CN203241090U - Micro-flow detection component used for multi-component gas infrared micro-flow sensor - Google Patents
Micro-flow detection component used for multi-component gas infrared micro-flow sensor Download PDFInfo
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- CN203241090U CN203241090U CN 201320202453 CN201320202453U CN203241090U CN 203241090 U CN203241090 U CN 203241090U CN 201320202453 CN201320202453 CN 201320202453 CN 201320202453 U CN201320202453 U CN 201320202453U CN 203241090 U CN203241090 U CN 203241090U
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- air chamber
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- gas chamber
- infrared
- microflow sensor
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- 238000001514 detection method Methods 0.000 title abstract description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 27
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 229910052721 tungsten Inorganic materials 0.000 claims description 25
- 239000010937 tungsten Substances 0.000 claims description 25
- 238000005259 measurement Methods 0.000 claims description 12
- 230000013011 mating Effects 0.000 claims description 11
- 241000589973 Spirochaeta Species 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000012827 research and development Methods 0.000 abstract description 5
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 1
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Abstract
The utility model discloses a micro-flow detection component used for a multi-component gas infrared micro-flow sensor. The micro-flow detection component comprises a measuring gas chamber, an infrared light source and a receiving gas chamber. The infrared light source is arranged at the front end of the measuring gas chamber and the receiving gas chamber is arranged at the tail end of the measuring gas chamber. A first optical window is arranged between the infrared light source at the front end of the measuring gas chamber and a cavity of the measuring gas chamber. The first optical window is perpendicularly connected with a light chopping plate, and the light chopping plate is connected with a light chopping plate motor. An air inlet and an air outlet are formed in the side wall of the cavity of the measuring gas chamber. The receiving gas chamber at the tail end of the measuring gas chamber is provided with two optical windows, and the tungsten wire micro-flow sensor is arranged on the receiving gas chamber. The two-stage spiral pipeline structure of a two-stage spiral tungsten wire is used as the micro-flow detection component, the tungsten wire of the two-stage spiral structure is low in manufacturing cost, and manufacturing cost and research and development cost of the infrared micro-flow sensor are greatly reduced.
Description
Technical field
The utility model belongs to gas infrared microflow sensor detection means, particularly a kind of micro-flow detector spare for the infrared microflow sensor of multicomponent gas.
Background technology
At present, the micro-flow detector spare of the infrared microflow sensor of multicomponent gas adopts the resistance wire of planar grille shape usually, measures although the resistance wire of this structure can effectively utilize trace gas stream, but its difficulty of processing is large, disposable having high input, the research and development of products cycle is long, and cost is high.
The utility model content
The purpose of this utility model provides a kind of micro-flow detector spare for the infrared microflow sensor of multicomponent gas, the two-stage helical pipeline configuration of this device by utilizing the two-stage screw tungsten filament is as micro-flow detector spare, the tungsten filament low cost of manufacture of two-stage screw structure greatly reduces manufacturing cost and the R﹠D costs of infrared microflow sensor.
The purpose of this utility model realizes by following technical proposals:
A kind of micro-flow detector spare for the infrared microflow sensor of multicomponent gas comprises the measurement air chamber, and is arranged at the infrared light supply of measurement air chamber front end and the reception air chamber of tail end; Described measurement air chamber front end infrared light supply and measure between the air chamber chamber and be provided with the 1# optical window, the 1# optical window vertically connects all mating plates, cuts mating plate and is connected with and cuts the mating plate motor; Described measurement air chamber chamber sidewall is provided with air intake opening and gas outlet; Described measurement air chamber tail end receives air chamber and is provided with two optical windows, receives on the air chamber and is provided with the tungsten filament microflow sensor.
Further, the reception air chamber of described measurement air chamber tail end is respectively ground floor and receives air chamber and second layer reception air chamber, and described ground floor receives the air chamber inboard and is provided with the 2# optical window, and the second layer receives the air chamber inboard and is provided with the 3# optical window.
Further, described ground floor receives on air chamber and the second layer reception gas chamber sidewall and is respectively equipped with the Capillary Gas circulation road, and the tungsten filament microflow sensor is arranged on described Capillary Gas circulation road endpiece.
Further, described tungsten filament microflow sensor is the two-stage screw structure, tungsten filament take 20 microns of single wire diameters turns to diameter as the spirochaeta minutum below 0.1 millimeter according to helix structure, take described spirochaeta minutum as the basis, turn to again the deuterostrophies body of diameter to 1 millimeter according to helix structure.
Characteristics of the present utility model are:
(1) can effectively restrain tungsten filament length in the two-stage screw structure of tungsten filament, in the spatial dimension that outside pore, allows, make tungsten filament meet the requirements of resistance characteristic;
(2) the two-stage screw structure of the tungsten filament surface area that device contacts with air-flow that has been multiplied makes tungsten filament to the susceptibility of air-flow corresponding enhancing be arranged also, thereby reaches as the technical requirement of micro-flow detector spare;
(3) as micro-flow detector spare, the tungsten filament low cost of manufacture of two-stage screw structure greatly reduces the manufacturing cost of infrared microflow sensor and R﹠D costs.
Description of drawings
Fig. 1 is the utility model structural representation.
Fig. 2 is two-stage screw structure tungsten filament microflow sensor structural representation.
Among the figure: 1-tungsten filament microflow sensor, 2-Capillary Gas circulation road, the 3-second layer receives air chamber, the 4-ground floor receives air chamber, the 5-1# optical window, 6-infrared light supply, 7-are cut the mating plate motor, 8-cuts mating plate, 9-air intake opening, 10-measures air chamber, 11-gas outlet, the 12-2# optical window, the 13-3# optical window.
Embodiment
As shown in Figure 1, the micro-flow detector spare that should be used for the infrared microflow sensor of multicomponent gas, comprise and measure air chamber 10, and be arranged at the infrared light supply 6 of measuring air chamber 10 front ends and the reception air chamber of tail end, wherein, measure between air chamber 10 front end infrared light supplies 6 and measurement air chamber 10 chambers and be provided with 1# optical window 5,1# optical window 5 vertically is connected with all mating plates 8, cuts mating plate 8 and is connected with and cuts mating plate motor 7.Measure air chamber 10 chamber sidewall and be provided with air intake opening 9 and gas outlet 11.Measure air chamber 10 tail ends reception air chamber and be provided with two optical windows, be respectively 2# optical window 12 and 3# optical window 13,2# optical window 12 is arranged on the inboard that the second layer receives air chamber 3, and 3# optical window 13 is arranged on ground floor and receives air chamber 4 inboards.The reception air chamber of tail end is respectively ground floor and receives air chamber 4 and second layer reception air chamber 3; Ground floor receives on air chamber 4 and second layer reception air chamber 3 sidewalls and is respectively equipped with Capillary Gas circulation road 2, is provided with tungsten filament microflow sensor 1 at described Capillary Gas circulation road 2 endpiece.
As shown in Figure 2, tungsten filament microflow sensor 1 is the two-stage screw structure, and take the tungsten filament of 20 microns of single wire diameters as basic material, it is little helical structure body below 0.1 millimeter that processing turns to diameter, take this little helical structure body as the basis, turn to again the deuterostrophies body of diameter to 1 millimeter.
The utility model has been taked the tungsten filament microflow sensor of two-stage screw structure is arranged on the Capillary Gas circulation road of measuring air chamber, owing to taked the two-stage screw structure, can effectively restrain tungsten filament length, in the spatial dimension that outside pore, allows, make tungsten filament meet the requirements of resistance characteristic; The surface area that device contacts with air-flow that has been multiplied makes tungsten filament to the susceptibility of air-flow corresponding enhancing be arranged also; Greatly reduce manufacturing cost and the R﹠D costs of infrared microflow sensor.
Above content is in conjunction with concrete preferred implementation further detailed description of the utility model; can not assert that embodiment of the present utility model only limits to this; for the utility model person of an ordinary skill in the technical field; without departing from the concept of the premise utility; can also make some simple deduction or replace, all should be considered as belonging to the utility model by the determined scope of patent protection of claims of submitting to.
Claims (4)
1. a micro-flow detector spare that is used for the infrared microflow sensor of multicomponent gas is characterized in that: comprise and measure air chamber (10), and be arranged at the infrared light supply (6) of measurement air chamber (10) front end and the reception air chamber of tail end; Described measurement air chamber (10) front end infrared light supply (6) and measure between air chamber (10) chamber and be provided with 1# optical window (5), 1# optical window (5) vertically connects all mating plates (8), cuts mating plate (8) and is connected with and cuts mating plate motor (7); Described measurement air chamber (10) chamber sidewall is provided with air intake opening (9) and gas outlet (11); Described measurement air chamber (10) tail end receives air chamber and is provided with two optical windows, receives on the air chamber and is provided with tungsten filament microflow sensor (1).
2. the micro-flow detector spare for the infrared microflow sensor of multicomponent gas according to claim 1, it is characterized in that: the reception air chamber of described measurement air chamber (10) tail end is respectively ground floor and receives air chamber (4) and second layer reception air chamber (3), described ground floor receives air chamber (4) inboard and is provided with 2# optical window (12), and the second layer receives air chamber (3) inboard and is provided with 3# optical window (13).
3. the micro-flow detector spare for the infrared microflow sensor of multicomponent gas according to claim 2, it is characterized in that: described ground floor receives on air chamber (4) and second layer reception air chamber (3) sidewall and is respectively equipped with Capillary Gas circulation road (2), and tungsten filament microflow sensor (1) is arranged on described Capillary Gas circulation road (2) endpiece.
4. the micro-flow detector spare for the infrared microflow sensor of multicomponent gas according to claim 1, it is characterized in that: described tungsten filament microflow sensor (1) is the two-stage screw structure, tungsten filament take 20 microns of single wire diameters turns to diameter as the spirochaeta minutum below 0.1 millimeter according to helix structure, take described spirochaeta minutum as the basis, turn to again the deuterostrophies body of diameter to 1 millimeter according to helix structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320202453 CN203241090U (en) | 2013-04-19 | 2013-04-19 | Micro-flow detection component used for multi-component gas infrared micro-flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320202453 CN203241090U (en) | 2013-04-19 | 2013-04-19 | Micro-flow detection component used for multi-component gas infrared micro-flow sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203241090U true CN203241090U (en) | 2013-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320202453 Expired - Lifetime CN203241090U (en) | 2013-04-19 | 2013-04-19 | Micro-flow detection component used for multi-component gas infrared micro-flow sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980870A (en) * | 2012-12-10 | 2013-03-20 | 武汉四方光电科技有限公司 | High-precision micro-flow infrared gas sensor and measurement method thereof |
| CN103808659A (en) * | 2014-02-19 | 2014-05-21 | 西安鼎研科技有限责任公司 | Light source chopping structure of optical sensor |
| WO2015106607A1 (en) * | 2014-01-17 | 2015-07-23 | 无锡华润上华半导体有限公司 | Gas concentration meter, micro-flow sensor, temperature-sensitive resistor structure and manufacturing method therefor |
-
2013
- 2013-04-19 CN CN 201320202453 patent/CN203241090U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980870A (en) * | 2012-12-10 | 2013-03-20 | 武汉四方光电科技有限公司 | High-precision micro-flow infrared gas sensor and measurement method thereof |
| WO2015106607A1 (en) * | 2014-01-17 | 2015-07-23 | 无锡华润上华半导体有限公司 | Gas concentration meter, micro-flow sensor, temperature-sensitive resistor structure and manufacturing method therefor |
| CN103808659A (en) * | 2014-02-19 | 2014-05-21 | 西安鼎研科技有限责任公司 | Light source chopping structure of optical sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: The new industrial park building 710065 Shaanxi province Xi'an City Station Road No. 22 Building 1 layer two Patentee after: XI'AN DINGYAN TECHNOLOGY CO.,LTD. Address before: 106, room 710065, building 1, block A, Kang Hong Industrial Park, No. six, 40 hi tech Road, Shaanxi, Xi'an Patentee before: XIAN DINGYAN TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A micro flow detection device for multi component gas infrared micro flow sensor Effective date of registration: 20201109 Granted publication date: 20131016 Pledgee: Pudong Development Bank of Shanghai Limited by Share Ltd. Xi'an branch Pledgor: XI'AN DINGYAN TECHNOLOGY Co.,Ltd. Registration number: Y2020610000200 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211125 Granted publication date: 20131016 Pledgee: Pudong Development Bank of Shanghai Limited by Share Ltd. Xi'an branch Pledgor: XI'AN DINGYAN TECHNOLOGY CO.,LTD. Registration number: Y2020610000200 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A micro flow detection device for multi-component gas infrared micro flow sensor Effective date of registration: 20211201 Granted publication date: 20131016 Pledgee: Pudong Development Bank of Shanghai Limited by Share Ltd. Xi'an branch Pledgor: XI'AN DINGYAN TECHNOLOGY CO.,LTD. Registration number: Y2021610000379 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20221215 Granted publication date: 20131016 Pledgee: Pudong Development Bank of Shanghai Limited by Share Ltd. Xi'an branch Pledgor: XI'AN DINGYAN TECHNOLOGY CO.,LTD. Registration number: Y2021610000379 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20131016 |
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| CX01 | Expiry of patent term |