CN203337164U - Substrate supporting table and substrate detection device - Google Patents

Substrate supporting table and substrate detection device Download PDF

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Publication number
CN203337164U
CN203337164U CN2013204645105U CN201320464510U CN203337164U CN 203337164 U CN203337164 U CN 203337164U CN 2013204645105 U CN2013204645105 U CN 2013204645105U CN 201320464510 U CN201320464510 U CN 201320464510U CN 203337164 U CN203337164 U CN 203337164U
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CN
China
Prior art keywords
substrate
ball
support
sucker
support bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2013204645105U
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Chinese (zh)
Inventor
张然
庞华山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN2013204645105U priority Critical patent/CN203337164U/en
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Publication of CN203337164U publication Critical patent/CN203337164U/en
Anticipated expiration legal-status Critical
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Abstract

The utility model relates to the technical field of liquid crystal display device production and detection, and discloses a substrate supporting table and a substrate detection device. The substrate supporting table comprises: a base; an air pump; a plurality of ball supporting elements arranged on the base, wherein each ball supporting element comprises a supporting rod whose top end is provided with an accommodating groove, and a ball which is arranged in the accommodating groove and can be rotated arbitrarily, wherein the ball is extended out from the accommodating groove for supporting the substrate; and a plurality of sucking disc supporting elements arranged on the base, wherein each sucking disc supporting element comprises a sucking disc, and a gas-guide tube which is used to support the sucking disc and communicate the sucking disc and the air pump. According to the utility model, the following advantages can be realized: when the placing position of the substrate is adjusted, the substrate is supported through the ball supporting elements, so the scratch condition of the substrate during place adjustment can be improved, and the safety performance of the substrate can be improved.

Description

A kind of substrate support pedestal and substrate detection apparatus
Technical field
The utility model relates to the technical field of liquid crystal indicator production testing, refers more particularly to a kind of substrate support pedestal and substrate detection apparatus.
Background technology
Generally adopt macro check equipment Inspection substrate in the liquid crystal indicator industry at present, when detecting, by substrate support pedestal, carry out supporting substrate.As depicted in figs. 1 and 2, the vertical view that Fig. 1 is substrate support pedestal of the prior art; The structural representation that Fig. 2 is sucker support member of the prior art.Substrate support pedestal of the prior art comprises: base 10, be arranged at a plurality of sucker support members 20 of described base 10, and described sucker support member 20 is communicated with air pump 30 by pipeline 60, and described pipeline 60 is provided with the rain glass 50 of detection air pressure.Concrete, described sucker support member 20 comprises: sucker 21 and the wireway 22 that supports described sucker 21, described wireway 22 comprises: be connected and have the connecting link 221 of through hole with described sucker 21, and be threaded with described connecting link 221 and have the threaded rod 222 of through hole.Its specific works is as follows: when substrate is placed into the base plate supports platform, air pump 30 is blown, and gas acts on substrate and makes its air supporting by sucker 21, and the staff adjusts the substrate placement location.After adjusting the substrate placement location, air pump 30 starts to bleed, thereby it is fixing that sucker 21 is sucked substrate, prevents that substrate from coming off from substrate support pedestal in checking process.
The defect of prior art is, when substrate is adjusted placement location, due to the aging gas leakage of sucker or local sucker air pressure lower, make substrate there is no complete air supporting, some positions of substrate also contact with sucker, thereby cause substrate when mobile, by the sucker with substrate contacts, are scratched.
The utility model content
The utility model provides a kind of substrate support pedestal and substrate detection apparatus, in order to improve the security of substrate when detecting.
The utility model provides a kind of substrate support pedestal, comprising:
Base;
Air pump;
Be arranged at a plurality of ball support members of described base; Each described ball support member comprises: top has the support bar of holding tank, is arranged in described holding tank and the ball that can rotate arbitrarily, and described ball leans out described holding tank and supports described substrate;
Be arranged at a plurality of sucker support members of described base, each sucker support member comprises: sucker and the wireway that supports described sucker and sucker is communicated with air pump.
In above-described embodiment, when substrate is adjusted placement location, by the roller support supporting substrate, improve the situation that substrate is scratched when adjusting position, improved the security performance of substrate.
Preferably, be provided with Flexible Connector between the bottom of described ball and described holding tank.By adopt Flexible Connector realized substrate by air supporting and ball simultaneously when substrate is adjusted placement location to the support of substrate.Further improve the situation that substrate is scratched when adjusting position, improved the security performance of substrate.
Preferably, described ball support member also comprises: be positioned at described holding tank and be set in the supporting seat in the described ball outside, described supporting seat comprises: the annular base be connected with described Flexible Connector, and be arranged at described annular base and support a plurality of spheroids that can rotate arbitrarily of described ball.Adopt supporting base to reduce the friction between ball and holding tank, thereby strengthened the dirigibility that ball rotates along with the movement of substrate, improved the situation that substrate is scratched when adjusting position, improved the security performance of substrate.
Preferably, described ball support member also comprises top cover, and described top cover has the hole that diameter is less than described ball diameter, and expose through described hole at described ball top.By adopting top cover that ball is limited in holding tank, avoided the ball accident to roll out holding tank, improved the reliability of ball support member.
Preferably, described support bar is expansion link.Thereby be convenient to adjust according to the actual conditions of substrate the height of ball support member.Concrete:
Selectable, described expansion link comprises the first support bar with holding tank and is fixed on described base and the second support bar be threaded with described the first support bar.
Selectable, described expansion link comprises the 3rd support bar with holding tank and is set in the 4th support bar in described the 3rd support bar, and the sidewall of described the 3rd support bar is equipped with lock(ing) bolt, described the 3rd support bar is by lock(ing) bolt and described the 4th support bar locking.
Preferably, described substrate support pedestal also comprises the rain glass that detects described sucker support member output gas pressure.The air pressure of avoiding the sucker support member is too small and cause the sucker support member to work.
The utility model also provides a kind of substrate detection apparatus, comprises above-mentioned any substrate support pedestal.Have and improve the situation that substrate is scratched when adjusting setting position, improved the security performance of substrate.
The accompanying drawing explanation
The vertical view that Fig. 1 is substrate support pedestal of the prior art;
The structural representation that Fig. 2 is sucker support member of the prior art;
The vertical view of the substrate support pedestal that Fig. 3 provides for the utility model embodiment;
The structural representation of the ball support member that Fig. 4 provides for the utility model embodiment;
The supporting seat that Fig. 5 provides for the utility model embodiment supports the structural representation of ball;
Another structural representation of the ball support member that Fig. 6 provides for the utility model embodiment.
Reference numeral:
10-base 20-sucker support member 21-sucker
22-wireway 221-connecting link 222-threaded rod
30-air pump 40-ball support member 41-ball
42-support bar 421-first support bar 422-the second support bar
423-the 3rd support bar 424-the 4th support bar 425-lock(ing) bolt
43-Flexible Connector 44-supporting base 441-annular base
442-spheroid 45-holding tank 50-rain glass
The 60-pipeline
Embodiment
For fear of substrate, when detecting, be scratched, the utility model embodiment provides a kind of substrate support pedestal and substrate detection apparatus, in the technical solution of the utility model, when substrate is adjusted, by ball supports support substrate, at substrate fixedly the time, by sucker support member absorption fixing base, thereby avoided substrate to be scratched when adjusting, improved the security performance of substrate when detecting.For making the purpose of this utility model, technical scheme and advantage clearer, below take nonrestrictive embodiment and the utility model is described in further detail as example.
The vertical view of the substrate support pedestal that as shown in Figure 2, Figure 3 and Figure 4, Fig. 3 provides for the utility model embodiment; The structural representation of the ball support member that Fig. 4 provides for the utility model embodiment.
The utility model embodiment provides a kind of substrate support pedestal, comprising:
Base 10;
Air pump 30;
Be arranged at a plurality of ball support members 40 of described base 10; Each described ball support member 40 comprises: top has the support bar 42 of holding tank 45, is arranged in described holding tank 45 and the ball 41 that can rotate arbitrarily, and described ball 41 leans out described holding tank 45 and supports described substrate;
Be arranged at a plurality of sucker support members 20 of described base 10, each sucker support member comprises: sucker 21 and the wireway 22 that supports described sucker 21 and sucker 21 is communicated with air pump 30.
The principle of work of the substrate support pedestal that adopts the utility model embodiment to provide is:
When adjusting the substrate placement location, carry out supporting substrate by ball support member 40, because ball 41 can be in the interior any rotation of the holding tank 45 of support member, therefore, when adjusting substrate, ball 41 rotates along with the direction of motion of substrate, has reduced the friction between substrate and ball 41, has avoided, when substrate is adjusted position, substrate is caused to scuffing.
At substrate fixedly the time, between sucker 21 and air pump 30, by pipeline 60, be communicated with, therefore, when air pump 30 is bled, thereby sucker 21 is evacuated substrate is sucked, and has realized the fixing of substrate.
In the present embodiment, due to substrate, when adjusting position, the weight of substrate is supported by ball support member 40, therefore, has reduced substrate when adjusting position, is applied to the pressure of sucker support member 20, thereby has improved the situation that substrate is scratched when adjusting position.
Continuation is with reference to figure 2, the concrete structure of sucker support member 20 is: described wireway 22 comprises: with described sucker 21, be connected and have the connecting link 221 of through hole, and be threaded with described connecting link 221 and there is the threaded rod 222 of through hole, wherein, described threaded rod 222 is fixed on base 10, when damaging appears in the sucker of sucker support member 20, can directly connecting link 221 be screwed out and be changed.
Continuation is with reference to figure 4, the situation be scratched when adjusting in order further to improve substrate.Preferably, when substrate is adjusted placement location, adopt sucker support member 20 and ball support member 40 supporting substrate simultaneously, concrete, air pump 30 is blown, and the below that gas is blown to substrate by sucker support member 20 makes substrate air supporting, simultaneously, ball 41 supporting substrates of ball support member 40, now, the concrete structure of ball support member 40 is: the support bar 42 with holding tank 45, the ball 41 that is positioned at described holding tank 45 and can rotates arbitrarily, and the Flexible Connector 43 between described ball 41 and holding tank 45 bottoms, and substrate is not when placing, the height on ball 41 tops is higher than the top height of sucker support member 20.Its principle of work is: when sucker support member 20 is blown, because the elastic deformation ball 41 of Flexible Connector 43 supports to substrate, when sucker support member 20 is bled fixing base, substrate descends, simultaneously, 43 deformation of substrate compressing Flexible Connector, ball 41 descends until sucker support member 20 sucks substrate thereupon.Further improved by sucker support member 20 and ball support member 40 situation that substrate is scratched when adjusting.
When substrate is adjusted placement location, owing to being sliding friction between substrate and ball 41, therefore, rotation between ball 41 and holding tank 45 directly has influence on the effect between substrate and ball 41, in order to reduce the friction between substrate and ball 41, as shown in Figure 5, the supporting seat that Fig. 5 provides for the utility model embodiment supports the structural representation of ball 41.Preferably, at the interior supporting base 44 that is set in ball 41 outsides that arranges of holding tank 45, concrete, supporting seat comprises: the annular base 441 be connected with described Flexible Connector 43, and be arranged at described annular base 441 and for supporting a plurality of spheroids 442 of described ball 41, and can rotate arbitrarily between described spheroid 442 and described ball 41.The spheroid 442 that employing can be rotated arbitrarily supports ball 41, has reduced the friction between ball 41 and supporting base 44, thereby makes substrate when adjusting placement location, and ball 41 can rotate arbitrarily with the motion of substrate.
Because ball 41 parts are positioned at holding tank 45, in order to prevent drop out the holding tank 45 of support bar 42 of ball 41, thereby cause ball support member 40 to work, preferably, at the top of ball support member 40, the top cover (not shown) is set, top cover has the hole that diameter is less than described ball 41 diameters, and expose through described hole at described ball 41 tops.Thereby improved the safety in utilization of ball support member 40.
Substrate is on being placed into sucker support member 20 and ball support member 40 time, thickness difference due to substrate, therefore the deformation quantity of its generation is not identical yet, for fear of substrate, deformation is occurring, cause substrate to be scratched when adjusting placement location, preferably, the support bar 42 of ball support member 40 is expansion link.Thereby realize the adjustment of ball support member 40 height.Concrete, expansion link can be the expansion link of different modes, below with two concrete embodiments, describes.
Embodiment 1
Continuation is with reference to figure 4, and described expansion link comprises the first support bar 421 with holding tank 45 and is fixed on described base 10 and the second support bar 422 be threaded with described the first support bar 421.Described the first support bar 421 and the second support bar 422 are threaded connection, when needs are heightened the expansion link height, thereby direction rotation first support bar 421 that can screw out along screw thread improves the height of whole expansion link, when needs are turned down the expansion link height, thereby can rotate the height that the first support bar 421 reduces whole expansion link along the direction of screw thread precession.Better, the second support bar 422 can adopt the threaded rod of sucker support member 20, i.e. threaded rod shown in accompanying drawing 2 222, thus make ball support member 40 and sucker support member 20 can adjust arbitrarily setting position.
Embodiment 2
As shown in Figure 6, another structural representation of the ball support member provided for the utility model embodiment.Described expansion link comprises the 3rd support bar 423 with holding tank 45 and is set in the 4th support bar 424 in described the 3rd support bar 423, and the sidewall of described the 3rd support bar 423 is equipped with lock(ing) bolt 425, described the 3rd support bar 423 is by lock(ing) bolt 425 and described the 4th support bar 424 lockings.The 4th support bar 424 is set in the 3rd support bar 423, can relatively move between the two, when needs are adjusted the height of expansion link, releasable lock is determined bolt 425, make the 3rd support bar 423 and the 4th support bar 4244 relative slidings, when adjusting to desired height, locking lock(ing) bolt 425.
In the above-described embodiments, sucker support member 20 is blown and the air-breathing air pressure that reaches certain that all needs, in order to make the operator can observe intuitively the atmospheric pressure value that sucker support member 20 provides, preferably, substrate support pedestal detects the rain glass 60 of described sucker support member 20 output gas pressures.Whether the atmospheric pressure value that by rain glass 50, can observe directly sucker support member 20 and provide meets the demands, and the atmospheric pressure value that the operator can show according to rain glass 50 is adjusted the output of air pump 30.
The utility model embodiment also provides a kind of substrate detection apparatus, comprises above-mentioned any substrate support pedestal.Thereby make the substrate detection apparatus that the utility model embodiment provides can improve the situation that substrate is scratched when adjusting placement location.
Obviously, those skilled in the art can carry out various changes and modification and not break away from spirit and scope of the present utility model the utility model.Like this, if within of the present utility model these are revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model also is intended to comprise these changes and modification interior.

Claims (9)

1. a substrate support pedestal, is characterized in that, comprising:
Base;
Air pump;
Be arranged at a plurality of ball support members of described base; Each described ball support member comprises: top has the support bar of holding tank, is arranged in described holding tank and the ball that can rotate arbitrarily, and described ball leans out described holding tank and supports described substrate;
Be arranged at a plurality of sucker support members of described base, each sucker support member comprises: sucker and the wireway that supports described sucker and sucker is communicated with air pump.
2. substrate support pedestal as claimed in claim 1, is characterized in that, between the bottom of described ball and described holding tank, is provided with Flexible Connector.
3. substrate support pedestal as claimed in claim 2, it is characterized in that, described ball support member also comprises: be positioned at described holding tank and be set in the supporting seat in the described ball outside, described supporting seat comprises: the annular base be connected with described Flexible Connector, and be arranged at described annular base and support a plurality of spheroids that can rotate arbitrarily of described ball.
4. substrate support pedestal as described as claim 1~3 any one, is characterized in that, described ball support member also comprises top cover, and described top cover has the hole that diameter is less than described ball diameter, and expose through described hole at the top of described ball.
5. substrate support pedestal as claimed in claim 4, is characterized in that, described support bar is expansion link.
6. substrate support pedestal as claimed in claim 5, is characterized in that, described expansion link comprises the first support bar with holding tank and is fixed on described base and the second support bar be threaded with described the first support bar.
7. substrate support pedestal as claimed in claim 5, it is characterized in that, described expansion link comprises the 3rd support bar with holding tank and is set in the 4th support bar in described the 3rd support bar, and the sidewall of described the 3rd support bar is equipped with lock(ing) bolt, described the 3rd support bar is by lock(ing) bolt and described the 4th support bar locking.
8. substrate support pedestal as claimed in claim 1, is characterized in that, also comprises the rain glass that detects described sucker support member output gas pressure.
9. a substrate detection apparatus, is characterized in that, comprises substrate support pedestal as described as claim 1~8 any one.
CN2013204645105U 2013-07-31 2013-07-31 Substrate supporting table and substrate detection device Expired - Fee Related CN203337164U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2013204645105U CN203337164U (en) 2013-07-31 2013-07-31 Substrate supporting table and substrate detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2013204645105U CN203337164U (en) 2013-07-31 2013-07-31 Substrate supporting table and substrate detection device

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Publication Number Publication Date
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105044949A (en) * 2015-09-17 2015-11-11 昆山精讯电子技术有限公司 Revolving working bench and display panel detection apparatus
CN108212950A (en) * 2018-01-04 2018-06-29 京东方科技集团股份有限公司 A kind of extreme ultraviolet cleaning equipment and base material cleaning method
CN110726361A (en) * 2019-10-11 2020-01-24 杭州友邦演艺设备有限公司 Safety detection method for underwater stage lamp inner plate
CN116944636A (en) * 2023-09-19 2023-10-27 中交一公局第五工程有限公司 Welding set is assembled to bridge steel case roof beam

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105044949A (en) * 2015-09-17 2015-11-11 昆山精讯电子技术有限公司 Revolving working bench and display panel detection apparatus
CN105044949B (en) * 2015-09-17 2018-03-06 昆山精讯电子技术有限公司 Rotary table and display panel testing
CN108212950A (en) * 2018-01-04 2018-06-29 京东方科技集团股份有限公司 A kind of extreme ultraviolet cleaning equipment and base material cleaning method
CN110726361A (en) * 2019-10-11 2020-01-24 杭州友邦演艺设备有限公司 Safety detection method for underwater stage lamp inner plate
CN110726361B (en) * 2019-10-11 2021-07-06 杭州友邦演艺设备有限公司 Safety detection method for underwater stage lamp inner plate
CN116944636A (en) * 2023-09-19 2023-10-27 中交一公局第五工程有限公司 Welding set is assembled to bridge steel case roof beam
CN116944636B (en) * 2023-09-19 2023-11-28 中交一公局第五工程有限公司 Welding set is assembled to bridge steel case roof beam

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131211

CF01 Termination of patent right due to non-payment of annual fee