CN203275343U - Semiconductor ozone sensor measuring circuit - Google Patents

Semiconductor ozone sensor measuring circuit Download PDF

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Publication number
CN203275343U
CN203275343U CN 201320237976 CN201320237976U CN203275343U CN 203275343 U CN203275343 U CN 203275343U CN 201320237976 CN201320237976 CN 201320237976 CN 201320237976 U CN201320237976 U CN 201320237976U CN 203275343 U CN203275343 U CN 203275343U
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China
Prior art keywords
circuit
potential electrode
ozone sensor
semiconductor
sensor
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Withdrawn - After Issue
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CN 201320237976
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Chinese (zh)
Inventor
张永辉
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Hainan University
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Hainan University
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Abstract

The utility model discloses a semiconductor ozone sensor measuring circuit which is characterized by consisting of a singlechip control circuit (1), a measuring electrode current source circuit (2), a measuring electrode voltage measurement circuit (3), a semiconductor ozone sensor (4) and a heating electrode power supply circuit (5), wherein the input end of the measuring electrode current source circuit (2) is connected with an interface of a DAC (Digital-to-Analog Converter) of the singlechip control circuit (1), and the output end of the measuring electrode current source circuit (2) is connected with pins (1,3) of a measuring electrode (4a) of the semiconductor ozone sensor (4); and the measuring electrode voltage measurement circuit (3) is connected with the pins (1,3) of the measuring electrode (4a) of the semiconductor ozone sensor (4), and the output end of the measuring electrode voltage measurement circuit (3) is connected with an interface of an ADC (Analog-to-Digital Converter) of the singlechip control circuit (1). The semiconductor ozone sensor measuring circuit has the following beneficial effects of realizing constant-current power supply for the measuring electrode of a semiconductor ozone concentration sensor, enabling the measuring electrode of the sensor to work at a stable current, and realizing the digital quantification detection on the semiconductor ozone sensor.

Description

A kind of semiconductor ozone sensor metering circuit
Technical field
The utility model relates to for a kind of semiconductor ozone sensor metering circuit of measuring the air ozone concentration.
Background technology
Ozone is a kind of strong oxidizer, have good disinfection function, it can permeate into any one the corner virus killing in the space, and does not have residue, avoid secondary pollution, be widely used in the fields such as air purification, water treatment, food processing, medical treatment, medicine, aquaculture.But ozone has stimulation to human respiratory tract's mucous membrane, and in air, ozone concentration is too high, can cause that pulse accelerates, tired, headache, when serious, pulmonary emphysema can occur, so that dead.Therefore when using ozone to carry out air purifying and sterilizing, strictly detect and control its concentration.
At present, the method for measuring ozone concentration in air has chemical method, ultraviolet absorption method, but equal continuous on-line detection, advantage is that accuracy of detection is high, good stability, and other oxygenant disturbs little.Shortcoming is that price is higher.The characteristics such as that semiconductor ozone sensor has is highly sensitive, fast response time, volume is little, the life-span is long, cost is low, metering circuit is simple, being widely used in the air ozone concentration measures, affected by humiture larger but due to the semiconductor ozone concentration sensor, measuring accuracy is low, the shortcomings such as bad measurement repeatability make this kind sensor only be used as observational measurement all the time.
Semiconductor ozone sensor is a kind of film-type semi-conductor oxidate gas sensor, formed by heating electrode and potential electrode, the effect of heating electrode is to burn being attached to the lip-deep dust of sensitive element, mist of oil etc., accelerates the absorption of gas, improves sensitivity and the response speed of device.The oxide semiconductor surface contacts the ozone potential electrode under the high temperature of 200 ~ 400 ℃, its resistance value can change, ozone concentration and potential electrode resistance value are definite funtcional relationship, can obtain the size of ozone concentration by the potential electrode resistance value of survey sensor.The routine measurement circuit is that the sensor measurement electrode is connected with a fixed value resistance, and two ends are fixed threshold voltage, measures fixed value resistance both end voltage, is used for the resistance of potential electrode of indirect survey sensor, obtains the ozone concentration value.Due to the resistance of sensor measurement electrode in the situation that ozone is arranged and ozone free alters a great deal, the electric current of series circuit is also unsettled, cause the working current of ozone sensor unstable, measurement result is inaccurate, it is higher that ozone concentration even appears in practical application, the potential electrode resistance measurement result variation tendency opposite with the Direction of Reaction, and bad measurement repeatability are difficult to realize quantitative measurment.
The utility model content
in order to improve the stable and repeated of existing semiconductor ozone sensor metering circuit measurement result, improve measuring accuracy, the utility model design provides a kind of metering circuit of novel semiconductor ozone sensor, namely by a controllable current source, the electric current of potential electrode is controlled, measure electric current when making working sensor and remain at a stationary value, for the measurement of semiconductor ozone sensor provides a stable current work condition, thereby can not occur due to the unsettled situation of the electric current of the potential electrode that occurs in the routine measurement circuit, affect the problem of the measuring accuracy of semiconductor ozone sensor.Effectively increase the measurement range of semiconductor ozone sensor by such measure, improved the stability of measuring accuracy and measurement.
The utility model is that the technical scheme that adopts of its technical matters of solution is as described below:
A kind of semiconductor ozone sensor metering circuit, this circuit is comprised of single chip machine controlling circuit 1, potential electrode current source circuit 2, potential electrode tension measuring circuit 3, semiconductor ozone sensor 4 and heating electrode feed circuit 5; The input end of described potential electrode current source circuit 2 is connected with the digital to analog converter DAC Control of Voltage interface of single chip machine controlling circuit by the pin 3 of integrated operational amplifier U1A, and output terminal is connected with the potential electrode 4a pin 1,3 of semiconductor ozone sensor 4; The pin 5 of integrated operational amplifier U1B in described potential electrode tension measuring circuit 3 is connected with the potential electrode 4a pin 1,3 of semiconductor ozone sensor 4, and described potential electrode tension measuring circuit 3 is connected with the analog to digital converter ADC voltage detecting interface of single chip machine controlling circuit 1 by the pin 7 of integrated operational amplifier U1B; Described heating electrode feed circuit 5 adopt circuit and the compensation method of having authorized patent of invention ZL201110128447.3, and heating electrode feed circuit 5 are connected with the heating electrode 4b pin 2 of semiconductor ozone sensor 4; The pin 4,5 of semiconductor ozone sensor 4,6 ground connection.
The potential electrode 4a power supply that described potential electrode current source circuit 2 is semiconductor ozone sensor 4, sensitivity characteristic according to potential electrode resistance, utilize potential electrode tension measuring circuit 3 to detect the change in voltage at potential electrode two ends, obtain the change in resistance of potential electrode, thereby determine the ozone concentration value of surveying, single chip machine controlling circuit 1 is according to the range setting range, adjust the size of current of potential electrode current source circuit 2, make semiconductor ozone sensor 4 both can be operated in different measurement ranges, can obtain a stable working current again when normal the measurement.
The utility model compared with prior art has outstanding substantive distinguishing features and significant progressive:
1, the utility model can be realized the current source supply of semiconductor ozone sensor potential electrode, and the stable output of control survey electrode current, reaches the purpose that the potential electrode constant current is controlled.
2, the semiconductor ozone concentration sensor metering circuit in the utility model can accurately obtain the resistance change of potential electrode, definite funtcional relationship according to itself and ozone concentration, obtain the ozone concentration value, the measurement result precision is high, good reproducibility, stable high.
3, the semiconductor ozone concentration sensor metering circuit output signal in the utility model is voltage signal, the potential electrode current control circuit is also to adopt Control of Voltage, can realize easily controlling the working sensor electric current and detecting ozone concentration with interface microcontroller, realize that the semiconductor ozone sensor digitizing detects.
4, the semiconductor ozone concentration sensor metering circuit volume of the utility model design is little, and cost is low, working stability, and high conformity is fit to batch production.
Description of drawings
Fig. 1 is framed structure schematic diagram of the present utility model;
Fig. 2 is circuit diagram of the present utility model;
Shown in figure: 1. single chip machine controlling circuit; 2. potential electrode current source circuit; 3. potential electrode tension measuring circuit; 4. semiconductor ozone sensor; 4a. potential electrode; 4b. heating electrode; 4c. shell; 5. heating electrode feed circuit; Q1. triode; R1, R2. resistance; U1A, U1B. integrated operational amplifier; DAC. digital to analog converter; ADC. analog to digital converter.
Embodiment
Below in conjunction with this specific embodiment, the technical solution of the utility model is further described, but not only is confined to following preferred embodiment.
As shown in Figure 1, the utility model has changed the power supply mode of conventional semiconductor ozone sensor potential electrode, adopting a controllable current source circuit is that potential electrode is carried out constant current-supplying, adopt a potential electrode tension measuring circuit to record the voltage at potential electrode two ends, utilize single chip circuit to control and detect, survey ozone concentration by calculating.Before measurement, at first utilize certain density ozone gas to proofread and correct, flow through the electric current of potential electrode by the Single-chip Controlling adjustment, make it be operated in a stable electric current power supply state, during normal operation, single chip machine controlling circuit utilizes constant electric current I s of digital to analog converter (DAC) Voltage-output V3 control survey current source electrode output.Just can obtain measuring voltage Vs from potential electrode this moment, according to Ohm law Rs=Vs/Is, can draw the resistance value Rs of potential electrode, thereby draw the concentration value M of ozone.
Measuring method in sum is to utilize the electrical resistance of semiconductor ozone sensor potential electrode to measure the rule of the concentration change of ozone:
M=f(Rs/R0)
In formula, Rs is the resistance value of ozone concentration potential electrode when being M, and R0 is the resistance value of potential electrode in pure air the time, and ozone concentration M and value (Rs/R0) have definite funtcional relationship.
If change measurement range, can flow through the electric current I s of potential electrode by Single-chip Controlling, according to Vs=Rs * Is, can utilize the ozone gas of variable concentrations to demarcate full scale voltage, make potential electrode be operated in different current values, thereby can realize a plurality of measurement ranges.
As shown in Figure 2, the utility model mainly is comprised of potential electrode current source resistance (R1), resistance (R2), integrated operational amplifier (U1A, U1B), semiconductor ozone sensor (4), triode (Q1), single chip machine controlling circuit (1) and heating electrode feed circuit (5) etc.integrated operational amplifier (U1A), triode (Q1) and resistance (R1, R2) form a potential electrode current source circuit (2), be connected with the pin 1,3 of potential electrode (4a), be used for potential electrode (4a) constant current-supplying into semiconductor ozone sensor (4), empty short characteristic according to ideal operational amplifier, 2 of U1A, 3 pin voltage are identical, therefore the voltage at R1 two ends is (VCC-V3), the characteristic of breaking according to void again, flow into U1A the 2nd, the electric current of 3 pins is about 0, the electric current that flows through R1 is about I1, the base current of triode Q1 can be ignored with respect to collector current I1, the electric current I 2 ≈ I1 of flows through sensor potential electrode Rs, I2 ≈ (VCC-V3)/R1, the resistance of R1 is certain, digital to analog converter (DAC) the Voltage-output interface of single chip machine controlling circuit (1) is connected with the pin 3 of amplifier U1A, short characteristic empty according to ideal operational amplifier, V1=V2=V3=VDAC, I2 ≈ (VCC-VDAC)/R1, the size that the size of control output voltage V DAC can be regulated potential electrode current source circuit (2) output current I2, reach the purpose of regulating the potential electrode working current, the voltage V4=Rs*I2 at potential electrode two ends, wherein Rs is the resistance of potential electrode, its size changes along with the variation of ozone concentration, the value of I2 is known, just the resistance Rs of potential electrode can be obtained by the size of measuring V4, current ozone concentration can be obtained according to its ozone concentration family curve.Integrated transporting discharging U1B is connected with analog to digital converter (ADC) input pin of single chip machine controlling circuit (1) as its pin 7 of a voltage follower, output voltage V 5=V4=VADC, single chip machine controlling circuit (1) judge the concentration of measured ozone by the size that detects VADC.
Above disclosed is only embodiment of the present utility model, certainly can not limit with this interest field of the utility model, and the equivalent variations of therefore doing according to the utility model claim still belongs to the scope that the utility model is contained.

Claims (1)

1. semiconductor ozone sensor metering circuit, it is characterized in that: this circuit is comprised of single chip machine controlling circuit (1), potential electrode current source circuit (2), potential electrode tension measuring circuit (3), semiconductor ozone sensor (4) and heating electrode feed circuit (5); The input end of described potential electrode current source circuit (2) is connected with digital to analog converter (DAC) the Control of Voltage interface of single chip machine controlling circuit (1) by the pin 3 of integrated operational amplifier (U1A), and output terminal is connected with potential electrode (4a) pin 1,3 of semiconductor ozone sensor (4); The pin 5 of the integrated operational amplifier (U1B) in described potential electrode tension measuring circuit (3) is connected with potential electrode (4a) pin 1,3 of semiconductor ozone sensor (4), and described potential electrode tension measuring circuit (3) is connected with analog to digital converter (ADC) the voltage detecting interface of single chip machine controlling circuit (1) by the pin 7 of integrated operational amplifier (U1B); Heating electrode feed circuit (5) are connected with heating electrode (4b) pin 2 of semiconductor ozone sensor (4), the pin 4,5 of semiconductor ozone sensor (4), 6 ground connection.
CN 201320237976 2013-05-06 2013-05-06 Semiconductor ozone sensor measuring circuit Withdrawn - After Issue CN203275343U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320237976 CN203275343U (en) 2013-05-06 2013-05-06 Semiconductor ozone sensor measuring circuit

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Application Number Priority Date Filing Date Title
CN 201320237976 CN203275343U (en) 2013-05-06 2013-05-06 Semiconductor ozone sensor measuring circuit

Publications (1)

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CN203275343U true CN203275343U (en) 2013-11-06

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103235011A (en) * 2013-05-06 2013-08-07 海南大学 Semiconductor ozone sensor measuring circuit
CN110168388A (en) * 2017-02-20 2019-08-23 新电元工业株式会社 Electronic device and connector
CN111796000A (en) * 2020-07-07 2020-10-20 王垚 Miniaturized ozone monitor based on gas-sensitive semiconductor and monitoring method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103235011A (en) * 2013-05-06 2013-08-07 海南大学 Semiconductor ozone sensor measuring circuit
CN110168388A (en) * 2017-02-20 2019-08-23 新电元工业株式会社 Electronic device and connector
CN110168388B (en) * 2017-02-20 2021-10-22 新电元工业株式会社 Electronic device and connector
CN111796000A (en) * 2020-07-07 2020-10-20 王垚 Miniaturized ozone monitor based on gas-sensitive semiconductor and monitoring method

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Granted publication date: 20131106

Effective date of abandoning: 20150408

RGAV Abandon patent right to avoid regrant