CN203223368U - System for maintaining pressure balance of diaphragm compressor - Google Patents
System for maintaining pressure balance of diaphragm compressor Download PDFInfo
- Publication number
- CN203223368U CN203223368U CN 201320104316 CN201320104316U CN203223368U CN 203223368 U CN203223368 U CN 203223368U CN 201320104316 CN201320104316 CN 201320104316 CN 201320104316 U CN201320104316 U CN 201320104316U CN 203223368 U CN203223368 U CN 203223368U
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- compressor
- process gas
- pressure
- pipeline
- knock out
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Abstract
The utility model relates to a system for maintaining pressure balance of a diaphragm compressor. The system comprises a compressor front buffer tank (1), a compressor rear buffer tank (2), a compressor (3), a low-pressure process gas inlet pipeline (4), a high-pressure process gas supplement pipeline (5), a process gas outlet pipeline (6) and a process gas pressure balance connecting pipeline (10). The process gas pressure balance connecting pipeline (10) is provided with a valve (9) and an automatic regulating valve (7), and an inert gas inlet pipeline (8) is arranged between the valve (9) and the automatic regulating valve (7). According to the system provided by the utility model, by utilizing a method of supplementing insert gases, a balance system of the compressor is prevented from being started, and therefore, not only is the output of the system ensured but also the phenomenon that trace impurities are carried due to the fact that high-pressure process gases are supplemented to cause the diaphragm of the compressor to be damaged is avoided. According to the system, not only is the production process simplified but also the production efficiency is improved, and therefore, the system is broad in market prospect.
Description
Technical field
The utility model relates to the diaphragm type compressor equipment technical field, particularly a kind of diaphragm type compressor pressure balancing system of keeping.。
Background technique
Compressor assembly is the dynamical system of continuous a, balance, and because guaranteeing external system to its continuous supply source of the gas, compressor has all carried balance sysmte, is used for stablizing the balance of self.But after self balance is enabled, knock out drum need replenish with migrant worker's process gases behind the compressor, and this migrant worker's process gases can have the impurity of trace, should not mix with the gas of knock out drum before the compressor, because can produce solid impurity after mixing, the diaphragm of compressor is caused damage.Therefore under the restriction of this technology condition, compressor self balance sysmte is not suitable for the big use of producing at present.
Summary of the invention
Keep the existing defective of diaphragm type compressor pressure balancing system and problem in the prior art in order to solve, the utility model provides a kind of a kind of diaphragm type compressor pressure balancing system of keeping simple in structure, easy to use.
For solving the problems of the technologies described above the technical solution of the utility model be: a kind of diaphragm type compressor pressure balancing system of keeping, comprise the preceding knock out drum of compressor, knock out drum behind the compressor, compressor, low pressure process gas introduction tube road, high-pressure process gas make-up pipeline, process gas is derived pipeline, process gas pressure balance connecting tube, knock out drum links to each other by pipeline with compressor before the described compressor, knock out drum links to each other by pipeline behind compressor and the compressor, before the compressor behind knock out drum and the compressor knock out drum link to each other by process gas pressure balance connecting tube, knock out drum is provided with low pressure process gas introduction tube road before the described compressor, knock out drum is provided with high-pressure process gas make-up pipeline and process gas derivation pipeline behind the described compressor, it is characterized in that: described process gas pressure balance connecting tube is provided with valve and automatic regulating valve, is provided with the inert gas import pipe between described valve and the automatic regulating valve.
The pressure of described low pressure process gas is 0.07-0.15Mpa.
The pressure of described high-pressure process gas is 0.5-0.65Mpa.
The beneficial effects of the utility model are: the utility model utilizes the method for topping up, avoid opening compressor self balance sysmte, both guaranteed the output of system, prevented from again carrying microimpurity because replenishing high-pressure process gas, and the situation that the diaphragm that causes compressor damages takes place, this is a kind of keeps that the diaphragm type compressor pressure balancing system is simple in structure, easy to use, reforming cost is low, has application space widely in the polysilicon industry.
Description of drawings
Fig. 1 the utility model is kept the structural representation of diaphragm type compressor pressure balancing system.
Among the figure: 1, knock out drum before the compressor, 2, knock out drum behind the compressor, 3, compressor, 4, low pressure process gas introduction tube road, 5, high-pressure process gas make-up pipeline, 6, process gas derives pipeline, 7, automatic regulating valve, 8, inert gas import pipe, 9, valve, 10, process gas pressure balance connecting tube.
Embodiment
As shown in Figure 1, a kind of diaphragm type compressor pressure balancing system of keeping, comprise the preceding knock out drum 1 of compressor, knock out drum 2 behind the compressor, compressor 3, low pressure process gas introduction tube road 4, high-pressure process gas make-up pipeline 5, process gas is derived pipeline 6, process gas pressure balance connecting tube 10, knock out drum 1 and compressor 3 link to each other by pipeline before the described compressor, knock out drum 2 links to each other by pipeline behind compressor 3 and the compressor, before the compressor behind knock out drum 1 and the compressor knock out drum 2 link to each other by process gas pressure balance connecting tube 10, knock out drum 1 is provided with low pressure process gas introduction tube road 4 before the described compressor, knock out drum 2 is provided with high-pressure process gas make-up pipeline 5 and process gas derivation pipeline 6 behind the described compressor, described process gas pressure balance connecting tube 10 is provided with valve 9 and automatic regulating valve 7, is provided with inert gas import pipe 8 between described valve 9 and the automatic regulating valve 7.
The pressure of described low pressure process gas is 0.1Mpa.
The pressure of described high-pressure process gas is 0.55Mpa.
The using method that the utility model is kept the diaphragm type compressor pressure balancing system is: behind compressor before knock out drum 2 and the compressor on the process gas pressure balance connecting tube 10 of knock out drum 1, install an inert gas import pipe 8 additional, close the valve 9 near knock out drum 2 behind the compressor simultaneously, recycling automatic regulating valve 7, set certain pressure, when the process gas undersupply, when pressure is lower than setting value, automatic regulating valve 7 is opened automatically, give compressor preceding knock out drum 1 topping up, to guarantee the balance of system.
The above; it only is the preferable embodiment of the utility model; but the utility model protection domain is not limited thereto, and is equal to replacement or change according to the technical solution of the utility model and inventive concept thereof, all should be encompassed within the protection domain of the present utility model.
Claims (3)
1. keep the diaphragm type compressor pressure balancing system for one kind, comprise the preceding knock out drum (1) of compressor, knock out drum behind the compressor (2), compressor (3), low pressure process gas introduction tube road (4), high-pressure process gas make-up pipeline (5), process gas is derived pipeline (6), process gas pressure balance connecting tube (10), knock out drum (1) links to each other by pipeline with compressor (3) before the described compressor, knock out drum (2) links to each other by pipeline behind compressor (3) and the compressor, before the compressor behind knock out drum (1) and the compressor knock out drum (2) link to each other by process gas pressure balance connecting tube (10), knock out drum (1) is provided with low pressure process gas introduction tube road (4) before the described compressor, knock out drum behind the described compressor (2) is provided with high-pressure process gas make-up pipeline (5) and process gas is derived pipeline (6), it is characterized in that: described process gas pressure balance connecting tube (10) is provided with valve (9) and automatic regulating valve (7), is provided with inert gas import pipe (8) between described valve (9) and the automatic regulating valve (7).
2. a kind of diaphragm type compressor pressure balancing system of keeping according to claim 1, it is characterized in that: the pressure of described low pressure process gas is 0.07-0.15Mpa.
3. a kind of diaphragm type compressor pressure balancing system of keeping according to claim 1, it is characterized in that: the pressure of described high-pressure process gas is 0.5-0.65Mpa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320104316 CN203223368U (en) | 2013-03-07 | 2013-03-07 | System for maintaining pressure balance of diaphragm compressor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320104316 CN203223368U (en) | 2013-03-07 | 2013-03-07 | System for maintaining pressure balance of diaphragm compressor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203223368U true CN203223368U (en) | 2013-10-02 |
Family
ID=49250372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320104316 Expired - Fee Related CN203223368U (en) | 2013-03-07 | 2013-03-07 | System for maintaining pressure balance of diaphragm compressor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203223368U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106762544A (en) * | 2015-09-11 | 2017-05-31 | 惠而浦股份有限公司 | The pressure balancing system of compressor, pressure balance method and the system operatio when hermetic compressor is cooled down |
-
2013
- 2013-03-07 CN CN 201320104316 patent/CN203223368U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106762544A (en) * | 2015-09-11 | 2017-05-31 | 惠而浦股份有限公司 | The pressure balancing system of compressor, pressure balance method and the system operatio when hermetic compressor is cooled down |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131002 Termination date: 20160307 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |