CN203255964U - MEMS (Micro Electro Mechanical Systems) module and control system based on same - Google Patents
MEMS (Micro Electro Mechanical Systems) module and control system based on same Download PDFInfo
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- CN203255964U CN203255964U CN 201320287262 CN201320287262U CN203255964U CN 203255964 U CN203255964 U CN 203255964U CN 201320287262 CN201320287262 CN 201320287262 CN 201320287262 U CN201320287262 U CN 201320287262U CN 203255964 U CN203255964 U CN 203255964U
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Abstract
The utility model relates to an MEMS module. The MEMS module comprises a circuit base board, a signal reception unit, a signal processing module and a communication unit, wherein the signal reception unit is arranged on the circuit base board and is used for receiving signals; the circuit base board is a flexible circuit base board, the input end of a signal processing unit is connected with the signal reception unit, and the output end of the signal processing unit is connected with the input end of the communication unit. Compared with the existing MEMS technology, the MEMS module and a control system based on the MEMS module have the advantages of simple structures, and low power consumption, electromagnetic interferences and costs.
Description
Technical Field
The utility model relates to the field of communication, more specifically, the utility model relates to a MEMS module and based on MEMS control system of this module based on FPC.
Background
The MEMS system is an integrated micro device system consisting of a micro sensor, a micro actuator, a signal processing and control circuit, a communication interface, a power supply and the like. The MEMS sensor can integrate the acquisition, processing and execution of information to form a multifunctional micro system, can greatly improve the automation, intelligence and reliability level of the system, and can enable manufacturers to integrate all functions of a product on a single chip, thereby not only reducing the volume, but also reducing the cost.
With the development of microelectronic technology in recent years, not only the computer and information technology fields are new, but also a microminiaturization revolution is initiated in many fields. The MEMS technology is developed along with the development of the semiconductor integrated circuit micro-machining technology and the ultra-precision machining technology, and is widely applied to the fields of micro-fluidic chips, synthetic biology and the like to realize chip integration of the laboratory technical processes of biochemistry and the like. At present, an MEMS system mainly includes three parts, namely, a micro sensor, a micro actuator and a corresponding processing circuit, and various information in nature as input signals are first converted into electric signals by the sensor, then subjected to a signal processing unit (including a/D, D/a conversion), and then acted on the outside world by the micro actuator. Specifically, the operation principle of the conventional MEMS technology is as shown in fig. 3.
Although the existing MEMS system has a relatively small structural volume due to the intelligentization of the MEMS sensor and the high functional centralization thereof, on the other hand, the existing MEMS technology is based on the PCB design, which greatly affects the overall performance of the MEMS due to the PCB-based design, because in the PCB-based design, the electromagnetic interference problem of various circuits laid on the PCB board must be considered, and the position of the resistor, the capacitor and the inductor must be considered, and the position of the capacitor must be considered, which increases the difficulty of the design on the one hand, and on the other hand, the anti-electromagnetic interference capability of the MEMS module cannot be ensured. In addition, the MEMS module based on the PCB material has large power consumption and high cost, and is not suitable for batch production. Therefore, the MEMS module made of the PCB substrate material cannot meet the product market requirement.
In order to solve the technical problems, the designer designs an MEMS module and an MEMS control system that have a simple structure, low power consumption, low electromagnetic interference, and low cost through research and experiments.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problem, an object of the present invention is to provide a MEMS module and a control system thereof based on FPC, which has a simple structure, low power consumption, low electromagnetic interference, and low cost.
In order to achieve the above object, the present invention provides a MEMS module, including a circuit substrate, a signal receiving unit, a signal processing module and a communication unit, which are disposed on the circuit substrate and used for receiving signals, wherein: the circuit substrate is a flexible circuit substrate, the input end of the signal processing unit is connected with the signal receiving unit, and the output end of the signal processing unit is connected with the input end of the communication unit.
According to the utility model discloses an embodiment, be equipped with the RS485 interface on the flexible circuit base plate, signal processing module passes through the RS485 interface and links to each other with this flexible circuit base plate.
According to the utility model discloses an embodiment, the RS485 interface includes balanced driver and differential receiver, wherein differential receiver's input with balanced driver's output links to each other, differential receiver's output is connected signal processing module.
According to the utility model discloses an embodiment, signal processing module, including AD conversion module, digital signal processing unit, DA conversion module, wherein this digital signal processing unit's input links to each other with AD conversion module, and DA conversion module is connected to its output.
According to the utility model discloses an embodiment, signal processing module is still including the power module who is used for providing the power, power module links to each other with DA conversion module and AD conversion module's input respectively.
According to the utility model discloses an embodiment, signal receiving unit is SMD antenna.
The utility model also provides a control system based on above-mentioned MEMS module, its including the MEMS sensor module that is used for gathering the measured object data, receive and handle MEMS sensor module, the management module that MEMS sensor module sent information and with the little executor that management module links to each other, its characterized in that: the MEMS module and the management module are connected with each other.
According to the utility model discloses an embodiment, MEMS sensor module is equipped with wireless transmitting module, wireless transmitting module is used for gathering data transmission with MEMS sensor module to MEMS module.
According to an embodiment of the present invention, the MEMS sensor module includes a pressure sensor and an acceleration sensor.
According to an embodiment of the present invention, the micro actuator includes a micro motor, micro tweezers, a micro pump, a micro valve, a micro optical device, a printer head, and a hard disk magnetic head.
According to an embodiment of the invention, the MEMS sensor module is provided with a calibration module for calibrating the data of the MEMS sensor module.
Compared with the prior art, the utility model, its beneficial effect is: the flexible circuit substrate is adopted as the design bottom plate of the MEMS module, so that the volume of the MEMS module is reduced, the circuit laying of the MEMS module is more reasonable, and the degree of freedom of the circuit design and the mechanical structure design of the MEMS module is greatly improved; meanwhile, the RS485 interface is adopted to connect the flexible circuit substrate and the signal processing module, so that the information transmission rate and the noise resistance of the MEMS module are improved.
Drawings
Fig. 1 is a logic block diagram of an FPC based MEMS module of the present invention;
fig. 2 is a control system block diagram of a MEMS module of the present invention;
fig. 3 is a logic block diagram of a MEMS system of the prior art of the present invention.
Detailed Description
In order to explain the technical content, structural features, achieved objects and functions of the present invention in detail, the following embodiments are described in detail with reference to the accompanying drawings.
Referring to fig. 1 in combination with fig. 2, the present invention provides a control system based on MEMS module to realize real-time monitoring and control of a controlled device, wherein the control system includes a MEMS sensor module 10, a MEMS module 20, a management module 30 and a micro-actuator 40; the MEMS sensor module 10 detects actual condition information of a controlled device, transmits the detected information data to the MEMS module 20, processes the information data, and transmits the processed information data to the management module 30 through a wireless or/and wired network, and the management module 30 controls the micro actuator to control the controlled device.
The MEMS sensor module 10 is a device that can sense a predetermined measured quantity and convert it into a usable signal (electrical signal) according to a certain rule; the measurands include various physical, chemical and biomass quantities of the controlled device, such as displacement, velocity, acceleration, sound, light, electricity, magnetism, heat, pH, ion concentration, etc. The MEMS sensor module 10 can convert the information into analog signals and send the analog signals to the MEMS module 20 through a wireless network/limited network, preferably, the MEMS sensor module 10 is a pressure sensor or an acceleration sensor and is used for detecting the pressure and the acceleration of the controlled equipment, the MEMS sensor module 10 sends the acquired data to the MEMS module 20 through a wireless network (for example, a wifi/zigbee wireless network), and the MEMS sensor module 10 is preferably provided with a wireless transmitting module and is used for sending the data information acquired by the MEMS sensor module to the MEMS module;
continuing to refer to fig. 2, the MEMS module 20 includes a circuit substrate 21, a signal receiving unit 22, a signal processing module 23, and a communication unit 24, wherein the circuit substrate 21 is a flexible circuit substrate (FPC), and the signal receiving unit 22 is connected to the signal processing module 23 and the communication unit 24 in sequence and disposed on the flexible circuit substrate; because the flexible circuit substrate is a flexible printed circuit substrate made of high-temperature-resistant polyimide and other film materials, the flexible printed circuit substrate has the characteristics of high wiring density, light weight and thin thickness and can be freely bent, the flexible circuit substrate is used as a manufacturing substrate of the MEMS module 20, the volume of the MEMS module 20 can be reduced, and meanwhile, compared with the MEMS module designed based on a PCB (printed Circuit Board), the circuit laying mode of the MEMS module based on the FPC is more reasonable, and the freedom degree of the circuit design and the mechanical structure design of the MEMS module 20 is greatly improved;
furthermore, the flexible circuit substrate is provided with an RS485 interface (not shown), the signal processing module 23 is connected with the flexible circuit substrate through the RS485 interface, the RS485 interface is used as a chip which is not easy to damage an interface circuit, the level of the RS485 interface is compatible with the level of TTL, the RS485 interface can be conveniently connected with the TTL circuit, the circuit is simplified, the laying is more reasonable, the highest data transmission rate of the RS485 interface is 10Mbps, and the data transmission rate of the whole MEMS module can be faster; meanwhile, the RS485 interface allows up to 128 transceivers to be connected on the bus, has multi-station capability, and can conveniently establish an equipment network to facilitate the transmission of data information; in order to further ensure that data transmission is not interfered by the outside, the RS485 interface comprises a balanced driver and a differential receiver, wherein the input end of the differential receiver is connected with the output end of the balanced driver, the output end of the differential receiver is connected with the signal processing module, and the received data is filtered and amplified by the MEMS module 20 through the differential receiver and the balanced driver and then sent to the management module, so that the common-mode interference resistance of the RS485 interface can be effectively improved, and the remote transmission of the data is effectively ensured.
Since the data sent by the MEMS sensor module 10 to the MEMS module 20 is an analog signal, preferably, the signal processing module 23 includes an a/D conversion module 231, a digital signal processing unit 232, and a D/a conversion module 233, wherein the input end of the digital signal processing unit is connected to the a/D conversion module 231, and the output end of the digital signal processing unit is connected to the D/a conversion module 233. The signal receiving unit 22 of the MEMS module converts the received analog signal to the a/D conversion module 231 of the signal processing module 23, converts the analog signal into a digital signal, sends the digital signal to the digital signal processing unit 232, processes the digital signal into a suitable logic, circuit or/and code, converts the digital signal into an analog signal through the D/a conversion module 233, and sends the analog signal to the management module 30; preferably, the signal processing module 23 further includes a power module 234 for providing power, and the power module 234 is connected to the input terminals of the D/a conversion module 233 and the a/D conversion module 231, respectively.
In order to ensure that the MEMS module 20 can accurately and effectively receive the data sent by the transmitting terminal of the MEMS sensor module 10, and at the same time, reduce industrial wiring and reduce energy consumption of the MEMS system, the data is transmitted between the MEMS sensor module 10 and the MEMS module 20 through a wireless network (e.g., a wifi/zigbee wireless network), and the signal receiving unit 22 disposed in the MEMS sensor module 10 is a patch antenna embedded in the flexible circuit substrate, so as to reduce the volume of the MEMS module 20.
During operation, the signal receiving unit 22 receives data collected by the MEMS sensor module, sends the data to the signal processing module 23, sends the data to the communication unit 24 after processing, and sends the data to the management module 30 through the communication unit 24; wherein,
the management module 30 includes a host and a centralized monitoring display screen, the MEMS module sends detected data information to the management module 30, and the detected data information is displayed by the centralized monitoring display screen of the management module 30, so that a user can directly know the real-time state of the currently controlled device through the centralized monitoring display screen, and according to the real-time state of the current device, a control signal is sent through the management module 30 to control the micro-actuator 50, so that the micro-actuator 50 does work to the outside, wherein, as an optimization, the micro-actuator can be a micro-motor, a micro-tweezers, a micro-pump, a micro-valve, a micro-optical device, a printer nozzle, a hard disk magnetic head, and the like.
With continued reference to fig. 1 in conjunction with fig. 2, according to embodiments of the present invention, calibration may be required due to the fact that monitored parameters of the monitored device, such as mechanical, electrical, and/or electrode assemblies, may change over time and may degrade due to aging of the MEMS sensor, changes in the temperature and humidity of its operating environment, and so on. In this regard, a calibration module (not shown) capable of calibrating/recalibrating the MEMS sensor acquisition data in various ways is provided within the MEMS sensor module 10. The data acquisition error is adjusted through a calibration module in the MEMS sensor, so that the data acquisition accuracy is ensured; further, in order to ensure real-time data acquisition of the monitoring device by the MEMS sensor and reduce the whole network data communication traffic of the whole MEMS control system, a comparator is provided in the MEMS sensor module 10, and a corresponding threshold is provided in the comparator, when the data acquired by the MEMS sensor exceeds the threshold corresponding to the comparator, the data is immediately sent to the MEMS module 20, and is processed by the processor and then sent to the management module 30, and the management module 30 controls the micro-actuator to perform a corresponding action or sends a call message to the MEMS module through the network; when the data collected by the MEMS sensor is within the threshold value set by the comparator, the data can be set by the system to be only sent to the management unit in average value in whole minutes.
To sum up, the preferred embodiment of the present invention is only, the protection scope of the present invention is not limited thereto, and all equivalent changes and modifications made in accordance with the patent scope and the content of the specification of the present invention are all within the scope covered by the present invention.
Claims (11)
1. The utility model provides a MEMS module, includes circuit substrate, locates the signal reception unit, signal processing module and the communication unit that are used for received signal on this circuit substrate, its characterized in that: the circuit substrate is a flexible circuit substrate, the input end of the signal processing unit is connected with the signal receiving unit, and the output end of the signal processing unit is connected with the input end of the communication unit.
2. The MEMS module of claim 1, wherein the flexible circuit substrate is provided with an RS485 interface, and the signal processing module is connected with the flexible circuit substrate through the RS485 interface.
3. The MEMS module of claim 2, wherein the RS485 interface comprises a balanced driver and a differential receiver, wherein an input terminal of the differential receiver is connected to an output terminal of the balanced driver, and an output terminal of the differential receiver is connected to the signal processing module.
4. The MEMS module of claim 1, wherein: the signal processing module comprises an A/D conversion module, a digital signal processing unit and a D/A conversion module, wherein the input end of the digital signal processing unit is connected with the A/D conversion module, and the output end of the digital signal processing unit is connected with the D/A conversion module.
5. The MEMS module of claim 4, wherein: the signal processing module also comprises a power supply module used for providing power supply, and the power supply module is respectively connected with the input ends of the D/A conversion module and the A/D conversion module.
6. The MEMS module of claim 1, wherein: the signal receiving unit is a patch antenna.
7. A control system based on the MEMS module of claim 1, which comprises a MEMS sensor module for collecting data of an object to be measured, a MEMS module for receiving and processing information sent from the MEMS sensor module, a management module, and a micro-actuator connected to the management module, wherein: the MEMS module and the management module are connected with each other.
8. The MEMS module-based control system of claim 7 wherein: the MEMS sensor module is provided with a wireless transmitting module, and the wireless transmitting module is used for transmitting data acquired by the MEMS sensor module to the MEMS module.
9. The MEMS module-based control system of claim 7 wherein: the MEMS sensor module includes a pressure sensor and an acceleration sensor.
10. The MEMS module-based control system of claim 7 wherein: the micro actuator comprises a micro motor, micro tweezers, a micro pump, a micro valve, a micro optical device, a printer nozzle and a hard disk magnetic head.
11. The MEMS module-based control system of claim 7 wherein: the MEMS sensor module is provided with a calibration module for calibrating data of the MEMS sensor module.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103274352A (en) * | 2013-05-23 | 2013-09-04 | 安徽海聚信息科技有限责任公司 | MEMS module and control system based on same |
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| CN103274352A (en) * | 2013-05-23 | 2013-09-04 | 安徽海聚信息科技有限责任公司 | MEMS module and control system based on same |
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Denomination of utility model: MEMS module and control system based on same Effective date of registration: 20150512 Granted publication date: 20131030 Pledgee: The construction of Huaibei investment limited liability company long development zone Pledgor: Anhui Haiju Information Technology Co., Ltd. Registration number: 2015340000008 |
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Granted publication date: 20131030 Termination date: 20200523 |