CN203242567U - Temperature protection device based on MEMS switch - Google Patents
Temperature protection device based on MEMS switch Download PDFInfo
- Publication number
- CN203242567U CN203242567U CN 201320275182 CN201320275182U CN203242567U CN 203242567 U CN203242567 U CN 203242567U CN 201320275182 CN201320275182 CN 201320275182 CN 201320275182 U CN201320275182 U CN 201320275182U CN 203242567 U CN203242567 U CN 203242567U
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- temperature protection
- micro
- switch
- protection device
- mechanical switch
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Abstract
The utility model discloses a temperature protection device based on an MEMS switch. The temperature protection device comprises a Si substrate, a signal line, a micro mechanical switch, pressure welding blocks and a platinum resistor which are arranged on the Si substrate, wherein micro mechanical switch is composed of a micro mechanical switch contact, an insulating layer and micro mechanical switch V-shaped beams which are connected in sequence, the signal line is broken in the middle, one end of the micro mechanical switch contact is arranged directly facing the disconnected part of the signal line, the other end is connected with driving ends of the micro mechanical switch V-shaped beams through the insulating layer, two anchor area ends of the micro mechanical switch V-shaped beams are respectively connected with one pressure welding block, one of the pressure welding blocks is grounded, and the other is connected with a power supply through the platinum resistor. The temperature protection device based on the MEMS switch sets a temperature protection value by presetting a current, and controls the current by utilizing the platinum resistor temperature effect, so as to make the micro mechanical switch V-shaped beams undergo thermal expansion, cause the displacement of the micro mechanical switch, realize the on-off of signals, and achieve the temperature protection purpose; and the temperature protection device based on the MEMS switch has the advantages of tunability, high sensitivity, simple structure, good controllability, small volume, and the like.
Description
Technical field
The utility model belongs to technical field of microelectronic devices, relates to a kind of temperature protection device.
Background technology
The temperature protection device is the temperature effect of utilizing temperature-sensing element, and when temperature was increased to critical temperature value, element produced action, cuts off or the connection circuit, thereby circuit is played heat protective effect.When temperature dropped to critical temperature, element produced action circuit is reclosed or cuts off, and makes whole system return to normal operating conditions.The temperature protection device has that volume is little, casing insulation, be active in one's movements, the characteristics such as the life-span is long, be widely used in the overheated overcurrent double protection of various motors, electromagnetic oven, vacuum cleaner, coil, transformer, electric heater, ballast, electric heating appliance, fluorescent lamp ballast, automobile motor, integrated circuit and general electric equipment.
Normally used temperature protection device is a kind of with the temperature switch of bimetal leaf as temperature-sensing element; during the electrical equipment normal operation; bimetal leaf is in free state; the contact is in closure or off-state; when temperature was increased to the temperature protection value, bimetallic element was heated and produces internal stress and rapidly action, opens or closing contact; cut off or the connection circuit, thereby play heat protective effect.When temperature drops to design temperature protection value when following, contact auto-closing or disconnection make circuit return to normal operating conditions.
Temperature protection device in the utility model is based on the MEMS technology, utilizes platinum resistance as temperature-sensing element, controls the action of micro-machinery switch by the change in resistance of platinum resistance, thereby switches on or off circuit, plays the temperature protection effect.Compare with common sheet metal temperature-sensing element, platinum resistance is more responsive to the variation of temperature, and temperature variant regularity is stronger, easier accurately control; Control break-make with the micro-machinery switch structure as contactor, can realize by default different initial currents the free setting of temperature protection value, and volume is less, performance is better, makes to need not special material and fully compatible with standard Si technique.
Characteristics based on above MEMS temperature protection device; can find out that the utility model is compared with traditional temperature switch and increased tunability clearly; improved performance; technique is more simple ripe; and taken into account volume little, with the advantages such as Si process compatible, high reliability, high duplication, well satisfied the basic demand of integrated circuit to device.Therefore, the temperature protection device based on mems switch has good using value and wide market potential.
The utility model content
Technical problem:The utility model provides a kind of can carry out temperature protection to circuit effectively, has tunability, and has solved the temperature protection device based on mems switch in all many-sided problems such as material, technique, reliability and repeatabilities.
Technical scheme:Temperature protection device based on mems switch of the present utility model; comprise the Si substrate; be arranged on the holding wire on the Si substrate; micro-machinery switch; press welding block and platinum resistance; micro-machinery switch is by the micro-machinery switch contact; insulating barrier and micro-machinery switch V-beam connect and compose successively; holding wire in separated; the one gap setting of rectifying holding wire of micro-machinery switch contact; the other end is connected by the drive end of insulating barrier with the micro-machinery switch V-beam; two anchor district ends of micro-machinery switch V-beam are connected with a press welding block respectively; one of them press welding block ground connection, another press welding block is connected with power supply by platinum resistance.
In the utility model, platinum resistance is as temperature sensitive member.
In the temperature protection device of the present utility model, platinum resistance and micromechanics (MEMS) construction of switch consists of current path, in the micro-machinery switch structure by the displacement of V-beam control switch.By default certain initial current so that micro-machinery switch produces certain displacement, because the variation of platinum resistance resistance and temperature has clear and definite corresponding relation, therefore the variation of temperature will cause the variation of electric current, thereby cause the change in displacement of micro-machinery switch, and then the break-make of control signal.Should be noted that some problems in the whole technical scheme, the system of the stress of beam for example, this realization tool for whole device architecture is of great significance.
The utility model device is a kind of temperature effect control size of current of utilizing platinum resistance, thereby causes that the switch displacement realizes the micro-structural of signal break-make control based on the micro-machinery switch structure.Temperature protection device based on mems switch of the present utility model provides support and assurance for real the realization based on the commercial application of electronic device in integrated circuit of MEMS technology.Temperature protection device in application the utility model can promote the commercial application of temperature protection structure in integrated circuit of MEMS technology.
The utility model device is to utilize platinum resistance to the sensitiveness of variations in temperature, controls size of current by the change in resistance of platinum resistance under the different temperatures, thereby causes the change in displacement of micro-machinery switch, realizes the structure of signal break-make.
Beneficial effect:The utility model compared with prior art has the following advantages:
1, simple in structure, reliability is high; 2, responsive to variations in temperature, be easy to control; 3, can be by default initial current free setting temperature protection value; 4, manufacture craft and Si process compatible.
For a long time because based on the particularity of the temperature protection device structure of MEMS technology, the research and development of such device only are confined to scientific research field.The large-scale production that is applied to integrated circuit based on the temperature protection device of mems switch exists a series of obstacles such as incompatible with main flow technique, that repeatability is poor, production cost is high.The temperature protection device structure based on mems switch in the utility model has broken through traditional material and structural limitations, has searched out the implementation method based on Si technique, and compatible and repeatability all is greatly improved.Simultaneously, the temperature protection device based on mems switch has the advantages such as tunable, simple in structure, highly sensitive, that controllability is good, with low cost.
Description of drawings
Fig. 1 is based on the temperature protection device structural representation of MEMS technology.
Have among the figure: silicon substrate 1, holding wire 2, micro-machinery switch contact 3, insulating barrier 4, micro-machinery switch V-beam structure 5, press welding block 6, platinum resistance 7.
Embodiment
Temperature protection device based on mems switch of the present utility model comprises Si substrate 1; be arranged on the holding wire 2 on the Si substrate 1; micro-machinery switch; press welding block 6 and platinum resistance 7; micro-machinery switch is by micro-machinery switch contact 3; insulating barrier 4 and micro-machinery switch V-beam 5 connect and compose successively; holding wire 2 in separated; the one gap setting of rectifying holding wire 2 of micro-machinery switch contact 3; the other end is connected with the drive end of micro-machinery switch V-beam 5 by insulating barrier 4; two anchor district ends of micro-machinery switch V-beam 5 are connected with a press welding block 6 respectively; one of them press welding block 6 ground connection, another press welding block 6 is connected with power supply by platinum resistance 7.
The manufacture craft of the temperature protection device based on mems switch of the present utility model and standard Si technique are fully compatible.
Temperature protection device based on mems switch of the present utility model is different from traditional temperature switch, this structure is by default initial current free setting temperature protection value, and utilize platinum resistance to control size of current, after having preset certain initial current, there is electric current to flow through on the micro-machinery switch V-beam 5 and generates heat, make micro-machinery switch V-beam 5 that thermal expansion occur, thereby so that micro-machinery switch is subjected to displacement, the micro-machinery switch contact contacted and realized signal conduction this moment with holding wire; After temperature raises, meeting so that the resistance value of platinum resistance become greatly, thereby so that flow through the electric current of micro-machinery switch V-beam 5 and diminish; after electric current is varied down to a certain degree; meeting so that micro-machinery switch contact and holding wire disengage, thereby realize the disconnection of signal, reach the purpose of temperature protection.Temperature protection device based on mems switch has following principal character: one, platinum resistance is more responsive to the variation of temperature, and is more accurate with the corresponding relation of temperature, is easy to working control and operation, improved the accuracy of switch motion; Two, the micro-machinery switch structure is easy to free setting temperature protection value; Three, manufacture craft and the Si technique based on the temperature protection device of MEMS technology is fully compatible.In addition, be that dwindling with integrated of switch control device size provides the foundation and guarantee based on the temperature protection device of mems switch, further promoted the commercial application of MEMS technology in integrated circuit simultaneously.
Distinguish whether to be the standard of this structure as follows:
(a) adopt platinum resistance as temperature sensitive member,
(b) adopt micro-machinery switch structure control holding wire break-make.
The device that satisfies above two conditions namely should be considered as temperature protection device of the present utility model.
Claims (3)
1. temperature protection device based on mems switch; it is characterized in that; this device comprises Si substrate (1); be arranged on the holding wire (2) on the described Si substrate (1); micro-machinery switch; press welding block (6) and platinum resistance (7); described micro-machinery switch is by micro-machinery switch contact (3); insulating barrier (4) and micro-machinery switch V-beam (5) connect and compose successively; described holding wire (2) in separated; the one gap setting of rectifying holding wire (2) of described micro-machinery switch contact (3); the other end is connected with the drive end of micro-machinery switch V-beam (5) by insulating barrier (4); two anchor district ends of micro-machinery switch V-beam (5) are connected with a press welding block (6) respectively; one of them press welding block (6) ground connection, another press welding block (6) is connected with power supply by platinum resistance (7).
2. the temperature protection device based on mems switch according to claim 1 is characterized in that, described platinum resistance (7) is as temperature sensitive member.
3. the temperature protection device based on mems switch according to claim 1 is characterized in that described micro-machinery switch is as driving element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320275182 CN203242567U (en) | 2013-05-20 | 2013-05-20 | Temperature protection device based on MEMS switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320275182 CN203242567U (en) | 2013-05-20 | 2013-05-20 | Temperature protection device based on MEMS switch |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203242567U true CN203242567U (en) | 2013-10-16 |
Family
ID=49319834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320275182 Withdrawn - After Issue CN203242567U (en) | 2013-05-20 | 2013-05-20 | Temperature protection device based on MEMS switch |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203242567U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103280377A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Micromechanical switch-based temperature protection device |
-
2013
- 2013-05-20 CN CN 201320275182 patent/CN203242567U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103280377A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Micromechanical switch-based temperature protection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131016 Effective date of abandoning: 20150121 |
|
| RGAV | Abandon patent right to avoid regrant |