CN203287146U - Silicon differential pressure sensor provided with unidirectional pressure overload protection function - Google Patents
Silicon differential pressure sensor provided with unidirectional pressure overload protection function Download PDFInfo
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- CN203287146U CN203287146U CN2013201688700U CN201320168870U CN203287146U CN 203287146 U CN203287146 U CN 203287146U CN 2013201688700 U CN2013201688700 U CN 2013201688700U CN 201320168870 U CN201320168870 U CN 201320168870U CN 203287146 U CN203287146 U CN 203287146U
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- overload protection
- pedestal
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Abstract
The utility model discloses a silicon differential pressure sensor provided with a unidirectional pressure overload protection function, and provides a method of realizing the high-low pressure chamber path used for vacuumizing and filling the filling liquid and transmitting the pressure. A low pressure side pressure is integratedly welded with a high pressure substrate, a low pressure substrate, and an overload protection diaphragm by pressure transmission welding blocks, and the pressure transmission function of transmitting the pressure of the low pressure side spanning the left side and the right side of the overload protection diaphragm can be realized, and therefore the pressure of the low pressure side can finally reach a negative pressure side of the silicon pressure sensitive chip, and the linkage effect of the isolation diaphragm, the filling liquid, the overload protection diaphragm, and the pedestal can be realized. The large unidirectional overload pressure can be only acted on the sensor pedestal, and cannot be transmitted to the silicon pressure sensitive chip, and therefore the silicon differential pressure sensor is provided with the reliable unidirectional pressure overload protection function, and the performance of the silicon differential pressure sensor can be improved.
Description
Technical field
The utility model patent relates to a kind of differential pressure pick-up of silicon with the uniaxial pressure overload protection function; this sensor is to measure the sensing element of differential pressure in pressure unit; when larger uniaxial pressure acts on sensor; this uniaxial pressure only can act on the base body of sensor; can not transfer function on the Silicon pressure sensitive chip, thereby realized the uniaxial pressure overload protection of silicon differential pressure pick-up.
Background technology
pressure unit is the important field instrument of industrial process control field, the important kind of pressure unit and adopt the differential pressure transmitter of Silicon pressure sensitive chip, the advantage that the Silicon pressure sensitive chip is used for the measurement differential pressure is: the linearity is good, repeatability is high, endurance, cost is low etc., therefore be widely used among differential pressure transmitter, but the anti-single-track overload pressure capability of Silicon pressure sensitive chip is low, when being subjected to larger single-track overload pressure-acting, easily cause the chip infringement, therefore must take measures in the structural design of silicon differential pressure pick-up, larger single-track overload pressure only can be acted on the silicon differential pressure pick-up and can not transfer function on the Silicon pressure sensitive chip, thereby protected the Silicon pressure sensitive chip, make differential pressure pick-up can bear larger single-track overload pressure.The core that realizes silicon differential pressure pick-up single-track overload pressure protecting function is to accomplish the interlink function of isolation diaphragm, filling liquid, overload protection diaphragm and pedestal; wherein for the structure that vacuumizes the path, high-low pressure chamber that charges topping up and transmission of pressure, realize it being crucial; and its complex structure of common product; thereby impact vacuumizes and charges and transmission of pressure; can not effectively realize the overload protection function of silicon differential pressure pick-up uniaxial pressure; or the reliability of silicon differential pressure pick-up uniaxial pressure overload protection is reduced, and reduce the performance of silicon differential pressure pick-up.
Summary of the invention
While in order to overcome general silicon differential pressure pick-up, realizing the uniaxial pressure overload protection; its complex structure and then cause sensor reliability and shortcoming that performance reduces; the utility model patent provides a kind of implementation method be used to vacuumizing the path, high-low pressure chamber that charges topping up and transmission of pressure; accomplish the interlink function of isolation diaphragm, filling liquid, overload protection diaphragm and pedestal, realized the overload protection of silicon differential pressure pick-up uniaxial pressure.
the technical scheme that the utility model patent adopts is: the high pressure chest path is by the high pressure pedestal, the high-pressure side isolation diaphragm, high-pressure side filling liquid, the overload protection diaphragm, chip base and Silicon pressure sensitive chip form, filling liquid level in high-pressure side is among the high pressure chest path, the low pressure chamber path is by the low pressure pedestal, the low-pressure side isolation diaphragm, low-pressure side filling liquid, the overload protection diaphragm, the pressure transmission welding block, chip base and Silicon pressure sensitive chip form, low-pressure side filling liquid level is among the low pressure chamber path, the isolation diaphragm of high and low pressure side, the filling liquid of high and low pressure side, the interlink function of overload protection diaphragm and high-low pressure pedestal, realized the uniaxial pressure overload protection of silicon differential pressure pick-up.The integral solder of relevant weld seam and high pressure pedestal, low pressure pedestal and overload protection diaphragm by the pressure transmission welding block; realized the pressure transmission that low-pressure lateral pressure is crossed over the overload protection diaphragm left and right sides; make low-pressure lateral pressure can finally arrive the suction side of Silicon pressure sensitive chip, cross over the pressure transmission path of the overload protection diaphragm left and right sides and entirely weld realization.The pressure transmission welding block is a hardware that is used for welding; it welds with low pressure pedestal, the high pressure pedestal of the overload protection diaphragm left and right sides outside the weld seam that high pressure pedestal, low pressure pedestal and overload protection diaphragm form, realized the pressure transmission that low-pressure lateral pressure is crossed over the overload protection diaphragm left and right sides after welding.After pressure transmission welding block and high pressure pedestal, low pressure pedestal and the welding of overload protection diaphragm; the pressure transmission welding block will be embedded among the high-low pressure pedestal; or the pressure transmission welding block is positioned at outside the high-low pressure pedestal; or the pressure transmission welding block will be partly embedded among the high-low pressure pedestal, and remainder is positioned at outside the high-low pressure pedestal.The edge of overload protection diaphragm is used for the welding with high pressure pedestal, low pressure pedestal and pressure transmission welding block, and edge is straight line or curve or circle.The pipe core that is connected with the low-pressure side of Silicon pressure sensitive chip in the chip base communicates with the low-pressure side oil guiding hole of chip base, and the aperture of low-pressure side oil guiding hole is positioned at the cylindrical side of chip base, is used for the transmission of sensor low-pressure lateral pressure.The chip base sinks and to be positioned among the high pressure pedestal, is used for vacuumizing the high pressure chest path that charges topping up and transmission of pressure and the realization in low pressure chamber path.Chip base in differential pressure pick-up can have simultaneously that high-pressure side filling liquid charges oil guide pipe and low-pressure side filling liquid charges oil guide pipe, by the chip base, can realize that vacuumizing of high pressure chest and low pressure chamber charges.The vacuumizing of high pressure chest in differential pressure pick-up and low pressure chamber charges and can charge oil guiding hole and low-pressure side filling liquid by high-pressure side filling liquid and charge oil guiding hole and carry out.The high side pressure of pressure process is delivered to the high-pressure side of Silicon pressure sensitive chip through high-pressure side isolation diaphragm and high-pressure side filling liquid, the low-pressure lateral pressure of pressure process is delivered to the low-pressure side of Silicon pressure sensitive chip through the low-pressure side oil guiding hole of low-pressure side isolation diaphragm, low-pressure side filling liquid, pressure transmission welding block and chip base, thereby makes the Silicon pressure sensitive chip can sense simultaneously high side pressure and the low-pressure lateral pressure of pressure process.
when larger pressure process only acts on high-pressure side one side of differential pressure pick-up, owing to being subjected to larger uniaxial pressure effect, the overload protection diaphragm is to low-pressure side bending displacement, filling liquid between high-pressure side isolation diaphragm and high pressure pedestal is reduced, when high-pressure side isolation diaphragm and high pressure pedestal are fitted fully, higher high-pressure side uniaxial pressure only can act on the high pressure pedestal, can not transfer function on high-pressure side filling liquid, thereby also just can not transfer function on the Silicon pressure sensitive chip, thereby protected the Silicon pressure sensitive chip, realized the overload protection of larger high-pressure side uniaxial pressure.In like manner, also can realize the overload protection of larger low-pressure side uniaxial pressure.
Be used for the high pressure chest path of process differential pressure transmission and the structure in low pressure chamber path and realize it being one of the utility model patent key; particularly low-pressure lateral pressure is by the integral solder of relevant weld seam and high pressure pedestal, low pressure pedestal and the overload protection diaphragm of pressure transmission welding block; realized the pressure transmission of the low-pressure lateral pressure leap overload protection diaphragm left and right sides, thereby made low-pressure lateral pressure can finally arrive the suction side of Silicon pressure sensitive chip.
In Fig. 1 and Fig. 3, the relevant weld seam of pressure transmission welding block and high pressure pedestal, the welding of low pressure pedestal, after welding, it is embedded among the high-low pressure pedestal and becomes with it a cylindrical integral.In Fig. 5 and Fig. 8, the welding of the outer surface of the relevant weld seam of pressure transmission welding block and high pressure pedestal, low pressure pedestal, after welding, it is outside the former high-low pressure pedestal face of cylinder.In Fig. 9 and Figure 10, the relevant weld seam of pressure transmission welding block and high pressure pedestal, the welding of low pressure pedestal, after welding, it is partly embedded among the high-low pressure pedestal, and part is outside the face of cylinder of high-low pressure pedestal.
The beneficial effect of the utility model patent is: by a kind of implementation method be used to vacuumizing the path, high-low pressure chamber that charges topping up and transmission of pressure is provided; accomplished the interlink function of isolation diaphragm, filling liquid, overload protection diaphragm and pedestal; thereby make the silicon differential pressure pick-up have the uniaxial pressure overload protection function, and improved the performance of silicon differential pressure pick-up.
High-pressure side in the utility model patent and the description of low-pressure side are comparatively speaking, can exchange fully.
Description of drawings
Below in conjunction with accompanying drawing and embodiment, the utility model patent is further illustrated.
Fig. 1 is the schematic diagram with the silicon differential pressure pick-up of uniaxial pressure overload protection.
Fig. 2 is the schematic diagram of pressure transmission welding block.
Fig. 3 is the schematic diagram with the silicon differential pressure pick-up of uniaxial pressure overload protection.
Fig. 4 is the schematic diagram of overload protection diaphragm.
Fig. 5 is the schematic diagram with the silicon differential pressure pick-up of uniaxial pressure overload protection.
Fig. 6 is the schematic diagram of pressure transmission welding block.
Fig. 7 is the schematic diagram of overload protection diaphragm.
Fig. 8 is the schematic diagram with the silicon differential pressure pick-up of uniaxial pressure overload protection.
Fig. 9 is the schematic diagram with the silicon differential pressure pick-up of uniaxial pressure overload protection.
Figure 10 is the schematic diagram with the silicon differential pressure pick-up of uniaxial pressure overload protection.
Figure 11 is the schematic diagram of pressure transmission welding block.
In figure: 1-high pressure pedestal; 2-low pressure pedestal; 3-high-pressure side isolation diaphragm; 4-low-pressure side isolation diaphragm; 5-high-pressure side filling liquid; 6-low-pressure side filling liquid; 7-overload protection diaphragm; 8-chip base; 9-Silicon pressure sensitive chip; Filling liquid in 10-high-pressure side charges oil guide pipe; 11-low-pressure side filling liquid charges oil guide pipe; 12-pressure transmission welding block; The low-pressure side oil guiding hole of 13-chip base; Filling liquid in 14-high-pressure side charges oil guiding hole; 15-low-pressure side filling liquid charges oil guiding hole; The 16-weld seam; 17-edge one; 18-edge two; 19-edge three.
Embodiment
The first example
in Fig. 1, at first with high pressure pedestal (1), overload protection diaphragm (7) and low pressure pedestal (2) weld together, then with high-pressure side isolation diaphragm (3) and high pressure pedestal (1) welding, with low-pressure side isolation diaphragm (4) and low pressure pedestal (2) welding, then with the weld seam of pressure transmission welding block (12) (16) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) are welded into an integral body, again with chip base (8) and high pressure pedestal (1) welding, charging oil guide pipe (10) and low-pressure side filling liquid by high-pressure side filling liquid finally charges after oil guide pipe (11) vacuumizes the high pressure pressure transmission chamber of sensor and low pressure pressure transmission chamber and charges topping up.
The second example
in Fig. 3, at first with high pressure pedestal (1), overload protection diaphragm (7) and low pressure pedestal (2) weld together, then with high-pressure side isolation diaphragm (3) and high pressure pedestal (1) welding, with low-pressure side isolation diaphragm (4) and low pressure pedestal (2) welding, then with the weld seam of pressure transmission welding block (12) (16) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) are welded into an integral body, again with chip base (8) and high pressure pedestal (1) welding, charging oil guiding hole (14) and low-pressure side filling liquid by high-pressure side filling liquid finally charges after oil guiding hole (15) vacuumizes the high pressure pressure transmission chamber of sensor and low pressure pressure transmission chamber and charges topping up.
The 3rd example
in Fig. 5, at first with high pressure pedestal (1), overload protection diaphragm (7) and low pressure pedestal (2) weld together, then with high-pressure side isolation diaphragm (3) and high pressure pedestal (1) welding, with low-pressure side isolation diaphragm (4) and low pressure pedestal (2) welding, then with the weld seam of pressure transmission welding block (12) (16) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) are welded into an integral body, again with chip base (8) and high pressure pedestal (1) welding, charging oil guide pipe (10) and low-pressure side filling liquid by high-pressure side filling liquid finally charges after oil guide pipe (11) vacuumizes the high pressure pressure transmission chamber of sensor and low pressure pressure transmission chamber and charges topping up.
The 4th example
in Fig. 8, at first with high pressure pedestal (1), overload protection diaphragm (7) and low pressure pedestal (2) weld together, then with high-pressure side isolation diaphragm (3) and high pressure pedestal (1) welding, with low-pressure side isolation diaphragm (4) and low pressure pedestal (2) welding, then with the weld seam of pressure transmission welding block (12) (16) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) are welded into an integral body, again with chip base (8) and high pressure pedestal (1) welding, charging oil guiding hole (14) and low-pressure side filling liquid by high-pressure side filling liquid finally charges after oil guiding hole (15) vacuumizes the high pressure pressure transmission chamber of sensor and low pressure pressure transmission chamber and charges topping up.
The 5th example
in Fig. 9, at first with high pressure pedestal (1), overload protection diaphragm (7) and low pressure pedestal (2) weld together, then with high-pressure side isolation diaphragm (3) and high pressure pedestal (1) welding, with low-pressure side isolation diaphragm (4) and low pressure pedestal (2) welding, then with the weld seam of pressure transmission welding block (12) (16) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) are welded into an integral body, again with chip base (8) and high pressure pedestal (1) welding, charging oil guide pipe (10) and low-pressure side filling liquid by high-pressure side filling liquid finally charges after oil guide pipe (11) vacuumizes the high pressure pressure transmission chamber of sensor and low pressure pressure transmission chamber and charges topping up.
The 6th example
in Figure 10, at first with high pressure pedestal (1), overload protection diaphragm (7) and low pressure pedestal (2) weld together, then with high-pressure side isolation diaphragm (3) and high pressure pedestal (1) welding, with low-pressure side isolation diaphragm (4) and low pressure pedestal (2) welding, then with the weld seam of pressure transmission welding block (12) (16) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) are welded into an integral body, again with chip base (8) and high pressure pedestal (1) welding, charging oil guiding hole (14) and low-pressure side filling liquid by high-pressure side filling liquid finally charges after oil guiding hole (15) vacuumizes the high pressure pressure transmission chamber of sensor and low pressure pressure transmission chamber and charges topping up.
Claims (10)
1. differential pressure pick-up of the silicon with the uniaxial pressure overload protection function, be useful on and vacuumize high pressure chest path and the low pressure chamber path that charges topping up and transmission of pressure, it is characterized in that: the high pressure chest path is by high pressure pedestal (1), high-pressure side isolation diaphragm (3), high-pressure side filling liquid (5), overload protection diaphragm (7), chip base (8) and Silicon pressure sensitive chip (9) form, high-pressure side filling liquid (5) is positioned among the high pressure chest path, the low pressure chamber path is by low pressure pedestal (2), low-pressure side isolation diaphragm (4), low-pressure side filling liquid (6), overload protection diaphragm (7), pressure transmission welding block (12), chip base (8) and Silicon pressure sensitive chip (9) form, low-pressure side filling liquid (6) is positioned among the low pressure chamber path, the isolation diaphragm of high and low pressure side, the filling liquid of high and low pressure side, the interlink function of overload protection diaphragm and high-low pressure pedestal, realized the uniaxial pressure overload protection of silicon differential pressure pick-up.
2. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: the integral solder of the relevant weld seam (16) by pressure transmission welding block (12) and high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7); realized the pressure transmission that low-pressure lateral pressure is crossed over overload protection diaphragm (7) left and right sides; make low-pressure lateral pressure can finally arrive the suction side of Silicon pressure sensitive chip (9), cross over the pressure transmission path of overload protection diaphragm (7) left and right sides and entirely weld realization.
3. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: pressure transmission welding block (12) is a hardware that is used for welding; it welds with low pressure pedestal (2), the high pressure pedestal (1) of overload protection diaphragm (7) left and right sides outside the weld seam that high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7) form, realized the pressure transmission that low-pressure lateral pressure is crossed over overload protection diaphragm (7) left and right sides after welding.
4. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: after pressure transmission welding block (12) welds with high pressure pedestal (1), low pressure pedestal (2) and overload protection diaphragm (7); pressure transmission welding block (12) will be embedded among the high-low pressure pedestal; or pressure transmission welding block (12) is positioned at outside the high-low pressure pedestal; or pressure transmission welding block (12) will be partly embedded among the high-low pressure pedestal, and remainder is positioned at outside the high-low pressure pedestal.
5. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: the edge one (17) of overload protection diaphragm (7) and edge two (18) are used for the welding with high pressure pedestal (1), low pressure pedestal (2) and pressure transmission welding block (12), and edge two (18) is straight line or curve.
6. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: the edge three (19) of overload protection diaphragm (7) is used for the welding with high pressure pedestal (1), low pressure pedestal (2) and pressure transmission welding block (12), and edge three (19) is round.
7. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: the pipe core that is connected with the low-pressure side of Silicon pressure sensitive chip (9) in chip base (8) communicates with the low-pressure side oil guiding hole (13) of chip base; the aperture of low-pressure side oil guiding hole (13) is positioned at the cylindrical side of chip base, is used for the transmission of sensor low-pressure lateral pressure.
8. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: chip base (8) sinks and to be positioned among high pressure pedestal (1), is used for vacuumizing the high pressure chest path that charges topping up and transmission of pressure and the realization in low pressure chamber path.
9. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1; it is characterized in that: the chip base (8) in differential pressure pick-up can have simultaneously that high-pressure side filling liquid charges oil guide pipe (10) and low-pressure side filling liquid charges oil guide pipe (11), by the chip base, can realize that vacuumizing of high pressure chest and low pressure chamber charges.
10. the differential pressure pick-up of the silicon with the uniaxial pressure overload protection function according to claim 1 is characterized in that: the vacuumizing of the high pressure chest in differential pressure pick-up and low pressure chamber charges and can charge oil guiding hole (14) and low-pressure side filling liquid by high-pressure side filling liquid and charge oil guiding hole (15) and carry out.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013201688700U CN203287146U (en) | 2013-04-07 | 2013-04-07 | Silicon differential pressure sensor provided with unidirectional pressure overload protection function |
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| CN2013201688700U CN203287146U (en) | 2013-04-07 | 2013-04-07 | Silicon differential pressure sensor provided with unidirectional pressure overload protection function |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104296831A (en) * | 2014-11-05 | 2015-01-21 | 成都思达高科软件有限公司 | Detection device of improved liquid level transmitter |
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2013
- 2013-04-07 CN CN2013201688700U patent/CN203287146U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104296831A (en) * | 2014-11-05 | 2015-01-21 | 成都思达高科软件有限公司 | Detection device of improved liquid level transmitter |
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Legal Events
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: Liang Huaixi Document name: Notification of Termination of Patent Right |
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| DD01 | Delivery of document by public notice | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131113 Termination date: 20180407 |
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| CF01 | Termination of patent right due to non-payment of annual fee |