CN203205374U - Soft X-ray tube and optical ion static electricity eliminator with same - Google Patents
Soft X-ray tube and optical ion static electricity eliminator with same Download PDFInfo
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- CN203205374U CN203205374U CN 201220635902 CN201220635902U CN203205374U CN 203205374 U CN203205374 U CN 203205374U CN 201220635902 CN201220635902 CN 201220635902 CN 201220635902 U CN201220635902 U CN 201220635902U CN 203205374 U CN203205374 U CN 203205374U
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Abstract
The utility model relates to a soft X-ray tube and an optical ion static electricity eliminator with the same. The soft X-ray tube is composed of an end window output type anode assembly, a vacuum sealing assembly and a cathode assembly; the cathode assembly includes a cathode holder, a flat core column, a lamp filament and a cathode holder which are fixed on the flat core column as well as a cathode cover which is in welding connection with the cathode holder; the anode assembly includes a beryllium sheet one surface of which is provided with a nanoscale metal film target layer, and an anode welding piece, wherein the beryllium sheet is welded on the anode welding piece; the vacuum sealing assembly is formed by a glass casing and a kovar member which are in sealing connection with each other; the anode welding piece is welded together with the kovar member; and the cathode assembly is positioned inside the vacuum sealing assembly. The soft X-ray tube has the advantages of simple structure, long service life, high efficiency in X-ray generation, large ray radiation angle and excellent symmetry in each direction in space, and is used for static electricity elimination in various industries.
Description
Technical field
The utility model relates to a kind of electron tube, especially a kind of grenz tube and be the photoion Xelminator of emission source by described grenz tube.
Background technology
At present, the range of application of X-ray tube has been widely used in other field, such as fields such as static elimination, air cleaning, soft tissue radiography, material analysis and commodity inspections except the industrial flaw detection of routine, safety inspection, medical diagnosis field.In recent years, mainly contain following several in the disclosed patented technology:
Application number is the disclosed X-ray tube of patent of invention " a kind of method and device thereof of eliminating static with photoion " of CN200810202778.5, be that circular anode target surface and hollow cathode are set in X-ray tube, front end at X-ray tube, the end-window emitter window is set, described hollow cathode is that an external diameter is less than the cylinder of circular anode target surface internal diameter, its end near the X ray terminals side arranges through hole, its end near the X-ray tube emitter window arranges a longitudinal opening groove and communicates with through hole, the helical heater winding is set in the open slot, its cathode construction complexity, processing difficulties.
Application number is the patent of invention " penetrating x-ray tube and manufacture method thereof " of CN200580010021.0, and the body of disclosed X-ray tube mainly is made up of pottery and copper product, and transmission anode end (end window) adopts copper product, and cathode construction does not have cathode shield.On the technology, adopt method for welding welded cathode structure and anode assemblies respectively, at last negative electrode and anode are welded again.The secondary soldering of not only complex structure, and manufacture craft process need and an arc welding also need many places to place scolder and ceramic metallization processing, and processing technology is comparatively complicated.
Application number is 200610114222.1 Chinese invention patent " a kind of end window X-ray tube ", a kind of typical end window X-ray tube is disclosed, shell adopts copper-based material, and it is the film molybdenum sheet of 20 μ m that the thin film positive pole target adopts thickness, and the thin film positive pole target is arranged between cathode filament and the beryllium window.The thin film positive pole target so arranges, and the efficient that produces grenz ray on the one hand is lower, and the x radiation x angle on the transmissive window direction is less on the other hand.
The utility model content
In order to solve the problems of the technologies described above, the utility model provides a kind of generation grenz ray to enrich, it is bigger to give off firing angle, the space each to symmetry good, and grenz tube simple in structure and be the photoion Xelminator of emission source by described grenz tube.
The technical solution of the utility model is as follows:
Grenz tube is made up of end window output type anode assemblies, vacuum seal assembly, cathode assembly; The cathode shield that described cathode assembly comprises negative electrode holder, dull and stereotyped stem stem, be separately fixed at filament on the dull and stereotyped stem stem and negative electrode holder and be welded to connect with the negative electrode holder, the structure of described dull and stereotyped stem stem is for being fixed on many stem stems the structure on the flat board, described filament is welded on the top of stem stem, and described negative electrode holder is fixed on the stem stem near dull and stereotyped position; Described anode assemblies comprises that one side has beryllium sheet and an anodic bonding fitting that thickness is nano level metallic film target layer, and the one side that described beryllium sheet has a nano level metal film target layer is towards described cathode assembly and be welded on the anodic bonding fitting; Described vacuum seal assembly comprises that structure is the glass shell of tubular structure of both ends open and the cut down member of sealing with an end of described glass shell; Described anodic bonding fitting and the described member that cuts down weld together, and the other end of described glass shell and the flat board of dull and stereotyped stem stem are sealed, and the filament of described cathode assembly is positioned at the vacuum seal component internal.
Preferably, described nano level metal film target layer is to adopt the method for ion beam sputter depositing to be deposited on the beryllium sheet.
Preferably, described metallic film target layer is the W film target layer, and the thickness of described W film target layer is 50nm ~ 4000nm.
Preferably, described metallic film target layer is a kind of in molybdenum, copper, iron, nickel, chromium, the silver metal film.
A kind of photoion Xelminator, its emission source are grenz tube described in the utility model.
Grenz tube described in the utility model, the static that is used for various industries is eliminated, its operation principle is: the grenz ray that produces with described grenz tube shines the static electrification object, make the object ambient air produce ionization, generate highdensity negative ions, the surface electrostatic of illuminated object is consequently eliminated in neutralization.
Grenz tube described in the utility model, transmissive window adopts beryllium Base Metal sheet, namely the unilateral one side towards described cathode assembly of beryllium with the method for ion beam sputter depositing (Ion Beam Spatter Deposition is called for short IBSD) deposit a layer thickness be nano level metallic film as the metallic film target layer that produces X ray as anode, namely hold window output type anode target surface.The electron beam that the filament of cathode assembly is launched is accelerated by the high voltage electric field between cathode assembly and the anode assemblies, and bombardment is to end window output type anode target surface, and the grenz ray of generation sees through the beryllium sheet to external radiation.So the metallic film target layer that arranges can produce grenz ray on the one hand expeditiously, on the other hand can the transmissive window direction have big x radiation x angle and good space each to symmetry, this radiation mode is called the transmission target end window way of output.Adopt vacuum brazing technique with beryllium sheet, anodic bonding fitting and can cut down that member is disposable to weld together, form the vacuum seal assembly that has anode assemblies, can guarantee vacuum-tightness fully, and have the very high power that is welded into.Adopt dull and stereotyped stem stem as support, the fixed structure of filament, by welding negative electrode is fixed, and be convenient to carry out sealing-in with described anode assemblies and vacuum seal assembly.Cathode shield and negative electrode holder be as the focusing structure of negative electrode, and all bombardment is on the metallic film target layer on the beryllium sheet to guarantee to launch electron beam by filament, and that has avoided that electronics takes place disperses, and has improved the utilance of electronics, has namely improved the ability that produces X ray.This easy row relatively simple for structure need not to adopt complicated grid control mode to focus on.
Because metallic film target layer thickness and integrity degree directly influence the output of grenz ray photon, if the thickness of metallic film target layer is too thin, the grenz ray photon of generation will be fewer, and the ability of eliminating static is poor; Otherwise if the metallic film target layer is too thick, though can produce more x-ray photon, most of grenz raies can be absorbed by the metallic film target layer again, and grenz ray is maximum to the air ionization contribution, and the effect of eliminating static equally is also bad.The optimum thickness of metallic film target layer carries out simulation calculation according to required anode voltage and experiment test is determined.The metallic film target layer adopts the method for ion beam sputter depositing to be deposited on the beryllium sheet, compares with other evaporation tungsten film technology, and the metallic film target layer of ion beam sputter depositing deposition techniques, the thickness of the metallic film target layer that deposits can accurately be controlled on the one hand; Metallic film target layer adhesive force is stronger on the other hand, described grenz tube is long-time use under, prevent that metallic film from coming off and because of the come off generation dosage decay of the X ray that causes of metallic film, thus the useful life of having improved described grenz tube.
The grenz tube volume is small and exquisite, can be under the condition of high pressure 10kV, line 0.15mA the work of continous-stable, its x-ray dose occurs after thousands of hours significantly reducing in continuous operation.With this understanding, can reach about 14mSv/h over against transmissive window (being the beryllium sheet) apart from the x-ray dose rate at 1000mm place, and X ray output in the space each to symmetry good, static is eliminated the effect excellence, has certain application value.
The high pressure 10kV of grenz tube described in the utility model, line 0.15mA as emission source, makes the product of photoion Xelminator with described grenz tube, belongs to static of new generation and eliminates product.Can be widely used on the various full-automatic production lines for example liquid crystal panel making, semiconductor fabrication, high speed printing, pharmacy etc.
Description of drawings
Fig. 1 is the structural representation of grenz tube described in the utility model.
Description of reference numerals:
1-end window output type anode assemblies, 2-vacuum seal assembly, the 3-cathode assembly, 11-beryllium sheet, 12-anodic bonding fitting, 21-can cut down member, 22-glass shell, 31-filament, 32-cathode shield, the holder of 33-negative electrode, the dull and stereotyped stem stem of 34-.
Embodiment
For clearer explanation the technical solution of the utility model, introduce the technical solution of the utility model in detail below in conjunction with specific embodiment.
As shown in Figure 1, grenz tube described in the utility model is made up of end window output type anode assemblies 1, vacuum seal assembly 2, cathode assembly 3.The cathode shield 32 that described cathode assembly 3 comprises negative electrode holder 33, dull and stereotyped stem stem 34, be separately fixed at filament 31 on the dull and stereotyped stem stem 34 and negative electrode holder 33 and be welded to connect with negative electrode holder 33, the structure of described dull and stereotyped stem stem 34 is for being fixed on many stem stems the structure on the flat board, described filament 31 is welded on the top of stem stem, and described negative electrode holder 33 is fixed on the stem stem near dull and stereotyped position.Described anode assemblies 1 comprises that one side has beryllium sheet 11 and an anodic bonding fitting 12 that thickness is nano level metallic film target layer, and the one side that described beryllium sheet 11 has a nano level metal film target layer is towards described cathode assembly 3 and be welded on the anodic bonding fitting 12; Wherein, the beryllium sheet 11 with nano level metal film target layer serves as plate target and transmissive window simultaneously.Described vacuum seal assembly 2 comprises that structure is the glass shell 22 of tubular structure of both ends open and the cut down member 21 of sealing with an end of described glass shell 22.Described anodic bonding fitting 12 welds together with the described member 21 that cuts down, and the flat board of the other end of described glass shell 22 and dull and stereotyped stem stem 34 is sealed, and the filament 31 of described cathode assembly 3 is positioned at vacuum seal assembly 2 inside.The flat board of described dull and stereotyped stem stem 34 also is to be glass material, so can not show in Fig. 1 with the seam of glass shell 22 sealing-ins.
Particularly, metallic film target layer on the beryllium sheet 11 is that the method deposition of ion beam sputter depositing forms, its thickness is nano level, the high voltage electric field of the electron beam that the filament 31 of cathode assembly 3 is launched between cathode assembly 3 and described anode assemblies 1 is accelerated, bombardment is to the metallic film target layer, and the grenz ray of generation sees through beryllium sheet 11 to external radiation.Because the ion beam sputter depositing technology can be controlled the thickness of institute's depositing metal films target layer accurately, thus can prepare the metallic film target layer of suitable thickness, so can produce grenz ray expeditiously.On the other hand because the emission source of emission grenz ray is attached on the transmissive window, so the grenz ray of launching have big x radiation x angle and good space each to symmetry.So the end window output type anode assemblies 1 that arranges is not only structurally very succinct, and aspect manufacture craft, has very high success rate.Simultaneously, the metallic film target layer strong adhesion of ion beam sputter depositing, guaranteed described grenz tube under long-time the use, the dosage of the X ray of generation can not decayed because of coming off of metallic film target layer, thus the useful life that can improve described grenz tube.
According to the purposes difference, the metallic film target layer that deposits at beryllium sheet 11 can be metallic films such as tungsten, molybdenum, copper, iron, nickel, chromium, silver.According to the operating voltage difference, for realizing maximum x-ray dose and enrich the output of grenz ray that metallic film target layer thickness is also different.Metallic film target layer thickness on the beryllium sheet 11 calculates and experiment test through theory according to operating voltage and the tube current of cathode assembly 3, obtains making grenz ray dosage maximum, the abundant metallic film target layer thickness of output.For tungsten film, during certain value in operating voltage is 3kV～80kV, its thicknesses of layers optimum value changes in 50nm～4000nm scope.
The high pressure 10kV of grenz tube described in the utility model, line 0.15mA, with described grenz tube as emission source, make the product of photoion Xelminator, can be widely used on the various full-automatic production lines, for example liquid crystal panel making, semiconductor fabrication, high speed printing, pharmacy etc. belong to static of new generation and eliminate product.
Above embodiment is indivedual execution mode of the present utility model, and non exhaustive, and all belong to protection range of the present utility model by any apparent improvement or the replacement that those skilled in the art have done on basis of the present utility model.
Claims (5)
1. grenz tube is made up of end window output type anode assemblies (1), vacuum seal assembly (2), cathode assembly (3); It is characterized in that: the cathode shield (32) that described cathode assembly (3) comprises negative electrode holder (33), dull and stereotyped stem stem (34), be separately fixed at filament (31) on the dull and stereotyped stem stem (34) and negative electrode holder (33) and be welded to connect with negative electrode holder (33), the structure of described dull and stereotyped stem stem (34) is for being fixed on many stem stems the structure on the flat board, described filament (31) is welded on the top of stem stem, and described negative electrode holder (33) is fixed on the stem stem near dull and stereotyped position; Described anode assemblies (1) comprises that one side has beryllium sheet (11) and an anodic bonding fitting (12) that thickness is nano level metal film target layer, and the one side that described beryllium sheet (11) has a nano level metallic film target layer is towards described cathode assembly (3) and be welded on the anodic bonding fitting (12); Described vacuum seal assembly (2) comprises that structure is the glass shell (22) of the tubular structure of both ends open and the cut down member (21) of sealing with an end of described glass shell (22); Described anodic bonding fitting (12) welds together with the described member (21) that cuts down, the flat board of the other end of described glass shell (22) and dull and stereotyped stem stem (34) is sealed, and the filament (31) of described cathode assembly (3) is positioned at vacuum seal assembly (2) inside.
2. grenz tube according to claim 1 is characterized in that: described nano level metal film target layer is to adopt the method for ion beam sputter depositing to be deposited on the beryllium sheet (11).
3. grenz tube according to claim 2, it is characterized in that: described metallic film target layer is the W film target layer, the thickness of described W film target layer is 50nm ~ 4000nm.
4. grenz tube according to claim 2 is characterized in that: described metallic film target layer is a kind of in molybdenum, copper, iron, nickel, chromium, the silver metal film.
5. a photoion Xelminator is characterized in that, its emission source is the described grenz tube of claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220635902 CN203205374U (en) | 2012-11-27 | 2012-11-27 | Soft X-ray tube and optical ion static electricity eliminator with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220635902 CN203205374U (en) | 2012-11-27 | 2012-11-27 | Soft X-ray tube and optical ion static electricity eliminator with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203205374U true CN203205374U (en) | 2013-09-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220635902 Expired - Lifetime CN203205374U (en) | 2012-11-27 | 2012-11-27 | Soft X-ray tube and optical ion static electricity eliminator with same |
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| Country | Link |
|---|---|
| CN (1) | CN203205374U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956419A (en) * | 2012-11-27 | 2013-03-06 | 公安部第一研究所 | Soft X-ray tube and manufacturing method thereof and photoion electrostatic eliminator with ray tube |
-
2012
- 2012-11-27 CN CN 201220635902 patent/CN203205374U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956419A (en) * | 2012-11-27 | 2013-03-06 | 公安部第一研究所 | Soft X-ray tube and manufacturing method thereof and photoion electrostatic eliminator with ray tube |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130918 |