oxide, silicon oxides of nitrogen, aluminum oxide) that adopts of insulation course 6 forms, observation to planimetric map can not cause obstruction, therefore the relative position relation of the second conducting portion 425 and the second electrode 421 omits the signal of insulation course 6 in the vertical view of Fig. 7, in order to can be shown better.
Wherein, the first conducting portion 415 is strip, the width of the first conducting portion 415 is less than adjacent the second electrode 421 along the spacing in the second electrode group 42 orientations, and the length of the first conducting portion 415 is more than or equal to adjacent the first electrode 411 along the spacing in the first electrode group 41 orientations; The second conducting portion 425 is strip, the width of the second conducting portion 425 is less than adjacent the first electrode 411 along the spacing in the first electrode group 41 orientations, and the length of the second conducting portion 425 is more than or equal to adjacent the second electrode 421 along the spacing in the second electrode group 42 orientations.
In the present embodiment, preferred, the first electrode 411, the second electrode 421 and the first conducting portion 415 employing tin indium oxides (Indium Tin Oxide the is called for short ITO) formation arranged with the first electrode, the same layer of the second electrode.Because tin indium oxide is transparent material, the sensor electrode 4 therefore formed, when guaranteeing touch function, can not hinder the Presentation Function of touch-screen.Certainly, the utility model does not limit and must adopt tin indium oxide to form sensor electrode, as long as meet conduction and can pass through the transparent material of semiconductor preparing process process conditions, all can be used as the material for preparing of sensor electrode, does not do restriction here.
Preferably, the second conducting portion 425 that is arranged on different layers with the first electrode, the second electrode adopts at least one material in molybdenums, molybdenum niobium alloy, aluminium, aluminium neodymium alloy, titanium and copper to form.Above-mentioned material is conductive material, and relative tin indium oxide material, has less resistance, can guarantee good electrical connection properties between the second electrode 421.
Certainly, " On-cell " capacitive touch screen as the vertical electric field type liquid crystal display, in the capacitive touch screen of the present embodiment, substrate with the opposing another side of the first electrode group 41, the second electrode group 42 on also be provided with color rete 12, also this capacitive touch screen comprises color membrane substrates 1 and the array base palte 2 in Fig. 5.The structure of color membrane substrates 1 and array base palte 2 is same as the prior art, repeats no more here.
Accordingly, the preparation method of capacitive touch screen in the present embodiment, be included in the step that forms sensor electrode on substrate, form the first electrode group that sensor electrode comprises that the formation multirow is arranged in parallel, the step of the second electrode group that multiple row is arranged in parallel, the first electrode group comprises a plurality of the first electrodes that are electrically connected to successively, the second electrode group comprises a plurality of the second electrodes that are electrically connected to successively, wherein, the preparation method also comprises, by the first electrode and/or the second electrode form comprise be distributed in peripheral peripheral electrode and with the central electrode of peripheral electrode electrical isolation, and the step that makes peripheral electrode adjacent in same row/column be electrically connected to mutually.
Before concrete elaboration preparation method, at first definition: in the utility model, composition technique, can only include photoetching process, or, comprise photoetching process and etch step, can also comprise printing, ink-jet etc. other are used to form the technique of predetermined pattern simultaneously; Photoetching process, refer to that utilize photoresist, mask plate, the exposure machine etc. of technological processs such as comprising film forming, exposure, development form the technique of figure.Can be according to the corresponding composition technique of formed structure choice in the utility model.
Concrete, the preparation method specifically comprises the steps:
Step S11: on substrate, form the figure that comprises the second conducting portion.
As shown in Figure 11 A, in this step, first on substrate 5, form the layer of metal thin layer, form metal film layer and can adopt the several different methods such as deposition, sputter or thermal evaporation.Form metal film layer and can adopt at least one material in molybdenum, molybdenum niobium alloy, aluminium, aluminium neodymium alloy, titanium and copper.
Then, by composition techniques such as exposure, development, etchings, make metal film layer form the figure that comprises the second conducting portion 425.
Step S12: on the substrate of completing steps S11, form insulation course, the zone that insulation course the end of the second conducting portion in correspondence offers via hole.
As shown in Figure 11 B, in this step, on the substrate of completing steps S11, first using plasma strengthens chemical vapour deposition technique and forms one deck insulating layer film, then by the normal masks plate, by a photoetching process, forms insulation course 6.Form at least one material that insulation course 6 adopts in Si oxide, silicon nitride, hafnium oxide, silicon oxides of nitrogen, aluminum oxide.
Step S13: on the substrate of completing steps S12, form the figure that comprises the first electrode, the second electrode, the first conducting portion, also be formed with the figure of the first isolated groove that comprises sealing in the first electrode simultaneously; Also be formed with the figure of the second isolated groove that comprises sealing in the second electrode, the first adjacent electrode is electrically connected to by the first conducting portion simultaneously, and the second adjacent electrode is electrically connected to the second conducting portion by via hole.
In this step, form the layer of metal thin layer on the substrate of completing steps S12, form metal film layer and can adopt the several different methods such as deposition, sputter or thermal evaporation.Form metal film layer and can adopt the tin indium oxide material.
Then, by composition techniques such as exposure, development, etchings, make metal film layer form the figure that comprises the first electrode, the second electrode, the first conducting portion.As shown in Figure 11 C, and simultaneously with reference to figure 6,7, in this step, adopt one time composition technique, form the figure that comprises the first electrode 411, the second electrode 421, the first conducting portion 415 (the particular location relation of the first electrode 411, the second electrode 421, the first conducting portion 415 is with reference to figure 6,7) arranged with layer, the first conducting portion 415 is overlapping with the second conducting portion 425 part quadrature on the orthogonal projection direction formed in step S11.
Shape with reference to figure 7, the first isolated grooves 412 is similar to the contour shape of the first electrode 411, and the degree of depth of the first isolated groove 412 equals the thickness of the first electrode 411; The shape of the second isolated groove 422 is similar to the contour shape of the second electrode 421, and the degree of depth of the second isolated groove 422 equals the thickness of the second electrode 421.
Preferably, the first electrode 411 is with the second electrode 421 rhombus that size is identical, and the first isolated groove 412 is the rhombus groove, and the width of the first isolated groove 412 is 5-30 μ m; The second isolated groove 422 is the rhombus groove, and the width of the second isolated groove 422 is 5-30 μ m.
Preferably, the 30-70% of the area that the area of the first central electrode 413 is the first electrode 411, the 30-70% of the area that the area of the second central electrode 423 is the second electrode 421.
In this step, in the mask plate adopted in exposure technology, except thering is corresponding the pattern that forms the first electrode 411, the second electrode 421, also there is corresponding the pattern that forms the first isolated groove 412 and the second isolated groove 422 simultaneously.Wherein, corresponding the pattern that forms the first isolated groove 412 and the second isolated groove 422 is that photoresist is removed district fully, accordingly, after exposure technology, developing process finish, corresponding part metallic film in metal film layer is completely removed in etching technics, thereby forms the first isolated groove 412 and the second isolated groove 422.
In the present embodiment, as shown in Figure 7, the first central electrode 413 and the complete electrical isolation of the first peripheral electrode 414 (are without any signal, to connect between the two, the first central electrode is equivalent to suspending), the second central electrode 423 and the complete electrical isolation of the second peripheral electrode 424 (are without any signal, to connect between the two, the second central electrode is equivalent to suspending), with sensor electrode in the prior art capacitive touch screen, compare, the first central electrode 413 and the second central electrode 423 are insulation isolated islands (floating ITO), therefore the first central electrode 413 and the second central electrode 423 can not produce coupling with public electrode in sensor electrode 4 chargings, thereby avoided further generation RC load.
Here it should be understood that; in the utility model, the figure of sensor electrode 4 is not limited to the lozenge diagram of example shown in the present embodiment; its essence is; the design of the central electrode by floated (floating); make the coupling between sensor electrode and public electrode reduce; and the change of its external shape or dependency structure does not break away from the category that the utility model is protected.
In the present embodiment, the first conducting portion 415 is strip, the first conducting portion 415 is formed at the first adjacent peripheral electrode 414 along between the water caltrop of the first electrode group 41 orientations, the width of the first conducting portion 415 is less than the second electrode 421 along the spacing in the second electrode group 42 orientations, and the length of the first conducting portion 415 is more than or equal to the first electrode 411 along the spacing in the first electrode group 41 orientations; The second conducting portion 425 is strip, the second conducting portion 425 is formed at the second adjacent peripheral electrode 424 along between the water caltrop of the second electrode group 42 orientations, the width of the second conducting portion 425 is less than the first electrode 411 along the spacing in the first electrode group 41 orientations, and the length of the second conducting portion 425 is more than or equal to the second electrode 421 along the spacing in the second electrode group 42 orientations.
In the present embodiment, the metal film layer in step S11 forms bridging and the edge cabling between the second electrode 421, wherein: i.e. the second conducting portion 425 of putting up a bridge, the edge cabling is the electric connection line between the peripheral circuit of sensor electrode and this capacitive touch screen; Metal film layer in step S13 forms the bridging between the first electrode 411, i.e. the first conducting portion 415.
As shown in Figure 7,8, with the electric connection mode between sensor electrode in prior art, compare, only need in insulation course 6, form a larger via hole 426 in the present embodiment and get final product, make technological design simpler, reduced fabrication error; Simultaneously, adopt a larger via hole to form and be arranged on the second electrode of different layers and being electrically connected to of the second conducting portion, compared to existing technology, adopt a plurality of less via holes to form not be electrically connected to (as shown in Figure 3,4) at electrode with the conducting portion of same layer, more easily obtain stable electrical connection effect, make display frame cleaner, the shadow better effects if disappears.Same as the prior art is, in the present embodiment, between the first electrode group 41 and the second electrode group 42, still adopt the mutual inductance mode to carry out touch sensible, can't affect Tx(Transmit in coupled electric field: transmit) and Rx(Receive: the coupling reception), sensitivity gets a promotion.
As shown in Fig. 9,10, for capacitive touch screen in the present embodiment at the cut-open view along paper horizontal direction (A-A) and vertical direction (B-B).Wherein, Fig. 9 shows the second electrode 421 in the second electrode group 42 of column direction by the second conducting portion 425(metal bridge) do electrical connection, adopting at least one material in molybdenum, molybdenum niobium alloy, aluminium, aluminium neodymium alloy, titanium and copper to form adjacent the second electrode 421 in the second conducting portion 425, the second electrode groups 42 is electrically connected to by the second conducting portion 425; Figure 10 shows the first electrode group 41 of line direction by the first conducting portion 415(sensor electrode bridge, in Figure 10, partly be the first conducting portion 415 with the sensor electrode of the second conducting portion 425 regional corresponding regions) do and be electrically connected to, adopting the tin indium oxide material to form adjacent the first electrode 411 in the first conducting portion 415, the first electrode groups 41 is electrically connected to by the first conducting portion 415.The overlapping region of the first conducting portion 415 and the second conducting portion 425 forms node capacitor, between the first conducting portion 415 and the second conducting portion 425, by insulation course 6 insulation, isolates.
Step S14: on the substrate of completing steps S13, form passivation layer.
As shown in Figure 11 D, in this step, on the substrate of completing steps S13, using plasma strengthens chemical vapour deposition technique and forms one deck passivation layer 7.Form at least one material that passivation layer 7 adopts in Si oxide, silicon nitride, hafnium oxide, silicon oxides of nitrogen, aluminum oxide.
Then, by composition techniques such as exposure, development, etchings, form via hole in passivation layer 7, the edge cabling between the peripheral circuit of sensor electrode 4 and this capacitive touch screen is electrically connected to by above-mentioned via hole.
So far, just formed the touch panel function part of capacitive touch screen.
In the preparation method of the present embodiment, complete by the first electrode and/or the second electrode form comprise be distributed in peripheral peripheral electrode and with the central electrode of peripheral electrode electrical isolation, and, after the step that makes peripheral electrode adjacent in same row/column be electrically connected to mutually, also further comprise:
Step S21: substrate is overturn in the vertical direction (overturning 180 °), as shown in Figure 11 E.
Step S22: on the opposing another side of the substrate after upset and the first electrode group, the second electrode group, form color rete, as shown in Figure 11 F.
; in the present embodiment, first prepared the touch panel function part, then substrate has been inverted to (facing down of figure that sensor electrode 4 is arranged); then there is no the one side of figure, adopt the photoetching process preparation to form color rete 12 and other the corresponding retes in color membrane substrates 1.In the present embodiment, the preparation of color membrane substrates is identical with the preparation of color membrane substrates in prior art, repeats no more here.
In the present embodiment, also comprise the array base palte be oppositely arranged with color membrane substrates, in the present embodiment the preparation of array base palte identical with the preparation of array base palte in prior art, repeat no more here.
Embodiment 2:
The difference of the present embodiment and embodiment 1 is, in the capacitive touch screen structure of the present embodiment, the second conducting portion and the first electrode, the second electrode form with layer, the first conducting portion is arranged at the below of the second conducting portion, be provided with via hole in insulation course, the first conducting portion is electrically connected to by via hole with the first electrode.
In the present embodiment, the first electrode, the second electrode and the second conducting portion adopt tin indium oxide to form; The first conducting portion adopts at least one material in molybdenum, molybdenum niobium alloy, aluminium, aluminium neodymium alloy, titanium and copper to form.
Accordingly, the preparation method specifically comprises the steps:
Step S11: on substrate, form the figure that comprises the first conducting portion.
Step S12: on the substrate of completing steps S11, form insulation course, the zone that insulation course the end of the first conducting portion in correspondence offers via hole.
Step S13: on the substrate of completing steps S12, form the figure that comprises the first electrode, the second electrode, the second conducting portion, also be formed with the figure of the first isolated groove that comprises sealing in the first electrode simultaneously; Also be formed with the figure of the second isolated groove that comprises sealing in the second electrode, the second adjacent electrode is electrically connected to by the second conducting portion simultaneously, and the first adjacent electrode is electrically connected to the first conducting portion by via hole.
Step S14: on the substrate of completing steps S13, form passivation layer.
In the present embodiment, but the concrete reference example 1 of other structures of capacitive touch screen and other steps in the preparation method, no longer describe in detail here.
Embodiment 3:
The difference of the present embodiment and embodiment 1,2 is in the present embodiment, the first electrode in the first electrode group is only arranged, or the isolated groove that offers sealing in the second electrode in the second electrode group is only arranged.
Accordingly, while in preparation technology, forming sensor electrode, in the mask plate adopted in exposure technology, except thering is corresponding the pattern that forms the first electrode 411, the second electrode 421, also there is corresponding the isolated groove that offers sealing in corresponding the first electrode of the first isolated groove 412(that forms) simultaneously; Perhaps, also there is corresponding the isolated groove that offers sealing in corresponding the second electrode of the second isolated groove 422(that forms simultaneously) pattern.Wherein, corresponding the pattern that forms the first isolated groove 412 or the second isolated groove 422 is that photoresist is removed district fully, accordingly, after exposure technology, developing process finish, corresponding part metallic film in metal film layer is completely removed in etching technics, thereby forms the first isolated groove 412 or the second isolated groove 422.
In the present embodiment, but the concrete reference example 1,2 of other structures of capacitive touch screen and other steps in the preparation method, no longer describe in detail here.
It should be understood that, in the sensor electrode of the utility model embodiment 1-3, the orientation of going is defined as the first electrode, the row orientation is defined as the second electrode, only in order to narrate conveniently, in fact, in sensor electrode, the first electrode, the second electrode do not limit direction,, also can by the row orientation be defined as the second electrode, the row orientation is defined as the first electrode, does not do restriction here.
To sum up, in " On-cell " capacitive touch screen of vertical electric field type liquid crystal display of the present utility model, owing to having adopted Floating central electrode in sensor electrode, make the coupling between sensor electrode and public electrode diminish, reduced the RC load, make the sensor electrode charging faster, antijamming capability is stronger, touch sensitivity is higher, makes display device when possessing higher display quality, has also possessed good touch effect.
Be understandable that, above embodiment is only the illustrative embodiments adopted for principle of the present utility model is described, yet the utility model is not limited to this.For those skilled in the art, in the situation that do not break away from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement also are considered as protection domain of the present utility model.
Claims (10)
1. a capacitive touch screen, comprise substrate and be arranged at the sensor electrode on described substrate, described sensor electrode comprises the first electrode group that multirow is arranged in parallel, the second electrode group that multiple row is arranged in parallel, described the first electrode group comprises a plurality of the first electrodes that are electrically connected to successively, described the second electrode group comprises a plurality of the second electrodes that are electrically connected to successively, it is characterized in that, described the first electrode and/or described the second electrode comprise be distributed in peripheral peripheral electrode and with the central electrode of described peripheral electrode electrical isolation, described peripheral electrode adjacent in same row/column is electrically connected to mutually.
2. capacitive touch screen according to claim 1, it is characterized in that, offer the first isolated groove of sealing in described the first electrode, the inboard of described the first isolated groove is the first central electrode, the described first isolated groove outside is the first peripheral electrode, and adjacent described the first peripheral electrode is electrically connected to mutually; And/or, offering the second isolated groove of sealing in described the second electrode, described the second isolated groove inboard is the second central electrode, and the described second isolated groove outside is the second peripheral electrode, and adjacent described the second peripheral electrode is electrically connected to mutually.
3. capacitive touch screen according to claim 2, is characterized in that, the shape of described the first isolated groove is similar to the contour shape of described the first electrode, and the degree of depth of described the first isolated groove equals the thickness of described the first electrode; And/or the shape of described the second isolated groove is similar to the contour shape of described the second electrode, the degree of depth of described the second isolated groove equals the thickness of described the second electrode.
4. capacitive touch screen according to claim 3, is characterized in that, described the first electrode is the rhombus that size is identical with described the second electrode, and described the first isolated groove is the rhombus groove, and the width of described the first isolated groove is 5-30 μ m; And/or described the second isolated groove is the rhombus groove, the width of described the second isolated groove is 5-30 μ m.
5. capacitive touch screen according to claim 4, is characterized in that, the 30-70% of the area that the area of described the first central electrode is described the first electrode, the 30-70% of the area that the area of described the second central electrode is described the second electrode.
6. according to the described capacitive touch screen of claim 1-5 any one, it is characterized in that, adjacent described the first peripheral electrode is provided with the first conducting portion between the water caltrop of described the first electrode group orientation, and adjacent described the first peripheral electrode is electrically connected to by described the first conducting portion; Adjacent described the second peripheral electrode is provided with the second conducting portion between the water caltrop of described the second electrode group orientation, adjacent described the second peripheral electrode is electrically connected to by described the second conducting portion, described the first conducting portion and described the second conducting portion are arranged on different layers, and the two part quadrature on the orthogonal projection direction is overlapping.
7. capacitive touch screen according to claim 6, it is characterized in that, be provided with insulation course between described the first conducting portion and described the second conducting portion, described the first conducting portion and described the first electrode, described the second electrode form with layer, described the second conducting portion is arranged at the below of described the first conducting portion, be provided with via hole in described insulation course, described the second conducting portion is electrically connected to by described via hole with described the second electrode;
Perhaps, described the second conducting portion and described the first electrode, described the second electrode form with layer, described the first conducting portion is arranged at the below of described the second conducting portion, in described insulation course, is provided with via hole, and described the first conducting portion is electrically connected to by described via hole with described the first electrode.
8. capacitive touch screen according to claim 7, it is characterized in that, described the first conducting portion is strip, the width of described the first conducting portion is less than adjacent described the second electrode along the spacing in described the second electrode group orientation, and the length of described the first conducting portion is more than or equal to adjacent described the first electrode along the spacing in described the first electrode group orientation;
Described the second conducting portion is strip, the width of described the second conducting portion is less than adjacent described the first electrode along the spacing in described the first electrode group orientation, and the length of described the second conducting portion is more than or equal to adjacent described the second electrode along the spacing in described the second electrode group orientation.
9. capacitive touch screen according to claim 8, it is characterized in that described the first electrode, described the second electrode and described the first conducting portion or described the second conducting portion employing tin indium oxide formation that arrange with layer with described the first electrode, described the second electrode;
Described the second conducting portion or described the first conducting portion that are arranged on different layers with described the first electrode, described the second electrode adopt at least one material in molybdenum, molybdenum niobium alloy, aluminium, aluminium neodymium alloy, titanium and copper to form.
10. according to the arbitrary described capacitive touch screen of claim 1-9, it is characterized in that, described substrate with the opposing another side of described the first electrode group, described the second electrode group on also be provided with color rete.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320368399XU CN203338332U (en) | 2013-06-25 | 2013-06-25 | Capacitive touch screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320368399XU CN203338332U (en) | 2013-06-25 | 2013-06-25 | Capacitive touch screen |
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| Publication Number | Publication Date |
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| CN203338332U true CN203338332U (en) | 2013-12-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201320368399XU Withdrawn - After Issue CN203338332U (en) | 2013-06-25 | 2013-06-25 | Capacitive touch screen |
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| CN (1) | CN203338332U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104750335A (en) * | 2013-12-30 | 2015-07-01 | 乐金显示有限公司 | Touch panel and method of fabricating the same |
| CN103365518B (en) * | 2013-06-25 | 2016-04-13 | 京东方科技集团股份有限公司 | A kind of capacitive touch screen and preparation method |
| CN106201040A (en) * | 2015-04-30 | 2016-12-07 | 深圳欧菲光科技股份有限公司 | The manufacture method of touch screen, display device and touch screen |
| CN107219956A (en) * | 2017-06-09 | 2017-09-29 | 京东方科技集团股份有限公司 | Display base plate and its driving method and display panel |
-
2013
- 2013-06-25 CN CN201320368399XU patent/CN203338332U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103365518B (en) * | 2013-06-25 | 2016-04-13 | 京东方科技集团股份有限公司 | A kind of capacitive touch screen and preparation method |
| CN104750335A (en) * | 2013-12-30 | 2015-07-01 | 乐金显示有限公司 | Touch panel and method of fabricating the same |
| CN104750335B (en) * | 2013-12-30 | 2018-04-10 | 乐金显示有限公司 | Touch panel and its manufacture method |
| CN106201040A (en) * | 2015-04-30 | 2016-12-07 | 深圳欧菲光科技股份有限公司 | The manufacture method of touch screen, display device and touch screen |
| CN107219956A (en) * | 2017-06-09 | 2017-09-29 | 京东方科技集团股份有限公司 | Display base plate and its driving method and display panel |
| CN107219956B (en) * | 2017-06-09 | 2021-01-29 | 京东方科技集团股份有限公司 | Display substrate, driving method thereof and display panel |
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| AV01 | Patent right actively abandoned |
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