CN203333757U - Fault nano polymer pulling-out protective device of fine nano vacuum coating equipment - Google Patents
Fault nano polymer pulling-out protective device of fine nano vacuum coating equipment Download PDFInfo
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- CN203333757U CN203333757U CN2013203571621U CN201320357162U CN203333757U CN 203333757 U CN203333757 U CN 203333757U CN 2013203571621 U CN2013203571621 U CN 2013203571621U CN 201320357162 U CN201320357162 U CN 201320357162U CN 203333757 U CN203333757 U CN 203333757U
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- vacuum pump
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Abstract
The utility model relates to nano vacuum coating equipment and in particular relates to a fault nano polymer pulling-out protective device of fine nano vacuum coating equipment. The fault nano polymer pulling-out protective device of the fine nano vacuum coating equipment comprises a deposition chamber, a condenser, a vacuum pump, a central controller, a vaporizing chamber, a splitting chamber and a charging chamber, wherein the charging chamber is connected with the vaporizing chamber by virtue of a pipeline, the vaporizing chamber is connected with the splitting chamber by virtue of a pipeline, and a control vale is arranged on a pipeline between the vaporizing chamber and the splitting chamber; the splitting chamber is connected with the vacuum pump by virtue of a pipeline, and a control vale is arranged on a pipeline between the splitting chamber and the vacuum pump; the splitting chamber is also connected with the deposition chamber by virtue of a pipeline, the deposition chamber is connected with the condenser by virtue of a pipeline, and the condenser is connected with the vacuum pump by virtue of a pipeline. The fault nano polymer pulling-out protective device of the fine nano vacuum coating equipment has the function of preventing the phenomenon that a coated object produces rime fog as vacuum pressure rapidly raises again owning to equipment faults, and solves the problem that the coated object is scrapped.
Description
Technical field
The utility model relates to industrial equipments manufacture and automation control area, is specifically related to the vacuum nano filming equipment.
Background technology
The meticulous plated film of vacuum (Parylene) is a kind of polymer thermoplastically polymer, when vacuum state, can do gaseous phase deposition.Use the treatment technology of gaseous phase deposition, can evenly form thickness in body surface, the thickness of film is between 0.001mm-0.05mm.After the process through overflash (150 ℃) and cracking (650 ℃), enter in paint booth, at room temperature in the mode of vapour deposition (CVD), evenly infiltrate and the inside slot that is coated on painting object and surface, under vacuum, the all-pervasive efficiency of operation is splendid, is different from immersed type or aerosol application.The advantage of the meticulous plated film of vacuum comprises: good cover characteristic is much better than the application modes such as Epoxy, Urethane, Silicone, and insulativity is good, and can be moistureproof, antirust.Good chemical property, can solve the problem of acid or alkaline matter corrosion.Good mechanical characteristics, can be adapted to the temperature range of 200 ℃ to-200 ℃, and most important is exactly that its thickness can be by 0.001mm to 0.05mm.
But, the meticulous filming equipment of vacuum is owing to having a power failure or other fault causes make equipment quit work, during power failure, vacuum pump does not operate and can cause vacuum chamber pressure to go up, exist clout in sediment chamber, these clouts, under antivacuum state, are subject to influence of gravity, can produce white mist phenomenon, make plated body surface deposit film inhomogeneous, even some place is not plated to, and causes plated body to cancel.
The utility model content
The utility model purpose is to be to provide a kind of meticulous nano vacuum filming equipment fault nano-high molecule and detaches protector.
To achieve these goals, the technical solution of the utility model is as follows:
A kind of meticulous nano vacuum filming equipment fault nano-high molecule detaches protector, comprise sediment chamber, condenser, vacuum pump, central controller, vaporizing chamber, cracking room, loading space, it is characterized in that, described loading space connects described vaporizing chamber by pipeline, described vaporizing chamber connects described cracking room by pipeline, and the pipeline between described vaporizing chamber and described cracking room is provided with a control valve;
Described cracking room connects described vacuum pump by pipeline, and the pipeline between described cracking room and described vacuum pump is provided with a control valve;
Described cracking room also connects described sediment chamber by pipeline, and described sediment chamber connects described condenser by pipeline, and described condenser connects described vacuum pump by pipeline.
A kind of meticulous nano vacuum filming equipment fault nano-high molecule detaches protector, also comprises a UPS uninterruptible power supply, and described UPS uninterruptible power supply is electrically connected to described vacuum pump, described condenser, described central controller.During the equipment power-off fault, by UPS, powered.
Pipeline between described vaporizing chamber and described cracking room, pipeline between described cracking room and described vacuum pump, share an overhead control valve, described overhead control valve is provided with 1 outlet, described outlet and described cracking room UNICOM, described overhead control valve also comprises 2 imports, be respectively the first import, the second import, described the first import and described vaporizing chamber UNICOM, the second import and described vacuum pump UNICOM, described overhead control valve also is provided with 2 valves, one between import and described the first import, another is between import and described the second import.
Described central controller connects described overhead control valve, described cracking room, described sediment chamber, described condenser.Data parameters before running and record trouble after described central controller controls equipment failure.Described central controller can be provided with a memory module, and memory module is for data parameters before and after record trouble.
Beneficial effect: when equipment breaks down when nano-macromolecule material starts cracking, by the UPS uninterruptible power supply, started, maintain condenser, vacuum pump, central controller work, pass through central controller controls, make control valve close vaporizing chamber to the cracking room charging, open the connection vacuum pump and lead to the cracking room pipeline valve, under the effect of vacuum pump, the clout of cracking room and sediment chamber is pumped down to the condenser filtration.The utility model has prevented from ging up fast because equipment failure causes vacuum pressure, causes plated body to produce the function of white mist phenomenon, has prevented the problem that plated body is scrapped.
The accompanying drawing explanation
Further illustrate the utility model below in conjunction with the drawings and specific embodiments:
Fig. 1 is a kind of general illustration of the present utility model.
Embodiment
For technique means, creation characteristic that the utility model is realized, reach purpose and effect is easy to understand, below in conjunction with concrete diagram, further set forth the utility model.
Referring to Fig. 1, a kind of meticulous nano vacuum filming equipment fault nano-high molecule detaches protector, comprise sediment chamber 1, condenser 6, vacuum pump 4, central controller 3, vaporizing chamber 8, cracking room 7, loading space 9, loading space 9 connects vaporizing chamber 8 by pipeline, vaporizing chamber 8 connects cracking room 7 by pipeline, and the pipeline between vaporizing chamber 8 and cracking room 7 is provided with a control valve; Cracking room 7 connects vacuum pump 4 by pipeline, and the pipeline between cracking room 7 and vacuum pump 4 is provided with a control valve; Cracking room 7 also connects sediment chamber 1 by pipeline, and sediment chamber 1 connects condenser 6 by pipeline, and condenser 6 connects vacuum pump 4 by pipeline.
A kind of meticulous nano vacuum filming equipment fault nano-high molecule detaches protector, also comprises a UPS uninterruptible power supply 5, and UPS uninterruptible power supply 5 is electrically connected to vacuum pump 4, condenser 6, central controller 3.During the equipment power-off fault, by UPS, powered.
Pipeline between vaporizing chamber 8 and cracking room 7, pipeline between cracking room 7 and vacuum pump 4, share an overhead control valve 2, and overhead control valve 2 is provided with 1 outlet, outlet and cracking room 7 UNICOMs, overhead control valve 2 also comprises 2 imports, is respectively the first import, the second import, the first import and vaporizing chamber 8 UNICOMs, the second import and vacuum pump 4 UNICOMs, overhead control valve 2 also is provided with 2 valves, one between import and the first import, another is between import and the second import.
Central controller 3 connects overhead control valve 2, cracking room 7, sediment chamber 1, condenser 6.Data parameters before running and record trouble after central controller 3 operating device faults.Central controller 3 can be provided with a memory module, and memory module is for data parameters before and after record trouble.
When equipment breaks down when nano-macromolecule material starts cracking, by UPS uninterruptible power supply 5, started, maintain condenser 6, vacuum pump 4, central controller 3 work, by central controller 3, control, make control valve close vaporizing chamber 8 to cracking room 7 chargings, open connection vacuum pump 4 and lead to cracking room 7 pipeline valves, under the effect of vacuum pump 4, the clout of cracking room 7 and sediment chamber 1 is pumped down to condenser 6 filtrations.The utility model has prevented from ging up fast because equipment failure causes vacuum pressure, causes plated body to produce the function of white mist phenomenon, has prevented the problem that plated body is scrapped.
Above demonstration and described ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; that in above-described embodiment and specification sheets, describes just illustrates principle of the present utility model; under the prerequisite that does not break away from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall in claimed the utility model scope.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (4)
1. a meticulous nano vacuum filming equipment fault nano-high molecule detaches protector, comprise sediment chamber, condenser, vacuum pump, central controller, vaporizing chamber, cracking room, loading space, it is characterized in that, described loading space connects described vaporizing chamber by pipeline, described vaporizing chamber connects described cracking room by pipeline, and the pipeline between described vaporizing chamber and described cracking room is provided with a control valve;
Described cracking room connects described vacuum pump by pipeline, and the pipeline between described cracking room and described vacuum pump is provided with a control valve;
Described cracking room also connects described sediment chamber by pipeline, and described sediment chamber connects described condenser by pipeline, and described condenser connects described vacuum pump by pipeline.
2. a kind of meticulous nano vacuum filming equipment fault nano-high molecule according to claim 1 detaches protector; it is characterized in that: also comprise a UPS uninterruptible power supply, described UPS uninterruptible power supply is electrically connected to described vacuum pump, described condenser, described central controller.
3. a kind of meticulous nano vacuum filming equipment fault nano-high molecule according to claim 1 detaches protector, it is characterized in that: the pipeline between described vaporizing chamber and described cracking room, pipeline between described cracking room and described vacuum pump, share an overhead control valve;
Described overhead control valve is provided with 1 outlet, described outlet and described cracking room UNICOM;
Described overhead control valve also comprises 2 imports, is respectively the first import, the second import, described the first import and described vaporizing chamber UNICOM, the second import and described vacuum pump UNICOM;
Described overhead control valve also is provided with 2 valves, one between import and described the first import, another is between import and described the second import.
4. a kind of meticulous nano vacuum filming equipment fault nano-high molecule according to claim 3 detaches protector, and it is characterized in that: described central controller connects described overhead control valve, described cracking room, described sediment chamber, described condenser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203571621U CN203333757U (en) | 2013-06-20 | 2013-06-20 | Fault nano polymer pulling-out protective device of fine nano vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203571621U CN203333757U (en) | 2013-06-20 | 2013-06-20 | Fault nano polymer pulling-out protective device of fine nano vacuum coating equipment |
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| Publication Number | Publication Date |
|---|---|
| CN203333757U true CN203333757U (en) | 2013-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203571621U Expired - Fee Related CN203333757U (en) | 2013-06-20 | 2013-06-20 | Fault nano polymer pulling-out protective device of fine nano vacuum coating equipment |
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| CN (1) | CN203333757U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104190571A (en) * | 2014-08-20 | 2014-12-10 | 傅庆材 | Nanometer coating equipment |
| CN105039935A (en) * | 2015-08-24 | 2015-11-11 | 深圳市星火辉煌系统工程有限公司 | Macromolecule vacuum covering device |
-
2013
- 2013-06-20 CN CN2013203571621U patent/CN203333757U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104190571A (en) * | 2014-08-20 | 2014-12-10 | 傅庆材 | Nanometer coating equipment |
| CN104190571B (en) * | 2014-08-20 | 2017-02-15 | 傅庆材 | Nanometer coating equipment |
| CN105039935A (en) * | 2015-08-24 | 2015-11-11 | 深圳市星火辉煌系统工程有限公司 | Macromolecule vacuum covering device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131211 Termination date: 20160620 |
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| CF01 | Termination of patent right due to non-payment of annual fee |