CN203320122U - Flattening device and magnetron sputtering winding and coating device - Google Patents
Flattening device and magnetron sputtering winding and coating device Download PDFInfo
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- CN203320122U CN203320122U CN2013203679528U CN201320367952U CN203320122U CN 203320122 U CN203320122 U CN 203320122U CN 2013203679528 U CN2013203679528 U CN 2013203679528U CN 201320367952 U CN201320367952 U CN 201320367952U CN 203320122 U CN203320122 U CN 203320122U
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- nip rolls
- dilatation
- main axis
- flattening device
- tracheae
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Abstract
The utility model relates to a flattening device which comprises a flattening roller; the flattening roller is in a hollow closed state and can be expanded after being filled with gas; the flattening roller is provided with a rotating shaft, and comprises an air pipe, an inflator pump and a power device; one end of the air pipe is communicated with the flattening roller; one end of the inflator pump is communicated with the other end of the air pipe; gas enters the flattening roller through the air pipe; an output end of the power device is connected with the flattening roller by the rotating shaft, so that the flattening roller is driven to rotate; when the flattening device works, the flattening roller is driven to continuously work by the power device; the inflator pump is used for filling the gas into the flattening roller by the air pipe, and the flattening roller is expanded after being filled with the gas; in the coating process, a flexible substrate is unwound by an unwinding device and wound by a winding device periodically; after being filled with the gas, the expanded flattening roller continuously rotates and is directly contacted with the flexible substrate, and the pressure to the flexible substrate can be generated by the flattening roller, so that the flexible substrate is prevented from being creased in the coating process, and the production yield and quality can be improved. The utility model also provides a magnetron sputtering winding and coating device applying the flattening device.
Description
Technical field
The utility model relates to magnetron sputtering coil film coating equipment utility appliance, particularly relates to the magnetron sputtering coil film coating equipment of a kind of flattening device for magnetron sputtering coil film coating equipment and a kind of this flattening device of application.
Background technology
Obtain in recent years fast development based on flexible base material as flexible electronic (flexible electronics) technology of polyethylene terephthalate (Polyethylene terephthalate, PET) etc.Adopt the vacuum magnetron sputtering coating film technology to there is the nano material of light modulation effect take plastics film deposited monolayers or multiple layer metal, metal alloy or medium etc. on main flexible rolling base material, the thickness of every layer of nano material is between tens to tens nanometers, formed product has that can to plate material various, horizontal homogeneity is good, the advantage that the product optical characteristics is adjustable.
At present, flexible base material develops rapidly along with the technical renovation of touch-screen industry, and base material thickness commonly used is generally 188 μ m, 125 μ m, 50 μ m.Along with the raising gradually of touch screen technology level, the requirement of base material thickness is also progressively increased.The flexible parent metal plated film generally adopts the spirally wound coating technique to realize, yet the base material thickness used during the flexible parent metal winding film plating is larger, and the plated film difficulty also will increase, so the base material of 50 μ m thickness more and more is subject to the favor of touch-screen industry.But base material thickness is too little, easily cause in coating process producing again gauffer, produce yield and quality thereby reduce.
Summary of the invention
Based on this, be necessary easily to produce for flexible parent metal in coating process the problem of gauffer, provide a kind of and can prevent that flexible parent metal from producing the flattening device of gauffer and the magnetron sputtering coil film coating equipment that application changes flattening device in coating process.
A kind of flattening device comprises:
Nip rolls, described nip rolls is inflatable after being the hollow sealed shape and being filled with gas, and described nip rolls inside is provided with turning axle, and the axial length of described turning axle is greater than the axial length of described nip rolls;
Tracheae, an end of described tracheae is communicated with described nip rolls;
Aerator pump, an end of described aerator pump is communicated with the other end of described tracheae, and gas enters described nip rolls by described tracheae;
Power set, the output terminal of described power set is connected with described nip rolls by described turning axle, drives described nip rolls rotation.
Therein in embodiment, described nip rolls comprises: nip rolls shell, rotation adapting pipe and inflatable main axis of dilatation, described main axis of dilatation is positioned at the formed chamber of described nip rolls shell, described main axis of dilatation is inflatable after being the hollow sealed shape and being filled with gas, described main axis of dilatation is held in the inner side-wall of described nip rolls shell after expanding, and make described nip rolls shell expand and expand along with described main axis of dilatation, described main axis of dilatation is communicated with described tracheae by described rotation adapting pipe, and described rotation adapting pipe rotates with described turning axle and described main axis of dilatation.
In embodiment, described nip rolls shell is rubbery outer cover therein, and described main axis of dilatation is the rubber swelling axle.
In embodiment, the wall thickness of described main axis of dilatation is increased to two ends gradually by middle portion therein so that the turgidity of main axis of dilatation middle portion higher than the Thickness Distribution at ，Qie two ends, two ends about the middle portion rotational symmetry.
In embodiment, described tracheae is the rubber type tracheae therein, and described tracheae can bear the peak pressure that pressure is greater than aerator pump output gas.
In embodiment, also comprise control module therein, described control module is electrically connected to described power set, can regulate the rotation mode of described power set by described control module.
In embodiment, also comprise axle sleeve therein, an end of described axle sleeve is fixed in the filming equipment chamber inner wall, and the other end of described axle sleeve is sheathed on described turning axle, and described nip rolls is fixed to described filming equipment chamber inner wall.
In embodiment, described aerator pump is the manual type aerator pump therein.
A kind of magnetron sputtering coil film coating equipment, comprise wrap-up and unwinding device, described wrap-up periodically rotates with rolling, described unwinding device periodically rotates to unreel with identical speed of rotation with described wrap-up, also comprise flattening device as previously discussed, described flattening device is between described wrap-up and described unwinding device.
In embodiment, also comprise tensioning roller therein, described tensioning roller provides tension force, and described tensioning roller is between described wrap-up and described unwinding device and before being positioned at described flattening device station.
Above-mentioned flattening device and while applying the magnetron sputtering coil film coating equipment work of this flattening device, power set provides power for nip rolls, and nip rolls is rotated continuously; Aerator pump is filled with gas by tracheae in the nip rolls of hollow sealed shape, and nip rolls expands after being filled with gas; In the process of plated film, flexible parent metal is periodically unreeled by unwinding device, the wrap-up rolling, be filled with that the nip rolls expanded after gas rotates continuously and directly contact with flexible parent metal, thereby flexible parent metal is produced to pressure, can prevent that flexible parent metal from producing gauffer in coating process, thereby improve, produce yield and quality.
The accompanying drawing explanation
The structural representation that Fig. 1 is flattening device;
Fig. 2 is for applying the structural representation of the magnetron sputtering coil film coating equipment that Fig. 1 is arranged.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, embodiment of the present utility model is described in detail.A lot of details have been set forth in the following description so that fully understand the utility model.But the utility model can be implemented much to be different from alternate manner described here, those skilled in the art can be in the situation that do similar improvement without prejudice to the utility model intension, so the utility model is not subject to the restriction of following public concrete enforcement.
It should be noted that, when element is called as " being fixed in " another element, can directly can there be element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may have centering elements simultaneously.
Unless otherwise defined, all technology that this paper is used are identical with the implication that belongs to the common understanding of those skilled in the art of the present utility model with scientific terminology.The term used in specification sheets of the present utility model herein, just in order to describe the purpose of specific embodiment, is not intended to be restriction the utility model.Term as used herein " and/or " comprise one or more relevant Listed Items arbitrarily with all combinations.
Refer to Fig. 1, a kind of flattening device 100, comprise nip rolls 110, tracheae 120, aerator pump 130 and power set 140.Nip rolls 110 is inflatable after being the hollow sealed shape and being filled with gas.Nip rolls 110 inside are provided with turning axle 111, and the axial length of turning axle 111 is greater than the axial length of nip rolls 110.Be the two ends that turning axle 111 protrudes nip rolls 110.One end of tracheae 120 is communicated with nip rolls 110, and the other end of tracheae 120 is communicated with aerator pump 130, and gas can enter nip rolls 110 by tracheae 120, and nip rolls 110 is expanded.The output terminal of power set 140 is connected with nip rolls 110 by turning axle, drives nip rolls 110 rotations.
During above-mentioned flattening device 100 work, power set 140, for nip rolls 110 provides power, rotates nip rolls 110 continuously; Aerator pump 130 is filled with gas by tracheae 120 in nip rolls 110, and nip rolls 110 expands after being filled with gas; In the process of plated film, flexible parent metal 300 is periodically unreeled by unwinding device 210, wrap-up 220 rollings, being filled with the nip rolls 110 expanded after gas rotates continuously and directly contacts with flexible parent metal 300, nip rolls 110 after expansion is tightr with contacting of flexible parent metal 300, nip rolls 110 produces pressure-acting to flexible parent metal 300 in the process of rotation, so can prevent that flexible parent metal 300 from producing gauffer in coating process, improves and produces yield and quality.
In the present embodiment, nip rolls 110 can comprise nip rolls shell 112, rotation adapting pipe 113 and main axis of dilatation 114.Main axis of dilatation 114 is the hollow sealed shape, and main axis of dilatation 114 inside can be filled with gas, is filled with after gas inflatable.Main axis of dilatation 114 is positioned at the formed chamber of nip rolls shell 112, is held in the inner side-wall of described nip rolls shell 112 after main axis of dilatation 114 expands, and nip rolls shell 112 is expanded along with the expansion of main axis of dilatation 114.Main axis of dilatation 114 is communicated with tracheae 120 by rotation adapting pipe 113, aerator pump 130 is by tracheae 120, tracheae 120 is filled with gas by rotation adapting pipe 113 again in main axis of dilatation 114, after being filled with gas in main axis of dilatation 114, expand, the axial wall of main axis of dilatation 114 supports the inner side-wall at nip rolls shell 112, and nip rolls shell 112 is expanded along with the expansion of main axis of dilatation 114.
It is to be noted, even nip rolls shell 112, rotation adapting pipe 113 and main axis of dilatation 114 are not set, only arrange and be hollow sealed shape and the rear expandable nip rolls of inflation, also can realize flexible parent metal 300 is exerted pressure and driven flat flexible parent metal 300 away, so nip rolls shell 112, rotation adapting pipe 113 and main axis of dilatation 114 are not necessary.
In the present embodiment, nip rolls shell 112 can be rubbery outer cover, and main axis of dilatation 114 can be the rubber swelling axle.Rubber is the snappiness polymer materials with reversible deformation, and elasticity is large, under very little External Force Acting, can produce than large deformation, removes resilient after external force.Be filled with gas by aerator pump 130 in main axis of dilatation 114 after, main axis of dilatation 114 is subject to external force and can expands rapidly, and nip rolls shell 112 also expands thereupon, and flexible parent metal 300 is produced to pressure-acting.When not working, release the gas in main axis of dilatation 114, main axis of dilatation 114 and nip rolls shell 112 can restore to the original state.It is pointed out that in other embodiments, the material of nip rolls shell 112 and main axis of dilatation 114 can be also other material, as long as can produce elastic deformation after being filled with gas.
In the present embodiment, the wall thickness of main axis of dilatation 114 is increased to two ends gradually by middle portion so that the turgidity of main axis of dilatation 114 middle portions higher than the Thickness Distribution at ，Qie two ends, two ends about the middle portion rotational symmetry.Aerator pump 130 pumps into gas to main axis of dilatation 114, main axis of dilatation 114 dilatational straiies, and the middle portion turgidity is greater than two ends, forms the main axis of dilatation 114 that mid-diameter is greater than the two ends diameter.The Thickness Distribution at the two ends of main axis of dilatation 114 can be about the middle portion rotational symmetry, and wall thickness is increased to end gradually by centre.Correspondingly, nip rolls shell 112 also forms the structure that mid-diameter is greater than the two ends diameter.When nip rolls shell 112 directly contacts with flexible parent metal 300, because nip rolls shell 112 mid-diameters are greater than the diameter at two ends, the middle portion evagination of nip rolls shell 112, so the area that nip rolls shell 112 contacts with flexible parent metal 300 increases, so nip rolls 110 can strut flexible parent metal 300, further prevent that flexible parent metal 300 from producing fold.Certainly, in other embodiments, the wall thickness of main axis of dilatation 114 can be uniformly distributed, and aerator pump 130 pumps into gas to main axis of dilatation 114, and main axis of dilatation 114 evenly expands.
In the present embodiment, tracheae 120 is the rubber tracheae, and tracheae 120 can bear the peak pressure that pressure is greater than aerator pump 130 output gases.The gas that aerator pump 130 pumps into main axis of dilatation 114 enters main axis of dilatation 114 by tracheae 120, so the pressure that tracheae 120 can bear is greater than the peak pressure of aerator pump 130 output gases, can prevent tracheae 120 explosions.Certainly, in other embodiments, tracheae 120 can bear pressure also can equal the peak pressure of aerator pump 130.
In the present embodiment, flattening device 100 also comprises control module 160.Control module 160 is electrically connected to power set 140, by controlling the rotation mode of control module adjustable moving power apparatus.Power set 140 is specifically as follows motor.Power set 140 can be positioned at nip rolls 110 side edge, for rotating nip rolls 110.During nip rolls 110 reverse rotation, can be by regulating control module 160, with the governor motor reverse rotation.When nip rolls 110 need to just be wanted to rotate, can, by regulating control module 160, with governor motor, be rotated in the forward.
In the present embodiment, flattening device 100 also comprises axle sleeve 170.One end of axle sleeve 170 is fixed in filming equipment chamber inner wall 230, and the other end of axle sleeve 170 is sheathed on turning axle 111, and nip rolls 110 is fixed to filming equipment chamber inner wall 230.Concrete 170, two axle sleeves 170 of two axle sleeves that can comprise are sheathed on respectively on the turning axle 111 of nip rolls 110, and nip rolls 110 is fixed in to filming equipment chamber inner wall 230.
In the present embodiment, aerator pump 130 is manual type aerator pump 130.Can be filled with gas manually in nip rolls 110, convenient control.Certainly, in other embodiments, can also be self acting aerator pump 130.
Refer to Fig. 2, a kind of magnetron sputtering coil film coating equipment 200, comprise wrap-up 220 and unwinding device 210, and wrap-up 220 periodically rotates with rolling, unwinding device 210 periodically rotates to unreel with identical speed of rotation with wrap-up 220, also comprises above-mentioned flattening device 100.Flattening device 100 is positioned at the filming equipment chamber interior, and flattening device 100 is between described wrap-up 220 and described unwinding device 210, and flattening device 100 is fixed in filming equipment chamber inner wall 230 by axle sleeve 170.In the present embodiment, tensioning roller 240 can also be set, tensioning roller 240 provides tension force, in coating process, by 240 pairs of flexible parent metals 300 of tensioning roller, applies tension force.
During above-mentioned magnetron sputtering coil film coating equipment 200 work, flexible parent metal 300 periodically unreels via unwinding device 210, then via flattening device 100 belows and plated film drum 250, the periodic rolling of wrap-up 220.The aerator pump 130 of flattening device 100 pumps into gas to nip rolls 110, nip rolls 110 expands after being filled with gas, nip rolls 110 directly contacts with flexible parent metal 300 again, so it is tightr that nip rolls 110 contacts with flexible parent metal 300, when after nip rolls 110 expands, rotation contacts with flexible parent metal 300, can produce pressure to flexible parent metal 300, so can prevent that in coating process, flexible parent metal 300 produces fold.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. a flattening device, is characterized in that, comprising:
Nip rolls, described nip rolls is inflatable after being the hollow sealed shape and being filled with gas, and described nip rolls inside is provided with turning axle, and the axial length of described turning axle is greater than the axial length of described nip rolls;
Tracheae, an end of described tracheae is communicated with described nip rolls;
Aerator pump, an end of described aerator pump is communicated with the other end of described tracheae, and gas enters described nip rolls by described tracheae;
Power set, the output terminal of described power set is connected with described nip rolls by described turning axle, drives described nip rolls rotation.
2. flattening device according to claim 1, it is characterized in that, described nip rolls comprises: the nip rolls shell, rotation adapting pipe and inflatable main axis of dilatation, described main axis of dilatation is positioned at the formed chamber of described nip rolls shell, described main axis of dilatation is inflatable after being the hollow sealed shape and being filled with gas, described main axis of dilatation is held in the inner side-wall of described nip rolls shell after expanding, and make described nip rolls shell expand and expand along with described main axis of dilatation, described main axis of dilatation is communicated with described tracheae by described rotation adapting pipe, described rotation adapting pipe rotates with described turning axle and described main axis of dilatation.
3. flattening device according to claim 2, is characterized in that, described nip rolls shell is rubbery outer cover, and described main axis of dilatation is the rubber swelling axle.
4. flattening device according to claim 2, is characterized in that, the wall thickness of described main axis of dilatation is increased to two ends gradually by middle portion so that the turgidity of main axis of dilatation middle portion higher than the Thickness Distribution at ，Qie two ends, two ends about the middle portion rotational symmetry.
5. flattening device according to claim 1, is characterized in that, described tracheae is the rubber tracheae, and described tracheae can bear the peak pressure that pressure is greater than aerator pump output gas.
6. flattening device according to claim 1, is characterized in that, also comprises control module, and described control module is electrically connected to described power set, can regulate the rotation mode of described power set by described control module.
7. flattening device according to claim 1, it is characterized in that, also comprise axle sleeve, an end of described axle sleeve is fixed in the filming equipment chamber inner wall, the other end of described axle sleeve is sheathed on described turning axle, and described nip rolls is fixed to described filming equipment chamber inner wall.
8. flattening device according to claim 1, is characterized in that, described aerator pump is the manual type aerator pump.
9. a magnetron sputtering coil film coating equipment, it is characterized in that, comprise wrap-up and unwinding device, described wrap-up periodically rotates with rolling, described unwinding device periodically rotates to unreel with identical speed of rotation with described wrap-up, also comprise flattening device as claimed in any of claims 1 to 8 in one of claims, described flattening device is between described wrap-up and described unwinding device.
10. magnetron sputtering coil film coating equipment according to claim 9, is characterized in that, also comprises tensioning roller, and described tensioning roller provides tension force, and described tensioning roller is between described wrap-up and described unwinding device and before being positioned at described flattening device station.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203679528U CN203320122U (en) | 2013-06-25 | 2013-06-25 | Flattening device and magnetron sputtering winding and coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203679528U CN203320122U (en) | 2013-06-25 | 2013-06-25 | Flattening device and magnetron sputtering winding and coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203320122U true CN203320122U (en) | 2013-12-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203679528U Withdrawn - After Issue CN203320122U (en) | 2013-06-25 | 2013-06-25 | Flattening device and magnetron sputtering winding and coating device |
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| CN (1) | CN203320122U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103320759A (en) * | 2013-06-25 | 2013-09-25 | 南昌欧菲光科技有限公司 | Flattening device and magnetron-sputtering winding film-coating equipment |
| CN106048554A (en) * | 2016-06-02 | 2016-10-26 | 南京汇金锦元光电材料有限公司 | Method for flattening original film base belt for magnetron sputtering coating |
-
2013
- 2013-06-25 CN CN2013203679528U patent/CN203320122U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103320759A (en) * | 2013-06-25 | 2013-09-25 | 南昌欧菲光科技有限公司 | Flattening device and magnetron-sputtering winding film-coating equipment |
| CN103320759B (en) * | 2013-06-25 | 2016-03-30 | 南昌欧菲光科技有限公司 | Flattening device and magnetron sputtering coil film coating equipment |
| CN106048554A (en) * | 2016-06-02 | 2016-10-26 | 南京汇金锦元光电材料有限公司 | Method for flattening original film base belt for magnetron sputtering coating |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131204 Effective date of abandoning: 20160330 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20131204 Effective date of abandoning: 20160330 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |