CN203117406U - Testing device used for testing magnetic thin film material force and magnetic coupling - Google Patents
Testing device used for testing magnetic thin film material force and magnetic coupling Download PDFInfo
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- CN203117406U CN203117406U CN 201220747731 CN201220747731U CN203117406U CN 203117406 U CN203117406 U CN 203117406U CN 201220747731 CN201220747731 CN 201220747731 CN 201220747731 U CN201220747731 U CN 201220747731U CN 203117406 U CN203117406 U CN 203117406U
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Abstract
The utility model discloses a testing device used for testing magnetic thin film material force and magnetic coupling, which comprises a light source, a polarizer, an analyzer, a first spectroscope, a second spectroscope, a first grating, a second grating, a lens, a filtering screen, a first light gathering device and a second light gathering device, wherein the first spectroscope, the second spectroscope, the first grating, the second grating, the lens, the filtering screen and the first light gathering device are sequentially arrayed on a horizontal straight line, the light source and the polarizer are arranged on one side of the first spectroscope, the light source, the polarizer and the first spectroscope are located on a same horizontal straight line, the second light gathering device and the analyzer are arranged on one side of the second spectroscope, and the second light gathering device, the analyzer and the second spectroscope are located on a same horizontal straight line. The testing device used for testing the magnetic thin film material force and the magnetic coupling has the advantage of achieving a characteristic test for the magnetic material force and the magnetic coupling.
Description
Technical field
The utility model relates to the thin magnetic film field tests, particularly, relates to a kind of for test magnetic membrane material power and magnetic-coupled proving installation.
Background technology
At present, membraneous material, especially thin magnetic film have more and more important use in MEMS (micro electro mechanical system).Distortion in the working environment of magnetic field or stress characteristic are one of major issues of paying special attention to of MEMS (micro electro mechanical system) research.Coherent gradient sensing system works principle is to introduce the interference fringe that optical path difference forms at last by the light after the film surface reflection through two gratings, and this striped has comprised the information of film surface distortion.By namely can obtain the deformation information of film surface to the processing of striped.This system has the whole audience, is widely used in the film surface deformation measurement to vibrating advantage such as insensitive.But this system only is confined to the distortion on testing film surface, does not have the ability of identification for the magnetic properties of membraneous material.Generally speaking, the electromagnetics characteristic of magnetic material is often with its mechanical deformation interrelated (coupling), and can not reflect its magnetic behavior.And it is existing less at thin magnetic film power-magnetic coupling characteristic research system, general material scholar pays close attention to its magnetic behavior more, and by magnetization curve, ac magnetic susceptibility etc. is studied, and the mechanics worker ignores power-magnetic-coupled feature often, only pays close attention to its deformation characteristic.And the research method that adopts these two kinds of employing power-magnetic to isolate will influence the MEMS (micro electro mechanical system) functional design of thin magnetic film.
The utility model content
The purpose of this utility model is, at the problems referred to above, proposes a kind ofly for test magnetic membrane material power and magnetic-coupled proving installation, under the situation of power-magnetic not being isolated, realizes the advantage to the power-magnetic coupling characteristic test of magnetic material.
For achieving the above object, the technical solution adopted in the utility model is:
A kind of for test magnetic membrane material power and magnetic-coupled proving installation, comprise light source, polarizer, analyzer, first spectroscope, second spectroscope, first grating, second grating, lens, filter screen, the first light harvester and the second light harvester, described first spectroscope, second spectroscope, first grating, second grating, lens, filter screen and the first light harvester are arranged on the horizontal linear in proper order, described light source, polarizer is arranged on first a spectroscopical side, and light source, polarizer and first spectroscope are on the same horizontal linear, the described second light harvester and analyzer are arranged on second a spectroscopical side, and the second light harvester, analyzer and second spectroscope are on the same horizontal linear; The white light that described light source sends becomes polarized light behind polarizer, this polarized light shines the thin magnetic film surface that is arranged in magnetic field environment behind first spectroscope, this polarized light is divided into two light beams after the reflection of thin magnetic film surface is by second spectroscope, one of them light beam is gathered by the second light harvester behind analyzer, another light beam forms striped respectively behind first grating and second grating interference, this striped is gathered by the first light harvester after lens and filter screen.
Further, the described first light harvester and the second light harvester adopt camera or video camera.
Further, the distance between described first grating and second grating is 60mm, and the distance between described second grating and filter screen is between 40-60mm.
The technical solution of the utility model, behind deformation of thin membrane, by the whole audience, real-time, non-contacting light harvester film is measured, obtain surface deformation (deformation gradient and curvature) and the synchronous information of magnetism characteristic distribution (by the analyzing test) of film, thereby realized the advantage to the power-magnetic coupling characteristic test of magnetic material.
Below by drawings and Examples, the technical solution of the utility model is described in further detail.
Description of drawings
Fig. 1 is that the utility model embodiment is described for test magnetic membrane material power and magnetic-coupled proving installation structural representation.
By reference to the accompanying drawings, Reference numeral is as follows among the utility model embodiment:
The 1-thin magnetic film; 2-first spectroscope; 3-second spectroscope; 4-first grating; 5-second grating; The 6-lens; The 7-filter screen; 8-first camera; 9-magnetic field; The 10-polarizer; The 11-analyzer; The 12-light source; 13-second camera.
Embodiment
Below in conjunction with accompanying drawing preferred embodiment of the present utility model is described, should be appreciated that preferred embodiment described herein only is used for description and interpretation the utility model, and be not used in restriction the utility model.
As shown in Figure 1, a kind of for test magnetic membrane material power and magnetic-coupled proving installation, comprise light source, polarizer, analyzer, first spectroscope, second spectroscope, first grating, second grating, lens, filter screen, the first light harvester and the second light harvester, described first spectroscope, second spectroscope, first grating, second grating, lens, filter screen and the first light harvester are arranged on the horizontal linear in proper order, light source, polarizer is arranged on first a spectroscopical side, and light source, polarizer and first spectroscope are on the same horizontal linear, the second light harvester and analyzer are arranged on second a spectroscopical side, and the second light harvester, analyzer and second spectroscope are on the same horizontal linear, the first light harvester and the second light harvester are camera, simultaneously also can be with video camera etc.The white light that light source sends becomes polarized light behind polarizer, this polarized light shines the surface of the thin magnetic film that is arranged in magnetic field environment behind first spectroscope, this polarized light is divided into two light beams after the reflection of thin magnetic film surface is by second spectroscope, one of them light beam is gathered by the second light harvester behind analyzer, another light beam forms striped respectively behind first grating and second grating interference, this striped is gathered by the first light harvester after lens and filter screen.Distance between first grating and second grating is 60mm.Distance between second grating and filter screen can be set between 40-60mm as required, and the distance between second grating and filter screen is set between 40-60mm, does not influence last striped and distributes, and it mainly acts on is with zero level, positive one-level and negative one-level interference fringe separately.
White light becomes polarized light behind polarizer, shine material surface behind first spectroscope, and reflection is gathered polarized light information with second camera by second spectroscope behind analyzer, can measure the magnetic properties of material.The second bundle light forms striped through two grating interferences behind second spectroscope.By first camera get final product the material surface deformation information.Wherein first spectroscope, second spectroscope, first grating, second grating, lens, filter screen and the first light harvester is centered close on the same horizontal line.Light source, polarizer and first spectroscopical center are on the same horizontal line, and the second light harvester, analyzer and second spectroscopical center are on the same horizontal line.
It should be noted that at last: the above only is preferred embodiment of the present utility model, be not limited to the utility model, although with reference to previous embodiment the utility model is had been described in detail, for a person skilled in the art, it still can be made amendment to the technical scheme that aforementioned each embodiment puts down in writing, and perhaps part technical characterictic wherein is equal to replacement.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (3)
1. one kind is used for test magnetic membrane material power and magnetic-coupled proving installation, it is characterized in that, comprise light source, polarizer, analyzer, first spectroscope, second spectroscope, first grating, second grating, lens, filter screen, the first light harvester and the second light harvester, described first spectroscope, second spectroscope, first grating, second grating, lens, filter screen and the first light harvester are arranged on the horizontal linear in proper order, described light source, polarizer is arranged on first a spectroscopical side, and light source, polarizer and first spectroscope are on the same horizontal linear, the described second light harvester and analyzer are arranged on second a spectroscopical side, and the second light harvester, analyzer and second spectroscope are on the same horizontal linear; The white light that described light source sends becomes polarized light behind polarizer, this polarized light shines the thin magnetic film surface that is arranged in magnetic field environment behind first spectroscope, this polarized light is divided into two light beams after the reflection of thin magnetic film surface is by second spectroscope, one of them light beam is gathered by the second light harvester behind analyzer, another light beam forms striped respectively behind first grating and second grating interference, this striped is gathered by the first light harvester after lens and filter screen.
2. according to claim 1ly it is characterized in that for test magnetic membrane material power and magnetic-coupled proving installation the described first light harvester and the second light harvester adopt camera or video camera.
3. according to claim 1 and 2ly it is characterized in that for test magnetic membrane material power and magnetic-coupled proving installation the distance between described first grating and second grating is 60mm, the distance between described second grating and filter screen is between 40-60mm.
Priority Applications (1)
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CN 201220747731 CN203117406U (en) | 2012-12-31 | 2012-12-31 | Testing device used for testing magnetic thin film material force and magnetic coupling |
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CN 201220747731 CN203117406U (en) | 2012-12-31 | 2012-12-31 | Testing device used for testing magnetic thin film material force and magnetic coupling |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103064043A (en) * | 2012-12-31 | 2013-04-24 | 兰州大学 | Testing device used for testing magnetic thin film material force and magnetic coupling and testing method thereof |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103064043A (en) * | 2012-12-31 | 2013-04-24 | 兰州大学 | Testing device used for testing magnetic thin film material force and magnetic coupling and testing method thereof |
CN103064043B (en) * | 2012-12-31 | 2015-03-18 | 兰州大学 | Testing method used for testing magnetic thin film material force and magnetic coupling |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130807 Termination date: 20141231 |
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EXPY | Termination of patent right or utility model |