CN203272139U - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
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- CN203272139U CN203272139U CN 201320199734 CN201320199734U CN203272139U CN 203272139 U CN203272139 U CN 203272139U CN 201320199734 CN201320199734 CN 201320199734 CN 201320199734 U CN201320199734 U CN 201320199734U CN 203272139 U CN203272139 U CN 203272139U
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- Prior art keywords
- motor
- rotor
- vacuum pump
- cooling
- motor rotor
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- 238000001816 cooling Methods 0.000 claims abstract description 50
- 238000004804 winding Methods 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 18
- 239000000498 cooling water Substances 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 16
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 abstract description 12
- 239000000110 cooling liquid Substances 0.000 description 15
- 230000000694 effects Effects 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 238000000465 moulding Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000002912 waste gas Substances 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910000976 Electrical steel Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000004781 supercooling Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001314 paroxysmal effect Effects 0.000 description 1
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Abstract
The utility mode discloses a vacuum pump which can improve the efficiency of a motor through reducing the heating of motor rotors and improving the cooling efficiency of the motor rotors. The vacuum pump is characterized in that a pair of Roots rotors (2,2) which are relatively arranged can synchronously revolute so as to exhaust, the main shaft ends (2a,2a) on the suction sides of the Roots rotors (2,2) are provided with motor rotors (5A,5B) with annually arranged permanent magnets (5a,5b), and shells (7,7) which can cover the peripheries and end surfaces of one sides of the motor rotors (5A,5B) are utilized to seal a pump part; the peripheries of the shells (7,7) are provided with a motor stator (6), and the motor stator (6) is composed of a water-cooled motor frame (9), a motor stator core (6a) and windings (8a,8b).
Description
Technical field
The utility model relates to vacuum pump, particularly relates to the vacuum pump that is suitable for semiconductor manufacturing process etc., can be driven by barometric pressure.
Background technique
Known a kind of vacuum pump that is called as the Roots type vacuum pump in the past, this vacuum pump by make a pair of rotor synchronous and round about rotation suck exhaust.A pair of rotor maintains small gap each other in shell inner surface and rotor, and non-contactly to opposite spin.This vacuum pump is designed to: multistage by rotor is set as, be about 10-3Torr in the suction side thus, and be barometric pressure at exhaust side.In multi-stage pump rotor, although the suction side rotor can not become high temperature (100 ℃ of left and right), along with the convergence exhaust side, can generate heat because of the compression between stage, thereby be heated to about 200 ℃ of left and right.
In the past, this vacuum pump was by the box induction motor drive.The box induction motor is the filled type structure, possesses the box motor rotor, and this box motor rotor is accommodated in rotor bar stacked iron core slot and connects its two ends with end ring.And, although the box motor rotor directly is installed on the pump shaft end, heating and the pump heatings such as motor rotor that cause due to the secondary resistance increment of motor, secondary copper loss etc., and cause the efficient of the motor non-constant that becomes.
If in order to reduce the temperature of above-mentioned motor rotor, and reduce the temperature of pump, easily be attached in semiconductor manufacturing process by the reaction product in the gas of vacuum pump.Thereby can shorten life-span of vacuum pump, therefore almost can't reduce the temperature of pump.In addition, owing to there is no in a vacuum heat transfer medium, heat is passed to shell so the heating of motor rotor is mainly by radiation, and conducts heat with the order of shell → stator iron core → motor frame.Yet the heat output that should conduct heat is less, thus be difficult to cool motors rotor effectively, thus motor rotor is in the state (about 200～300 ℃) of high temperature.
The model utility content
The utility model is to make in view of above-mentioned thing, and purpose is to provide a kind of cooling effectiveness that can generate heat and improve motor rotor by reducing motor rotor, improves the vacuum pump of motor efficiency.
To achieve these goals, the utility model is a kind of vacuum pump, make a pair of pump rotor synchronous rotary that configures carry out exhaust oppositely, described vacuum pump is characterised in that, spindle end in the suction side of described pump rotor is equipped with the motor rotor that permanent magnet is set, and come canned pump section with the shell of the face of the periphery that covers this motor rotor and a side, at the periphery configuration motor stator of described shell, the formation of described motor stator comprises: motor frame, stator core in motor and the winding of water-cooled.
According to the utility model, in order to reduce the heating value of motor rotor, do not adopt existing box induction motor, but adopt direct current motor, make the structure of motor rotor form permanent magnet rings if be embedded in the structure of rotor yoke.Thus, the secondary copper loss of motor rotor disappears, and the heating value of motor rotor falls sharply.
In addition, by motor rotor being installed on the spindle end of the suction side of pump rotor, can reduce the heat output that comes self-pumping thus.Permanent magnet has hot demagnetize characteristic under high temperature, and demagnetize is remarkable when surpassing 100 ℃ usually, and the motor performance variation, this structure produces in order to prevent this situation.By reducing the temperature of permanent magnet, result is not use the high price permanent magnet of high warm demagnetize characteristic good.
In addition, in a mode of the present utility model, in order to increase the radiations heat energy from motor rotor to shell, and internal surface and the rotor outer surface of shell formed black, thereby improve the cooling effectiveness of motor rotor.
In addition, according to the utility model, in order to optimize the cooling of motor rotor, except the heat transfer path that existing order with shell → stator iron core → motor frame is conducted heat, also whole with the outer surface of cover housing and be close to the mode of the motor frame of water-cooled, comprise stator iron core, winding, carry out molding with die material such as rubber, resins, setting can further improve cooling effect thus with the heat transfer path of the order of motor rotor → shell → die material → water-cooled motor frame.
In addition, by carrying out molding with die material, can play following effect thus, that is: the outside of shell is strengthened as vacuum vessel, even and just in case shell is damaged, also can keeps vacuum and can not suck a large amount of outside airs, for example, can improve Security, prevent that the silane gas etc. because using from reacting accidents caused with atmosphere in semiconductor manufacturing process.
In addition, carry out molding by the whole outer surface with shell with die material, conduct is also very effective from the padded coaming of the noise of pump internal communication thus, thereby can reduce to the outside noise that leaks of pump.
In addition, as a mode of the present utility model, at described pump rotor and spindle end described motor rotor opposition side, be provided with the bearing housing of water-cooled, prevent that thus the bearing of discharging side from heating up.
In addition, be respectively arranged with the cooling water stream in described motor frame and described bearing housing, and each cooling water stream is connected with cooling mechanism, therefore can carries out cooling according to the cooling degree that requires separately.
Described cooling mechanism constitutes and makes cooling water flow to described motor frame from described bearing housing, therefore as mentioned above, not only can carry out according to the cooling degree that requires separately coolingly, can also reduce the use amount of cooling water.
Description of drawings
Fig. 1 means an embodiment's of the vacuum pump that the utility model is related sectional view.
Fig. 2 is the II-II line sectional view of Fig. 1.
Fig. 3 is the III-III line sectional view of Fig. 1.
Fig. 4 is the IV-IV line sectional view of Fig. 1.
Fig. 5 means the figure of details of the motor rotor of Fig. 1, and Fig. 5 (a) is side view, and Fig. 5 (b) is the V(b of Fig. 5 (a))-V(b) line sectional view.
Fig. 6 is the explanatory drawing of action of the brushless direct current motor of explanatory drawing 1.
Fig. 7 is the action specification figure of the roots rotor of Fig. 1.
Fig. 8 means the stereogram of other configuration examples of cooling mechanism.
Fig. 9 means the schematic diagram that is provided with the cooling liquid stream (circulation stream) as cooling mechanism at bearing housing.
Description of reference numerals: 1 ... housing; 2 ... roots rotor; 3 ... bearing; 5A, 5B ... motor rotor; 5a, 5b ... permanent magnet; 6 ... motor stator; 6a ... stator core in motor; 7 ... resin shell; 8a, 8b ... winding; 9 ... the motor frame; 10 ... motor driver; 11 ... timing gear; 12 ... die material.
Embodiment
An embodiment referring to the related vacuum pump of description of drawings the utility model.Fig. 1 means the sectional view of Roots type vacuum pump of the present utility model, and Fig. 2 is the II-II line sectional view of Fig. 1.
In Fig. 1 and Fig. 2, mark 1 is housing, is equipped with the roots rotor 2,2 that consists of a pair of pump rotor in housing 1.Housing 1 forms elongated shape, possesses the suction side with suction port 1s and has the discharge side of exhaust port 1d.Each roots rotor 2 is supported by bearing 3,3 near two end part.Roots rotor 2,2 is by twin shaft brushless direct current motor M rotary actuation.
Fig. 3 and Fig. 4 mean the figure of the details of twin shaft brushless direct current motor M, and Fig. 3 is the III-III line sectional view of Fig. 1, and Fig. 4 is IV-IV line sectional view.As shown in Figures 3 and 4, be fixed with motor rotor 5A, 5B at roots rotor 2,2 spindle end 2a, 2a.That is, motor rotor 5A, 5B are fixed on spindle end 2a, the 2a of the suction side of vacuum pump.Two motor rotor 5A, 5B respectively in the mode that radially produces magnetic flux with respect to the axle core symmetrically uniformly-spaced to be equipped with permanent magnet 5a, the 5b of the 2n utmost point (n is as integer).
Fig. 5 means the figure of the details of motor rotor 5A, and Fig. 5 (a) is side view, and Fig. 5 (b) is the V(b of Fig. 5 (a))-V(b) line sectional view.In addition, motor rotor 5B is and the identical structure of motor rotor 5A therefore to omit diagram.Motor rotor 5A is equipped with 4 utmost point permanent magnet 5a of S, N, S, N.And be folded with the iron core 5c that is consisted of by stacked silicon steel plate between permanent magnet 5a and spindle end 2a.
In addition, as Fig. 1, Fig. 3 and shown in Figure 4, at the outer circumferential side of motor rotor 5A, 5B, the shell 7 that consists of across material or resin by excellent corrosion resistance, 7 and be equipped with a motor stator 6. Shell 7,7 covers motor rotor 5A, the periphery of 5B and the end face of a side, utilizes the pump section of these shells 7,7 pairs of vacuum pumps to seal.In addition, the outer surface of the internal surface of shell 7 and motor rotor 5A, 5B is black.As Fig. 1, Fig. 3 and shown in Figure 4, the formation of motor stator 6 comprises: the stator core in motor 6a and winding 8a, the 8b that possess the motor frame 9 of the water-cooled of water jacket 9a, be made of stacked silicon steel plate.
Be formed with respectively 6 magnetic pole tooth U～Z, U1～Z1 at stator core in motor 6a in the mode along the equidistant configuration of circumference.And, at magnetic pole tooth U～Z, U1～Z1, be separately installed with winding 8a, 8b, winding 8b and winding 8a reverse-winding in mode symmetrical with respect to the median plane C of the axis of two motor rotor 5A, 5B and that become opposite magnetic pole.Be provided with the die material 12 such as rubber or resin with the described motor frame 9 of being close to water-cooled and the mode that covers stator core in motor 6a, winding 8a, 8b and shell 7,7 outer surface integral body.In addition, as shown in Figure 1, be fixed with motor driver 10 on motor frame 9.
On the other hand, at roots rotor 2,2 and the axle head motor opposition side, be fixed with a pair of timing gear that is engaged with each other 11,11(the gear of one side only be shown in Fig. 1), thus prevent from causing a pair of roots rotor 2,2 asynchronous because of paroxysmal outside main cause.
Next, the effect of the vacuum pump that consists of as mentioned above is described.Fig. 6 is the explanatory drawing of explanation motor M action.In addition, omit resin shell 7 and die material 12 for simplified illustration in Fig. 6.If winding 8a, the 8b energising via 10 couples of twin shaft brushless direct current motor M of motor driver forms at stator core in motor 6a the shifting magnetic field, space that motor rotor 5A, 5B are rotated in the mode of counter-rotating respectively.
That is, under the state of Fig. 6 (a), if to become the N utmost point at magnetic pole tooth U, X-shaped, become the S utmost point at magnetic pole tooth V, Y shape, form the S utmost point at magnetic pole tooth U1, X1, the mode that forms the N utmost point at magnetic pole tooth V1, Y1 is switched on, and motor rotor 5A, 5B are driven in rotation to opposed direction as shown by arrows.
Equally in Fig. 6 (b), if become the S utmost point at magnetic pole tooth V, Y shape, at magnetic pole tooth W, the Z-shaped one-tenth N utmost point, form the N utmost point at magnetic pole tooth V1, Y1, the mode that forms the S utmost point at magnetic pole tooth W1, Z1 is switched on, and become the S utmost point at magnetic pole tooth X, U-shaped as shown in Fig. 6 (c), become the N utmost point at magnetic pole tooth Y, V-arrangement, form the N utmost point at magnetic pole tooth X1, U1 respectively simultaneously, magnetic pole tooth Y1, V1 form the mode of the S utmost point and switch on, and motor rotor 5A, 5B are driven in rotation to the relative direction shown in arrow because of continuous rotating force.
The magnetic field that is produced by each permanent magnet 5a, the 5b of motor rotor 5A, 5B constitutes, and forms magnetic circuit and magnetic circuit closure between each motor rotor 5A, 5B due to stator core in motor 6a.Therefore, produce magnetic coupling interaction at the different pole face in pair of motors rotor 5A, 5B, synchronously and mutually rotate to opposition side so motor rotor 5A, 5B are inevitable.
Because of the rotation of motor rotor 5A, 5B, a pair of roots rotor 2,2 carries out synchronous rotary.Fig. 7 is explanation at the figure of a pair of roots rotor 2 of first order isotactic deciding grade and level, 2 action, and a pair of roots rotor 2,2 internal surface and rotors 2,2 at housing 1 keep small gap each other, non-contactly to opposite spin.Along with a pair of roots rotor 2,2 rotates to phase place 4 from phase place 1, suction side gas is enclosed between rotor 2 and housing 1 and is transported to the discharge side.In three lobe rotor, because a roots rotor has three place paddy sections, so the every rotation of pump once, with regard to exhaust six times.The gas of discharging from first order isotactic deciding grade and level shown in Figure 7 is imported into the next stage such as the second level, brings into play effect same as described above.
According to the utility model, in order to reduce the heating value of motor rotor 5A, 5B, do not adopt existing box induction motor, and adopt brushless direct current motor M, the structure of motor rotor 5A, 5B is formed the structure of establishing permanent magnet 5a, 5b at the rotor yoke ring.The secondary copper loss of motor rotor 5A, 5B disappears thus, and the heating value of motor rotor 5A, 5B falls sharply.
In addition, by motor rotor 5A, 5B being installed on spindle end 2a, the 2a of roots rotor 2,2 suction side, can reduce the heat output that comes self-pumping thus.Permanent magnet has hot demagnetize characteristic under high temperature, and demagnetize is remarkable when surpassing 100 ℃ usually, and the motor performance variation, this structure produces in order to prevent this situation.By reducing the temperature of permanent magnet, result is not use the high price permanent magnet of high warm demagnetize characteristic good.In addition, in the utility model, be bonded permanent magnet by the material that makes permanent magnet, can suppress thus permanent magnet self and produce foucault current, thereby the heating of rotor can be minimized.
In addition, in the utility model, in order to improve the cooling effectiveness of motor rotor 5A, 5B, and increase from motor rotor 5A, 5B to shell by 7,7 radiations heat energy, therefore shell 7,7 internal surface and the outer surface of motor rotor 5A, 5B are formed black.
In addition, according to the utility model, in order to optimize the cooling of motor rotor 5A, 5B, except the heat transfer path that existing order with shell → stator iron core → motor frame is conducted heat, also with cover housing 7,7 outer surface is whole and be close to the mode of water-cooled motor frame 9, comprise stator iron core 6a, winding 8a, 8b, carry out molding with the die material such as rubber, resin 12, setting can further improve cooling effect thus with the heat transfer path of the order of motor rotor 5A, 5B → shell 7,7 → die material, 12 → water-cooled motor frame 9.In addition, by carrying out molding with die material 12, can play following effect, that is: shell 7,7 the outside are strengthened as vacuum vessel, even and just in case shell is damaged, also can keeps vacuum and can not suck a large amount of outside airs, for example, can improve Security, prevent that silane gas of using etc. from reacting with atmosphere and accidents caused in semiconductor manufacturing process.
In addition, use 12 pairs of shells 7 of die material, 7 whole outer surface to carry out molding, also very effective as the padded coaming from the noise of pump internal communication, thus can reduce to the outside noise that leaks of pump.
In addition, as shown in Figure 9, be provided with the cooling liquid stream (circulation stream) 25 as cooling mechanism in the inside of bearing housing 23.More specifically, form cooling liquid stream 25 by burying cooling tube 36 underground at bearing housing 23.Cooling tube 36 is made of the material that cooling liquid is had the corrosion resistant feeding habits.And, because cooling liquid (for example cooling water) flows in this cooling liquid stream 25, so bearing housing 23 is cooled liquid cooling but.In addition, bearing 3 and sealed department 27,28 etc. are by the lubricant oil that is cooled of bearing housing 23 inside and cooling fully by the cooling liquid that flows in cooling liquid stream 25.Like this, according to the utility model, bearing and to be disposed near the sealed department bearing mechanism that is cooled cooling.Wherein, in the present embodiment, be disposed near bearing sealed department and not only comprise shaft seal section, also comprise the O V-shaped ring 27 that is configured between side body 26 and bearing housing 23, be configured in the O V-shaped ring 28 between housing 1 and side body 26.Wherein, the installation method of O V-shaped ring (sealed department) 27,28 is not limited to installation method shown in Figure 1.For example, in Fig. 1, although O V-shaped ring 27 is installed on bearing housing 23, also can be installed on side body 26.In addition, be connected with the housing with subatmospheric interior pressure at the bearing housing that has near the interior pressure of room pressure (being barometric pressure) that vacuum pump will be set, and in the situation of the structure of running shaft perforation bearing housing and housing, be disposed near the sealed department of bearing and be not limited to present embodiment.In such structure, be configured near bearing sealed department and mean the outer circumferential face and the sealed department between bearing housing or housing that are configured in running shaft, be configured in sealed department between bearing housing and housing etc.Wherein, in the situation that consist of cooling tube 36 by the material with corrosion resistance, cheap vacuum pump can be provided, and needn't consist of bearing housing 23 by the expensive material with corrosion resistance.
Fig. 8 means the stereogram of other configuration examples of cooling mechanism.As shown in Figure 8, the number of turns of the cooling tube 36 of formation cooling liquid stream 25 is more than the number of turns of cooling tube shown in Figure 1 36.In addition, the position of cooling tube 36 shown in Figure 8 than the position of cooling tube shown in Figure 1 36 near housing 1 side.Like this, be embedded in the number of turns, the position of the cooling tube 36 of bearing housing 23 by change, can regulate housing 1, the temperature of discharging the gas of side.In this case, metal is poured into a mould together with cooling tube 36 etc. and to be made bearing housing 23.
In vacuum pump, if improve the vacuum exhaust object container degree of vacuum and become the smooth operation state, the discharge flow rate of gas reduces, the most of pressure difference between barometric pressure and Vacuum Pressure puts on the rotor of final level.Therefore, the opposing of the rotor of final level is rotated near atmospheric pressure difference, thus produce large calorimetric at the rotor chamber of final level, thus become high temperature near this rotor chamber.Can prevent from as described above adhering to contained reaction product in process gas in the semiconductor fabrication processing process or waste gas although become high temperature near should rotor chamber of final level, if but high temperature involves the O V- shaped ring 27,28 etc. of bearing 3, pump, become O V- shaped ring 27,28 equivalent damages or the deteriorated reason that can make bearing 3, pump, because of rather than preferred.
Therefore, in this vacuum pump, cooling liquid stream 25 is located at the inside of bearing housing 23.By the cooling liquid that flow to herein, the part of the high temperature of not wishing in cooling bearing 3 and O V- shaped ring 27,28 etc. to become is cooling, and side body 26 and housing 1 are cooled to composition near exhaust port waste gas does not solidify, inadhering degree.In addition, cooling mechanism can be set, make after the cooling water after the cooling bearing case cool motors by the water cooled pipeline in the water-cooled motor frame.Thus, can carry out cooling position to the both end sides of rotor with each cooling mechanism, just can complete with a cooling mechanism, thus the capacity of the cooling water that also reduce to use.Like this, for also cool motors frame, cooling mechanism can also be set, cooling water is flowed as follows, that is: to after cooling with the bearing housing of the rotor axle head of motor opposition side, the bearing housing of cool motors side (21), last cool motors frame.This cooling mechanism has the pump of carrying cooling water.In addition, in the situation that make cooling water circulation, the cooling mechanism of the cooling water after also further possessing cooling water tank and heating up.Thus, can not need necessary cooling collar that is arranged at the housing peripheral part etc. in the past, thereby can reduce manufacture cost.Simultaneously, can prevent near the supercooling exhaust port that the cooling collar because of existing housing peripheral part causes, prevent because of adhering to that the curing such as reaction product in waste gas cause.
Usually, if the flow of the gas that imports from suction port 1s is more, the heat that produces in the primary rotor chamber of suction side increases, and therefore need to carry out cooling to the bearing 3 of described primary rotor chamber, suction side.In this case, if described primary rotor chamber is carried out directly cooling, gas might solidify and separate out, is attached in rotor chamber.Therefore in the present embodiment, housing 1 is indirectly cooled across side body 22 by the cooling liquid that flows at cooling liquid stream 9a.Thus, can prevent housing 1 by supercooling, and can carry out cooling to the bearing 3 that is contained in motor frame 9.
In addition, if utilize the cooling liquid that flows at cooling liquid stream 9a to come cool motors frame 9, the side body 22 adjacent with motor frame 9 also is cooled.Therefore be configured in the O V-shaped ring (sealed department) 32 between motor frame 9 and side body 22, the O V-shaped ring (sealed department) 31 that is configured between side body 30 and housing 1 also can be cooled.
, to embodiment shown in Figure 8 two-shaft vacuum pump and double-axis motor are illustrated at Fig. 1, but no matter vacuum pump is single shaft pump or twin shaft pump, in the situation that motor only is installed, can obtains same effect on an axle.
The effect of model utility
As above explanation, the effect of enumerating below can obtaining according to the utility model.
(1) make by forming that to drive the vacuum pump motor be direct current motor, making motor rotor is the structure that is equipped with permanent magnet, and the secondary copper loss of existing motor rotor is disappeared, thereby can reduce the heating value of rotor.Can improve motor efficiency like this, compare with the motor of existing type thus, efficient can be improved more than 10%.
(2) be installed on the spindle end of pump suction side by the motor rotor that will be equipped with permanent magnet, can reduce the heat output from pump rotor to motor rotor, thereby can reduce the temperature of permanent magnet.The high price permanent magnet of high warm demagnetize characteristic good can be used especially like this, consequently cheap pump can be produced.
(3) in order to reduce the temperature of motor rotor, by the internal surface of shell and the outer surface of rotor are formed black, can increase thus the radiations heat energy from motor rotor to shell.
(4) by with die material such as rubber or resins, water-cooled motor frame, shell periphery and stator iron core, winding being carried out molding, can improve the cooling effect of motor rotor thus, and can realize the shell as vacuum vessel is strengthened, prevent from destroying vacuum when damaged as the shell of vacuum vessel, reduce the noise of pump.
(5) only so that the cooling water after the cooling bearing case, this cooling mechanism of cool motors by the water cooled pipeline in the water-cooled motor frame, just can to the intensification difference of whole pump, effectively prevent because of adhering to that the curing such as reaction product in waste gas cause.
Claims (7)
1. a vacuum pump makes a pair of pump rotor synchronous rotary that configures carry out exhaust oppositely, and described vacuum pump is characterised in that,
Spindle end in the suction side of described pump rotor is equipped with the motor rotor that permanent magnet is set, and come canned pump section with the shell of the face of the periphery that covers this motor rotor and a side, at the periphery configuration motor stator of described shell, the formation of described motor stator comprises: motor frame, stator core in motor and the winding of water-cooled.
2. vacuum pump according to claim 1, is characterized in that,
Described motor rotor ring is if be embedded with permanent magnet.
3. vacuum pump according to claim 1 and 2, is characterized in that,
Be provided with the die material of rubber or resin with the described motor frame of being close to water-cooled and the mode that covers described stator iron core, described winding.
4. vacuum pump according to claim 1 and 2, is characterized in that,
The internal surface of described motor stator and the outer surface of described motor rotor are black.
5. vacuum pump according to claim 1, is characterized in that,
At described pump rotor and spindle end described motor rotor opposition side, be provided with the bearing housing of water-cooled.
6. vacuum pump according to claim 5, is characterized in that,
Be respectively arranged with the cooling water stream in described motor frame and described bearing housing, and each cooling water stream is connected with cooling mechanism.
7. vacuum pump according to claim 6, is characterized in that,
Described cooling mechanism constitutes and makes cooling water flow to described motor frame from described bearing housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320199734 CN203272139U (en) | 2013-04-19 | 2013-04-19 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320199734 CN203272139U (en) | 2013-04-19 | 2013-04-19 | Vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203272139U true CN203272139U (en) | 2013-11-06 |
Family
ID=49502566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320199734 Expired - Fee Related CN203272139U (en) | 2013-04-19 | 2013-04-19 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203272139U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112664460A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
-
2013
- 2013-04-19 CN CN 201320199734 patent/CN203272139U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112664460A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
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