CN203250177U - A self-correction electron beam scanning and outputting system - Google Patents
A self-correction electron beam scanning and outputting system Download PDFInfo
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- CN203250177U CN203250177U CN 201320291129 CN201320291129U CN203250177U CN 203250177 U CN203250177 U CN 203250177U CN 201320291129 CN201320291129 CN 201320291129 CN 201320291129 U CN201320291129 U CN 201320291129U CN 203250177 U CN203250177 U CN 203250177U
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Abstract
Provided is a self-correction electron beam scanning and outputting system. The self-correction electron beam scanning and outputting system comprises a single chip microcomputer system, a D/A converting unit, an amplifying circuit unit, a power amplifying unit, a dosage sensor unit, and a dosage signal processing unit. The self-correction electron beam scanning and outputting system overcomes a defect of uneven scanning degree of a product in the prior art and uses two feedback mechanisms including negative feedback and real-time monitoring and feedback of scanning dosage in a large-power amplifying circuit. Correction is executed according to actual dosage and set dosage in order to achieve standard dosage. Therefore, various parts of an object being scanned receive basically same irradiation dosage.
Description
Technical field
The utility model relates to a kind of measurement and proving installation, relates in particular to a kind of electron beam scanning and measures and proving installation.
Background technology
According to electron beam mode of motion analysis in magnetic field, original scanning power supply adopts the triangular wave mode, and electron beam is swung under the effect of variation magnetic field.Specific implementation is, adopt the integrated signal generator to produce fixed frequency, the triangular wave of fixed amplitude, this triangular wave are adjusted to suitable amplitude after processing through amplifying circuit, then by amplifier and power amplification circuit output, take out actual waveform by sampling resistor simultaneously and feed back to the amplifier negative terminal.
Although such scheme can be realized swinging of electron beam since beam energy and electron beam irradiation time direct relation is arranged.When deflection of a beam of electrons when the scan box two ends, in the same angular velocity situation, the goods on the unit area connects the irradiated time and can reduce, thereby so that dosage will reduce, thereby cause in the middle of the goods inconsistent with goods two ends dosage.The utility model has been and has addressed this problem and design.
When the scanning power supply output current will produce a changing magnetic field during by scanning yoke, electron beam scans irradiation to goods under the effect in this magnetic field.Because the radiation dose that irradiation processing requires goods to accept is as far as possible consistent, has proposed higher requirement for scanning uniformity, the utility model namely solves the scanning uniformity problem by scan mode and the structure of improving scanning power supply.
Summary of the invention
The purpose of this utility model is in order to overcome above-mentioned the deficiencies in the prior art, provide a kind of two kinds of feedback mechanisms of Real-Time Monitoring and feedback that adopt negative feedback under the high-power amplifying circuit and scanning dose Uniform Scanning review one's lessons by oneself formal electron beam scanning output system.
For achieving the above object, the utility model adopts following technical proposals:
A kind ofly review one's lessons by oneself formal electron beam scanning output system, comprise
Single Chip Microcomputer (SCM) system D1, described Single Chip Microcomputer (SCM) system comprises single-chip microcomputer, power circuit, oscillatory circuit, holding circuit and other necessary peripheral circuits can be long-term in order to guarantee the monolithic machine, stable work;
D/A converting unit D2, described D/A converting unit comprises the D/A conversion chip, and the required peripheral circuit of this D/A conversion chip, this D/A converting unit converts the digital quantity of described single-chip microcomputer output to analog quantity, i.e. the needed suitable waveform of output scanning power supply;
Amplifier circuit unit UB, described amplifier circuit unit is finished the adjustment to the D/A output waveform, makes it satisfy the actual scanning demand in amplitude;
Power amplification unit Q, described power amplification unit can carry out power amplification with the waveform of amplifier circuit unit output, makes it satisfy application demand at electric current;
Dose sensor cell S 1 is installed several dose sensor at the goods irradiated site, measures the irradiation dose that goods is accepted in the whole irradiation process;
Dose signal processing unit D3, the electromagnetic signal when being used for filtering irradiation processing is disturbed, and obtains clean sensor transmissions signal and is used for the single-chip microcomputer analysis;
Single Chip Microcomputer (SCM) system D1, D/A converting unit D2, amplifier circuit unit UB, power amplification unit Q successively order are electrically connected, serial scan coil L between described power amplification unit Q output terminal and the amplifier circuit unit UB negative pole, Single Chip Microcomputer (SCM) system D1, dose signal processing unit D3, dose sensor cell S 1 successively order are electrically connected.
As further improvement of the utility model, describedly review one's lessons by oneself formal electron beam scanning output system, it is characterized in that: sampling resistor R connects between described amplifier circuit unit UB negative pole and the earth terminal.
The utility model adopts two kinds of feedback mechanisms, a kind of is that sweep current feeds back to operational amplification circuit through behind the sample resistance, this negative feedback can guarantee the relatively constant of electric current to output current correction automatically, another kind is the dosage of real-time collection irradiation, single-chip microcomputer just can be revised with setting dosage according to actual dose, to reach standard dose.By these two means so that goods when scanning various piece to accept irradiation dose basic identical, also just solved the uniformity coefficient problem of scanning.
Description of drawings:
Fig. 1 is electrical schematic diagram of the present utility model.
Embodiment
Referring to accompanying drawing 1, the utility model is comprised of following components, 1. Single Chip Microcomputer (SCM) system.Single Chip Microcomputer (SCM) system comprises single-chip microcomputer, power circuit, and oscillatory circuit, holding circuit and other necessary peripheral circuits can be long-term in order to guarantee the monolithic machine, stable work.2.D/A converting unit.The D/A converting unit is mainly the D/A conversion chip, and the required peripheral circuit of this D/A conversion chip.The D/A converting unit can convert the digital quantity of single-chip microcomputer output to analog quantity, i.e. the needed suitable waveform of output scanning power supply.3. amplifier circuit unit.Amplifier circuit unit is finished the adjustment to the D/A output waveform, makes it can satisfy the actual scanning demand on amplitude.4. power amplification unit.Power amplification unit can carry out power amplification with the waveform of amplifier circuit unit output, makes it also can satisfy application demand on electric current.5. dose sensor unit.At the goods irradiated site several dose sensor are installed, substantially can measure the irradiation dose that goods is accepted in the whole irradiation process.6. dose signal processing unit.Disturb owing to have strong electromagnetic signal during irradiation processing, so the signal of sensor transmissions must can obtain cleaner signal through processing, single-chip microcomputer can be analyzed.Therefore the dose signal treatment circuit is very crucial.
Above-mentioned Single Chip Microcomputer (SCM) system D1, D/A converting unit D2, amplifier circuit unit UB, power amplification unit Q successively order is electrically connected, serial scan coil L between described power amplification unit Q output terminal and the amplifier circuit unit UB negative pole, Single Chip Microcomputer (SCM) system D1, dose signal processing unit D3, dose sensor cell S 1 successively order is electrically connected, 0-No. 7 eight output ports of described Single Chip Microcomputer (SCM) system D1 and 0-No. 7 corresponding electrical connections of eight input ports of described D/A converting unit D2, the analog output port 8 of described D/A converting unit D2 is electrically connected with the positive pole of amplifier circuit unit UB, and sampling resistor R connects between amplifier circuit unit UB negative pole and the earth terminal.
In the utility model, sweep waveform is no longer directly produced by signal generator, but is produced by single-chip microcomputer.After setting the parameter that needs dosage when equipment is started working, single-chip microcomputer calculates the amplitude output digit signals of initial waveform.The D/A converting unit is exported an analog signals after receiving this signal.Output to power amplification unit after this waveform is processed by amplifying circuit and amplify, output to scanning yoke, drive electron beam and begin deflection.Deliver in the dose signal treatment circuit after the dose sensor of irradiation zone is subjected to signal simultaneously, the signal after the processing is delivered in the single-chip microcomputer.Single-chip microcomputer is analyzed resulting dose signal, and output waveform is revised.When measuring dosage less than setting value, single-chip microcomputer keeps the output waveform amplitude constant, because this scanning power supply adopts negative feedback mechanism, then can keep the electric current of scanning yoke to remain unchanged, then scanning magnetic field does not change yet, so that electron beam is in this short stay, to replenish the dosage that is lacked.When reaching setting value, single-chip microcomputer changes wave-shape amplitude, and sweep current changes, thereby changes scanning magnetic field, so that deflection of a beam of electrons shines to other positions.
As mentioned above, the utility model adopts two kinds of feedback mechanisms, a kind of is that sweep current feeds back to operational amplification circuit through behind the sample resistance, this negative feedback can guarantee the relatively constant of electric current to output current correction automatically, another kind is the dosage of real-time collection irradiation, single-chip microcomputer just can be revised with setting dosage according to actual dose, to reach standard dose.By these two means so that goods when scanning various piece to accept irradiation dose basic identical, well solved the uniformity coefficient problem of scanning.
Claims (2)
1. review one's lessons by oneself formal electron beam scanning output system for one kind, comprise
Single Chip Microcomputer (SCM) system (D1), described Single Chip Microcomputer (SCM) system comprises single-chip microcomputer, power circuit, oscillatory circuit, holding circuit and other necessary peripheral circuits can be long-term in order to guarantee the monolithic machine, stable work;
D/A converting unit (D2), described D/A converting unit comprises the D/A conversion chip, and the required peripheral circuit of this D/A conversion chip, this D/A converting unit converts the digital quantity of described single-chip microcomputer output to analog quantity, i.e. the needed suitable waveform of output scanning power supply;
Amplifier circuit unit (UB), described amplifier circuit unit is finished the adjustment to the D/A output waveform, makes it satisfy the actual scanning demand in amplitude;
Power amplification unit (Q), described power amplification unit can carry out power amplification with the waveform of amplifier circuit unit output, makes it satisfy application demand at electric current;
Several dose sensor are installed at the goods irradiated site in dose sensor unit (S1), measure the irradiation dose that goods is accepted in the whole irradiation process;
Dose signal processing unit (D3), the electromagnetic signal when being used for filtering irradiation processing is disturbed, and obtains clean sensor transmissions signal and is used for the single-chip microcomputer analysis;
Single Chip Microcomputer (SCM) system (D1), D/A converting unit (D2), amplifier circuit unit (UB), power amplification unit (Q) successively order are electrically connected, serial scan coil (L) between described power amplification unit (Q) output terminal and amplifier circuit unit (UB) negative pole, Single Chip Microcomputer (SCM) system (D1), dose signal processing unit (D3), dose sensor unit (S1) successively order are electrically connected.
2. as claimed in claim 1ly review one's lessons by oneself formal electron beam scanning output system, it is characterized in that: the sampling resistor (R) of connecting between described amplifier circuit unit (UB) negative pole and the earth terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320291129 CN203250177U (en) | 2013-05-26 | 2013-05-26 | A self-correction electron beam scanning and outputting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320291129 CN203250177U (en) | 2013-05-26 | 2013-05-26 | A self-correction electron beam scanning and outputting system |
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| Publication Number | Publication Date |
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| CN203250177U true CN203250177U (en) | 2013-10-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320291129 Withdrawn - After Issue CN203250177U (en) | 2013-05-26 | 2013-05-26 | A self-correction electron beam scanning and outputting system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103279060A (en) * | 2013-05-26 | 2013-09-04 | 山东蓝孚高能物理技术有限公司 | Self-correction electron beam scanning output system |
| CN108034835A (en) * | 2017-12-31 | 2018-05-15 | 株洲稀美泰材料有限责任公司 | Electron beam scanning control system and matched electron beam accelerating power source and electron beam furnace |
-
2013
- 2013-05-26 CN CN 201320291129 patent/CN203250177U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103279060A (en) * | 2013-05-26 | 2013-09-04 | 山东蓝孚高能物理技术有限公司 | Self-correction electron beam scanning output system |
| CN103279060B (en) * | 2013-05-26 | 2016-06-29 | 山东蓝孚高能物理技术有限公司 | Review one's lessons by oneself formal electron beam scanning output system |
| CN108034835A (en) * | 2017-12-31 | 2018-05-15 | 株洲稀美泰材料有限责任公司 | Electron beam scanning control system and matched electron beam accelerating power source and electron beam furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Five Ji'nan province high tech Zone, Shandong Road, No. 2711, No. 250101 Patentee after: SHANDONG VANFORM HIGH ENERGY PHYSICS TECHNOLOGY CO., LTD. Address before: Five Ji'nan province high tech Zone, Shandong Road, No. 2711, No. 250101 Patentee before: Shandong Vanform HighEnergyPhysics Technology Co., Ltd. |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20131023 Effective date of abandoning: 20160629 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |