CN203163789U - Flow meter - Google Patents
Flow meter Download PDFInfo
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- CN203163789U CN203163789U CN 201320122717 CN201320122717U CN203163789U CN 203163789 U CN203163789 U CN 203163789U CN 201320122717 CN201320122717 CN 201320122717 CN 201320122717 U CN201320122717 U CN 201320122717U CN 203163789 U CN203163789 U CN 203163789U
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Abstract
The utility model provides a flow meter which is wide in measurement range and high in accuracy. The flow meter comprises a valve body (5), a plurality of stop valves (1, 2, 3 and 4), a sensor and a control part. An air inlet channel (15) and a plurality of bypass channels (18) are arranged in the valve body. The stop valves (1, 2, 3 and 4) have different flow ranges and respectively correspond to the bypass channels (18), so that fluid in the corresponding flow ranges respectively flows into the bypass channels (18). The sensor detects flow of the fluid flowing into the bypass channels (18). The control part selects one stop valve in a corresponding flow range from the stop valves (1, 2, 3 and 4) according to the detecting result of the sensor and makes the stop valves (1, 2, 3 and 4) in a corresponding flow range to be communicated. Therefore, the measurement range can be automatically switched according to the fluid within the range from zero to the full scale, and high-accuracy signal output is achieved.
Description
Technical field
The utility model relates to a kind of wide-range, high-precision flowmeter, relates in particular to a kind of wide-range, high-precision mass-flow gas meter.
Background technology
Flowmeter is widely used in the fluid measurement in fields such as semiconductor manufacturing, vacuum coating, analysis, chemical industry, environment, thereby need have higher measuring accuracy in the gamut scope.Yet, when the scope of range is big, existing flowmeter can't guarantee the measuring accuracy below 1% usually in the gamut scope, error even can reach 100% in certain range ability, thereby existing flowmeter can not guarantee the measuring accuracy in the gamut scope, particularly has the low problem of low side measurement range precision.
In order to address this is that, the user can buy many flowmeters usually and replace mutually and use, and in addition, has a kind of integrated integrated equipment of many flowmeters with contact.But, replace and use many flowmeters and adopt above-mentioned integrated equipment can bring problems such as cost height, system is huge, replacement process is loaded down with trivial details.
In addition, though also can improve the measuring accuracy in the gamut scope by raising part processing precision, raising sensor accuracy, this method can significantly raise the cost.
The utility model content
In view of the above problems, the purpose of this utility model be to provide a kind of can be at 0 to the fluid automatic switching range between the full scale, and realize the flowmeter of high-precision signal output.
In order to address the above problem, flowmeter of the present utility model comprises valve body, fluid access way, comprises in addition: a plurality of bypass channels; A plurality of stop valves, each stop valve has different flow range, and each bypass channel is corresponding with each stop valve respectively; Sensor, detection flows into the flow of the fluid of described bypass channel; Control part selects the stop valve of corresponding discharge scope to make its connection according to the testing result of described sensor.
Flowmeter of the present utility model is preferably mass-flow gas meter, but also can be liquid flowmeter.
In flowmeter of the present utility model, described control part can at first make the stop valve of minimum flow scope connect, when the measurement result of judging described sensor is the minimum flow scope, outputting measurement value, when the measurement result of judging described sensor is not the minimum flow scope, close described stop valve and make the stop valve of high section flow range connect and judge successively, select the stop valve of corresponding discharge scope.
As preferred embodiment, when flow under near situation about changing the critical value of two stop valve flow range, described control part is controlled, when flow from less than critical value when increasing greater than critical value, described control part is that switching point is connected the stop valve of big flow range with the critical value, when flow from greater than critical value when reducing less than critical value, described control part is that switching point is connected the stop valve of low discharge scope with the regulation point less than critical value.
As preferred embodiment, in each described bypass channel, can be provided with shunt, described shunt is regulated the flow proportional that enters described sensor, so that a certain amount of fluid flows into described sensor.
As preferred embodiment, the quantity of sensor can equal the quantity of bypass channel in the utility model, and both are corresponding one by one.
As another embodiment, the quantity that can quantity be less than bypass channel of sensor, this sensor is for detection of the flow of one or more bypass channels.
As preferred embodiment, described sensor is thermal sensor.
As another embodiment, be equipped with pressure transducer or air velocity transducer in the provided upstream of described thermal sensor.
As another embodiment, described sensor can be pressure transducer or air velocity transducer.
As an embodiment, described control part comprises wireless telecommunications portion, and the signal from the external wireless terminal that described control part utilizes described wireless telecommunications portion to receive is controlled flowmeter.
According to the utility model, can realize high-precision signal output at 0 to the fluid automatic switching range between the full scale.
Description of drawings
Fig. 1 is the mass-flow gas meter inner structure schematic perspective view of the utility model one preferred embodiment.
Fig. 2 is the main valve body structural upright synoptic diagram of mass-flow gas meter embodiment illustrated in fig. 1.
Fig. 3 is the diagrammatic cross-section of main valve body inner structure shown in Figure 2.
Description of reference numerals
1 first electromagnet cut off valve
2 second electromagnet cut off valve
3 the 3rd electromagnet cut off valve
4 the 4th electromagnet cut off valve
5 main valve bodies
6 first sensors
7 second sensors
8 the 3rd sensors
9 four-sensors
10 valve bodies of giving vent to anger
11 stop valve ventholes
12 stop valve air admission holes
13 sensor ventholes
14 sensor air admission holes
15 inlet channels
16 outlet passageways
17 shunting cores
18 bypass channels
Embodiment
Flowmeter of the present utility model is used for the flow measurement of fluid, is specially adapted to the precision measurement of the fluid flow in the process control.The measuring object of this flowmeter can be gas and liquid, and flow can be volumetric flow rate and mass rate.Below, with reference to accompanying drawing the mass-flow gas meter as the utility model flowmeter one example is described.
Fig. 1 is the inner structure schematic perspective view of the mass-flow gas meter of the utility model one preferred embodiment.
Mass-flow gas meter of the present utility model comprises the flowmeter control system that is made of circuit board, control part etc., and described control part control sensor, electromagnet cut off valve etc. for example comprise bridge diagram, gain circuitry, compensating circuit and valve-driving circuit etc.The structure of said apparatus and circuit all belongs to common practise and the customary means of this area, does not elaborate at this.
As shown in Figure 1, mass-flow gas meter of the present utility model also comprises: main valve body 5 is used for making gas to be measured to flow into; First～the 4th electromagnet cut off valve 1～4 is installed on the surface of main valve body 5 by connection and lock member secures, connects according to different flow range, and the gas to be measured of corresponding discharge scope is passed through; The first～the four-sensor 6～9 is installed on the surface of main valve body 5 by connection and lock member secures, is used for measuring the flow of the gas that flows through corresponding electromagnet cut off valve; And the valve body 10 of giving vent to anger, be used for making the gas after the measurement to flow out.
Mass-flow gas meter of the present utility model can adopt plural electromagnet cut off valve and more than one sensor according to the flow range of gas to be measured.In the present embodiment, adopted four electromagnet cut off valve and four sensors, and first～the 4th electromagnet cut off valve 1～4 is corresponding one by one with the first～the four-sensor 6～9, utilizes a sensor measurement to flow through the gas of a corresponding electromagnet cut off valve.The measurement range of the mass-flow gas meter in the present embodiment for example is the scope of 0～10L/min, and the connection flow range of first electromagnet cut off valve 1 for example is 0～10mL/min for the connection flow range of 10mL/min～100mL/min, the 4th electromagnet cut off valve 4 for example for the connection flow range of 100mL/min～1L/min, the 3rd electromagnet cut off valve 3 for example for the connection flow range of 1L/min～10L/min, second electromagnet cut off valve 2 for example.In the present embodiment, the size of the nozzle by changing electromagnet cut off valve makes the flow range difference of electromagnet cut off valve.
Fig. 2 is the main valve body structural upright synoptic diagram of mass-flow gas meter embodiment illustrated in fig. 1.Fig. 3 is the diagrammatic cross-section of the inner structure of this main valve body.
Following structure with reference to the main valve body 5 of Fig. 2, Fig. 3 is elaborated.Need to prove that Fig. 3 is the diagrammatic cross-section of main valve body inner structure, wherein the structure of each bypass channel 18 is identical, is respectively arranged with a shunting core (example of shunt) 17 in each bypass channel 18.In Fig. 3, only illustrate a shunting core 17.
Shown in Fig. 2,3, be provided with inlet channel 15 in front end (right side among Fig. 3) inside of main valve body 5, this inlet channel 15 is by the external communications of air admission hole and mass-flow gas meter, and gas to be measured flows into inlet channel 15 by air admission hole.In addition, be provided with four bypass channels 18 with inlet channel 15 adjacency, inlet channel 15 and four bypass channels 18 are provided with four stop valve air admission holes 12 accordingly, and this stop valve air admission hole 12 is communicated with the surface of main valve body 5.In addition, four bypass channels 18 are respectively arranged with stop valve venthole 11, sensor air admission hole 14, sensor venthole 13, and this stop valve venthole 11, sensor air admission hole 14, sensor venthole 13 also are communicated with the surface of main valve body 5 respectively.Utilize to connect and locking member, first～the 4th electromagnet cut off valve 1～4 is fixedly mounted on the surface of main valve body 5, thereby it is inner and flow out from stop valve venthole 11 to make gas enter electromagnet cut off valve by stop valve air admission hole 12.In addition, utilize and connect and locking member, the first～the four-sensor 6～9 is fixedly mounted on the surface of main valve body 5 in gas communication direction downstream, thereby makes the gas of the corresponding electromagnet cut off valve of flowing through to enter sensor internal and flow out from sensor venthole 13 from sensor air admission hole 14 via shunting core 17.At this, shunting core 17 is used for producing laminar flow between main channel and kapillary, regulates the flow proportional that enters sensor, to guarantee a certain amount of gas flow sensor.In addition, be provided with four outlet passageways 16 in the inside, rear end (left side among Fig. 3) of main valve body 5, be used for making the gas of flows through sensor to flow out.In the present embodiment, outlet passageway 16 is wholely set with bypass channel 18.
In addition, as shown in Figure 1, be provided with the valve body 10 of giving vent to anger in the rear end (left side among Fig. 3) of main valve body 5, flow out to the outside of mass-flow gas meter from outlet passageway 16 effluent airs by the valve body 10 of giving vent to anger.
Below the fundamental measurement process is described.
At first, gas to be measured enters the inlet channel 15 of main valve body 5, then utilize control part that the 4th electromagnet cut off valve 4 of minimum range is connected, gas flows into the 4th electromagnet cut off valve 4 by stop valve air admission hole 12, and by stop valve venthole 11 inflow bypass channels 18, and flow into first sensors 6 and portalled by sensor stream from sensor air admission hole 14 via shunting core 17 and 13 flow out, in this process, utilize the flow of four-sensor 9 measurement gas.The sensor that adopts in the present embodiment can be thermal sensor.Utilize control part and be stored in the program of not shown storer, the signal of four-sensor 9 is handled, if judge that flow satisfies minimum measurement range 0mL/min～10mL/min, delivery rate value then.Surpass flow range if judge flow, then close the 4th electromagnet cut off valve 4, the 3rd electromagnet cut off valve 3 is connected, if flow satisfies flow range 10mL/min～100mL/min, delivery rate value then.Surpass flow range if judge flow, then close the 3rd electromagnet cut off valve 3.By that analogy, realized measuring the automatic switchover of range.In addition, make the gas of measuring after finishing flow into the valve body 10 of giving vent to anger by outlet passageway 16, flow out to the outside of mass-flow gas meter at last.
Need to prove at this, measurement range selection mode of the present utility model be not limited to above-mentioned from little range to wide range, for example also can select from wide range to little range or at random.In addition, when the gas flow of Ce Lianging just is in critical value (for example 10mL/min) between the multirange if desired, lose code check and can not reach reason such as 100% owing to guaranteeing that absolute stability of flow and A/D data collecting card do not have, flowmeter can constantly switch at the critical value place.In order to address this problem, the mode that control part switches with hysteresis is controlled: when flow from less than critical value when increasing greater than critical value, switching point is critical value, that is, make this moment and connect the 3rd electromagnet cut off valve 3 connections that flow range is 10mL/min～100mL/min; When flow near critical value from greater than critical value when reducing less than critical value, switching point is a bit (for example to be 95% of critical value less than certain of critical value, but be not limited to 95%), that is, make this moment and connect the 4th electromagnet cut off valve 4 connections that flow range is 0～10mL/min.
Thus, mass-flow gas meter of the present utility model is by arranging a plurality of electromagnet cut off valve, shunting core and sensor, and utilize control part to realize measurement gas 0 to the automatic switchover between the full scale, and reached in the range ability 1% high set point precision.At this, the set point precision refers to the percent value that the difference of the actual value that flowmeter displayed value and standard are measured is compared with actual value.
Need to prove:
Electromagnet cut off valve in above-described embodiment, shunting core, sensor are corresponding one by one.As variation, also can reduce the quantity of sensor, detected the flow of the gas that flows through a plurality of electromagnet cut off valve and a plurality of shunting cores by a sensor.For example a sensor can only be set, detected the flow of the gas that flows through four electromagnet cut off valve and four shunting cores by a sensor, two sensors can also be set, and each sensor detects the flow of the gas that flows through two electromagnet cut off valve and two shunting cores.Thus, can reduce number of sensors, reduce cost;
The measurement range of flowmeter is not limited to the scope of 0～10L/min, also can be wideer scope.And the connection flow of electromagnet cut off valve is not limited to above-mentioned scope, can suitably change according to the fluid of actual measurement;
The inlet channel 15 of present embodiment is set directly at the inside of main valve body 5.But, also can the air inlet valve body that an inside has inlet channel be set separately as the valve body 10 of giving vent to anger, and offer four ventholes at this air inlet valve body, this air inlet valve body is sealedly attached to main valve body;
Sensor in above-described embodiment adopts thermal sensor, changes the method that the capillary temperature distribution causes the upstream and downstream temperature difference thereby utilize fluid to flow through kapillary, measures the mass rate of fluid.But, when fluid flow exceeded the sensor measurement scope, the phenomenon of sensor signal anti-espionage may appear in the process of switching range, and the sensor output signal demonstration did not rise counter falling when namely flow increased.The utility model comes current limliting by the electromagnet cut off valve of selecting the corresponding discharge scope, thereby measurement flow and sensor are complementary.In addition, by thermal sensor being replaced with pressure transducer, air velocity transducer etc., or in the upstream of thermal sensor pressure transducer, air velocity transducer etc. are set, also can avoid occurring the phenomenon of above-mentioned sensor anti-espionage;
Flowmeter of the present utility model can adopt wire communication mode, also can adopt wireless communication mode, namely, at control part wireless telecommunications portion is set, the signal from the external wireless terminal that utilizes wireless telecommunications portion to receive is controlled flowmeter, thereby can solve problems such as the existing connection of cable communication is complicated, difficult movement.
More than be that example is illustrated flowmeter of the present utility model with the gas medium, but flowmeter of the present utility model obviously is not limited in this, its principle and structure are equally applicable to liquid flowmeter.Just according to the difference of fluid properties, those of ordinary skills can make corresponding change to the structure of flowmeter, and for example its electromagnet cut off valve, shunting core, sensor etc. are done corresponding design and selection according to the difference of medium.
Claims (9)
1. a flowmeter comprises valve body and fluid access way, it is characterized in that also comprising:
A plurality of bypass channels;
A plurality of stop valves, each stop valve has different flow range, and each bypass channel is corresponding with each stop valve respectively;
Sensor, detection flows into the flow of the fluid of described bypass channel;
Control part selects the stop valve of corresponding discharge scope to make its connection according to the testing result of described sensor.
2. flowmeter according to claim 1 is characterized in that, described flow is counted mass-flow gas meter.
3. flowmeter according to claim 2 is characterized in that, is provided with shunt in each described bypass channel, and described shunt is regulated the flow proportional that enters described sensor, so that a certain amount of fluid flows into described sensor.
4. according to any described flowmeter in the claim 1 to 3, it is characterized in that the quantity of sensor equals the quantity of bypass channel, both are corresponding one by one.
5. according to any described flowmeter in the claim 1 to 3, it is characterized in that the quantity of sensor is less than the quantity of bypass channel, this sensor is for detection of the flow of the fluid of one or more bypass channels.
6. according to any described flowmeter in the claim 1 to 3, it is characterized in that described sensor is thermal sensor.
7. flowmeter according to claim 6 is characterized in that, is equipped with pressure transducer or air velocity transducer in the provided upstream of described thermal sensor.
8. according to any described flowmeter in the claim 1 to 3, it is characterized in that described sensor is pressure transducer or air velocity transducer.
9. according to any described flowmeter in the claim 1 to 3, it is characterized in that described control part comprises wireless telecommunications portion, the signal from the external wireless terminal that described control part utilizes described wireless telecommunications portion to receive is controlled flowmeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320122717 CN203163789U (en) | 2013-03-18 | 2013-03-18 | Flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320122717 CN203163789U (en) | 2013-03-18 | 2013-03-18 | Flow meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203163789U true CN203163789U (en) | 2013-08-28 |
Family
ID=49024967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320122717 Expired - Lifetime CN203163789U (en) | 2013-03-18 | 2013-03-18 | Flow meter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203163789U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104061973A (en) * | 2013-03-18 | 2014-09-24 | 北京堀场汇博隆精密仪器有限公司 | Flowmeter |
| CN111307228A (en) * | 2020-02-26 | 2020-06-19 | 中国计量大学 | Modular pressure level difference type laminar flow sensing element |
| US10863667B2 (en) | 2015-09-28 | 2020-12-15 | Precision Planting Llc | Systems and devices for controlling and monitoring liquid applications of agricultural fields |
-
2013
- 2013-03-18 CN CN 201320122717 patent/CN203163789U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104061973A (en) * | 2013-03-18 | 2014-09-24 | 北京堀场汇博隆精密仪器有限公司 | Flowmeter |
| CN104061973B (en) * | 2013-03-18 | 2017-07-25 | 北京堀场汇博隆精密仪器有限公司 | Flowmeter |
| US10863667B2 (en) | 2015-09-28 | 2020-12-15 | Precision Planting Llc | Systems and devices for controlling and monitoring liquid applications of agricultural fields |
| US11337366B2 (en) | 2015-09-28 | 2022-05-24 | Precision Planting Llc | Systems and devices for controlling and monitoring liquid applications of agricultural fields |
| US11350562B2 (en) | 2015-09-28 | 2022-06-07 | Precision Planting Llc | Systems and devices for controlling and monitoring liquid applications of agricultural fields |
| CN111307228A (en) * | 2020-02-26 | 2020-06-19 | 中国计量大学 | Modular pressure level difference type laminar flow sensing element |
| CN111307228B (en) * | 2020-02-26 | 2022-03-18 | 中国计量大学 | Modular pressure level difference type laminar flow sensing element |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 23 and 25, No. 40, Beiyuan Road, Chaoyang District, Beijing 100012 Patentee after: Houlibo precision instrument (Beijing) Co.,Ltd. Address before: 100012 No. 40 Beiyuan Road, Beijing, Chaoyang District Patentee before: BEIJING HORIBA METRON INSTRUMENTS Co.,Ltd. |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130828 |