CN203205392U - Closed pin ceramic support plate - Google Patents
Closed pin ceramic support plate Download PDFInfo
- Publication number
- CN203205392U CN203205392U CN 201320169947 CN201320169947U CN203205392U CN 203205392 U CN203205392 U CN 203205392U CN 201320169947 CN201320169947 CN 201320169947 CN 201320169947 U CN201320169947 U CN 201320169947U CN 203205392 U CN203205392 U CN 203205392U
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- support plate
- face
- pin
- branch
- closed
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Abstract
The utility model provides a closed pin ceramic support plate, and is to solve the problems that conventional products are easy to deform and supporting points are different in height. The utility model employs a closed-equilateral triangle. The structure aims at a structure form arranging total three pins on a circumference on a device. The structure form determines a circle by using three points to realize support for wafer. The support plate includes a support plate using side and a support plate fixed side. The ceramic material is used. The advantages of high strength and small high-temperature deformation are fully used. The pin ceramic support plate realizes location with a lifting mechanism through a pin hole, and achieves fastening connection with the lifting mechanism through mounting through holes. The closed pin ceramic support plate has the characteristics of relatively simple structure, high strength and good performance. The closed pin ceramic support plate is mainly used in semiconductor coating equipments, and belongs to the technical field of semiconductor thin film deposition application and preparation.
Description
Technical field
The utility model relates to the ceramic support plate of a kind of pin, exactly is the ceramic support plate of a kind of closed pin, is mainly used in the semiconductor coated film equipment, belongs to semiconductive thin film deposition applications and preparing technical field.
Background technology
In existing semiconductor coated film equipment, the especially 12 inches semiconductor coated film equipment, the pin support plate is realized the unified lifting of the pin on the diverse location by self lifting, thereby is realized the lifting of wafer in the biography sheet process in whole technical process.Pin generally distributes by even circumferential, and quantity is generally three or more and does not wait.Be to guarantee wafer in whole technical process without phenomenons such as skew, slide plates, it is consistent needing the height of the pin on the assurance diverse location, namely no matter under any state, the lifting of pin is the same with the speed of decline.This has just improved the requirement of pin support plate.Need the pin support plate under any state, the lifting that is positioned at residing of the pin of diverse location is consistent, and guarantees that these faces are in the same plane all the time.Sealing and the installing space of considering cavity are limited, and the pin support plate generally only is provided with a lifting fulcrum.This has improved the requirement of strength of pin support plate again, does not allow it to have larger distortion to exist under the condition of high temperature.The height of selling everywhere with assurance does not have large difference, thereby the transmission of guaranteeing wafer is smooth and easy.Simultaneously, the pin support plate himself can not be too heavy, avoids causing distortion because of Action of Gravity Field.
The structural style of the pin support plate that adopts in the existing semiconductor coated film equipment is a lot, and " V " type aluminum support plate of open type is arranged, and baroque emission type support plate is arranged, and circular arc type support plate etc. is arranged.But under the condition of high temperature, except the supporting surface at lifting fulcrum place, each branch end all has very large distortion.After distortion produced, the position of the peak of pin just there are differences everywhere, thereby caused wafer can not be in the state of a relative level or inclination or slide plate.
Summary of the invention
The utility model be for above-mentioned prior art structure easily seriously, the technical problem that just differs of fulcrum everywhere, and provide a kind of structure relatively simple, intensity is high, the new version of better performances.The advantages such as the employing ceramic material takes full advantage of ceramics strength high, and high temperature deformation is little.The equilateral triangle closed type is adopted in this invention, and its structure is for being provided with altogether the version that three places are positioned at the pin on the equal circumference on the equipment.This version utilizes determine a circle at 3, realizes the support to wafer.
For achieving the above object, the utility model adopts following technical proposals: the ceramic support plate of closed pin comprises that support plate uses side (15) and support plate fixation side (18).Described support plate uses side (15) by the face A(2 of branch), the face B(4 of branch) and the face C(8 of branch) form.Pin support face A(1 on the above-mentioned support plate use side (15)), pin supports and uses face B(3) and pin support face C(7) the sinking certain altitude is made on the basis of support plate use side 15.Above-mentioned pin supports use face A(1), pin supports and use face B(3) and sell support face C(7) on three strong points that are positioned on the same concentric circles are arranged respectively, for easy to process, also for alleviating the weight of end, the material monolithic of its end is machined away, become existing pin support use face A(1), pin supports and use face B(3) and sell support face C(7).Above-mentioned three pins support with face in the same plane, have identical flatness.
Support plate fixation side (18) is by the face D(9 of branch), the face E(11 of branch) jointly form.The stiff end place is provided with cylinder table (20), and is provided with chamfering (21) at end face, and its end face (14) is the thickest place of whole pin support plate.The face E(11 of branch of support plate fixation side (18)) is provided with the reinforcement (10) of 2 symmetries, the whole structure that adopts the conical surface (17) of reinforcement (10).The initiating terminal of reinforcement (10) is provided with fillet (12), and its stress deformation under the condition of high temperature is reduced.Support plate fixation side (18) is provided with cylinder table (20) and is provided with a counterbore B(21 in it), use side also to be provided with a counterbore A(16 at support plate), above-mentioned cylinder table (20) inside is provided with pin-and-hole (6) and installation through hole (5).The pin support plate is realized location with elevating mechanism by pin-and-hole (6), realizes and being fastenedly connected of elevating mechanism by through hole (5).
The beneficial effects of the utility model are: the pin that this structure has better avoided the distortion because of support plate to cause highly differs, thereby causes wafer tilt or the appearance of slide plate phenomenon.And compared with prior art have more reasonability, its parts required precision is relatively not high, simple in structure, processing, easy for installation, intensity is good, under the condition of high temperature distortion little, can well ensure pin to the supporting role of wafer, simultaneously price is also relatively cheap.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the rearview of Fig. 1.
Fig. 3 be Fig. 2 A-A to cutaway view.
Embodiment
Embodiment
With reference to Fig. 1-3, the ceramic support plate of closed pin is formed by holistic Machining of Ceramics.Monnolithic case is equilateral triangle, and Fig. 1 uses side for it, and Fig. 2 is its fixation side.Support plate uses side 15 to be comprised of the face A2 of branch, the face B4 of branch and the face C8 of branch.Above-mentioned three branch's faces have identical flatness, are the datum levels of all the other features of processing.The height of its machining accuracy has influence on whole pin with the precision of all dimension chains of support plate, and it plays an important role in whole the course of processing.Its pin support is supported with face B3 with face A1, pin and is sold to support with face C7 sinking certain altitude on the basis of support plate use side 15 and make.The pin support is supported with face B3 with face A1, pin and is sold to support and all adopt fillet structure with the top of face C7, avoids wedge angle, plays simultaneously the effect of the weight that alleviates self.Above-mentioned pin supports with face A1, pin support and supports with three strong points that are positioned on the same concentric circles are arranged respectively on the face C7 with face B3 and pin, for easy to process, also for alleviating the weight of end, the material monolithic of its end is machined away, become existing pin and support the face of using A1, pin support face B3 and pin support face C7.Above-mentioned three pins support with face in the same plane, have identical flatness, thereby have better guaranteed the consistency of three strong point place height.
The structure relative complex of pin support plate fixation side.The pin support plate has one jiao of support end of using during as whole support plate lifting.Consider from the intensity aspect, this end is the thickest place of material, can see by cutaway view (Fig. 3) to draw.Because support plate is mounted in inside cavity, consider the aspects such as the sealing of cavity tapping, the installation of selling support plate, lifting, the stiff end place is made as cylinder table 20, and is provided with chamfering 21 at end face, and its end face 14 is the thickest places of whole pin support plate.Consider from requirement of strength and the heating stress deformation aspect of integral body, the support plate fixation side 18 that jointly is comprised of the face D9 of branch, the face E11 of branch is the thinnest places of whole pin support plate, therefore be provided with the reinforcement 10 of 2 symmetries at the face E11 of branch of support plate fixation side 18.The reinforcement 10 whole structures that adopt the conical surface 17, it finishes to the face D9 of branch, the face E11 of branch from cylinder table 20 root planes 13, has fully guaranteed except the strong point at lift points place, in addition the intensity of two place's strong points.The initiating terminal of reinforcement 10 is provided with fillet 12, and its stress deformation under the condition of high temperature is reduced.Support plate fixation side 18 is provided with cylinder table 20 and is provided with a counterbore B21 in it, uses side also to be provided with a counterbore A16 at support plate, and above-mentioned cylinder table 20 inside are provided with a pin-and-hole 6 and three through holes 5 are installed.
During installation, counterbore B21 directly contacts with the pin elevating mechanism, plays the guide and limit effect when being connected with the pin elevating mechanism.When integral installation was fixing, the end of securing member was in the counterbore, can not exceed the face of the whole use side of pin support plate, no matter guaranteed at any state, and the use face of whole pin support plate is a flat state all the time.The pin support plate is realized location with elevating mechanism by pin-and-hole 6, realizes and being fastenedly connected of elevating mechanism by through hole 5 is installed.
During use, the cylinder table 20 of pin support plate is passed through cavity alignment pin elevating mechanism, adjust the position of pin-and-hole 6, pin-and-hole 6 is aimed at the pin on the elevating mechanism, slowly fall, until counterbore B21 fully contacts with the upper surface of elevating mechanism, the angle of trickle adjusting pin support plate simultaneously makes three through holes 5 are installed are fully alignd with three screwed holes on the elevating mechanism.Securing member manually is with first, is adjusted the levelness of whole pin support plate, guaranteed that namely pin supports with face A1, sells and support the levelness that supports the face of using C7 with face B3 and pin, tightens securing member.The installation of whole like this pin support plate has just been finished.
Claims (4)
1. ceramic support plate of closed pin, comprise that support plate uses side (15) and support plate fixation side (18), it is characterized in that: it is by the face A(2 of branch that support plate uses side (15)), the face B(4 of branch) and the face C(8 of branch) form, support plate uses the pin on the side (15) to support and uses face A(1), pin supports uses face B(3) and pin support face C(7) use the basis of side (15) to sink to making at support plate, three pins support with three strong points that are positioned on the same concentric circles are arranged respectively on the face, its pin supports with face in the same plane, has identical flatness; Support plate fixation side (18) is by the face D(9 of branch), the face E(11 of branch) jointly form, the stiff end place is provided with cylinder table (20), and be provided with chamfering (21) at end face, its end face (14) is the thickest place of whole pin support plate, above-mentioned support plate fixation side (18) is provided with cylinder table (20), be provided with a counterbore B(21 in it), use side also to be provided with a counterbore A(16 at support plate), above-mentioned cylinder table (20) inside is provided with pin-and-hole (6) and through hole (5) is installed.
2. the ceramic support plate of closed pin as claimed in claim 1, it is characterized in that: the reinforcement (10) that the face E(11 of branch of described support plate fixation side (18)) is provided with 2 symmetries, the whole structure that adopts the conical surface (17) of reinforcement (10), the initiating terminal of reinforcement (10) is provided with fillet (12).
3. the ceramic support plate of closed pin as claimed in claim 1, it is characterized in that: described pin-and-hole (6) is 1, it is 3 that through hole (5) is installed.
4. the ceramic support plate of closed pin as claimed in claim 1 is characterized in that: described pin supports use face A(1), pin supports and use face B(3) and sell support face C(7) the top all adopt fillet structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320169947 CN203205392U (en) | 2013-04-07 | 2013-04-07 | Closed pin ceramic support plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320169947 CN203205392U (en) | 2013-04-07 | 2013-04-07 | Closed pin ceramic support plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203205392U true CN203205392U (en) | 2013-09-18 |
Family
ID=49149472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320169947 Withdrawn - After Issue CN203205392U (en) | 2013-04-07 | 2013-04-07 | Closed pin ceramic support plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203205392U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236409A (en) * | 2013-04-07 | 2013-08-07 | 沈阳拓荆科技有限公司 | Sealed pin ceramic support plate |
-
2013
- 2013-04-07 CN CN 201320169947 patent/CN203205392U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236409A (en) * | 2013-04-07 | 2013-08-07 | 沈阳拓荆科技有限公司 | Sealed pin ceramic support plate |
| CN103236409B (en) * | 2013-04-07 | 2015-11-04 | 沈阳拓荆科技有限公司 | The ceramic support plate of closed pin |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130918 Effective date of abandoning: 20151104 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |