CN203291814U - Micron-sized high-speed liquid drop generation device - Google Patents

Micron-sized high-speed liquid drop generation device Download PDF

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Publication number
CN203291814U
CN203291814U CN2013202686505U CN201320268650U CN203291814U CN 203291814 U CN203291814 U CN 203291814U CN 2013202686505 U CN2013202686505 U CN 2013202686505U CN 201320268650 U CN201320268650 U CN 201320268650U CN 203291814 U CN203291814 U CN 203291814U
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China
Prior art keywords
runner
drop
generation device
inner housing
feed conduit
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Expired - Lifetime
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CN2013202686505U
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Chinese (zh)
Inventor
王宇
张罗莎
吴晓斌
陈进新
王魁波
罗艳
谢婉露
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Institute of Microelectronics of CAS
Aerospace Information Research Institute of CAS
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Academy of Opto Electronics of CAS
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Abstract

The utility model discloses a micron-order high-speed liquid drop generation device. The device is used for converting a stationary liquid material into liquid drops and ejecting the liquid drops at a certain speed. The liquid drop generation device comprises at least one feeding guide pipe (10) and a cavity, wherein a runner (11) is arranged in a central position of the cavity, and a central shaft of the runner is parallel to the horizontal plane; and the feeding guide pipe (10) penetrates through the upper part of the cavity and reaches the space where the runner (11) is located, so that a liquid material (8) in a liquid storage box (9) can drop onto the side surface of the runner (11) through the feeding guide pipe (10), and the runner (11) accelerates the flowing-in liquid material and then tosses out the liquid material in the form of drops from a tangential direction of the side surface of the runner (11). The micron-sized high-speed liquid drop generation device can produce micron-order drops with stable and an adjustable ejection frequency and diameter and at a certain initial speed.

Description

A kind of micron order high speed drop generation device
Technical field
The utility model relates to the drop generation device that a kind of micron order exceeds radio frequency rate, high initial speed degree, dimensionally stable, belongs to instrument, instrument field.
Background technology
Along with the raising of scientific and technological level, increasing field need to provide micron order diameter, dimensionally stable, the outgoing frequency is higher and have the drop generation device of certain initial velocity, such as grenz ray, extreme ultraviolet are luminous, inkjet printing etc.Such demand promotion correlative study continues to bring out.
Such as publication number is that US4723262 B1, utility model name are called the United States Patent (USP) of " APPARATUS FOR PRODUCTION SOFT X-RAYS USING A HIGH ENERGY LASER BEAM ", utilize fluid pressure differential that the liquid in liquid reserve tank is extruded by conduit, form stream of liquid droplets.This apparatus structure is simple, but can't effectively control liquid-drop diameter, drop outgoing frequency and outgoing speed.
Aspect the control liquid-drop diameter, publication number is that US2007257970 A1, utility model name are called in the United States Patent (USP) prospectus of " DROPLETS GENERATOR " and at first by conduit, liquid are carried out to current limliting, by piezo-electric crystal, vibrate and make fluid separation applications become each droplet again, finally by the nozzle outgoing.Although liquid-drop diameter can effectively be controlled by the vibration frequency of piezo-electric crystal, the drop outgoing initial velocity that the method generates is lower, can't be applied to the drop initial velocity device that has certain requirements.
Improving aspect initial velocity, publication number is that the Chinese patent prospectus that CN102210997 A, name are called " single-particle high-speed drop generator " has proposed drop generating device shown in Figure 1.As shown in Figure 1, liquid reserve tank 1 is be used to storing the liquid material 2 that forms drop, its underpart is communicated with a conduit 7, in liquid material 2 gravitate inflow catheters 7 in liquid reserve tank 1, the outer ring of conduit 7 is equipped with piezoelectric ceramics 3, by on piezoelectric ceramics 3, applying square-wave signal, change its internal diameter, make conduit 7 periodically be in conducting and by state, thereby effectively control drop outgoing frequency.In the drop outlet, charged ring 4 is installed, is made liquid droplet charged, by accelerating field 5 and deflecting electric field 6, change outgoing speed and the exit direction of drop.The disclosed scheme of this patent application prospectus can reach the purpose of controlling drop outgoing frequency and initial velocity, but can't effectively control liquid-drop diameter, and on the drop that produces with electric charge, be unfavorable for subsequent applications.
Simultaneously, existing micron order drop generation device mostly generates is continuous drop chain on a line only, can't realize Shang De space, plane droplet distribution, has limited the range of application of drop generation device.
The utility model content
(1) technical problem that will solve
The utility model aim to provide a kind of simple and reliable high frequency, at a high speed, micron order drop generation device, drop outgoing frequency is lower to solve in existing drop generation device, initial velocity is controlled and the problem such as is difficult for, the outgoing liquid-drop diameter is unstable, apparatus structure is complicated.
(2) technical scheme
The utility model proposes a kind of drop generation device, after static liquid material being converted into to drop, with certain speed, penetrate, this device comprises at least one feed conduit, this drop generation device also comprises a cavity, the center of this cavity is provided with a runner, this runner is cylindrical and can rotate around its central shaft, and this central axes is in horizontal plane; Described feed conduit penetrates the space that arrives described runner place from described cavity top, so that the liquid material in described liquid reserve tank can drop onto the side of described runner by described feed conduit, thereby this runner tangentially throws away described liquid material from of this runner side after accelerating for the liquid material that flows into the drop form.
According to the specific embodiment of the present utility model, the extended line of described feed conduit and the central shaft of described runner are non-intersect.
According to the specific embodiment of the present utility model, described cavity is comprised of an inner housing and a shell body, and described inner housing is surrounded by shell body, and the two has certain spacing; And described runner is surrounded by described inner housing, and also has certain spacing between this runner and this inner housing; Described feed conduit penetrated the space at described shell body and inner housing arrival described runner place successively from described cavity top.
According to the specific embodiment of the present utility model, between the inner housing of described cavity and shell body, be provided with the inside that is connected this inner housing and the material outlet canal of this shell body outside, its quantity is with described to go out feed conduit identical, and the bearing of trend of this material outlet canal is consistent with the direction of advance of the drop that is thrown away by described runner, so that the drop that is thrown away by described runner can shine by this material outlet canal the outside of described cavity.
According to the specific embodiment of the present utility model, the outside of described material outlet canal is equipped with piezoelectric ceramics, and the internal diameter of this material outlet canal can be regulated by piezoelectric ceramics.
According to the specific embodiment of the present utility model, between the outside of described inner housing and described shell body, be provided with fistulae, so that the unnecessary liquid material in described inner housing flow to the outside of described shell body by this fistulae.
According to the specific embodiment of the present utility model, the side opening of described runner is fluted, and the quantity of described groove is identical with described feed conduit, and each groove is aimed at each feed conduit.
According to the specific embodiment of the present utility model, described groove is rectangular recess, v-depression, U-shaped groove or trapezoidal groove.
(3) beneficial effect
The utility model can produce radio frequency rate and diameter and all stablizes adjustable and have a micron order drop of certain initial velocity.Simultaneously, the utility model can, by simple and easy repacking, can produce and have the droplet array that certain space distributes.
The accompanying drawing explanation
Fig. 1 is the structural representation of a kind of drop generation device in prior art;
Fig. 2 is the structural representation of an embodiment of drop generation device of the present utility model;
Fig. 3 is the inside cavity enlarged drawing of an embodiment of liquid end generation device of the present utility model;
The numerous embodiments schematic diagram of Fig. 4 A to Fig. 4 B runner of the present utility model;
Fig. 5 is the structural representation that can produce the runner of droplet array of the present utility model.
The specific embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
The utility model aims to provide the simple and reliable micron order drop generation device that exceeds radio frequency rate, high initial speed degree, dimensionally stable.
Fig. 2 is the structural representation of an embodiment of drop generation device of the present utility model.As shown in Figure 2, this device comprises a liquid reserve tank 9 and a cavity, the center of cavity is provided with a runner 11, this runner 11 is cylindrical and can rotate around its central shaft, this central axes is in horizontal plane, this cavity is comprised of an inner housing 12 and a shell body 13, and inner housing 12 is surrounded by shell body 13, and the two has certain spacing; Described runner 11 is surrounded by described inner housing 12, and, between runner 11 and inner housing 12, also have certain spacing.
Liquid reserve tank 9 is positioned at the top of cavity, for storage of liquids material 8.The bottom of liquid reserve tank 9 is connected with a feed conduit 10, and this feed conduit 10 penetrated the space at shell body 13 and inner housing 12 arrival runner 11 places successively from cavity top, like this, the liquid material 8 in liquid reserve tank 9 can drop onto the side (columniform side) of this runner 11 by this feed conduit 10.
Fig. 3 has shown the enlarged drawing of subelement of the inside cavity of this embodiment.As shown in Figure 3, rotary output axis 23 interlocks of the rotating shaft of described runner 11 and a motor, this motor 23 can carry out high speed rotating, and thus, this high-speed electric expreess locomotive 23 can provide for runner 11 power of high speed rotating.
The liquid outlet of described feed conduit 10 is positioned at the eccentric position of runner 11, and so-called eccentric position refers to that the central shaft of the extended line of described feed conduit 10 and runner 11 is non-intersect, as shown in Figure 2.Liquid material 8 flows into the edge of runner 11 by feed conduit 10, like this, one from these runner 11 sides after the liquid material that this runner 11 is inflow accelerates tangentially throws away described liquid material with the drop form, and the drop that throws away as shown in Figure 2.When liquid object 8 flowed into runner constantly, the drop that throws away became the drop 19~23 of outgoing at certain intervals.
Between the inner housing 12 of described cavity and shell body 13, be provided with a material outlet canal 17 that is connected inside and shell body 13 outsides of inner housing 12, and the bearing of trend of this material outlet canal is consistent with the direction of advance of the drop that is thrown away by runner 12.Like this, the drop that is thrown away by runner 11 can shine by this material outlet canal 17 outside of cavity.
Control the rotating speed of runner 11, can make drop enter material outlet canal after required runner tangential direction throws away, material outlet canal 17 can carry out the diameter selection to the drop that throws away, and only makes the drop outgoing of diameter less than catheter diameter.So, shine the drop 19~23rd of cavity outside, the drop with required diameter size.
According to preferred embodiment of the present utility model, the outside of described material outlet canal 17 is equipped with piezoelectric ceramics 16, and like this, the internal diameter of this material outlet canal 17 can be regulated by piezoelectric ceramics 16.When the internal diameter of material outlet canal 17 was excessive, the input voltage that changes piezoelectric ceramics 16 made its inside contraction, and the stressed generation elastic deformation of conduit internal diameter reduces; When the internal diameter of material outlet canal 17 is too small, reduce the input voltage of piezoelectric ceramics 16, the conduit pressurized reduces, and elastic deformation recovers, and internal diameter increases.
According to another preferred embodiment of the present utility model, between the outside of the inner housing 12 of described cavity and shell cavity body 13, be provided with a fistulae 18, thus, the unnecessary liquid material in inner housing can flow into by this fistulae 18 collection box 14 of the outside that is positioned at shell body.As shown in Figure 2, this unnecessary liquid object 15 can re-start recycling.
Feed conduit 10 is inputted liquid material in high speed runner 11, and liquid material accelerates by high speed runner 11, and in accelerator, liquid is subjected to material viscous force and surface tension effects to form drop, and its diameter is relevant with material character and runner rotating speed.When the suffered centrifugal force of drop greater than liquid after the wheel surface friction, in the runner tangential direction, be subjected to centrifugal action to produce drop 19~23.This liquid-drop diameter is by the rotating speed decision of high speed runner, and the liquid-drop diameter of the higher generation of rotating speed is less, and liquid-drop diameter is constant when the runner invariablenes turning speed.When for example diameter high speed runner 11 rotating speeds that are about 200mm reached 8000 rev/mins, the droplet diameter of generation was about 40 μ m.During the high speed runner stabilization of speed, its drop produces frequency stabilization.
The basic structure of an embodiment of the present utility model has more than been described.On the basis of above-mentioned basic structure, in order to meet the different needs, can carry out the more design that improves to above-mentioned basic structure.Below with regard to several improved examples of exemplary explanation, this is with enforcement so that those skilled in the art are easier to understand.
Fig. 4 A~Fig. 4 C has shown the structural representation of several embodiments of the runner in drop generation device of the present utility model.Wherein show be along the central shaft of runner 11 longitudinal profile.According to the utility model, the side of described runner can be level and smooth, also can have groove, and groove is aimed at described feed conduit 10.As shown in Figure 4, Fig. 4 A has shown the situation of rectangular recess, and Fig. 4 B has shown the situation of v-depression, and Fig. 4 C has shown the situation that there is no groove.Above three kinds of modes are exemplary embodiment of the present utility model, as long as guarantee that drop can, equably from the outgoing of runner edge, can make various changes to runner 11 such as U-shaped groove, trapezoidal groove etc.Therefore above-mentioned embodiment is not limited to the utility model.
By changing the quantity of runner Edge feed conduit and material outlet canal, can also producing, has the droplet array that certain space distributes.Axial direction along runner 11 increases the width of the axial length of runner to required droplet array, along the high speed runner axial direction, increases multiple feed conduit and material outlet canal simultaneously, and the number of feed conduit and material outlet canal is identical.If runner is the band groove structure shown in Fig. 4 A or Fig. 4 B, the quantity of groove is also identical with the quantity of feed conduit, material outlet canal, each groove is aimed at each feed conduit 10, and can be according to required droplet array width and density design groove quantity and charging, material outlet canal quantity; If runner be shown in Fig. 4 C without groove structure, feed conduit and discharging opening catheter design be along runner shaft to linear structure get final product.
Fig. 5 has shown the structure of another embodiment of the runner in drop generation device of the present utility model.As shown in Figure 5, be illustrated in figure 5 the rotaring wheel structure that produces droplet array, liquid material 8 enters in a plurality of grooves of high speed runner by feed conduit group 24, the process that produces with single drop is identical, produce single drop in each groove, the drop stressing conditions due to institute in fluted is identical, the therefore fluted interior drop while outgoing of institute, after the screening of material outlet canal, the drop that namely produces the identical initial velocity of same diameter is capable.In an instantiation, device of the present utility model can produce 40,000~100 with stabilized frequency each second, 000 or have an identical characteristics fine droplet chain, after material outlet canal, can obtain having the fine droplet array that certain space distributes more.
The utility model scope that is widely used, as luminous as grenz ray, extreme ultraviolet, inkjet printing etc.Grenz ray and extreme ultraviolet luminous in, this device can provide light source activation required liquid metal target, in inkjet printing, can provide ink droplet.The utility model also can, by regulating discharging opening piezoelectric ceramics input voltage, be exported the segmentation of drop chain property performance period.
The utility model utilizes rotary wheel device, effectively controls drop outgoing frequency, produces to have certain initial velocity and diameter is stable is controlled at micron-sized drop.While is modifying device as required, is created in a plane and has the stable droplet array that certain space distributes.
At first the utility model produces drop by centrifugal principle, and liquid enters in the groove of high speed runner by feed conduit.Liquid is accelerated on high speed runner, in accelerator, is subjected to material viscous force and surface tension effects to form drop, and its diameter is relevant with material character and runner rotating speed.When the suffered centrifugal force of drop greater than liquid after the wheel surface friction, will be along the outgoing of runner tangential direction, and liquid-drop diameter is constant when the runner invariablenes turning speed.In the drop production process, by controlling the runner rotating speed, control drop outgoing frequency, when stabilization of speed, can obtain the drop chain of stabilized frequency and certain initial velocity.With respect to prior art, the utlity model has following advantage:
1) the utility model is based on the drop generation device of runner, by the acceleration that transforms, can produce radio frequency rate and initial velocity all higher and stablize controlled drop;
2) the utility model has adopted the controlled material outlet canal of internal diameter simultaneously, has realized that stablizing of drop micron order size is controlled;
3) the utility model can carry out various repackings easily, can realize the spatial distribution of droplet array.
4) the utlity model has the advantages such as simple and reliable for structure, stable output, during-operation service expense be low.
5) inside and outside double-layer shell structure of the present utility model is evenly adjusted catheter diameter in the process of piezoelectric ceramics adjusting catheter diameter.Simultaneously, when feed liquid is too high or too low for temperature, can between inside and outside shell, add insulation material to improve the security performance of device.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.

Claims (8)

1. drop generation device, penetrate with certain speed after for the liquid material by static, being converted into drop, and this drop generation device comprises at least one feed conduit (10), it is characterized in that:
This drop generation device also comprises a cavity, and the center of this cavity is provided with a runner (11), and this runner (11) is cylindrical and can rotate around its central shaft, and this central axes is in horizontal plane;
Described feed conduit (10) penetrates the space that arrives described runner (11) place from described cavity top, so that liquid material (8) can drop onto the side of described runner (11) by described feed conduit (10), thereby this runner (11) tangentially throws away described liquid material from of this runner (11) side after accelerating for the liquid material that flows into the drop form.
2. drop generation device as claimed in claim 1, it is characterized in that: the central shaft of the extended line of described feed conduit (10) and described runner (11) is non-intersect.
3. drop generation device as claimed in claim 2 is characterized in that:
Described cavity is comprised of an inner housing (12) and a shell body (13), and described inner housing (12) is surrounded by shell body (13), and the two has certain spacing; And
Described runner (11) is surrounded by described inner housing (12), and also has certain spacing between this runner (11) and this inner housing (12);
Described feed conduit (10) penetrated the space that described shell body (13) and inner housing (12) arrive described runner (11) place successively from described cavity top.
4. drop generation device as claimed in claim 3 is characterized in that:
Between the inner housing (12) of described cavity and shell body (13), be provided with the outside material outlet canal (17) of the inside that is connected this inner housing (12) and this shell body (13), its quantity is with described to go out feed conduit (10) identical, and the bearing of trend of this material outlet canal (17) is consistent with the direction of advance of the drop that is thrown away by described runner (12), so that the drop that is thrown away by described runner (11) can shine by this material outlet canal (17) outside of described cavity.
5. drop generation device as claimed in claim 3 is characterized in that:
The outside of described material outlet canal (17) is equipped with piezoelectric ceramics (16), and the internal diameter of this material outlet canal (17) can be regulated by piezoelectric ceramics (16).
6. drop generation device as claimed in claim 3 is characterized in that:
Between the outside of described inner housing (12) and described shell body (13), be provided with fistulae (18), so that the unnecessary liquid material in described inner housing (12) flow to the outside of described shell body (13) by this fistulae (18).
7. drop generation device as described as any one in claim 1 to 6, it is characterized in that: the side opening of described runner is fluted, and the quantity of described groove is identical with described feed conduit, and each groove is aimed at each feed conduit (10).
8. drop generation device as claimed in claim 7, it is characterized in that: described groove is rectangular recess, v-depression, U-shaped groove or trapezoidal groove.
CN2013202686505U 2013-05-16 2013-05-16 Micron-sized high-speed liquid drop generation device Expired - Lifetime CN203291814U (en)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114311390A (en) * 2022-03-17 2022-04-12 山东海科创新研究院有限公司 High-viscosity liquid phase granulation equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114311390A (en) * 2022-03-17 2022-04-12 山东海科创新研究院有限公司 High-viscosity liquid phase granulation equipment

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20200824

Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3

Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences

Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District

Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences

Effective date of registration: 20200824

Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District

Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences

Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094

Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences

TR01 Transfer of patent right
CX01 Expiry of patent term

Granted publication date: 20131120

CX01 Expiry of patent term