CN203164205U - Surface plasma longitudinal field scanning near-field optic microscope device - Google Patents

Surface plasma longitudinal field scanning near-field optic microscope device Download PDF

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CN203164205U
CN203164205U CN 201220754746 CN201220754746U CN203164205U CN 203164205 U CN203164205 U CN 203164205U CN 201220754746 CN201220754746 CN 201220754746 CN 201220754746 U CN201220754746 U CN 201220754746U CN 203164205 U CN203164205 U CN 203164205U
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surface plasma
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袁小聪
杜路平
沈军峰
朱思伟
闵长俊
方晖
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Nankai University
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Abstract

The utility model provides a surface plasma longitudinal field scanning near-field optic microscope device. The device is provided with a surface plasma excitation unit (1), a scanning control unit (2) and a detection unit (3); after being focused through a high numerical aperture objective lens (6), incident light excites an SPP field on an interface of a metal membrane and air, raman signals and the SPP field interfere with each other to form a stationary field of the SPP field around a focus; the scanning control unit (2) can achieve three-dimensional scanning and positioning for an atomic force microscope (AFM) metal probe (5) by means of an AFM controller (4); and the detection unit (3) achieves three-dimensional measurement and analysis for a longitudinal field component of a surface plasma field.

Description

一种表面等离子体纵向场扫描近场光学显微镜装置A surface plasmon longitudinal field scanning near-field optical microscope device

技术领域 technical field

本实用新型属于近场光学探测的光学传感和成像技术领域,特别涉及一种表面等离子体纵向场的检测装置。  The utility model belongs to the optical sensing and imaging technical field of near-field optical detection, in particular to a detection device for surface plasma longitudinal field. the

背景技术 Background technique

现有技术中,在近场条件下物体小于衍射极限的精细结构和起伏信息与束缚在物体表面的非辐射场密切相关,一方面,处于近场区域的非辐射场内包含物体结构的细节信息;另一方面,由于该场的场强随着离开表面距离呈指数衰减,故而在远场即传统的光学检测技术中无法探测到。这一矛盾将近场光学的核心问题集中在探测束缚在物体表面的非辐射场,并将非辐射场不失真地以辐射场的形式传播出去,并加以接收的技术上。由于表面等离子体共振可以有效增强局域场的强度并且具有一系列新颖的特性,因此对于表面等离子体(Surface Plasmons Polaritons,SPPs)的近场检测是目前近场光学的一个重要问题。处于近场区域的SPPs包含了丰富的反映物体精细结构以及光学特性的信息,因此SPPs的检测技术不仅对了解表面等离子体本身的激发和传播特性,而且对SPPs传感,成像技术等都具有重大的指导意义。由于SPPs的表面波特性,其电场强度在垂直于界面方向呈现指数衰减形式,所以传统的光学显微手段无法对其进行成像。  In the prior art, the fine structure and fluctuation information of an object smaller than the diffraction limit under near-field conditions is closely related to the non-radiative field bound on the surface of the object. On the one hand, the non-radiative field in the near-field region contains detailed information of the object structure ; on the other hand, since the field strength of this field decays exponentially with the distance from the surface, it cannot be detected in the far field, that is, traditional optical detection techniques. This contradiction concentrates the core problem of near-field optics on the technology of detecting the non-radiation field bound on the surface of the object, and transmitting the non-radiation field in the form of radiation field without distortion, and receiving it. Since surface plasmon resonance can effectively enhance the intensity of the local field and has a series of novel characteristics, the near-field detection of surface plasmons (Surface Plasmons Polaritons, SPPs) is an important issue in near-field optics. SPPs in the near-field region contain a wealth of information reflecting the fine structure and optical properties of objects. Therefore, the detection technology of SPPs is not only important for understanding the excitation and propagation characteristics of surface plasmons, but also for SPPs sensing and imaging technologies. guiding significance. Due to the surface wave characteristics of SPPs, the electric field strength of SPPs exhibits an exponential decay form in the direction perpendicular to the interface, so traditional optical microscopy methods cannot image them. the

目前较为常见的测量近场分布的仪器是扫描近场光学显微镜(SNOM),但是利用SNOM对表面等离子体的近场检测存在一些缺陷和不足:首先,由于其利用光纤探针对近场进行检测,在一般情况下只能探测到近场区域内光场的横向分量。研究表明只有当待测场的纵向分量大于横向分量30倍时,才能有效地探测到近场的纵向分量。对于SPPs而言,其纵向分量占主导地位,但不同条件下纵向场所占总场的比例不同,但总体而言,纵向场分量仍 与横向场分量的30倍存在差距,故无法用SNOM进行纵向场的有效检测。其次,透射光对成像的结果具有很大的影响。由于透射光也能有效的耦合到SNOM的光纤探针,因此利用SNOM得到的近场分布是SPPs与透射光的叠加,这在一定程度上影响了SPPs光场的检测质量。尤其在高数值孔径聚焦的情形下,其透射光的强度甚至大于所产生的SPPs的强度,因此大大降低了检测的可靠性。特别在焦点附近的光场,目前还没有得到过非常完美的SPPs光场成像。因此研究和开发出一套能有效检测近场纵向分量,同时能够很好消除透过光影响的超高分辨率成像技术具有特别深远的意义。  At present, the more common instrument for measuring the near-field distribution is the scanning near-field optical microscope (SNOM), but there are some defects and deficiencies in the near-field detection of surface plasmons by using SNOM: , in general only the transverse component of the light field in the near-field region can be detected. Studies have shown that only when the longitudinal component of the field to be measured is 30 times larger than the transverse component, can the longitudinal component of the near field be effectively detected. For SPPs, the longitudinal component is dominant, but the proportion of the longitudinal field to the total field is different under different conditions, but overall, there is still a gap of 30 times between the longitudinal field component and the transverse field component, so it is impossible to use SNOM to conduct longitudinal field analysis. Effective detection of the field. Second, transmitted light has a great influence on the imaging results. Since the transmitted light can also be effectively coupled to the fiber optic probe of SNOM, the near-field distribution obtained by using SNOM is the superposition of SPPs and transmitted light, which affects the detection quality of SPPs light field to a certain extent. Especially in the case of high numerical aperture focusing, the intensity of the transmitted light is even greater than that of the generated SPPs, thus greatly reducing the reliability of detection. Especially for the light field near the focal point, perfect SPPs light field imaging has not been obtained so far. Therefore, it is of great significance to research and develop a set of ultra-high-resolution imaging technology that can effectively detect the near-field longitudinal component and can well eliminate the influence of transmitted light. the

实用新型内容 Utility model content

本实用新型针对上述现有技术存在的问题进行了改进,即本实用新型要解决的技术问题是提供一种表面等离子体纵向场扫描近场光学显微镜装置,在利用该装置时实现了超高分辨率的近场电场纵向分量扫描探测。  The utility model improves on the problems existing in the above-mentioned prior art, that is, the technical problem to be solved by the utility model is to provide a surface plasmon longitudinal field scanning near-field optical microscope device, which realizes ultra-high resolution when using the device The near-field electric field longitudinal component of the rate is scanned for probing. the

本实用新型的表面等离子体纵向场检测装置包括:一种表面等离子体纵向场扫描近场光学显微镜装置,具有表面等离子体激发单元1、扫描控制单元2和检测单元3;表面等离子体激发单元1包括:激发光源、分束器7、高数值孔径物镜6、镀有45nm银膜的玻片、三维扫描平台;镀有45nm银膜的玻片设置在三维扫描平台上,其上通过自组装吸附有拉曼分子;激发光源发出的光束穿过分束器7、高数值孔径物镜6照射在吸附有拉曼分子的玻片上;扫描控制单元2包括:AFM金属探针5、AFM控制器4、计算机;AFM控制器4控制连接AFM金属探针5;计算机控制连接AFM控制器4;检测单元3包括:光谱分析仪11、光电倍增管10、分束器8、CCD和计算机;分束器8连接光谱分析仪11、光电倍增管10;光谱分析仪11连接CCD;CCD和光电倍增管10连接计算机; 谱分析仪11连接CCD;CCD和光电倍增管10连接计算机;  The surface plasmon longitudinal field detection device of the present utility model includes: a surface plasmon longitudinal field scanning near-field optical microscope device, which has a surface plasmon excitation unit 1, a scanning control unit 2 and a detection unit 3; a surface plasmon excitation unit 1 Including: excitation light source, beam splitter 7, high numerical aperture objective lens 6, glass slide coated with 45nm silver film, three-dimensional scanning platform; There are Raman molecules; the light beam emitted by the excitation light source passes through the beam splitter 7, and the high numerical aperture objective lens 6 is irradiated on the glass slide adsorbed with Raman molecules; the scanning control unit 2 includes: AFM metal probe 5, AFM controller 4, computer AFM controller 4 controls and connects AFM metal probe 5; computer control connects AFM controller 4; detection unit 3 includes: spectrum analyzer 11, photomultiplier tube 10, beam splitter 8, CCD and computer; beam splitter 8 connects Spectrum analyzer 11, photomultiplier tube 10; Spectrum analyzer 11 connects CCD; CCD and photomultiplier tube 10 connect computer; Spectrum analyzer 11 connects CCD; CCD and photomultiplier tube 10 connect computer;

光谱分析仪(11)分析的是拉曼光谱;  What spectrometer (11) analyzes is Raman spectrum;

具有表面等离子体激发步骤、扫描控制步骤和检测步骤;表面等离子体激发步骤是在金属膜和空气界面上通过自组装吸附拉曼分子,在入射光经高数值孔径物镜(6)聚焦后在金膜与空气界面产生SPP场,在SPP场的作用下金膜上的拉曼分子发出拉曼信号,其相互干涉在焦点附近形成SPPs的驻波场,通过分析拉曼信号得到SPP场的特点;  It has a surface plasmon excitation step, a scanning control step and a detection step; the surface plasmon excitation step is to adsorb Raman molecules through self-assembly on the interface between the metal film and the air, and after the incident light is focused by the high numerical aperture objective lens (6) on the gold The SPP field is generated at the interface between the film and the air. Under the action of the SPP field, the Raman molecules on the gold film emit Raman signals, and their mutual interference forms a standing wave field of SPPs near the focus. The characteristics of the SPP field are obtained by analyzing the Raman signal;

扫描控制步骤利用AFM控制器(4)可实现对AFM金属探针(5)的三维扫描和定位;  The scan control step utilizes the AFM controller (4) to realize three-dimensional scanning and positioning of the AFM metal probe (5);

检测步骤实现表面等离子体场的纵向场分量三维测量和分析。  The detection step realizes the three-dimensional measurement and analysis of the longitudinal field component of the surface plasma field. the

具有表面等离子体激发步骤、扫描控制步骤和检测步骤;表面等离子体激发步骤是在金属膜和空气界面上涂覆拉曼分子,在入射光经高数值孔径物镜6聚焦后在金膜与空气界面产生SPP场,在SPP场的作用下金膜上的拉曼分子发出拉曼信号,其相互干涉在焦点附近形成SPPs的驻波场,通过分析拉曼信号得到SPP场的特点;扫描控制步骤利用AFM控制器4可实现对AFM金属探针5的三维扫描和定位;  It has a surface plasmon excitation step, a scanning control step and a detection step; the surface plasmon excitation step is to coat the Raman molecule on the interface between the metal film and the air, and after the incident light is focused by the high numerical aperture objective lens 6, it is on the interface between the gold film and the air The SPP field is generated, and under the action of the SPP field, the Raman molecules on the gold film emit Raman signals, and their mutual interference forms a standing wave field of SPPs near the focus, and the characteristics of the SPP field are obtained by analyzing the Raman signal; the scanning control step uses The AFM controller 4 can realize three-dimensional scanning and positioning of the AFM metal probe 5;

检测步骤实现表面等离子体场的纵向场分量三维测量和分析。  The detection step realizes the three-dimensional measurement and analysis of the longitudinal field component of the surface plasma field. the

表面等离子体激发单元,满足表面等离子体激发条件的TM光波经过高数值孔径(N.A=1.49)物镜聚焦,可以形成ATR(衰减全反射,Attenuated TotalReflection)结构,从而能够在银膜(或金膜;自工,平均膜厚差别为0.3nm)表面产生表面等离子体,不同偏振态的激发光在金属膜表面产生不同分布样式的表面等离子体分布。  In the surface plasmon excitation unit, the TM light waves meeting the surface plasmon excitation conditions are focused by a high numerical aperture (N.A=1.49) objective lens, which can form an ATR (attenuated total reflection, Attenuated Total Reflection) structure, so that it can be on the silver film (or gold film; Surface plasmons are generated on the surface of the self-made, average film thickness difference is 0.3nm), and the excitation light of different polarization states produces surface plasmon distributions with different distribution patterns on the surface of the metal film. the

扫描控制单元,利用AFM控制器可实现对AFM金属探针的三维扫描和定位,控制AFM金属探针尖靠近金属膜表面的SPPs时,由于SPPs与金属探针尖的作用能有效的激发局域表面等离子体(LSP),使得金属针尖尖端处的电 场得到了极大的增强。通过自组装使得金属探针尖端吸附有拉曼分子时,由于高度局域并显著增强的耦合场的存在,拉曼信号得到108倍以上的增强;考虑透射光影响时,对应于SPPs激发的拉曼信号强度是透射光激发的信号强度的20倍,而SPPs与LSP耦合场的拉曼信号强度比单纯由SPPs激发的拉曼信号强度提高了近2个数量级,从而射光的影响基本可以忽略。  The scanning control unit can realize the three-dimensional scanning and positioning of the AFM metal probe by using the AFM controller. When the AFM metal probe tip is controlled to be close to the SPPs on the surface of the metal film, the interaction between the SPPs and the metal probe tip can effectively excite the local Surface plasmon (LSP), which greatly enhances the electric field at the tip of the metal needle tip. When Raman molecules are adsorbed on the tip of the metal probe through self-assembly, the Raman signal is enhanced by more than 10 8 times due to the existence of a highly localized and significantly enhanced coupling field; when considering the influence of transmitted light, the corresponding SPPs excited The Raman signal intensity is 20 times that of the signal excited by transmitted light, and the Raman signal intensity of the coupling field between SPPs and LSP is nearly 2 orders of magnitude higher than that excited by SPPs alone, so the influence of transmitted light can basically be ignored. .

检测单元,在金属膜表面产生的表面等离子体包含纵向分量和横向分量两部分,SPPs的纵向分量和横向分量之比是由金属及其附近的电介质的介电常数之比所决定的,即:|Ez|2/|Er|2=|εm|/εd,在可见光范围内,对于金和银这两种激发表面等离子体最常用的金属而言,该比值分别为0.83,21.78和2.923,26.3,这个比值的大小不满足纵向场是横向场的30倍这一下限,因此不能直接使用常规方法进行检测。本实用新型检测单元借助SPPs与金属探针尖的相互作用实现拉曼增强,通过表面等离子体耦合辐射(surface plasmon-coupled emission,SPCE)将拉曼信号从金属膜上方经过高数值孔径油浸物镜定向耦合到分束器1,之后分别经由分束器2进入CCD和光电倍增管,通过计算机控制拉曼信号的收集,进而得到表面等离子体场的单点纵向场分量测量。控制AFM金属探针进行三维扫描可以实现表面等离子体场的纵向场分量三维测量和分析。整个纵向场探测结果的分辨率在50nm以下,而且每张纵向场分布的图像的获取过程时间只要1-2分钟。对CCD获取的图像进行去卷积处理可以得到直观的纵向场分布情况可以与利用光电倍增管获得的纵向场分布情况形成良好的互补。  In the detection unit, the surface plasmon generated on the surface of the metal film contains two parts: a longitudinal component and a transverse component. The ratio of the longitudinal component and the transverse component of SPPs is determined by the ratio of the dielectric constant of the metal and its surrounding dielectric, namely: |E z | 2 /|E r | 2 = |ε m |/ε d , in the visible range, for gold and silver, the two most commonly used metals to excite surface plasmons, the ratios are 0.83, 21.78, respectively And 2.923, 26.3, the size of this ratio does not meet the lower limit of 30 times that the longitudinal field is the transverse field, so it cannot be directly detected by conventional methods. The detection unit of the utility model realizes Raman enhancement by means of the interaction between SPPs and metal probe tips, and passes the Raman signal from above the metal film through the high numerical aperture oil immersion objective lens through surface plasmon-coupled emission (SPCE) Directional coupling to the beam splitter 1, and then enter the CCD and photomultiplier tube respectively through the beam splitter 2, and the collection of Raman signals is controlled by the computer, and then the single-point longitudinal field component measurement of the surface plasmon field is obtained. Controlling the AFM metal probe for three-dimensional scanning can realize three-dimensional measurement and analysis of the longitudinal field component of the surface plasmon field. The resolution of the entire longitudinal field detection result is below 50nm, and the acquisition process time of each longitudinal field distribution image is only 1-2 minutes. The intuitive longitudinal field distribution can be obtained by deconvoluting the images acquired by the CCD, which can form a good complement to the longitudinal field distribution obtained by using the photomultiplier tube.

本实用新型的表面等离子体纵向场检测方法包括:是在金属膜和空气界面上通过自组装涂覆单层拉曼分子,当入射光经高数值孔径物镜聚焦后会在金属膜和空气界面激发SPPs,其相互干涉在焦点附近形成SPPs的驻波场。当粘附有拉曼分子的AFM金属探针尖靠近SPPs的驻波场时,由于SPPs与金属探针尖的作用能有效的激发局域表面等离子体(LSP),使得金属针尖尖端 处的电场得到了极大的增强。由于金属膜-AFM金属探针的gap结构(金属膜-间隙-金属探针结构)取向与SPPs纵向场分量的取向一致,从而可以充分激发LSP,而横向场不参与LSP的激发,当拉曼分子粘附在针尖尖端时,SPPs和LSP的耦合场激发的拉曼信号也得到了极大的增强。  The surface plasmon longitudinal field detection method of the utility model includes: coating a single layer of Raman molecules on the metal film and air interface through self-assembly, and when the incident light is focused by a high numerical aperture objective lens, it will be excited at the metal film and air interface SPPs, which interfere with each other to form a standing wave field of SPPs near the focal point. When the AFM metal probe tip attached with Raman molecules is close to the standing wave field of the SPPs, due to the interaction between the SPPs and the metal probe tip, the localized surface plasmon (LSP) can be effectively excited, so that the electric field at the tip of the metal tip has been greatly enhanced. Since the orientation of the gap structure (metal film-gap-metal probe structure) of the metal film-AFM metal probe is consistent with the orientation of the longitudinal field component of SPPs, the LSP can be fully excited, and the transverse field does not participate in the excitation of the LSP. When the Raman The coupled field-excited Raman signals of SPPs and LSPs are also greatly enhanced when the molecules are attached to the needle tip. the

II RSRS (( vv SS )) ∝∝ NσNσ SERSSERS ·&Center Dot; || EE. locloc || 44 || EE. SPSP || 44 ·&Center Dot; || EE. SPSP || 22 == NσNσ SERSSERS ·&Center Dot; RERE ·&Center Dot; || EE. SPSP || 22 -- -- -- (( 11 ))

其中IRS为拉曼信号强度,Eloc为SPPs与LSP耦合电磁场的场强,esp为激发LSP的SPPs场的场强,RE为拉曼增强因子。  where I RS is the Raman signal intensity, E loc is the field strength of the coupling electromagnetic field between SPPs and LSP, e sp is the field strength of the SPPs field that excites LSP, and RE is the Raman enhancement factor.

从上述原理可以得到:拉曼信号强度和针尖所处位置的SPPs电场强度成正比,同时由于SPPs的横向分量基本与LSP的激发无关,且SPPs电场强度的主体为其纵向分量,从而根据拉曼信号强度与针尖所处位置SPPs的纵向电场强度关系,可得到对应位置处的纵向场场强分布;进而对实验平台进行高精度的三维扫描,同时将拉曼信号导入光电倍增管进行二次放大,就能实现对整个近场范围内表面等离子体纵向分量的有效、精确且十分快速的测量。  From the above principle, it can be obtained that the Raman signal intensity is proportional to the SPPs electric field intensity at the position of the needle tip, and since the transverse component of SPPs is basically irrelevant to the excitation of LSP, and the main body of the SPPs electric field intensity is its longitudinal component, so according to Raman The relationship between the signal strength and the longitudinal electric field strength of the SPPs at the position of the needle tip can be used to obtain the longitudinal field strength distribution at the corresponding position; and then perform high-precision three-dimensional scanning on the experimental platform, and at the same time introduce the Raman signal into the photomultiplier tube for secondary amplification , the effective, precise and very fast measurement of the longitudinal component of surface plasmons in the entire near-field range can be realized. the

本实用新型提供了对表面等离子体纵向场的高精度、高灵敏度测量的方法及装置,通过采用SPPs和LSP耦合拉曼光谱增强技术,有效减少了外界环境因素带来的干扰,提高了纵向场测量的可靠性和稳定性。本实用新型可拓展至对普通光场的纵向分量的检测,易于应用在不同类型的SPR耦合方案中,并且系统设计简单,操作方便。  The utility model provides a method and device for high-precision and high-sensitivity measurement of the surface plasma longitudinal field. By adopting SPPs and LSP coupling Raman spectrum enhancement technology, the interference caused by external environmental factors is effectively reduced, and the longitudinal field is improved. Measurement reliability and stability. The utility model can be extended to the detection of the longitudinal component of the ordinary light field, is easy to be applied in different types of SPR coupling schemes, and has simple system design and convenient operation. the

附图说明: Description of drawings:

图1表面等离子体纵向场检测装置结构示意图;  Figure 1 Schematic diagram of the surface plasmon longitudinal field detection device;

图2时域有限差分法针对该实验的模拟结果示意图;  Fig. 2 is a schematic diagram of the simulated results of the experiment by the finite difference time domain method;

图3模拟结果中SPPs场以及其横向、纵向分量与实验结果比较示意图;  Fig. 3 Schematic diagram of the comparison between the SPPs field and its horizontal and vertical components in the simulation results and the experimental results;

图4对焦点附近SPPs驻波场的扫描结果:a,b,c分别为线偏振光、径向偏振光拓扑荷为1的涡旋光束所激发的SPPs在焦点附近纵向场分布。d,e,f,为根据Richard-wolf vectorial method(理查德-沃尔夫矢量积分理论)的模拟结果;  Fig. 4 Scanning results of the standing wave field of SPPs near the focal point: a, b, and c are the longitudinal field distribution of SPPs excited by the vortex beam with a topological charge of 1 for linearly polarized light and radially polarized light, respectively. d, e, f, are simulation results according to Richard-wolf vectorial method (Richard-Wolf vector integral theory);

图5-1纵向场分量中心半高宽的实验结果;  Figure 5-1 Experimental results of center half-width of longitudinal field components;

图5-2纵向场分量中心半高宽的重复性实验结果示意图。  Figure 5-2 Schematic diagram of the repeatable experimental results of the center width at half maximum of the longitudinal field component. the

具体实施方式:Detailed ways:

下面结合附图和实施例对本实用新型作进一步说明。  Below in conjunction with accompanying drawing and embodiment the utility model is further described. the

本实用新型的基本思想是借助SPPs与金属探针尖的相互作用实现拉曼增强,根据拉曼信号强度跟SPPs纵向分量之间的正比关系,以拉曼信号强度间接探测纵向场分布。  The basic idea of the utility model is to achieve Raman enhancement by means of the interaction between SPPs and metal probe tips, and to indirectly detect the longitudinal field distribution with the Raman signal intensity according to the proportional relationship between the Raman signal intensity and the SPPs longitudinal component. the

实施例:如图1、2、3、4、5-1、5-2所示,  Embodiment: as shown in Figure 1, 2, 3, 4, 5-1, 5-2,

一种表面等离子体纵向场扫描近场光学显微镜装置,具有表面等离子体激发单元1、扫描控制单元2和检测单元3;表面等离子体激发单元1包括:激发光源、分束器7、高数值孔径物镜6、镀有45nm银膜的玻片、三维扫描平台;镀有45nm银膜的玻片设置在三维扫描平台上,其上通过自组装吸附有拉曼分子;激发光源发出的光束穿过分束器7、高数值孔径物镜6照射在吸附有拉曼分子的玻片上;扫描控制单元2包括:AFM金属探针5、AFM控制器4、计算机;AFM控制器4控制连接AFM金属探针5;计算机控制连接AFM控制器4;检测单元3包括:光谱分析仪11、光电倍增管10、分束器8、CCD和计算机;分束器8连接光谱分析仪11、光电倍增管10;光谱分析仪11连接CCD;CCD和光电倍增管10连接计算机;  A surface plasmon longitudinal field scanning near-field optical microscope device has a surface plasmon excitation unit 1, a scanning control unit 2 and a detection unit 3; the surface plasmon excitation unit 1 includes: an excitation light source, a beam splitter 7, a high numerical aperture Objective lens 6, a glass slide coated with 45nm silver film, and a three-dimensional scanning platform; the glass slide coated with a 45nm silver film is set on the three-dimensional scanning platform, and Raman molecules are adsorbed on it through self-assembly; the beam emitted by the excitation light source passes through the beam splitter Device 7, high numerical aperture objective lens 6 is irradiated on the glass slide that is adsorbed with Raman molecule; Scanning control unit 2 includes: AFM metal probe 5, AFM controller 4, computer; AFM controller 4 controls and connects AFM metal probe 5; Computer control connects AFM controller 4; Detection unit 3 includes: spectrum analyzer 11, photomultiplier tube 10, beam splitter 8, CCD and computer; Beam splitter 8 connects spectrum analyzer 11, photomultiplier tube 10; Spectrum analyzer 11 connect CCD; CCD and photomultiplier tube 10 connect computer;

光谱分析仪(11)分析的是拉曼光谱;  What spectrometer (11) analyzes is Raman spectrum;

具有表面等离子体激发步骤、扫描控制步骤和检测步骤;表面等离 子体激发步骤是在金属膜和空气界面上通过自组装吸附拉曼分子,在入射光经高数值孔径物镜(6)聚焦后在金膜与空气界面产生SPP场,在SPP场的作用下金膜上的拉曼分子发出拉曼信号,其相互干涉在焦点附近形成SPPs的驻波场,通过分析拉曼信号得到SPP场的特点;;  It has a surface plasmon excitation step, a scanning control step and a detection step; the surface plasmon excitation step is to adsorb Raman molecules through self-assembly on the metal film and air interface, after the incident light is focused by a high numerical aperture objective lens (6) The SPP field is generated at the interface between the gold film and the air. Under the action of the SPP field, the Raman molecules on the gold film emit Raman signals, which interfere with each other to form a standing wave field of SPPs near the focus. The SPP field is obtained by analyzing the Raman signal. features;

扫描控制步骤利用AFM控制器(4)可实现对AFM金属探针(5)的三维扫描和定位;  The scan control step utilizes the AFM controller (4) to realize three-dimensional scanning and positioning of the AFM metal probe (5);

检测步骤实现表面等离子体场的纵向场分量三维测量和分析。  The detection step realizes the three-dimensional measurement and analysis of the longitudinal field component of the surface plasma field. the

具有表面等离子体激发步骤、扫描控制步骤和检测步骤;表面等离子体激发步骤是在金属膜和空气界面上涂覆拉曼分子,在入射光经高数值孔径物镜6聚焦后在金膜与空气界面产生SPP场,在SPP场的作用下金膜上的拉曼分子发出拉曼信号,其相互干涉在焦点附近形成SPPs的驻波场,通过分析拉曼信号得到SPP场的特点;;  It has a surface plasmon excitation step, a scanning control step and a detection step; the surface plasmon excitation step is to coat the Raman molecule on the interface between the metal film and the air, and after the incident light is focused by the high numerical aperture objective lens 6, it is on the interface between the gold film and the air Generate an SPP field, under the action of the SPP field, the Raman molecules on the gold film emit Raman signals, and their mutual interference forms a standing wave field of SPPs near the focus, and the characteristics of the SPP field are obtained by analyzing the Raman signal;

扫描控制步骤利用AFM控制器4可实现对AFM金属探针5的三维扫描和定位;  The scan control step utilizes the AFM controller 4 to realize three-dimensional scanning and positioning of the AFM metal probe 5;

检测步骤实现表面等离子体场的纵向场分量三维测量和分析。  The detection step realizes the three-dimensional measurement and analysis of the longitudinal field component of the surface plasma field. the

并且为简化装置,用直径为60nm的银纳米小球取代AFM金属扫描头系统,并将拉曼分子置于纳米球与金属膜之间。由于纳米球与金属膜之间的纵向排列关系,只有电场的纵向分量能有效的激发LSP,并将电场束缚在拉曼分子所处的纳米球与金属膜的空隙中。因此这种方法具有与AFM金属扫描头系统具有完全相同的功能。通过对该简化装置实验结果的分析,能够实现对表面等离子体纵向场扫描显微镜系统的可行性,有效性,以及实用性的评估。从图2可以看出,由于近场探测装置(金属小球,AFM金属探针5)的引入,SPPs场的场分布不发生变化,仅出现能量在探测装置和金膜之间聚集。采用时域有限差分法对该实验进行模拟,并与实验结果进行对比,如图3所示,不失一般性,采用上述装置,分别对线偏振光、径向偏振光、以及拓扑荷为 1的涡旋光束进行了数值模拟和对应的SPPs纵向场的实际测量,结果如图4所示。根据本实验方案测出的SPPs驻波场与数值模拟的纵向电场分布完全吻合,具有很高的精确性。对于波长632.8nm的径向偏振光激发的SPPs,实验检测结果中其纵向场分量的中心最大值半高宽为184.3nm,如图5-1和5-2所示,以五十个样本为一组进行重复性实验,所得结果基本满足正态分布,其纵向场中心最大值半高宽平均值为188.93nm(0.355λ0,对应地,0.099λ0 2)比其典型值0.16λ0 2小38%,标准差为6.76nm。这对于提高系统的分辨率有着重要意义。同时,由于显著的拉曼增强效应以及光电倍增管的二次放大作用,拉曼信号得到显著的放大,从而有效的降低了扫描成像所需的积分时间,这大大提高了本实用新型系统的实用性。总之,根据我们的实验结果,本实用新型系统的可行性,有效性,以及实用性都得到了验证。  And in order to simplify the device, the AFM metal scanning head system is replaced by silver nanospheres with a diameter of 60nm, and the Raman molecules are placed between the nanospheres and the metal film. Due to the longitudinal arrangement between the nanospheres and the metal film, only the longitudinal component of the electric field can effectively excite the LSP, and the electric field is bound in the gap between the nanospheres and the metal film where the Raman molecules are located. So this method has exactly the same function as the AFM metal scanning head system. Through the analysis of the experimental results of the simplified device, the feasibility, effectiveness and practicability of the surface plasmon longitudinal field scanning microscope system can be evaluated. It can be seen from Figure 2 that due to the introduction of the near-field detection device (metal ball, AFM metal probe 5), the field distribution of the SPPs field does not change, and only the energy gathers between the detection device and the gold film. The experiment was simulated by the finite difference time domain method, and compared with the experimental results, as shown in Figure 3, without loss of generality, using the above device, respectively for linearly polarized light, radially polarized light, and topological charge 1 The numerical simulation and the actual measurement of the corresponding SPPs longitudinal field were carried out for the vortex beam, and the results are shown in Fig. 4. The standing wave field of SPPs measured according to this experimental scheme is in good agreement with the numerically simulated longitudinal electric field distribution, with high accuracy. For SPPs excited by radially polarized light with a wavelength of 632.8nm, the central maximum half-maximum width of the longitudinal field component in the experimental detection results is 184.3nm, as shown in Figures 5-1 and 5-2, with fifty samples as A group of repeated experiments, the results basically meet the normal distribution, the center of the longitudinal field maximum value at half maximum is 188.93nm (0.355λ 0 , correspondingly, 0.099λ 0 2 ) than its typical value of 0.16λ 0 2 38% smaller with a standard deviation of 6.76nm. This is of great significance for improving the resolution of the system. At the same time, due to the significant Raman enhancement effect and the secondary amplification of the photomultiplier tube, the Raman signal is significantly amplified, thereby effectively reducing the integration time required for scanning imaging, which greatly improves the practicality of the system of the present invention. sex. In a word, according to our experiment results, the feasibility, effectiveness and practicality of the system of the present utility model have been verified.

显然,本实用新型的上述实施例仅仅是为清楚地说明本实用新型所作的举例,而并非是对本实用新型的实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而这些属于本实用新型的精神所引伸出的显而易见的变化或变动仍处于本实用新型的保护范围之中。  Apparently, the above-mentioned embodiments of the present utility model are only examples for clearly illustrating the present utility model, rather than limiting the implementation manner of the present utility model. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And these obvious changes or variations derived from the spirit of the present utility model are still within the protection scope of the present utility model. the

Claims (2)

1. a surface plasma longitudinal field optical microscope for scanning near field device is characterized in that, has surface plasma and excites unit (1), scan control unit (2) and detecting unit (3); Described surface plasma excites unit (1) to comprise: excitation source, beam splitter (7), high-NA objective (6), the slide that is coated with the 45nm silverskin, 3-D scanning platform; The slide of the described 45nm of being coated with silverskin is arranged on the described 3-D scanning platform, is adsorbed with Raman molecular by self assembly on it; The light beam that described excitation source sends passes described beam splitter (7), high numerical aperture journey object lens (6) and is radiated on the described slide that is adsorbed with Raman molecular; Described scan control unit (2) comprising: AFM metal probe (5), AFM controller (4), computing machine; The described AFM metal probe of described AFM controller (4) control linkage (5); Described computer control connects described AFM controller (4); Described detecting unit (3) comprising: spectroanalysis instrument (11), photomultiplier (10), beam splitter (8), CCD and computing machine; Described beam splitter (8) connects described spectroanalysis instrument (11), photomultiplier (10); (11 connect described CCD to described spectroanalysis instrument; Described CCD is connected described computing machine with photomultiplier (10).
2. surface plasma longitudinal field optical microscope for scanning near field device according to claim 1 is characterized in that: what described spectroanalysis instrument (11) was analyzed is Raman spectrum.
CN 201220754746 2012-12-28 2012-12-28 Surface plasma longitudinal field scanning near-field optic microscope device Expired - Fee Related CN203164205U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103105511A (en) * 2012-12-28 2013-05-15 南开大学 Surface plasma longitudinal field scanning near-field optic microscope device and detection method
CN103892920A (en) * 2014-04-03 2014-07-02 张道福 Neurosurgical procedure guiding tool
CN103954802A (en) * 2014-05-13 2014-07-30 中国科学技术大学 Long-wavelength scanning near-field microscopic analysis system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103105511A (en) * 2012-12-28 2013-05-15 南开大学 Surface plasma longitudinal field scanning near-field optic microscope device and detection method
CN103892920A (en) * 2014-04-03 2014-07-02 张道福 Neurosurgical procedure guiding tool
CN103954802A (en) * 2014-05-13 2014-07-30 中国科学技术大学 Long-wavelength scanning near-field microscopic analysis system

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