CN203241374U - Catalytic combustion type methane concentration sensing structure based on capacitance - Google Patents

Catalytic combustion type methane concentration sensing structure based on capacitance Download PDF

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Publication number
CN203241374U
CN203241374U CN 201320225538 CN201320225538U CN203241374U CN 203241374 U CN203241374 U CN 203241374U CN 201320225538 CN201320225538 CN 201320225538 CN 201320225538 U CN201320225538 U CN 201320225538U CN 203241374 U CN203241374 U CN 203241374U
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China
Prior art keywords
pillar
tie
substrate
pole plate
methane concentration
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Expired - Fee Related
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CN 201320225538
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Chinese (zh)
Inventor
张渤
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Xian University of Science and Technology
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Xian University of Science and Technology
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Priority to CN 201320225538 priority Critical patent/CN203241374U/en
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Abstract

The utility model discloses a catalytic combustion type methane concentration sensing structure based on capacitance. The sensing structure comprises a substrate, as well as a first strut and a second strut, which are arranged on the substrate, wherein a first polar plate and a second polar plate used for forming a plate condenser are arranged between the first strut and the second strut, the first polar plate is installed on the upper surface of the substrate, one side edge of the second polar plate is connected with the first strut through a first connecting beam, the other side edge of the second polar plate is connected with the second strut through a second connecting beam, heating layers made from resistance wires are arranged on the upper surfaces of the first connecting beam and the second connecting beam, deformation layers generating bending deformation after being heated are arranged on the upper surfaces of the heating layers, thin film layers used for adhering catalysts are arranged on the upper surfaces of the deformation layers, and catalyst layers used for generating flameless combustion with methane gas are arranged on the upper surfaces of the thin film layers. The methane concentration sensing structure is simple in structure, convenient to use, low in production cost, small in power consumption, capable of forming sensing matrix and convenient to popularize and use.

Description

Catalytic combustion-type methane concentration sensing arrangement based on electric capacity
Technical field
The utility model relates to a kind of sensing methane concentration structure, particularly relates to a kind of catalytic combustion-type methane concentration sensing arrangement based on electric capacity.
Background technology
Be exactly gas explosion to the most serious disaster of Safety of Coal Mine Production at present.Because the principal ingredient of gas is methane, therefore current colliery is all used the sensing of the methane gas content main reference index as gas bearing capacity.It is necessary requiring mine gas content is carried out accurately and timely monitoring continuously according to Safety Work in Colliery, and it also becomes one of important guarantee measure of instructing Safety of Coal Mine Production.The method of sensing gas bearing capacity is a lot, such as thermal conductivity method, optical interferometry, infrared spectrum absorption process, ultrasonic Method for Measuring, gas sensory method and gas catalyst element method etc., but all exist the sensor apparatus volume large, precision is low, stream time is short, and sensing result is easily affected by environment.
Catalytic combustion-type methane sensing instrument is to use extensive, the most general methane sensing instrument in the current colliery, is the effective tool of colliery dynamic surveillance Mine Methane.Because the development of its technology and perfect, this quasi-instrument development in recent years is swift and violent, of a great variety, no matter from the still present low gas sensor to the safety monitoring system of warning miner's lamp, portable gas explosion alarm, all occupied the leading position of coal-mine gas sensor apparatus, Safety of Coal Mine Production has been played vital effect.But because the portable gas explosion alarm also exists certain design defect on sensing principle and software algorithm in the market, so that the measuring error of watt inspection instrument is larger.
The utility model content
The purpose of this utility model is to overcome above-mentioned deficiency of the prior art, and a kind of catalytic combustion-type methane concentration sensing arrangement based on electric capacity is provided.This sensing methane concentration structure simple in structure, easy to use, production cost is low, power consumption is little, can form sensing matrix, be convenient to promote the use of.
For achieving the above object, the technical solution adopted in the utility model is: based on the catalytic combustion-type methane concentration sensing arrangement of electric capacity, it is characterized in that: comprise substrate and be arranged on suprabasil pillar one and pillar two, be provided with between described pillar one and the pillar two for the pole plate one and the pole plate two that consist of plate condenser, described pole plate one is installed in the upper surface of substrate, one side of described pole plate two is connected with pillar one by tie-beam one, another side of described pole plate two is connected with pillar two by tie-beam two, the upper surface of described tie-beam one and tie-beam two is provided with the zone of heating of being made by resistance wire, the upper surface of described zone of heating is provided with for produce diastrophic deformation layer when being heated, the upper surface of described deformation layer is provided with the thin layer for attached catalyst, and the upper surface of described thin layer is provided with for methane gas aphlogistic catalyst layer occuring.
The above-mentioned catalytic combustion-type methane concentration sensing arrangement based on electric capacity, it is characterized in that: be provided with the pillar three of laying with pillar one homonymy and the pillar four of laying with pillar two homonymies in the described substrate, described pillar three is connected with pole plate two by tie-beam three, described pillar four-way is crossed tie-beam four and is connected with pole plate two, the upper surface of described tie-beam three and tie-beam four is provided with the zone of heating of being made by resistance wire, the upper surface of described zone of heating is provided with for produce diastrophic deformation layer when being heated, the upper surface of described deformation layer is provided with the thin layer for attached catalyst, and the upper surface of described thin layer is provided with for methane gas aphlogistic catalyst layer occuring.
The above-mentioned catalytic combustion-type methane concentration sensing arrangement based on electric capacity is characterized in that: described substrate, pillar one, pillar two, pillar three, pillar four, tie-beam one, tie-beam two, tie-beam three and tie-beam four are made by silicon.
The above-mentioned catalytic combustion-type methane concentration sensing arrangement based on electric capacity, it is characterized in that: be provided with the housing that covers for pillar one, pillar two and substrate in the described substrate, be provided with on the described housing and a plurality ofly enter in the housing and stop dust to enter bleeder vent in the housing for methane gass.
The utility model compared with prior art has the following advantages:
1, of the present utility model simple in structure, rationally novel in design.
2, the utility model is by setting up pillar three, pillar four, tie-beam three and tie-beam four, so that the stability of pole plate two improves, and improved the sensitivity of this sensing arrangement by tie-beam three and tie-beam four.
3, realization cost of the present utility model is low, and result of use is good, is convenient to promote the use of.
In sum, the utility model is simple in structure, and rationally novel in design, functional reliability is high, long service life, and production cost is low, and power consumption is little, can form sensing matrix.
Below by drawings and Examples, the technical solution of the utility model is described in further detail.
Description of drawings
Fig. 1 is the structural representation of the utility model embodiment 1.
Fig. 2 is the structural representation of the utility model embodiment 2.
Fig. 3 is the annexation schematic diagram of the utility model zone of heating, deformation layer, thin layer and catalyst layer.
Fig. 4 is the annexation schematic diagram of the utility model housing and substrate.
Description of reference numerals:
1-pillar one; 2-pillar two; 3-pillar three;
4-pillar four; 5-substrate; 6-tie-beam one;
7-tie-beam two; 8-tie-beam three; 9-tie-beam four;
10-pole plate one; 11-pole plate two; 12-zone of heating;
13-deformation layer; 14-thin layer; 15-catalyst layer;
16-housing; 17-bleeder vent.
Embodiment
Embodiment 1
A kind of catalytic combustion-type methane concentration sensing arrangement based on electric capacity as shown in figures 1 and 3, comprise substrate 5 and be arranged on pillar 1 and pillar 22 in the substrate 5, be provided with between described pillar 1 and the pillar 22 for the pole plate 1 and the pole plate 2 11 that consist of plate condenser, described pole plate 1 is installed in the upper surface of substrate 5, one side of described pole plate 2 11 is connected with pillar 1 by tie-beam 1, another side of described pole plate 2 11 is connected with pillar 22 by tie-beam 27, the upper surface of described tie-beam 1 and tie-beam 27 is provided with the zone of heating 12 of being made by resistance wire, the upper surface of described zone of heating 12 is provided with for produce diastrophic deformation layer 13 when being heated, the upper surface of described deformation layer 13 is provided with the thin layer 14 for attached catalyst, and the upper surface of described thin layer 14 is provided with for methane gas aphlogistic catalyst layer 15 occuring.
In the present embodiment, described catalyst layer 15 is palladium oxide or its complex, described deformation layer 13 is made by two kinds of different metals of thermal deformation, deformation layer 13 adopts aluminium and gold to make in the present embodiment, during use, this sensing arrangement placed treat sensitive zones, by being switched on, heats the resistance wire in the zone of heating 12, when the temperature of zone of heating 12 rises to 500 ℃ of left and right sides, and when tested gas contacts with catalyst layer 15, if methane concentration is non-vanishing, to carry out flameless burning on catalyst layer 15 surfaces, heat is emitted in flameless burning further raises deformation layer 13 temperature below catalyzer, deformation layer 13 occurs bending and deformation, and forces tie-beam 1 and tie-beam 27 to occur bending and deformation, and drives simultaneously the pole plate 2 11 that is attached thereto and moves, cause the distance between pole plate 2 11 and the pole plate 1 to change, can indirectly measure the size of methane concentration by the variation of sensing capacitance size.
In the present embodiment, described pillar 1 is connected by the middle part of tie-beam 1 with pole plate 2 11 1 sides, and described pillar 22 is connected by the middle part of tie-beam 27 with pole plate 2 11 another sides.Described substrate 5, pillar 1, pillar 22, tie-beam 1 and tie-beam 27 are made by silicon.
As shown in Figure 4, be provided with the housing 16 that covers for pillar 1, pillar 22 and substrate 5 in the described substrate 5, be provided with on the described housing 16 and a plurality ofly enter in the housing 16 and stop dust to enter bleeder vent 17 in the housing 16 for methane gass.A plurality of described bleeder vents 17 are the micron order bleeder vent.
Should be applicable to based on the catalytic combustion-type methane concentration sensing arrangement of electric capacity micro electronmechanical skilled worker's technology and produce in enormous quantities, and compare with traditional catalyst sensing methane concentration device, production cost is low, power consumption is little, can form sensing matrix, effectively avoid the catalyst aging poisoning, the shortcoming that the work period is short.
Embodiment 2
As shown in Figure 2, the difference of the present embodiment and embodiment 1 is: be provided with the pillar 33 of laying with pillar one 1 homonymies and the pillar 44 of laying with pillar 22 homonymies in the described substrate 5, described pillar 33 is connected with pole plate 2 11 by tie-beam 38, described pillar 44 is connected with pole plate 2 11 by tie-beam 49, the upper surface of described tie-beam 38 and tie-beam 49 is provided with the zone of heating 12 of being made by resistance wire, the upper surface of described zone of heating 12 is provided with for produce diastrophic deformation layer 13 when being heated, the upper surface of described deformation layer 13 is provided with the thin layer 14 for attached catalyst, and the upper surface of described thin layer 14 is provided with for methane gas aphlogistic catalyst layer 15 occuring.
The present embodiment is by setting up pillar 33, pillar 44, tie-beam 38 and tie-beam 49, so that the stability of pole plate 2 11 improves, and improved the sensitivity of this sensing arrangement by tie-beam 38 and tie-beam 49.
In the present embodiment, described pillar 1 is connected by the end of tie-beam 1 with pole plate 2 11 1 sides, and described pillar 33 is connected by the other end of tie-beam 38 with pole plate 2 11 1 sides; Described pillar 22 is connected by the end of tie-beam 27 with pole plate 2 11 another sides, and described pillar 44 is connected by the other end of tie-beam 49 with pole plate two another sides.Described substrate 5, pillar 1, pillar 22, tie-beam 1 and tie-beam 27 are made by silicon.
The above; it only is preferred embodiment of the present utility model; be not that the utility model is imposed any restrictions; every according to the utility model technical spirit to any simple modification, change and equivalent structure transformation that above embodiment does, all still belong in the protection domain of technical solutions of the utility model.

Claims (4)

1. based on the catalytic combustion-type methane concentration sensing arrangement of electric capacity, it is characterized in that: comprise substrate (5) and be arranged on pillar one (1) and pillar two (2) in the substrate (5), be provided with between described pillar one (1) and the pillar two (2) for the pole plate one (10) and the pole plate two (11) that consist of plate condenser, described pole plate one (10) is installed in the upper surface of substrate (5), one side of described pole plate two (11) is connected with pillar one (1) by tie-beam one (6), another side of described pole plate two (11) is connected with pillar two (2) by tie-beam two (7), the upper surface of described tie-beam one (6) and tie-beam two (7) is provided with the zone of heating (12) of being made by resistance wire, the upper surface of described zone of heating (12) is provided with for produce diastrophic deformation layer (13) when being heated, the upper surface of described deformation layer (13) is provided with the thin layer (14) for attached catalyst, and the upper surface of described thin layer (14) is provided with for methane gas aphlogistic catalyst layer (15) occuring.
2. the catalytic combustion-type methane concentration sensing arrangement based on electric capacity according to claim 1, it is characterized in that: be provided with the pillar three (3) of laying with pillar one (1) homonymy and the pillar four (4) of laying with pillar two (2) homonymies in the described substrate (5), described pillar three (3) is connected with pole plate two (11) by tie-beam three (8), described pillar four (4) is connected with pole plate two (11) by tie-beam four (9), the upper surface of described tie-beam three (8) and tie-beam four (9) is provided with the zone of heating (12) of being made by resistance wire, the upper surface of described zone of heating (12) is provided with for produce diastrophic deformation layer (13) when being heated, the upper surface of described deformation layer (13) is provided with the thin layer (14) for attached catalyst, and the upper surface of described thin layer (14) is provided with for methane gas aphlogistic catalyst layer (15) occuring.
3. the catalytic combustion-type methane concentration sensing arrangement based on electric capacity according to claim 2 is characterized in that: described substrate (5), pillar one (1), pillar two (2), pillar three (3), pillar four (4), tie-beam one (6), tie-beam two (7), tie-beam three (8) and tie-beam four (9) are made by silicon.
4. the catalytic combustion-type methane concentration sensing arrangement based on electric capacity according to claim 1, it is characterized in that: be provided with the housing (16) that covers for pillar one (1), pillar two (2) and substrate (5) in the described substrate (5), be provided with on the described housing (16) and a plurality ofly enter in the housing (16) and stop dust to enter bleeder vent (17) in the housing (16) for methane gass.
CN 201320225538 2013-04-28 2013-04-28 Catalytic combustion type methane concentration sensing structure based on capacitance Expired - Fee Related CN203241374U (en)

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CN 201320225538 CN203241374U (en) 2013-04-28 2013-04-28 Catalytic combustion type methane concentration sensing structure based on capacitance

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Application Number Priority Date Filing Date Title
CN 201320225538 CN203241374U (en) 2013-04-28 2013-04-28 Catalytic combustion type methane concentration sensing structure based on capacitance

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109828325A (en) * 2019-03-25 2019-05-31 苏州科技大学 A kind of Temperature Control Type Grating Film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109828325A (en) * 2019-03-25 2019-05-31 苏州科技大学 A kind of Temperature Control Type Grating Film

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C17 Cessation of patent right
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Granted publication date: 20131016

Termination date: 20140428