CN203114757U - Vacuum diffusion pump - Google Patents
Vacuum diffusion pump Download PDFInfo
- Publication number
- CN203114757U CN203114757U CN 201320055749 CN201320055749U CN203114757U CN 203114757 U CN203114757 U CN 203114757U CN 201320055749 CN201320055749 CN 201320055749 CN 201320055749 U CN201320055749 U CN 201320055749U CN 203114757 U CN203114757 U CN 203114757U
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- CN
- China
- Prior art keywords
- oil
- evaporation
- diffusion pump
- pump housing
- heating element
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Jet Pumps And Other Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A vacuum diffusion pump comprises a pump body, wherein an inlet and an outlet are formed in the pump body, a cooling jacket is arranged on the outer wall of the pump body, multistage nozzles are arranged in a vacuum cavity of the pump body, an evaporation oil chamber is respectively connected with the multistage nozzles, a heating element is arranged on the lower portion of the evaporation oil chamber, and an oil guiding disc is arranged in the evaporation oil chamber. The oil guiding disc is in a reversely-buckled bowl shape, the widest portion on the outer edge of the oil guiding disc covers a horizontal surface projection position of an oil return hole, and the thinnest position on the outer edge of the oil guiding disc covers horizontal surface projection positions of all evaporation holes. A temperature sensor is arranged close to the evaporation oil chamber or the heating element. Through the arrangement of the oil guiding disc, evaporation efficiency of oil is improved. Through the arrangement of a condensation grid, the fact that oil vapor is condensed on the condensation grid is guaranteed, and backflow cannot be produced. Through the arrangement of the temperature sensor, operating conditions of the heating element of the diffusion pump can be conveniently observed, maintenance can be carried out on the equipment timely, and therefore production efficiency is improved.
Description
Technical field
The utility model relates to field of vacuum, particularly a kind of vacuum diffusion pump.
Background technique
Diffusion pump is one of the most extensive, topmost instrument that obtains at present high vacuum.Diffusion pump is a kind of secondary pumps, and it needs mechanical pump as fore pump.Oil in the diffusion pump is heated to boiling temperature (being about 200 degree) in a vacuum and produces a large amount of oily vapourss, and oily vapours is via the directed ejection at a high speed of nozzles at different levels.Because the partial pressure of pumped gas is higher than the partial pressure of this gas in the steam flow near the diffusion pump suction port.Like this, the pumped gas molecule is along steam direction high-speed motion, and gas molecule is run into pump housing inwall and reflected again, is subjected to steam flow collision again and flows to the pump wall along the steam flow direction again.After collision several times, gas molecule is compressed to the rough vacuum end, by the steam air inlet multistage compression of stage further nozzle ejection, is taken away by fore pump at last again, and oily vapours turns back to lower floor at the pump wall of cooling after being condensed and is heated again, and so periodic duty reaches the purpose of bleeding.The problem that exists is, 1, the evaporation of oil is relevant with the area of air contact, and existing structural limitations the oily area that contacts with air, influence evaporation efficiency.Though 2 exist cooling jacket, still have the part oil vapor to backflow to enter into from entrance and taken out container, influenced the diffusion pump performance.When 3, diffusion pump quit work, pump oil is deterioration easily.4, the heating element fault easily causes the electric furnace outage to quit work, because electric furnace and the combination of diffusion pump bottom are firmly, the stove silk of heating element is out of order and is difficult for discovering, the invalid variation that causes degree of vacuum of heating function after the electric furnace fault, thus influence ordinary production.
Summary of the invention
At the deficiencies in the prior art, the purpose of this utility model provides a kind of vacuum diffusion pump, can overcome the low problem of evaporation efficiency of oil in the prior art, further, can avoid backflowing of oil vapor, avoid pump oil deterioration to cause the variation of degree of vacuum with avoiding the heating element fault in the electric furnace.
The purpose of this utility model is achieved in that a kind of vacuum diffusion pump, comprises the pump housing, and the pump housing is provided with entrance and exit, and pump housing outer wall is provided with cooling jacket
,Be provided with multistage nozzle in the vacuum chamber of the pump housing, the evaporation oil pocket is connected respectively with multistage nozzle, and evaporation oil pocket bottom is provided with heating element, is provided with the Oil Guide dish in the described evaporation oil pocket; Described Oil Guide dish is the bowl-shape of back-off, and Oil Guide dish outer rim the widest position covers the horizontal plane projection position of spill port, and the narrowest place covers the horizontal plane projection position in all evapn hole.
Be provided with temperature transducer near described evaporation oil pocket or the heating element.
Ingress near the pump housing also is provided with the condensation grid.
The outlet port of the pump housing is provided with unidirectional butterfly valve.
Described multistage nozzle is three.
Described multistage nozzle arranged concentric progressively reduces to outer layer height from internal layer.
A kind of vacuum diffusion pump that the utility model provides, the Oil Guide dish by arranging has improved oily evaporation efficiency.By the condensation grid that arrange, guarantee that oil vapor is condensed herein, can not produce and backflow.The temperature transducer that arranges, the function situation that can observe the diffusion pump heating element is easily in time safeguarded the equipment place under repair, thereby is enhanced productivity.The unidirectional butterfly valve that arranges can guarantee that the utility model when not working, still keeps vacuum state, in order to avoid pump oil deterioration.
Description of drawings
The utility model is described in further detail below in conjunction with drawings and Examples.
Fig. 1 is overall structure schematic representation of the present utility model.
Among the figure: entrance 1, cooling jacket 2, first order jet nozzle 3, vacuum chamber 4,5, three grades of nozzles 6 of secondary nozzle, outlet 7, Oil Guide dish 8, evaporation oil pocket 9, heating element 10, temperature transducer 11, the pump housing 12, condensation grid 13, unidirectional butterfly valve 14, spill port 15, evaporation apertures 16.
Embodiment
In Fig. 1, a kind of vacuum diffusion pump comprises the pump housing 12, and the pump housing 12 is provided with entrance 1 and outlet 7, and the pump housing 12 outer walls are provided with cooling jacket 2
,Be provided with multistage nozzle in the vacuum chamber 4 of the pump housing 12, evaporation oil pocket 9 is connected respectively with multistage nozzle, and evaporation oil pocket 9 bottoms are provided with heating element 10, are provided with Oil Guide dish 8 in the described evaporation oil pocket 9; Described Oil Guide dish 8 is the bowl-shape of back-off, and Oil Guide dish 8 outer rim the widest position cover the horizontal plane projection position of spill port 15, and the narrowest place covers the horizontal plane projection position in all evapn hole 16.By the Oil Guide dish that arranges, enlarged the surface of contact of pump oil with air, improved oily evaporation efficiency, and oil return is smooth and easy, compare do not transform before, efficiengy-increasing 15%.
Be provided with temperature transducer near described evaporation oil pocket 9 or the heating element 10.Structure thus, the function situation that can observe the diffusion pump heating element is easily in time safeguarded the equipment place under repair, thereby is enhanced productivity.
Entrance 1 place near the pump housing 12 also is provided with condensation grid 13.Structure has been avoided backflowing of oil vapor thus, has improved efficient.
Outlet 7 places of the pump housing 12 are provided with unidirectional butterfly valve 14.Structure thus, when the utility model was not worked, high-precision unidirectional butterfly valve 14 namely cut out, and still keeps vacuum state in the vacuum chamber 4, in order to avoid pump oil deterioration.
In the scheme of optimizing, described multistage nozzle is three.Described multistage nozzle arranged concentric progressively reduces to outer layer height from internal layer.
During use, pump oil is heated element 10 and adds the thermosetting oil vapor, enter into nozzles at different levels from evaporation apertures 16, after oil vapor sprays with supersonic speed from first order jet nozzle 3, its speed increases gradually, pressure and density reduce gradually, the gas of entrance 1 because of density difference will be in the steam jet diffusion and be carried to the pump housing 12 inwall places of cooling jacket 2 by jet, at this place, the working steam major part is condensed into oil droplet and flow back in the oil cauldron along the pump housing 12 inwalls and recycle, and pumped gas is piled up at the pump housing 12 inwall places, compression is carried away by subordinate's jet of secondary nozzle 5 and three grades of nozzles 6 at last, to reach compression step by step, taken away from exporting 7 by fore pump at last.A spot of oil vapor that backflows is condensed at condensation grid 13 places and forms the oil droplet backflow.When heating element is unusual, control system or manually can view the abnormal signal that temperature transducer 11 returns, thus in time handle.When the utility model quit work, under the vacuum action of vacuum chamber 4, unidirectional butterfly valve 14 cut out rapidly, closed the valve at entrance 1 and outlet 7 places this moment again, can guarantee the degree of vacuum in the pump housing 12, thereby guaranteed the deterioration of pump oil.
Claims (6)
1. a vacuum diffusion pump comprises the pump housing (12), and the pump housing (12) is provided with entrance (1) and outlet (7), and the pump housing (12) outer wall is provided with cooling jacket (2)
,Be provided with multistage nozzle in the vacuum chamber (4) of the pump housing (12), evaporation oil pocket (9) is connected respectively with multistage nozzle, and evaporation oil pocket (9) bottom is provided with heating element (10), it is characterized in that: be provided with Oil Guide dish (8) in the described evaporation oil pocket (9); Described Oil Guide dish (8) is the bowl-shape of back-off, and Oil Guide dish (8) outer rim the widest position covers the horizontal plane projection position of spill port (15), and the narrowest place covers the horizontal plane projection position in all evapn hole (16).
2. a kind of vacuum diffusion pump according to claim 1 is characterized in that: be provided with temperature transducer near described evaporation oil pocket (9) or the heating element (10).
3. a kind of vacuum diffusion pump according to claim 1 is characterized in that: the entrance (1) near the pump housing (12) locates also to be provided with condensation grid (13).
4. a kind of vacuum diffusion pump according to claim 1, it is characterized in that: the outlet (7) of the pump housing (12) locates to be provided with unidirectional butterfly valve (14).
5. a kind of vacuum diffusion pump according to claim 1, it is characterized in that: described multistage nozzle is three.
6. a kind of vacuum diffusion pump according to claim 1 is characterized in that: described multistage nozzle arranged concentric, progressively reduce to outer layer height from internal layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320055749 CN203114757U (en) | 2013-02-01 | 2013-02-01 | Vacuum diffusion pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320055749 CN203114757U (en) | 2013-02-01 | 2013-02-01 | Vacuum diffusion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203114757U true CN203114757U (en) | 2013-08-07 |
Family
ID=48895107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320055749 Expired - Lifetime CN203114757U (en) | 2013-02-01 | 2013-02-01 | Vacuum diffusion pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203114757U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103742456A (en) * | 2013-12-20 | 2014-04-23 | 江苏大学 | Rotation type vacuum diffusion pump |
| CN108691818A (en) * | 2017-04-10 | 2018-10-23 | 青岛理工大学 | A kind of diffusion pump of quick startup floating heating rotating-spray |
| CN108691819A (en) * | 2017-04-10 | 2018-10-23 | 青岛理工大学 | A kind of floating heated type quickly starts diffusion pump |
| CN112128149A (en) * | 2020-09-04 | 2020-12-25 | 深圳第三代半导体研究院 | Novel diffusion pump cooling device |
| RU2786535C1 (en) * | 2022-04-07 | 2022-12-21 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования "Новосибирский Государственный Технический Университет" | Diffusion pump |
-
2013
- 2013-02-01 CN CN 201320055749 patent/CN203114757U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103742456A (en) * | 2013-12-20 | 2014-04-23 | 江苏大学 | Rotation type vacuum diffusion pump |
| CN108691818A (en) * | 2017-04-10 | 2018-10-23 | 青岛理工大学 | A kind of diffusion pump of quick startup floating heating rotating-spray |
| CN108691819A (en) * | 2017-04-10 | 2018-10-23 | 青岛理工大学 | A kind of floating heated type quickly starts diffusion pump |
| CN108691818B (en) * | 2017-04-10 | 2021-03-30 | 青岛理工大学 | Diffusion pump capable of quickly starting floating, heating and rotationally spraying |
| CN108691819B (en) * | 2017-04-10 | 2021-03-30 | 青岛理工大学 | Floating heating type rapid start diffusion pump |
| CN112128149A (en) * | 2020-09-04 | 2020-12-25 | 深圳第三代半导体研究院 | Novel diffusion pump cooling device |
| RU2786535C1 (en) * | 2022-04-07 | 2022-12-21 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования "Новосибирский Государственный Технический Университет" | Diffusion pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 444100 Hubei province Yichang city mayor of Osaka Road No. 188 South Dangyang Patentee after: Hubei Dongtian Micro Technology Co.,Ltd. Address before: 444100 Hubei province Yichang city mayor of Osaka Road No. 188 South Dangyang Patentee before: HUBEI DONGTIAN OPTIC MATERIAL TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130807 |
|
| CX01 | Expiry of patent term |