CN203117635U - Mask plate processor and plate rack thereof - Google Patents
Mask plate processor and plate rack thereof Download PDFInfo
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- CN203117635U CN203117635U CN 201320039943 CN201320039943U CN203117635U CN 203117635 U CN203117635 U CN 203117635U CN 201320039943 CN201320039943 CN 201320039943 CN 201320039943 U CN201320039943 U CN 201320039943U CN 203117635 U CN203117635 U CN 203117635U
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- plate rack
- mask
- projection
- plate
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Abstract
The utility model discloses a plate rack for a mask plate processor. The plate rack comprises a plate rack body and a plurality of groups of protruding components arranged on the plate rack body, wherein each group of protruding components include four protrusions which are all positioned on the same circle and peripherally and evenly distributed; circles where the protrusions of the plurality of groups of protruding components are located are concentric circles and have unequal diameters, and the heights of the protrusions are in direct proportion to the diameters of the circles; and a plurality of clamp posts are arranged at the top of each protrusion. Specifically, proper protruding components are selected to be arranged according to the size of a mask plate to be processed, namely four corners of the mask plate to be processed are clamped among the clamp posts of the protrusions, so that the mask plate is fixed among the four protrusions to be processed. The mask plates of different sizes can be arranged without the need of replacing the plate rack, therefore time and labor are saved and the processing efficiency is improved. The utility model further discloses a mask plate processor comprising the plate rack.
Description
Technical field
The utility model relates to the mask technical field, more particularly, relates to a kind of plate rack for the support mask, also relates to a kind of mask processor with above-mentioned plate rack.
Background technology
The mask processor be specialty for the treatment of the machine of mask, need to utilize that the mask processor develops after the general mask exposure, the processing of etching process etc.
When carrying out PROCESS FOR TREATMENT, generally mask is placed on the plate rack of mask processor, wherein plate rack is provided with for four projections of setting up four angles of mask respectively, and four angles of square mask are stuck on four projections on the plate rack, carries out PROCESS FOR TREATMENT then.
Yet each plate rack of mask processor only arranges a cover and sets up the projection assembly of mask in the prior art, and every suit projection assembly can only set up a kind of mask of model, such as setting up the mask that the length of side is 6 inches, 7 inches or 5 inches.So when handling, if want to handle the mask of different size, need to change plate rack and just can handle, so waste time and energy, reduced treatment effeciency.
In sum, how to solve effectively needs to change the mask that plate rack just can be handled different size, wastes time and energy, and the low problem for the treatment of effeciency is present those skilled in the art's urgent problem.
The utility model content
In view of this, first purpose of the present utility model is to provide a kind of plate rack, the structural design of this plate rack can solve effectively needs to change the mask that plate rack just can be handled different size, waste time and energy, treatment effeciency is lower, and second purpose of the present utility model provides a kind of mask processor that comprises above-mentioned plate rack.
In order to reach above-mentioned first purpose, the utility model provides following technical scheme:
A kind of plate rack is used for the mask processor, comprises plate rack body and the many groups projection assembly that is arranged on the described plate rack body, and every group of described projection assembly comprises four projections, and four described projections are positioned on the same circle and circumferentially evenly distribution; The circle at the projection place of described many group projection assemblies is that concentric circles and diameter are all inequality, and the height of described projection is directly proportional with the diameter of a circle at its place;
The top of each described projection is provided with a plurality of card posts.
Preferably, the quantity of described projection assembly is specially three groups.
Preferably, each described projection is provided with two card posts.
Preferably, described card post is specially cylinder.
Preferably, also be provided with on the described projection for the support column that supports mask.
Preferably, described projection is fixed on the described plate rack body by screw.
A kind of mask processor, comprise above-mentioned in each described plate rack.
The plate rack that the utility model provides is used for the mask processor, comprises plate rack body and the many groups projection assembly that is arranged on the plate rack body, and every group of projection assembly comprises four projections, and four projections are positioned on the same circle and circumferentially evenly distribution; The circles at the projection place of many group projection assemblies are that concentric circles and diameter are all inequality, and the height of projection is directly proportional with the diameter of a circle at its place, and namely the edge raises successively away from the height of the direction projection assembly in the center of circle, and the top of each projection is provided with a plurality of card posts.
When using the plate rack that the utility model provides, because this plate rack is provided with many group projection assemblies, and the circle of organizing the projection place of projection assembly is that concentric circles and diameter are all inequality more, different projection assemblies can block the mask of establishing different size, the height of projection is directly proportional with the diameter of a circle at its place in addition, namely the edge raises successively away from the height of the direction projection assembly in the center of circle, so arrange and to prevent that hindering mask near the projection assembly in the center of circle is installed on the projection assembly away from the center of circle, specifically can install by suitable projection assembly according to the size Selection of pending mask, four angles that are about to pending mask are fastened between the card post of projection, with this mask is fixed between four projections, handles then.This plate rack needn't be changed the mask that different size just can be installed, and is more time saving and energy saving, improved treatment effeciency.
In order to reach above-mentioned second purpose, the utility model also provides a kind of mask processor, and this mask processor comprises above-mentioned any plate rack.Because above-mentioned plate rack has above-mentioned technique effect, the mask processor with this plate rack also should have corresponding technique effect.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the plate rack that Fig. 1 provides for the utility model embodiment;
Fig. 2 is the partial enlarged drawing of a-quadrant among Fig. 1.
Mark is as follows in the accompanying drawing:
1-plate rack body, 2-projection, 21-card post, 22-support column.
Embodiment
First purpose of the present utility model is to provide a kind of plate rack, the structural design of this plate rack can solve effectively needs to change the mask that plate rack just can be handled different size, waste time and energy, treatment effeciency is lower, and second purpose of the present utility model provides a kind of mask processor that comprises above-mentioned plate rack.
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
See also Fig. 1-Fig. 2, the structural representation of the plate rack that Fig. 1 provides for the utility model embodiment; Fig. 2 is the partial enlarged drawing of a-quadrant among Fig. 1.
The plate rack that the utility model embodiment provides is used for the mask processor, comprises plate rack body 1 and the many groups projection assembly that is arranged on the plate rack body 1, and every group of projection assembly comprises four projections 2, and four projections 2 are positioned on the same circle and circumferentially evenly distribution; The circle at projection 2 places of many group projection assemblies is that concentric circles and diameter are all inequality, and the height of projection 2 is directly proportional with the diameter of a circle at its place, namely the edge raises successively away from the height of the direction projection assembly in the center of circle, and the top of each projection 2 is provided with a plurality of card posts 21.
When using the plate rack that the utility model embodiment provides, because this plate rack is provided with many group projection assemblies, and the circle of organizing projection 2 places of projection assembly is that concentric circles and diameter are all inequality more, different projection assemblies can block the mask of establishing different size, the height of projection 2 is directly proportional with the diameter of a circle at its place in addition, namely the edge raises successively away from the height of the direction projection assembly in the center of circle, so arrange and to prevent that hindering mask near the projection assembly in the center of circle is installed on the projection assembly away from the center of circle, specifically can install by suitable projection assembly according to the size Selection of pending mask, four angles that are about to pending mask are fastened between the card post 21 of projection 2, with this mask is fixed between four projections 2, handles then.This plate rack needn't be changed the mask that different size just can be installed, and is more time saving and energy saving, improved treatment effeciency.
Wherein, the quantity of projection assembly can be three groups, and one group of projection assembly can be placed 5 inches mask, and one group of projection assembly can be placed 6 inches mask, and another group projection assembly can be placed 7 inches mask.
Concrete, on each projection 2 two card posts 21 can be set, the angle of mask is fastened between two card posts 21 and gets final product.Further, card post 21 can be specially cylinder.Can certainly be square column, not limit at this.
Wherein, can also be provided for supporting the support column 22 of mask on the projection 2.Wherein support column 22 is that the top is the cylinder on plane.
Preferably, projection 2 can be arranged at by the mode of screw on the plate rack body 1, so arranges, and can process projection 2 separately and then both is connected with plate rack body 1.Certainly projection 2 and the 1 integral type machine-shaping of plate rack body do not limit at this.
Based on the plate rack that provides in above-described embodiment, the utility model also provides a kind of mask processor, and this mask processor comprises any one plate rack in above-described embodiment.Because this mask processor has adopted the plate rack in above-described embodiment, so the beneficial effect of this mask processor please refer to above-described embodiment.
Each embodiment adopts the mode of going forward one by one to describe in this instructions, and what each embodiment stressed is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from spirit or scope of the present utility model in other embodiments herein.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the wideest scope consistent with principle disclosed herein and features of novelty.
Claims (7)
1. plate rack, be used for the mask processor, it is characterized in that, comprise plate rack body (1) and be arranged at many groups projection assembly on the described plate rack body (1), every group of described projection assembly comprises four projections (2), and four described projections (2) are positioned on the same circle and circumferentially evenly distribution; The circle at projection (2) place of described many group projection assemblies is that concentric circles and diameter are all inequality, and the height of described projection (2) is directly proportional with the diameter of a circle at its place;
The top of each described projection (2) is provided with a plurality of card posts (21).
2. plate rack according to claim 1 is characterized in that, the quantity of described projection assembly is specially three groups.
3. plate rack according to claim 1 is characterized in that, each described projection (2) is provided with two card posts (21).
4. plate rack according to claim 1 is characterized in that, described card post (21) is specially cylinder.
5. plate rack according to claim 1 is characterized in that, also is provided with on the described projection (2) for the support column (22) that supports mask.
6. plate rack according to claim 1 is characterized in that, described projection (2) is fixed on the described plate rack body (1) by screw.
7. a mask processor is characterized in that, comprises as each described plate rack among the claim 1-6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320039943 CN203117635U (en) | 2013-01-24 | 2013-01-24 | Mask plate processor and plate rack thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320039943 CN203117635U (en) | 2013-01-24 | 2013-01-24 | Mask plate processor and plate rack thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203117635U true CN203117635U (en) | 2013-08-07 |
Family
ID=48897964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320039943 Expired - Lifetime CN203117635U (en) | 2013-01-24 | 2013-01-24 | Mask plate processor and plate rack thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203117635U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117826546A (en) * | 2024-02-28 | 2024-04-05 | 无锡迪思微电子有限公司 | Mask plate bearing mechanism and mask plate measuring machine |
-
2013
- 2013-01-24 CN CN 201320039943 patent/CN203117635U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117826546A (en) * | 2024-02-28 | 2024-04-05 | 无锡迪思微电子有限公司 | Mask plate bearing mechanism and mask plate measuring machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180621 Address after: 214135 -6, Linghu Road, Taihu international science and Technology Park, Wuxi, Jiangsu, 180 Patentee after: WUXI DISI MICROELECTRONICS Co.,Ltd. Address before: No. 14, Liang Xi Road, Wuxi, Jiangsu Province Patentee before: WUXI CHINA RESOURCES MICROELECTRONICS Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130807 |
|
| CX01 | Expiry of patent term |