CN203295607U - Spraying system and a wet etching device - Google Patents
Spraying system and a wet etching device Download PDFInfo
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- CN203295607U CN203295607U CN2013202838014U CN201320283801U CN203295607U CN 203295607 U CN203295607 U CN 203295607U CN 2013202838014 U CN2013202838014 U CN 2013202838014U CN 201320283801 U CN201320283801 U CN 201320283801U CN 203295607 U CN203295607 U CN 203295607U
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- spray piping
- rotating shaft
- sprinkling system
- pull bar
- spray
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Abstract
The utility model relates to the technical field of substrate etching, particularly to a spraying system and a wet etching device, which are used for improving the etching qualification rate. The spraying system comprises two opposite fixed support frames, a plurality of spraying pipeline groups between the two support frames, a plurality of swinging blocks, pull rods, a power device and a liquid supply pipeline, wherein two ends of each spraying pipeline group are respectively connected with the two support frames; each spraying pipeline group comprises at least one spraying pipeline and at least one rotating shaft; at least one end of each spraying pipeline group is fixedly connected with one rotating shaft; one end of each swinging block is fixedly connected with one rotating shaft; the pull rods are respectively connected with the other ends of the swinging blocks; the power device is in transmission connection with the pull rods; the pull rods drive the swinging blocks to swing under the drive of the power device; the spraying pipelines rotate under the drive of the corresponding swinging blocks and rotating shafts; the liquid supply pipeline is communicated with the spraying pipelines respectively and used for supplying liquid to the spraying pipelines.
Description
Technical field
The utility model relates to the base plate carving and corrosion technical field, particularly a kind of sprinkling system and Wet-method etching device.
Background technology
In the substrate manufacture process, be generally to utilize Wet-method etching device to carry out etching to form required pattern to the metallic diaphragm on substrate.Wet-method etching device comprises: vacuum chamber is arranged at the sprinkling system at vacuum chamber top; Behind the spray interval of substrate being sent into to vacuum chamber, sprinkling system sprays etching liquid to substrate, and the metallic diaphragm on etch substrate is to form required pattern.
As shown in Figure 1, be the structural representation of a kind of sprinkling system in prior art.This sprinkling system comprises two spray unit, each spray unit comprises: the main line 10 of carrying etching liquid, the several spray pipings 11 that are communicated with main line 10 respectively and equidistantly arrange, on each spray piping 11, be provided with a plurality of nozzles 111, perpendicular to several spray pipings 11 pull bar 12 that is fixedly connected with several spray pipings 11 respectively, lay respectively at roller assembly 13 and the slide block assembly 14 of pull bar 12 two ends for tie-strut 12, and the motor 15 that is in transmission connection and moves forward and backward be used to driving pull bar 12 with slide block assembly 14; Wherein, roller assembly 13 comprises: be fixed on the bearing 131 on the vacuum chamber inwall, roll and be arranged on the roller bearing 132 on bearing 131, and roller bearing 132 and pull bar 12 1 end in contact; Slide block assembly 14 comprises: be fixed on two parallel guides 141 on the vacuum chamber inwall, and each guide rail 141 is parallel with pull bar 12 length directions, be slidably mounted on two slide blocks 142 on guide rail 141, and slide block 142 is in transmission connection (not shown in FIG. 142 and 15 annexations) with motor 15, and slide block 142 is fixedly connected with pull bar 12 the other ends.During spray, motor 15 drives the relative roller assembly 13 of pull bar 12 and slide block assembly 14 moves forward and backward, and pull bar 12 drives several spray pipings 11 and moves forward and backward, and etching liquid is sprayed on substrate in the process that several spray pipings 11 move forward and backward.
In existing sprinkling system, several spray pipings 11 and pull bar 12 are supported by roller assembly 13 and slide block assembly 14, pull bar 12 is done front-rear reciprocation movement on roller bearing 132, wearing and tearing to pull bar 12 and roller bearing 132 are larger, be prone to grind away stuck phenomenon and cross the phenomenon at quarter of roller bearing 132, affect the homogeneity of etching; In addition, when pull bar 12 and roller bearing 132 fricting movement, fricative chip can fall at substrate surface, affects the good article rate of etching.
The utility model content
The purpose of this utility model is to provide a kind of sprinkling system and Wet-method etching device, be used to improving the good article rate of etching.
To achieve these goals, the utility model provides following technical scheme:
A kind of sprinkling system comprises:
Two bracing frames that position is fixed and is oppositely arranged;
The spray piping group of a plurality of equidistant arrangements between described two bracing frames, the two ends of each described spray piping group are connected with two bracing frames respectively, each described spray piping group comprises at least one spray piping and at least one rotating shaft, and at least one end of each described spray piping is fixedly connected with rotating shaft; Each described spray piping has a plurality of nozzles;
A plurality of swinging blocks, an end of each swinging block is fixedly connected with a described rotating shaft, and each described swinging block swings in the plane perpendicular to described spray piping;
The pull bar that is connected with described a plurality of swinging block the other ends respectively;
With the power set that described pull bar is in transmission connection, described pull bar drives described a plurality of swinging block and swings under the driving of described power set, and described spray piping rotates under the drive of the swinging block of correspondence and rotating shaft;
And with each described spray piping, be communicated with respectively, the fluid supply conduit of liquid is provided for each described spray piping.
Preferably, each support frame as described above is the back-up block with a plurality of open holess, and an end of corresponding described spray piping group is arranged in described open holes by bearing.
Preferably, described rotating shaft is hollow cylinder, and corresponding described swinging block is fixed on described hollow cylinder outside surface, and an end of corresponding spray piping stretches in described hollow cylinder and fixes.
Preferably, each described spray piping group also comprises: between two bracing frames, be used to carrying the pipeline frame of described spray piping.
Preferably, described pipeline frame is for offering the cylinder body rod of stopper slot at length direction, and corresponding described spray piping is arranged in described stopper slot.
Further, above-mentioned sprinkling system also comprises: at least one retaining plate, described retaining plate is connected with described rotating shaft, and described rotating shaft can be rotated around Pivot Point Center.
Preferably, each described retaining plate has a dead eye, and described rotating shaft is arranged in described dead eye by bearing.
Further, above-mentioned sprinkling system also comprises: also comprise: the position transducer that is positioned at described pull bar one end, detection described pull bar shift position.
Preferably, described spray piping group comprises two or more spray pipings, between every two spray pipings, by rotating shaft, is fixedly connected with.
The utility model also provides a kind of Wet-method etching device simultaneously, comprises the sprinkling system with above-mentioned feature.
The sprinkling system that the utility model provides, drive pull bar by power set and move forward and backward to drive a plurality of swinging blocks swings, thereby drive a plurality of rotating shafts that are connected with the plurality of pendulums motion block respectively, rotates, and then drive the spray that the spray piping group has been rotated etching liquid; Compared with prior art, the sprinkling system that adopts the utility model to provide, can alleviate the frictional dissipation between each moving parts, reduced the stuck phenomenon of grinding away, crossed phenomenon appearance at quarter and the generation of friction chip, improve the homogeneity of etching liquid spray, thereby improved the good article rate of etching; In addition, the sprinkling system that the utility model provides, simple in structure, convenient disassembly, be easy to sprinkling system is carried out to inspection and maintenance.
The accompanying drawing explanation
Fig. 1 is the structural representation of a kind of sprinkling system in prior art;
The structural representation of a kind of sprinkling system that Fig. 2 provides for the utility model embodiment mono-;
Fig. 3 is the structural representation of the pipeline frame for carrying Fig. 2 spray piping;
The structural representation of a kind of sprinkling system that Fig. 4 provides for the utility model embodiment bis-
Fig. 5 is the annexation figure of retaining plate and rotating shaft in Fig. 4.
Reference numeral:
The 10-main line, the 11-spray piping, 12, the 23-pull bar,
The 13-roller assembly, the 14-slide block assembly, the 15-motor,
The 20-bracing frame, 21-spray piping group, the 22-swinging block,
The 24-power set, the 25-fluid supply conduit, the 26-retaining plate,
The 27-position transducer, the 211-spray piping, the 212-rotating shaft,
The 213-nozzle, 214-pipeline frame.
Embodiment
Sprinkling system in existing Wet-method etching device, spray piping and pull bar are supported by roller assembly and slide block assembly, and be when pull bar is done front-rear reciprocation movement on roller bearing, larger to the wearing and tearing of pull bar and roller bearing, be prone to grind away stuck phenomenon and cross the phenomenon at quarter of roller bearing, affect the homogeneity of etching; In addition, when pull bar and roller bearing fricting movement, fricative chip can fall at substrate surface, affects the good article rate of etching.
In view of this, the utility model provides a kind of improved technical scheme, but utilize a plurality of swinging blocks of swing to drive a plurality of rotating shafts that are connected with the plurality of pendulums motion block respectively, rotates, thereby drives the spray that the spray piping group has been rotated etching liquid; Compared with prior art, increased the point of suppon that supports a plurality of spray piping groups, thereby alleviated the frictional dissipation between each moving parts, and reduced the stuck phenomenon or cross the quarter phenomenon and occur of grinding away between each moving parts, improve the homogeneity of etching liquid spray, and then improved the good article rate of etching.
In order to make those skilled in the art better understand the technical solution of the utility model, below in conjunction with Figure of description, the utility model embodiment is described in detail.
It should be noted that the sprinkling system that provides because of the utility model embodiment is applicable to the spray of plurality of liquid, as etching liquid or scavenging solution etc., convenient in order to describe, hereinafter as an example of the spray etching liquid example, be described.
The structural representation of a kind of sprinkling system that provides for the utility model embodiment mono-as shown in Figure 2.The sprinkling system that the utility model embodiment mono-provides comprises:
Two bracing frames 20 that position is fixed and is oppositely arranged;
The spray piping group 21 of a plurality of equidistant arrangements between two bracing frames 20, the two ends of each spray piping group 21 are connected with two bracing frames 20 respectively, each spray piping group 21 comprises at least one spray piping 211 and at least one rotating shaft 212, at least one end of each spray piping 211 is fixedly connected with rotating shaft 212, and each spray piping 211 has a plurality of nozzles 213;
A plurality of swinging blocks 22, an end of each swinging block 22 is fixedly connected with a rotating shaft 212, and each swinging block 22 swings in the plane perpendicular to spray piping 211;
The pull bar 23 that is connected with a plurality of swinging block 22 the other ends respectively;
With the power set 24 that pull bar 23 is in transmission connection, pull bar 23 drives a plurality of swinging blocks 22 and swings under the driving of power set 24, and spray piping 211 rotates under the drive of the swinging block 22 of correspondence and rotating shaft 212;
And with each spray piping 211, be communicated with respectively, the fluid supply conduit 25 of etching liquid is provided for each spray piping 211.
During concrete enforcement, two bracing frames 20 are oppositely arranged and are fixed on desired location, and preferably, each bracing frame 20 is for having the back-up block of a plurality of open holess, and an end of corresponding spray piping group 21 is arranged in open holes by bearing.
A plurality of spray piping groups 21 are arranged between two bracing frames 20 and equidistantly, and the two ends of a plurality of spray piping groups 21 join with two bracing frames 20 respectively, each spray piping group 21 comprises at least one spray piping 211 and at least one rotating shaft 212, at least one end and the rotating shaft 212 of each spray piping 211 are fixedly linked, and each spray piping 211 has a plurality of nozzles 213; In the present embodiment, each spray piping group 21 comprises: a spray piping 211, and the rotating shaft 212 that is fixedly connected with spray piping 211 of an end, the other end of rotating shaft 212 is connected with bracing frame 20.It should be noted that, each spray piping group 21 is to be flexibly connected with the mode of connection of bracing frame 20, and each spray piping group 21 can be rotated relative to bracing frame 20 around Pivot Point Center.
Preferably, rotating shaft 212 is hollow cylinder, and corresponding swinging block 22 is fixed on the hollow cylinder outside surface, and an end of corresponding spray piping 211 stretches in hollow cylinder and fixes; So arrange, can further alleviate the weight of a plurality of spray piping groups 21, thereby alleviate the frictional dissipation between each moving parts, and then reduced the stuck phenomenon or cross the quarter phenomenon and occur of grinding away between each moving parts, improve the homogeneity of etching liquid spray.
One end of each swinging block 22 is fixedly connected with a corresponding rotating shaft 212, the other end is connected with pull bar 23, pull bar 23 is also to be flexibly connected with the mode of connection of swinging block 22 herein, pull bar 23 can drive swinging block 22, swinging block 22 also can rotate relative to pull bar 23, and each swinging block 22 is hinged with pull bar in other words.
When the sprinkling system that employing above-described embodiment one provides sprays etching liquid, power set 24 drives pull bar 23 and moves forward and backward, thereby driving a plurality of swinging blocks 22 swings in the plane perpendicular to spray piping 211, because each spray piping group 21 is fixedly connected with a swinging block 22 by rotating shaft 212, therefore, a plurality of swinging blocks swing and will drive each spray piping group 21 rotations, thereby complete the etching liquid spray.Compared with prior art, increased the point of suppon that supports a plurality of spray pipings 21, make the bearing capacity of each point of suppon reduce, thereby alleviated the frictional dissipation between each moving parts, and reduced the stuck phenomenon or cross the quarter phenomenon and occur of grinding away between each moving parts, improve the homogeneity of etching liquid spray, thereby improved the good article rate of etching; In addition, the sprinkling system that the utility model provides, simple in structure, convenient disassembly, be easy to sprinkling system is carried out to inspection and maintenance.
In above-described embodiment one, the two ends of each spray piping group 21 directly are connected with two bracing frames 20, also can in the following way the two ends of spray piping group 21 be connected with two bracing frames 20, as shown in Figure 3, be the structural representation of the pipeline frame for carrying Fig. 2 spray piping.Preferably, each spray piping group 21 also comprises: between two bracing frames 20, be used to carrying the pipeline frame 214 of spray piping 211; When adopting pipeline frame 214 carrying spray piping 211, spray piping 211 is fixedly arranged on pipeline frame 214, at least one end of pipeline frame 214 is fixedly connected with rotating shaft 212, and pipeline frame 214 can rotate relative to two bracing frames 20 around Pivot Point Center, thereby drive spray piping 211, rotates.Preferably, pipeline frame 214 is for offering the cylinder body rod of stopper slot at length direction, and corresponding spray piping 211 is arranged in stopper slot.
As shown in Figure 4 and Figure 5, the structural representation of a kind of sprinkling system of providing for the utility model embodiment bis-of Fig. 4; Fig. 5 is the annexation figure of retaining plate and rotating shaft in Fig. 4.The sprinkling system that the utility model embodiment bis-provides comprises:
Two bracing frames 20 that position is fixed and is oppositely arranged;
The spray piping group 21 of a plurality of equidistant arrangements between two bracing frames 20, the two ends of each spray piping group 21 are connected with two bracing frames 20 respectively, each spray piping group 21 comprises two spray pipings 211 and a rotating shaft 212, rotating shaft 212 is fixedly connected with between two spray pipings 211 and with two spray pipings 211, each spray piping 211 has a plurality of nozzles 213;
At least one retaining plate 26, retaining plate 26 is connected with rotating shaft 212, and rotating shaft 212 can be rotated around Pivot Point Center;
A plurality of swinging blocks 22, an end of each swinging block 22 is fixedly connected with a rotating shaft 212, and each swinging block 22 swings in the plane perpendicular to spray piping 211;
The pull bar 23 that is connected with a plurality of swinging block 22 the other ends respectively;
With the power set 24 that pull bar 23 is in transmission connection, pull bar 23 drives a plurality of swinging blocks 22 and swings under the driving of power set 24, and spray piping 211 rotates under the drive of the swinging block 22 of correspondence and rotating shaft 212;
And with each spray piping 211, be communicated with respectively, the fluid supply conduit 25 of etching liquid is provided for each spray piping 211.
With embodiment mono-, compare, embodiment bis-has increased the retaining plate 26 be used to falling to hang a plurality of spray piping groups 21, particularly, adopt in the present embodiment two retaining plates 26, each retaining plate 26 has a dead eye, rotating shaft 212 is arranged in dead eye by bearing, makes rotating shaft 212 to rotate relative to retaining plate 26.So arrange, can further reduce the bearing capacity of each point of suppon, alleviate the frictional dissipation between each moving parts, and reduce grind away stuck phenomenon or phenomenon appearance at quarter excessively between each moving parts, thereby improved the homogeneity of etching liquid spray, and then improved the good article rate of etching.
Continuation is referring to Fig. 4, and in order to increase the reliability of sprinkling system, further, above-mentioned sprinkling system also comprises: the position transducer 27 that is positioned at pull bar 23 1 ends, detection pull bar 23 shift positions.In the present embodiment, adopt two position transducers 27, be respectively used to detect position that pull bar 23 moves forward and mobile position backward, judge the consistence of shift position forward or backward, consistent with this hunting range that guarantees each a plurality of swinging block 22, improve etching homogeneity, thereby improve the good article rate of etching.
In above-described embodiment one, spray piping group 21 comprises a spray piping 211 and a rotating shaft 212; In above-described embodiment two, spray piping group 21 comprises two spray pipings 211, the rotating shaft 212 that is fixedly connected with two spray pipings 211 respectively with two ends; Further, above-mentioned spray piping group 21 can comprise two or more spray pipings 211, between every two spray pipings, by rotating shaft 212, is fixedly connected with; For instance, when spray piping group 21 comprises three spray pipings 211 and two rotating shafts 212, three spray pipings 211 are connected successively by two rotating shafts 212, the end that is first spray piping 211 is connected with the head end of second spray piping 211, and the end of second spray piping 211 is connected with the head end of the 3rd spray piping 211.
The utility model also provides a kind of Wet-method etching device simultaneously, comprising: the sprinkling system with above-mentioned feature.
In sum, the sprinkling system that the utility model provides, by power set, drive pull bar and move forward and backward to drive a plurality of swinging blocks swings, thereby drive a plurality of rotating shafts that are connected with the plurality of pendulums motion block respectively, rotate, and then drive the spray that the spray piping group has been rotated etching liquid; Compared with prior art, the sprinkling system that adopts the utility model to provide, can alleviate the frictional dissipation between each moving parts, reduced the stuck phenomenon of grinding away, crossed phenomenon appearance at quarter and the generation of friction chip, improve the homogeneity of etching liquid spray, thereby improved the good article rate of etching; In addition, the sprinkling system that the utility model provides, simple in structure, convenient disassembly, be easy to sprinkling system is carried out to inspection and maintenance.
Obviously, those skilled in the art can carry out various changes and modification and not break away from spirit and scope of the present utility model the utility model.Like this, if within of the present utility model these are revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model also is intended to comprise these changes and modification interior.
Claims (10)
1. a sprinkling system, is characterized in that, comprising:
Two bracing frames that position is fixed and is oppositely arranged;
The spray piping group of a plurality of equidistant arrangements between described two bracing frames, the two ends of each described spray piping group are connected with two bracing frames respectively, each described spray piping group comprises at least one spray piping and at least one rotating shaft, and at least one end of each described spray piping is fixedly connected with rotating shaft; Each described spray piping has a plurality of nozzles;
A plurality of swinging blocks, an end of each swinging block is fixedly connected with a described rotating shaft, and each described swinging block swings in the plane perpendicular to described spray piping;
The pull bar that is connected with described a plurality of swinging block the other ends respectively;
With the power set that described pull bar is in transmission connection, described pull bar drives described a plurality of swinging block and swings under the driving of described power set, and described spray piping rotates under the drive of the swinging block of correspondence and rotating shaft;
And with each described spray piping, be communicated with respectively, the fluid supply conduit of liquid is provided for each described spray piping.
2. sprinkling system as claimed in claim 1, is characterized in that, each support frame as described above is the back-up block with a plurality of open holess, and an end of corresponding described spray piping group is arranged in described open holes by bearing.
3. sprinkling system as claimed in claim 1, is characterized in that, described rotating shaft is hollow cylinder, and corresponding described swinging block is fixed on described hollow cylinder outside surface, and an end of corresponding spray piping stretches in described hollow cylinder and fixes.
4. sprinkling system as claimed in claim 1, is characterized in that, each described spray piping group also comprises: between two bracing frames, be used to carrying the pipeline frame of described spray piping.
5. sprinkling system as claimed in claim 4, is characterized in that, described pipeline frame is for offering the cylinder body rod of stopper slot at length direction, and corresponding described spray piping is arranged in described stopper slot.
6. sprinkling system as claimed in claim 1, is characterized in that, also comprises: at least one retaining plate, described retaining plate is connected with described rotating shaft, and described rotating shaft can be rotated around Pivot Point Center.
7. sprinkling system as claimed in claim 6, is characterized in that, each described retaining plate has a dead eye, and described rotating shaft is arranged in described dead eye by bearing.
8. sprinkling system as claimed in claim 1, is characterized in that, also comprises: the position transducer that is positioned at described pull bar one end, detection described pull bar shift position.
9. as the described sprinkling system of claim 1-8 any one, it is characterized in that, described spray piping group comprises two or more spray pipings, between every two spray pipings, by rotating shaft, is fixedly connected with.
10. a Wet-method etching device, is characterized in that, comprising: described sprinkling system as arbitrary as claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202838014U CN203295607U (en) | 2013-05-22 | 2013-05-22 | Spraying system and a wet etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202838014U CN203295607U (en) | 2013-05-22 | 2013-05-22 | Spraying system and a wet etching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203295607U true CN203295607U (en) | 2013-11-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202838014U Expired - Fee Related CN203295607U (en) | 2013-05-22 | 2013-05-22 | Spraying system and a wet etching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203295607U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330907A (en) * | 2014-10-30 | 2015-02-04 | 深圳市华星光电技术有限公司 | TFT (Thin Film Transistor) substrate spraying device and etching system |
-
2013
- 2013-05-22 CN CN2013202838014U patent/CN203295607U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330907A (en) * | 2014-10-30 | 2015-02-04 | 深圳市华星光电技术有限公司 | TFT (Thin Film Transistor) substrate spraying device and etching system |
| CN104330907B (en) * | 2014-10-30 | 2017-06-06 | 深圳市华星光电技术有限公司 | TFT substrate spray equipment and etch system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150707 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150707 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150707 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131120 |