CN203209360U - Probe cleaning device for LED testing machine - Google Patents
Probe cleaning device for LED testing machine Download PDFInfo
- Publication number
- CN203209360U CN203209360U CN 201220652766 CN201220652766U CN203209360U CN 203209360 U CN203209360 U CN 203209360U CN 201220652766 CN201220652766 CN 201220652766 CN 201220652766 U CN201220652766 U CN 201220652766U CN 203209360 U CN203209360 U CN 203209360U
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- cleaning
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- magnetic valve
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Abstract
A probe cleaning device for an LED testing machine comprises a monitoring device, a cleaning device, a drying device and a control device. The monitoring device is disposed in a horizontal position of a probe of the testing machine; the cleaning device includes a container bottle, a solenoid valve, a liquid conduit and a diversion wire; the container bottle is connected with the diversion wire through the liquid conduit and connected with an external gas source through the solenoid valve; the drying device comprises a gas blowing device, a gas conduit and a solenoid valve; and the gas blowing device is connected with the external gas source through the gas conduit and the solenoid valve. The monitoring device CCD is used for monitoring whether the probe is dirty or clean; the cleaning device is used for washing the probe with a flowing-out cleaning solution; the drying device connected to a nitrogen source is used for drying the probe with residues of the cleaning solution; and the control device controls the operation of the probe cleaning device. According to the utility model, deviation during point measurement resulted from a dirty probe can be avoided, thereby enabling more accurate data of point measurement and improving accuracy of chip testing and grading.
Description
Technical field
The utility model relates to the semiconductor manufacturing facility field, relates in particular to a kind of clear needle device of LED tester table.
Background technology
The appearance of LED and development have caused a solid-state illumination revolution of have swepting the globe, and have now entered functional lighting field, and progressively enter the general lighting field.The light efficiency of LED is higher than traditional illumination and display light source far away, demonstrates energy-saving effect preferably, and as can save energy 70% at Landscape Lighting, the LCD TV backlight source can save energy 50%, and road lighting can save energy more than 50%.If China's semiconductor lighting product can enter 30% general lighting market in 2015, can annual economize on electricity about 1,000 hundred million spend, for the per GDP energy consumption reduces the contribution one percentage point, reduce CO
2, SO
2, 1.5 hundred million tons of dust emissions.Therefore the LED industry is extremely paid much attention to various countries as pollution-free industry.
LED is a kind of very useful and effective light source, advantage is the brightness height, operating voltage is low, power consumption is little, microminiaturized, easily with the integrated circuit coupling, drive simply, the life-span is long, shock-resistant, stable performance etc.Yet characteristics such as LED is little because of its volume, directional transmissions light, high brightness, PN junction electrical characteristics are producing many problems aspect the evaluation of quality and the detection method.Make the finished product LED after the encapsulation more accurate, at first will guarantee the accuracy of chip testing.So the test of chip is extremely important part.
In the test process of routine, the probe of test machine is in the whole Zhang Jingyuan process of a survey (the especially less situation of chip size), probe can stick foul easily, comprise the dust impurity of surrounding environment or metal fillings or the cull on the chip, proceed a survey if stick the probe of foul, foul can block the light that a part of chip sends, cause the test brightness that obtains at last lower than chip intrinsic brilliance, this will have a strong impact on the accuracy of chip testing and classification, directly cause encapsulating departing from of back finished product parameter, sorting and encapsulation work have been brought very big difficulty.
Summary of the invention
The purpose of this utility model is to solve in the present led chip point survey process, has influenced the phenomenon of test result owing to probe is dirty.
For overcoming the above problems, the utility model provides a kind of clear needle device of LED tester table: comprise monitoring device, cleaning device, drying device and control device;
Described monitoring device is positioned at the horizontal level of tester table probe;
Described cleaning device comprises container bottle, magnetic valve, liquid conduits and channelizing line, and container bottle is connected with channelizing line by liquid conduits, is connected with external air source by magnetic valve;
Described drying device comprises blowning installation, gas conduit and magnetic valve; Blowning installation is connected with external air source by gas conduit, magnetic valve;
Be provided with control program in the described control device, control the work of whole clear needle device.
A kind of preferred version is that described monitoring device is imageing sensor.
A kind of preferred version is that described channelizing line adopts glass fibre.
Monitoring device of the present utility model is used for the dirty situation of monitoring probe, can adopt CCD image sensor to realize.
The container bottle of cleaning device is used for the splendid attire cleaning fluid, as alcohol; The channelizing line of cleaning device is positioned at the top of tester table probe; When needs clean probe, enter the gas flow of container bottle by solenoid control, cleaning fluid is flow on the probe via liquid conduits, channelizing line, thereby take away the foul on the probe.Glass fibre is a kind of good insulating, pollution-free, and erosion-resisting linear species is the preferred material of channelizing line.
The blowning installation of drying device can be arranged on tester table CHUCK dish side, connects external air source by gas conduit, magnetic valve, as source nitrogen; After having cleaned probe, blowning installation is aimed at probe, blows out nitrogen by solenoid control, and the probe of residual cleaning fluid is dried up.
The whole work of asking needle device of control device control.In chip point survey process, when sticking foul on the probe, CCD monitors foul on the probe, sends a signal by control program and gives tester table; After tester table was received signal, the CHUCK of device chip dish was removed automatically; The container bottle of splendid attire cleaning fluid is subjected to flowing out quantitative cleaning fluid automatically behind the pressure of gas, and the flushing probe is taken away foul; Be arranged on the blowning installation of CHUCK dish side, blow out nitrogen, the probe of residual cleaning fluid is dried up; After probe dried up, the CHUCK dish was retracted the origin-location again, proceeds a survey.Surpass 3 times if cleaning procedure starts in the short period of setting continuously, then send alarm signal, can avoid like this because the phenomenon that other situations cause constantly cleaning probe takes place.
The utility model can avoid because the deviation that the dirty point that causes of probe takes place when surveying, and makes that to survey data more accurate, improves the accuracy of chip testing and classification.The utility model can be used for testing the tester table of two probes of bluish-green chip, also can be used for testing the tester table of a probe of reddish yellow chip, and other need and require the testing arrangement of probe cleaning by probe test, and the quantity of adjusting liquid conduits and channelizing line according to actual needs gets final product.
Description of drawings
The front schematic view of a kind of embodiment of Fig. 1 the utility model;
The top schematic diagram of a kind of embodiment of Fig. 2 the utility model;
1-monitoring device wherein; The 2-container bottle; The 3-liquid conduits; The 4-channelizing line; The 5-blowning installation; The 6-gas conduit.
The specific embodiment
As shown in Figure 1, 2, the utility model provides a kind of clear needle device of LED tester table: comprise monitoring device, cleaning device, drying device and control device; Monitoring device is positioned at the horizontal level of tester table probe, adopts CCD image sensor here; Cleaning device comprises container bottle, magnetic valve, liquid conduits and channelizing line, and channelizing line is glass fibre; Container bottle is connected with channelizing line by liquid conduits, is connected with external air source by magnetic valve, adopts source nitrogen here; Drying device comprises blowning installation, gas conduit and magnetic valve, and blowning installation is connected with external air source by gas conduit, magnetic valve, adopts source nitrogen here; Be provided with control program in the control device, control the work of whole clear needle device.
Before chip point is surveyed, by the initial pictures of an intact probe of CCD setting, as standard picture; In the chip point survey process, when sticking foul on the probe, it is different with standard picture that CCD monitors image, then sends a signal by control program and give tester table; After tester table was received signal, the CHUCK of device chip dish was removed automatically; Solenoid control flows into the nitrogen flow of container bottle, and the spirituous container bottle of splendid attire is subjected to flowing out a certain amount of alcohol after the nitrogen gas pressure, and alcohol flows out by liquid conduits, flows on the probe via channelizing line, and foul is taken away; The blowning installation that is arranged on CHUCK dish side connects source nitrogen by gas conduit, magnetic valve, and after cleaning step finished, blowning installation blew out nitrogen, and the probe of residual alcohol is dried up; After probe dried up, the CHUCK dish was retracted the origin-location again, proceeds a survey.
Surpass 3 times if cleaning procedure starts in the short period of setting continuously, then send alarm signal, can avoid like this because the phenomenon that other situations cause constantly cleaning probe takes place.
Claims (3)
1. the clear needle device of a LED tester table comprises monitoring device, cleaning device, drying device and control device; It is characterized in that,
Described monitoring device is positioned at the horizontal level of tester table probe;
Described cleaning device comprises container bottle, magnetic valve, liquid conduits and channelizing line; Container bottle is connected with channelizing line by liquid conduits, is connected with external air source by magnetic valve;
Described drying device comprises blowning installation, gas conduit and magnetic valve; Blowning installation is connected with external air source by gas conduit, magnetic valve.
2. the clear needle device of LED tester table as claimed in claim 1 is characterized in that, described monitoring device is imageing sensor.
3. the clear needle device of LED tester table as claimed in claim 1 is characterized in that, described channelizing line adopts glass fibre.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220652766 CN203209360U (en) | 2012-12-03 | 2012-12-03 | Probe cleaning device for LED testing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220652766 CN203209360U (en) | 2012-12-03 | 2012-12-03 | Probe cleaning device for LED testing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203209360U true CN203209360U (en) | 2013-09-25 |
Family
ID=49198931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220652766 Expired - Fee Related CN203209360U (en) | 2012-12-03 | 2012-12-03 | Probe cleaning device for LED testing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203209360U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104384123A (en) * | 2014-09-24 | 2015-03-04 | 上海华力微电子有限公司 | Probe cleaning device for probe card |
| CN105182208A (en) * | 2015-08-13 | 2015-12-23 | 山东浪潮华光光电子股份有限公司 | LED chip test method |
| CN107356852A (en) * | 2016-05-03 | 2017-11-17 | 无锡华润安盛科技有限公司 | TSOT apparatus for testing chip |
| CN115407176A (en) * | 2022-10-31 | 2022-11-29 | 长春光华微电子设备工程中心有限公司 | Calibration method for needle cleaning height difference and probe station |
| CN116046798A (en) * | 2023-03-30 | 2023-05-02 | 合肥新晶集成电路有限公司 | Automatic needle cleaning method, automatic needle cleaning system and wafer acceptance test method |
-
2012
- 2012-12-03 CN CN 201220652766 patent/CN203209360U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104384123A (en) * | 2014-09-24 | 2015-03-04 | 上海华力微电子有限公司 | Probe cleaning device for probe card |
| CN105182208A (en) * | 2015-08-13 | 2015-12-23 | 山东浪潮华光光电子股份有限公司 | LED chip test method |
| CN107356852A (en) * | 2016-05-03 | 2017-11-17 | 无锡华润安盛科技有限公司 | TSOT apparatus for testing chip |
| CN107356852B (en) * | 2016-05-03 | 2020-05-29 | 无锡华润安盛科技有限公司 | TSOT chip testing device |
| CN115407176A (en) * | 2022-10-31 | 2022-11-29 | 长春光华微电子设备工程中心有限公司 | Calibration method for needle cleaning height difference and probe station |
| CN115407176B (en) * | 2022-10-31 | 2023-01-03 | 长春光华微电子设备工程中心有限公司 | Calibration method for needle cleaning height difference and probe station |
| CN116046798A (en) * | 2023-03-30 | 2023-05-02 | 合肥新晶集成电路有限公司 | Automatic needle cleaning method, automatic needle cleaning system and wafer acceptance test method |
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| RINS | Preservation of patent right or utility model and its discharge | ||
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Effective date of registration: 20160311 Granted publication date: 20130925 |
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| RINS | Preservation of patent right or utility model and its discharge | ||
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| RINS | Preservation of patent right or utility model and its discharge | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130925 Termination date: 20211203 |
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| CF01 | Termination of patent right due to non-payment of annual fee |