CN203325875U - Wafer positioning fixture - Google Patents
Wafer positioning fixture Download PDFInfo
- Publication number
- CN203325875U CN203325875U CN201320432787XU CN201320432787U CN203325875U CN 203325875 U CN203325875 U CN 203325875U CN 201320432787X U CN201320432787X U CN 201320432787XU CN 201320432787 U CN201320432787 U CN 201320432787U CN 203325875 U CN203325875 U CN 203325875U
- Authority
- CN
- China
- Prior art keywords
- wafer
- chuck body
- fixture
- opening
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Abstract
The utility model relates to an electronic wafer processing tool, and in particular relates to a wafer positioning fixture. The wafer positioning fixture includes a fixture body. The wafer positioning fixture is characterized in that: the fixture body is a square; a lower part of the fixture body is provided with a base; two sides of the fixture body are respectively provided with a positioning screw hole for positioning on a device; a middle of the fixture body is provided with an opening for mounting a wafer; and contact heads of contact wafer positive/negative poles are arranged on two side walls of the opening. The wafer positioning fixture has the advantages of being suitable for a variety of the processing devices, being capable of carrying out the performance testing after processing, and realizing the full-automatic processing.
Description
Technical field
The utility model relates to a kind of electronic wafer machining tool, specifically relates to a kind of wafer orientation fixture.
Background technology
The wafer orientation fixture is mainly used in wafer is positioned, the instrument that facilitates wafer process to produce, existing wafer orientation fixture is to have the opening that wafer is installed in the middle of iron block, carry out wafer process because such fixture can only be fixed on a kind of equipment, while needing next operation, need to again change fixture, there is complex operation, can't automated production, working (machining) efficiency is low, the shortcoming that labour intensity is high.
Summary of the invention
The purpose of this utility model is exactly for above-mentioned shortcoming, and a kind of applicable various processing equipment that has is provided, and after processing, can carry out performance test, realizes a kind of wafer orientation fixture of full-automatic processing.
The technical solution of the utility model is achieved in that a kind of wafer orientation fixture, comprise chuck body, it is characterized in that: described chuck body is square, bottom is provided with base, both sides are provided with for being positioned at the positioning screw hole on equipment, centre is provided with for the opening of wafer is installed, and described opening two side is provided with the contact head of contact wafer both positive and negative polarity.
Described base bottom is provided with the joint pin on the equipment of being connected to, and described joint pin is arranged on connecting plate, and described connecting plate is provided with the supporting bracket for the stationary fixture body, and described supporting bracket is arranged on the Si Jiaochu of chuck body.
The described chuck body outside is provided with wire jack, and described wire jack connects contact head.
Further say: described chuck body is that copper billet is made.
In use, only wafer need be arranged in the opening of chuck body, base by the chuck body bottom is arranged on chuck body on process equipment, utilize the positioning screw hole of chuck body both sides that chuck body is located, thereby realize wafer process, after machining, the wire of connecting test device is inserted in wire jack, carry out the wafer property test, thereby form automation processing.
The beneficial effects of the utility model are: so a kind of wafer orientation fixture has applicable various processing equipment, after processing, can carry out performance test, realizes the advantage of full-automatic processing.
The accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
1, chuck body 2, base 3, positioning screw hole 4, opening 5, contact head 6, joint pin 7, connecting plate 8, supporting bracket 9, wire jack.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described.
As shown in Figure 1, a kind of wafer orientation fixture, comprise chuck body 1, it is characterized in that: described chuck body 1 is square, bottom is provided with base 2, both sides are provided with for being positioned at the positioning screw hole 3 on equipment, and centre is provided with the opening 4 for wafer is installed, and described opening 4 two sides are provided with the contact head 5 of contact wafer both positive and negative polarity.
Described base 2 bottoms are provided with the joint pin 6 on the equipment of being connected to, and described joint pin 6 is arranged on connecting plate 7, and described connecting plate 7 is provided with the supporting bracket 8 for stationary fixture body 1, and described supporting bracket 8 is arranged on the Si Jiaochu of chuck body 1.
Described chuck body 1 outside is provided with wire jack 9, and described wire jack 9 connects contact head 5.
Further say: described chuck body 1 is made for copper billet.
In use, only wafer need be arranged in the opening 4 of chuck body 1, base 2 by chuck body 1 bottom is arranged on chuck body 1 on process equipment, utilize the positioning screw hole 3 of chuck body 1 both sides by chuck body 1 location, thereby realize wafer process, after machining, the wire of connecting test device is inserted in wire jack 9, carry out the wafer property test, thereby form automation processing.
A kind of wafer orientation fixture like this has applicable various processing equipment, after processing, can carry out performance test, realizes the advantage of full-automatic processing.
Claims (4)
1. a wafer orientation fixture, comprise chuck body, it is characterized in that: described chuck body is square, bottom is provided with base, both sides are provided with for being positioned at the positioning screw hole on equipment, centre is provided with for the opening of wafer is installed, and described opening two side is provided with the contact head of contact wafer both positive and negative polarity.
2. a kind of wafer orientation fixture according to claim 1, it is characterized in that: described base bottom is provided with the joint pin on the equipment of being connected to, described joint pin is arranged on connecting plate, described connecting plate is provided with the supporting bracket for the stationary fixture body, and described supporting bracket is arranged on the Si Jiaochu of chuck body.
3. a kind of wafer orientation fixture according to claim 1, is characterized in that: be provided with wire jack outside described chuck body, described wire jack connection contact head.
4. a kind of wafer orientation fixture according to claim 1, it is characterized in that: described chuck body is that copper billet is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320432787XU CN203325875U (en) | 2013-07-21 | 2013-07-21 | Wafer positioning fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320432787XU CN203325875U (en) | 2013-07-21 | 2013-07-21 | Wafer positioning fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203325875U true CN203325875U (en) | 2013-12-04 |
Family
ID=49665184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320432787XU Expired - Fee Related CN203325875U (en) | 2013-07-21 | 2013-07-21 | Wafer positioning fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203325875U (en) |
-
2013
- 2013-07-21 CN CN201320432787XU patent/CN203325875U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131204 Termination date: 20140721 |
|
| EXPY | Termination of patent right or utility model |