CN203333738U - Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof - Google Patents
Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof Download PDFInfo
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- CN203333738U CN203333738U CN2013201227761U CN201320122776U CN203333738U CN 203333738 U CN203333738 U CN 203333738U CN 2013201227761 U CN2013201227761 U CN 2013201227761U CN 201320122776 U CN201320122776 U CN 201320122776U CN 203333738 U CN203333738 U CN 203333738U
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- vacuum pipe
- throttle
- cooling jacket
- control system
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Abstract
The utility model discloses a multifunctional throttling pipeline structure for vacuum coating equipment and a control system thereof. The throttling pipeline structure comprises a vacuum pipe (3), and is characterized in that a connecting flange (1), a seal ring (2) and a cooling jacket (4) are arranged in the vacuum pipe (3); the inner cavity of the vacuum pipe (3) is provided with a plurality of throttling baffle structures (5); each throttling baffle structure is formed by connecting a baffle with an angle adjustment unit; the angle adjustment unit is utilized to adjust the angle of the baffle so as to control the gas throughput in the vacuum pipe at a stable pumping speed; the cooling jacket (4) is arranged around the vacuum pipe (3) to form a surrounding structure for the vacuum pipe (3); a cooling medium is arranged in the inner cavity of the cooling jacket (4); and the inner cavity of the cooling jacket (4) is communicated with the connecting flange (1). The throttling control system comprises a computer control system (10), a vacuum chamber (11), a diffusion pump (12) and a water-cooling vacuum throttling connecting pipe. The utility model can implement stable-speed suction of the diffusion oil pump, and continuously keep high vacuum in the vacuum chamber.
Description
Technical field
The utility model relates to a kind of type of the Multifunctional throttle for Vacuum coating device vacuum pipe structure and Controlling System thereof, belongs to the Vacuum coating device technical field.
Background technology
Oil diffusion pump is because have the advantages such as simple in structure, that cost is low, maintenance cost is cheap, so application is very extensive in high-vacuum apparatus and vacuum coat field.But the best pumping speed of existing conventional oil diffusion pump is to be 10 in the oil diffusion pump inlet pressure
-1the operating mode that Pa is following, if higher than this pressure, the pumping speed of oil diffusion pump will be unstable, and exhaust capacity descends rapidly, in the time of causing like this coating process operation, the pressure surge of vacuum chamber is very large.Along with the development of vacuum coat Technology, the vacuum coat operation pressure has risen to 10
1the Pa left and right, existing its technical parameter of conventional oil diffusion pump can not meet the needs of vacuum coat technique fully, so how vacuum system and relevant device are carried out to technological improvement, make vacuum chamber pressure meet the coating process parameter request, to realize stablizing the oil diffusion pump pumping speed, guaranteeing the coating process pressure stability, is one of the technical problems to be solved in the utility model.
In existing conventional oil diffusion pump application, in oil diffusion pump ingress operated by rotary motion, the cold well of water-cooled is arranged, turn back to vacuum chamber for the oil vapour that prevents diffusion pump.But still have micro-oil molecule during practical application and cross the cold well of water-cooled, and turn back to vacuum chamber by connecting tube.How further reducing the oil pollution problem of returning of diffusion pump oil, is also the utility model technical issues that need to address.
In Vacuum coating device work, when vacuum chamber opens the door, the vacuum chamber inwall all can be exposed in air, at this moment the aqueous vapor in vacuum chamber inwall meeting absorbed air, when vacuum chamber is closed the door while vacuumizing again, the aqueous vapor of adsorbing can discharge lentamente, affects the speed that coat system vacuumizes, and reduces production efficiency.Improving the vacuum pumping rate of vacuum chamber, is also the utility model technical issues that need to address.
Experiment showed, connect vacuum chamber to the pipeline configuration of oil diffusion pump to maintaining the pressure of stablizing vacuum chamber, the oil pollution problem of returning of reduction diffusion pump oil improves the vacuum pumping rate to vacuum chamber simultaneously, plays very important effect.For this reason, the applicant conducts in-depth research Multifunctional throttle type vacuum pipe structure and Controlling System thereof for vacuum coat.
The utility model content
One of the purpose of this utility model, it is the problem that oil diffusion pump in order to solve above-mentioned prior art can not meet coating process pressure, a kind of type of the Multifunctional throttle for Vacuum coating device vacuum pipe structure is provided, adopt this vacuum pipe to be connected between oil diffusion pump inlet valve and vacuum chamber, by controlling the latus rectum in vacuum pipe, the adjustments of gas throughput is to stablize pumping speed.There are characteristics simple in structure, easy to use, that cost is low.
Two of the purpose of this utility model is for a kind of throttle control system for Vacuum coating device with Multifunctional throttle type vacuum pipe structure is provided.
One of the purpose of this utility model can reach by taking following technical scheme:
Multifunctional throttle type vacuum pipe structure for Vacuum coating device, its constructional feature is: at the two ends of vacuum pipe, be provided with joint flange and sealing-ring, outer side wall at vacuum pipe is provided with cooling jacket, at the inner chamber of vacuum pipe, is provided with several throttle flap structures.The throttle flap structure consists of baffle plate connection angle regulon, and the drive output of angle regulating unit and baffle plate are flexibly connected, and by the angle of angle regulating unit controllable register, controls the interior gas throughput of vacuum pipe to stablize pumping speed; Sealing-ring is arranged in the annular recesses of joint flange end face, and cooling jacket is looped around the surrounding of vacuum pipe, forms the package structure to vacuum pipe.The initial and end end of cooling jacket is connected on the end face of joint flange, at the inner chamber of cooling jacket, is provided with refrigerant, and the inner chamber of cooling jacket is communicated with joint flange.
One of the purpose of this utility model can also reach by taking following technical scheme:
Further, can be provided with at an end of cooling jacket the refrigerant entrance, at the other end of cooling jacket, be provided with refrigerant exit.Refrigerant is provided by external very low temperature refrigerant equipment, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket, the temperature state in very low temperature in vacuum that keeps vacuum pipe, the oil molecule of crossing the cold well of oil diffusion pump water-cooled is condensate in vacuum pipe, simultaneously also by the aqueous vapor molecule condensation in vacuum chamber and be frozen in the inwall of vacuum pipe, thereby reach the oil pollution problem of returning that reduces diffusion pump oil, and the purpose that improves the vacuum pumping rate of vacuum apparatus.
Refrigerant is provided by external very low temperature refrigerant equipment, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket, the temperature state in very low temperature in vacuum that keeps vacuum pipe, oil molecule and aqueous vapor molecule in vacuum pipe are condensed, thereby reach the oil pollution problem of returning that reduces diffusion pump oil, and the purpose that improves the vacuum pumping rate of vacuum apparatus.
Further, described vacuum pipe is circular configuration, and in the throttle flap structure, baffle plate can be circular throttle plate, and angle regulating unit can consist of rotating shaft; The lower end of rotating shaft is flexibly connected at inner chamber and the circular throttle plate of vacuum pipe, and the internal chamber wall that vacuum pipe is passed in the upper end of rotating shaft exposes, angulation is regulated drive end.
Further, described vacuum pipe is square structure, in the throttle flap structure, baffle plate can be square throttle flap, can be formed by some louvre curtain sheets, these some louvre curtain sheets and angle regulating unit connect and compose the louvre type syndeton, and the adjusting control end of angle regulating unit stretches out the vacuum pipe outer wall, and angulation is regulated drive end.
Further, the initial and end two ends of described cooling jacket can respectively be welded on the joint flange end face by welding process.
Two of the purpose of this utility model can reach by taking following technical scheme:
Be used for the Controlling System of the Multifunctional throttle vacuum pipe structure of Vacuum coating device, its constructional feature is: comprise computer control system, vacuum chamber, oil diffusion pump and Multifunctional throttle type vacuum pipe structure; Multifunctional throttle type vacuum pipe structure is connected with the cap of high-vacuum baffle valve of vacuum chamber, oil diffusion pump by the joint flange at two ends; One of input terminus of computer control system one of is regulated and to be communicated with the vacuum chamber inner chamber by vacuum measurement, and what two of the input terminus of computer control system was regulated by vacuum measurement two connects cap of high-vacuum baffle valve, i.e. oil diffusion pump inlet ends; The angular adjustment drive end of one of output terminal of computer control system passing ratio setter connecting joint flow pattern vacuum pipe structure, two of the output terminal of computer control system connects vacuum chamber process gas input terminus by gas meter, forms the pressure control system of intelligent oil diffusion pump.
The beneficial effects of the utility model:
1, the utility model is owing to being provided with one or more throttle flap structures on air current flow direction in vacuum pipe, throttle flap can need the angle of rotation adjustment according to technique, when needs are bled fast to vacuum chamber, baffle plate is adjusted to and vacuum pipe air flow line parallel position, and baffle plate does not affect the pumping speed of vacuum system.When needs carry out coating process, baffle plate according to technique need to be adjustable to vacuum pneumatic at an angle, maximum 90 degree, make vacuum chamber pressure when meeting the coating process requirement, guarantees that the inlet pressure of oil diffusion pump can not surpass 10
-1pa.This utility model has the beneficial effects such as simple in structure, easy to use and cost is low.
2, the utility model is enclosed with cooling jacket on the vacuum pipe circumference, cooling jacket is connected with very low temperature refrigerant equipment, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket, the temperature state in very low temperature in vacuum that keeps vacuum pipe, oil molecule and aqueous vapor molecule in vacuum pipe are condensed, thereby reach the oil pollution problem of returning that reduces diffusion pump oil, and the purpose that improves the vacuum pumping rate of vacuum apparatus.This cooling jacket is the sealing-ring on cooling two end flanges both, also can reduce the oily phenomenon of returning of oil diffusion pump, and improves the vacuum pumping rate of vacuum apparatus, has the beneficial effect of realizing that the oil diffusion pump pumping speed is stable concurrently.
The accompanying drawing explanation
The structure sectional view that Fig. 1 is throttle-type vacuum pipe structure in the utility model specific embodiment 1.
Fig. 2 is a kind of structural representation of the throttle control system that relates to of the utility model.
The structure sectional view that Fig. 3 is throttle-type vacuum pipe structure in the utility model specific embodiment 2.
Embodiment
With reference to Fig. 1, the type of the Multifunctional throttle for the Vacuum coating device vacuum pipe structure that the present embodiment relates to, comprise vacuum pipe 3, be provided with joint flange 1 and sealing-ring 2 at the two ends of vacuum pipe 3, outer side wall at vacuum pipe 3 is provided with cooling jacket 4, at the inner chamber of vacuum pipe 3, is provided with throttle flap structure 5.Throttle flap structure 5 is connected and composed by baffle plate and angle regulating unit, and the drive output of angle regulating unit and baffle plate are flexibly connected, and by the angle of angle regulating unit controllable register, controls gas throughput in vacuum pipe to stablize pumping speed.Sealing-ring 2 is arranged in the annular recesses of joint flange 1 end face, the surrounding that cooling jacket 4 is looped around vacuum pipe 3 forms the package structure to vacuum pipe 3, the initial and end end of cooling jacket 4 is connected on the end face of joint flange 1, inner chamber at cooling jacket 4 is provided with refrigerant, and the inner chamber of cooling jacket 4 and joint flange 1 join.Refrigerant is provided by external very low temperature refrigerant equipment 17, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket 4, the temperature state in very low temperature in vacuum that keeps vacuum pipe 3, the oil molecule of crossing the cold well 16 of oil diffusion pump water-cooled is condensate in vacuum pipe 3, simultaneously also by the aqueous vapor molecule condensation in vacuum chamber 11 and be frozen in the inwall of vacuum pipe 3, thereby reach the oil pollution problem of returning that reduces diffusion pump oil, and the purpose that improves the vacuum pumping rate of vacuum apparatus.
In the present embodiment:
Described throttle flap structure 5 can arrange more than one or two, at an end of cooling jacket 4, is provided with refrigerant entrance 41, at the other end of cooling jacket 4, is provided with refrigerant exit 42.Described vacuum pipe 3 is circular configuration, and in throttle flap structure 5, baffle plate is circular throttle plate, and angle regulating unit consists of rotating shaft 6; The lower end of rotating shaft 6 is flexibly connected at inner chamber and the circular throttle plate of vacuum pipe 3, and expose through the internal chamber wall of vacuum pipe the upper end of rotating shaft 6, and angulation is regulated drive end.The initial and end two of described cooling jacket 4 respectively is welded on joint flange 1 end face by welding process.
With reference to Fig. 2, the Controlling System of the vacuum pipe of the Multifunctional throttle for the Vacuum coating device structure that the present embodiment 1 relates to, comprise computer control system 10, vacuum chamber 11, oil diffusion pump 12 and Multifunctional throttle type vacuum pipe structure.Multifunctional throttle type vacuum pipe structure is connected with the cap of high-vacuum baffle valve 12-1 of vacuum chamber 11, oil diffusion pump 12 by the joint flange 1 at two ends.One of input terminus of computer control system 10, regulate 15-1 by vacuum measurement and be communicated with vacuum chamber 11 inner chambers, and two of the input terminus of computer control system 10 is regulated 15-2 by vacuum measurement and connected cap of high-vacuum baffle valve 12-1, i.e. oil diffusion pump 12 inlet ends; One of output terminal of computer control system 10, the angular adjustment drive end of passing ratio setter 13 connecting joint flow pattern vacuum pipe structures; Two of the output terminal of computer control system 10 connects mass-flow gas meter 14, controls the input of vacuum chamber 11 process gass, forms the pressure control system of intelligent oil diffusion pump.
In practical application:
The flange 1 that is positioned at vacuum pipe 3 two ends is connected respectively to the vacuum chamber 11 of vacuum coat system and the vacuum valve 12-1 of oil diffusion pump 12 ingress.The diameter of vacuum pipe 3 and flange 1 is determined according to the size of the joint flange of described vacuum valve end, and vacuum pipe 3 is interior along evenly being provided with throttle flap structure 5 on the air motion direction, and the present embodiment throttle flap adopts circular configuration.
When needs are bled fast to vacuum chamber 11, the angle of rotation regulon makes throttle flap in the position parallel with vacuum pipe 3 air flow lines, and throttle flap can not affect the pumping speed of vacuum system.When needs carry out coating process, the angle of rotation regulon, slowly become greatly throttle flap and vacuum pipe 3 air flow line angles, thereby increase the resistance of throttle flap to air-flow, when making the pressure of vacuum chamber 11 meet processing requirement, guarantee that the inlet pressure of oil diffusion pump can not surpass 10
-1pa.
In addition, in vacuum, control by computer control system 10, make very low temperature refrigerant equipment 17 for cooling jacket 4 supply refrigerants, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket 4, keep the temperature state in very low temperature in vacuum in vacuum pipe, and oil molecule and aqueous vapor molecule in vacuum pipe are condensed, thereby reach the oil pollution problem of returning that reduces diffusion pump oil, and the purpose that improves the vacuum pumping rate of vacuum apparatus.
Referring to Fig. 3, the characteristics of this specific embodiment 2 are: described vacuum pipe 3 is square structure, in throttle flap structure 5, baffle plate is square throttle flap, by some louvre curtain sheets, formed, these some louvre curtain sheets and angle regulating unit connect and compose the louvre type syndeton, the adjusting control end of angle regulating unit is lever 6, lever 6 adopts the straight-bar structure to stretch out the vacuum pipe outer wall, angulation is regulated drive end, by lever 6, promotes or rotarily drive baffle plate to carry out angular setting.All the other structures are with specific embodiment 1.
When needs are bled fast to vacuum chamber, make throttling baffle blades Unscrew by angle regulating unit, throttle flap, in the position parallel with vacuum pipe 3 air flow lines, forms ventilation shape structure, and throttle flap can not affect the pumping speed of vacuum system.When needs carry out coating process, pass through angle regulating unit, make throttle flap 5 and vacuum pipe 3 air flow line angles slowly become large, the final closed structure that forms, thereby increase the resistance of throttle flap to air-flow, make the pressure of vacuum chamber when meeting processing requirement, guarantee that the inlet pressure of oil diffusion pump can not surpass 10
-1pa, realize vacuum chamber and oil diffusion pump inlet pressure are regulated.
The application the purpose of this utility model, by applying above-mentioned Multifunctional throttle type vacuum pipe structure, pass into the very low temperature refrigerant in the vacuum pipe cooling jacket, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket, make temperature state in very low temperature in vacuum of vacuum pipe, the diffusion pump oil molecule of crossing the cold well of oil diffusion pump water-cooled is condensate in vacuum pipe, further reduces the diffusion pump oil of existing oil diffusion pump and cross the cold well of water-cooled, and return to the phenomenon of vacuum chamber.
The application the purpose of this utility model, can be also by application of aforementioned Multifunctional throttle type vacuum pipe structure, pass into the very low temperature refrigerant in the vacuum pipe cooling jacket, evaporation endothermic phenomenon by the very low temperature refrigerant in cooling jacket, make temperature state in very low temperature in vacuum of vacuum pipe, the water vapor condensation of vacuum chamber the inside in vacuum pipe, thereby reach the purpose that improves vacuum pumping rate.
The above; it is only preferably specific embodiment of the utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the scope that the utility model discloses; be equal to replacement or changed according to the technical solution of the utility model and utility model design thereof, all being belonged to protection domain of the present utility model.
Claims (6)
1. for the Multifunctional throttle type vacuum pipe structure of Vacuum coating device, comprise vacuum pipe (3), it is characterized in that: be provided with joint flange (1) and sealing-ring (2) at the two ends of vacuum pipe (3), outer side wall at valve tube (3) is provided with cooling jacket (4), at the inner chamber of vacuum pipe (3), is provided with several throttle flap structures (5); Throttle flap structure (5) consists of baffle plate connection angle regulon, and the drive output of angle regulating unit and baffle plate are flexibly connected, and by the angle of angle regulating unit controllable register, controls gas throughput in vacuum pipe to stablize pumping speed; Sealing-ring (2) is arranged in the annular recesses of joint flange (1) end face, cooling jacket (4) is looped around the surrounding of vacuum pipe (3), the package structure of formation to vacuum pipe (3), the initial and end end of cooling jacket (4) is connected on the end face of joint flange (1), inner chamber at cooling jacket (4) is provided with refrigerant, and the inner chamber of cooling jacket (4) is communicated with joint flange (1).
2. the type of the Multifunctional throttle for Vacuum coating device vacuum pipe structure according to claim 1, it is characterized in that: the end at cooling jacket (4) is provided with refrigerant entrance (41), at the other end of cooling jacket (4), is provided with refrigerant exit (42).
3. the type of the Multifunctional throttle for Vacuum coating device vacuum pipe structure according to claim 1 and 2, it is characterized in that: described vacuum pipe (3) is circular configuration, in throttle flap structure (5), baffle plate is circular throttle plate, and angle regulating unit consists of rotating shaft (6); The lower end of rotating shaft (6) is flexibly connected at inner chamber and the circular throttle plate of vacuum pipe (3), and the internal chamber wall that vacuum pipe is passed in the upper end of rotating shaft (3) exposes, angulation is regulated drive end.
4. the type of the Multifunctional throttle for Vacuum coating device vacuum pipe structure according to claim 1 and 2, it is characterized in that: described vacuum pipe (3) is square structure, in throttle flap structure (5), baffle plate is square throttle flap, consists of some louvre curtain sheets, these some louvre curtain sheets and angle regulating unit connect and compose the louvre type syndeton, and the adjusting control end of angle regulating unit stretches out the vacuum pipe outer wall, angulation is regulated drive end.
5. the type of the Multifunctional throttle for Vacuum coating device vacuum pipe structure according to claim 1 and 2, it is characterized in that: the initial and end two ends of described cooling jacket (4) respectively are welded on joint flange (1) end face by welding process.
6. for the Multifunctional throttle Controlling System of Vacuum coating device, it is characterized in that: comprise computer control system (10), vacuum chamber (11), oil diffusion pump (12) and throttle-type vacuum pipe structure, throttle-type vacuum pipe structure is by the joint flange (1) and vacuum chamber (11) at two ends, the cap of high-vacuum baffle valve (12-1) of oil diffusion pump (12) connects, one of input terminus of computer control system (10) is regulated (15-1) by vacuum measurement and is communicated with vacuum chamber (11) inner chamber, it is oil diffusion pump (12) inlet end that two of the input terminus of computer control system (10) is regulated (15-2) connection cap of high-vacuum baffle valve (12-1) by vacuum measurement, the angular adjustment drive end of one of output terminal of computer control system (10) passing ratio setter (13) connecting joint flow pattern vacuum pipe structure, two of the output terminal of computer control system (10) connects mass-flow gas meter (14), control the input of vacuum chamber (11) process gas, form the pressure control system of intelligent oil diffusion pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201227761U CN203333738U (en) | 2013-03-18 | 2013-03-18 | Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201227761U CN203333738U (en) | 2013-03-18 | 2013-03-18 | Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203333738U true CN203333738U (en) | 2013-12-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013201227761U Expired - Fee Related CN203333738U (en) | 2013-03-18 | 2013-03-18 | Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203333738U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103173736A (en) * | 2013-03-18 | 2013-06-26 | 广东世创金属科技有限公司 | Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof |
| CN105134945A (en) * | 2015-08-10 | 2015-12-09 | 苏州普京真空技术有限公司 | Vacuum pipe sealing device |
-
2013
- 2013-03-18 CN CN2013201227761U patent/CN203333738U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103173736A (en) * | 2013-03-18 | 2013-06-26 | 广东世创金属科技有限公司 | Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof |
| CN103173736B (en) * | 2013-03-18 | 2018-01-12 | 广东世创金属科技股份有限公司 | Multifunctional throttle vacuum pipe structure and its control system for Vacuum coating device |
| CN105134945A (en) * | 2015-08-10 | 2015-12-09 | 苏州普京真空技术有限公司 | Vacuum pipe sealing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP03 | Change of name, title or address |
Address after: 510450, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee after: Guangdong Shi Chuan metal Science and Technology Co., Ltd. Address before: 510450 No. 15, Guangzhou economic and Technological Development Zone, Guangzhou, Guangdong, Qingnian Road Patentee before: Guangdong Strong Metal Technology Co., Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: 528313, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee after: Guangdong Shi Chuan metal Science and Technology Co., Ltd. Address before: 510450, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee before: Guangdong Shi Chuan metal Science and Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131211 Termination date: 20190318 |