CN203108276U - Liquid-gas separating device for chemical dispensing system - Google Patents
Liquid-gas separating device for chemical dispensing system Download PDFInfo
- Publication number
- CN203108276U CN203108276U CN 201220726741 CN201220726741U CN203108276U CN 203108276 U CN203108276 U CN 203108276U CN 201220726741 CN201220726741 CN 201220726741 CN 201220726741 U CN201220726741 U CN 201220726741U CN 203108276 U CN203108276 U CN 203108276U
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- liquid
- gas
- separator body
- separation device
- separating device
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Abstract
The utility model relates to the technical field of chemicals supply, and in particular relates to a liquid-gas separating device for a chemical dispensing system. The liquid-gas separating device comprises a tubular separator body, wherein a gas outlet (1) and a liquid outlet (2) are formed in the top of the separator body, a gas-liquid two-phase inlet (3) is formed in the side surface of the separator body, the gas outlet (1) is connected with a gas guide cavity (4), the liquid outlet (2) is connected with a liquid guide pipe (5) and penetrates through the gas guide cavity (4) to extend to the bottom of the separator body, and the liquid guide pipe (5) is separated from the gas guide cavity (4). Compared with the prior art, the liquid-gas separating device has the advantages of being novel and simple in structure, being capable of well eliminating large bubbles in an initial stage of conveying chemicals and small bubbles due to turbulent flows in a subsequent delivery pump and a pipeline so as to avoid the influence of the bubbles to the normal work of important parts in a pipeline system, and being small in occupation space, good in pollution discharge effect, and good in economy.
Description
[technical field]
The utility model relates to chemicals provisioning technique field, specifically a kind of chemicals supply system liquid-gas separation device.
[background technology]
In the high-purity chemical product supply system of integrated circuit and field of semiconductor manufacture; usually can be because of the former thereby formation bubbles such as reaching the pipeline flow-disturbing of doing of delivery pump; particularly for bucket formula supply system in bulk; the chemicals supply initial stage after changing bucket; have relatively large gas and enter pipeline, these bubbles all can influence the normal use of supply system.As: the accurate measurement to supply system exit position use traffic meter impacts, thereby can't know rate of discharge accurately; Perhaps, reduce the filter efficiency of chemicals filter in the pipe-line system, if the cumulant of bubble acquires a certain degree, even can occur making liquid can't enter filter than big local pressure, and cause the phenomenon of booster.Simultaneously, because part semiconductor factory is not equipped with big capacity dashpot (Buffer Tank), directly be fed to the terminal process apparatus if the chemicals supply system will contain the chemicals of bubble, will greatly influence process apparatus and bring into play due effect.Therefore, for effectively eliminating ducted bubble, need to use liquid-gas separation device to reach the purpose of eliminating harmful bubble in the pipeline.
Yet liquid-gas separation device commonly used at present usually can form the phenomenon of liquid flooding in being applied to high pressure and low surface tension pipe-line system.Because the normal chemicals that uses in the semi-conductor industry, (its surface tension only is 1/7 of water to belong to the lower liquid of more typical surface tension again as hydrofluoric acid, surface tension is 10.1mN/m during the hydrofluoric acid zero degree, the surface tension of contrast water when zero degree is 72.75mN/m), must have under the condition of higher corrosion resistance characteristic in separator material of limited while of separator usage space, the chemicals of big flow makes that the liquid load in the separator is bigger after entering separator, simultaneously because the downspout caliber of separator is less, to make bubble have little time from two phase flow, to separate, cause gas and liquid mixture to enter pipeline through the outlet of downspout below, the downspout resistance will further increase, thus the generation of easier triggering liquid flooding phenomenon.
[utility model content]
The purpose of this utility model is exactly will solve above-mentioned deficiency and a kind of chemicals supply system liquid-gas separation device is provided, can effectively eliminate ducted bubble, the influence of having avoided bubble that the operate as normal of vitals in the pipe-line system is brought, and it is little to take up an area of the space, filth-discharging effect is good, has better economic.
Design a kind of chemicals supply system liquid-gas separation device for achieving the above object, the separator body that comprises tubulose, described separator bodies top is provided with gas vent 1 and liquid outlet 2, described separator body side is provided with gas-liquid two-phase import 3, described gas vent 1 connects air guide die cavity 4, described liquid outlet 2 connects catheter 5, and described catheter 5 passes air guide die cavity 4 and extends to separator body bottom, and described catheter 5 separates with air guide die cavity 4.
Described separator body bottom is provided with sewage draining exit 8, and described sewage draining exit 8 places are provided with blowdown control valve 9, and described sewage draining exit 8 connects blow-off line.
The pressure pipe that described separator body adopts perfluoroalkoxy resin to make is made.
The utility model is compared with prior art, novel structure, simple, by utilizing the different gravity that are subjected to gas density of liquid different, thereby realize that liquid gas separates, the use of this gravity type liquid-gas separation device, the influence of at utmost having avoided bubble that the operate as normal of vitals in the pipe-line system is brought is as filter, flowmeter etc.; And, the utility model adopts special structural design and PLC to connect the interlock effect of liquid level sensor and operated pneumatic valve, make liquid-gas separation device can handle the small-sized bubble that chemicals carries the larger bubbles at initial stage and subsequent delivery pump and the interior flow-disturbing of pipeline to cause well, thereby can effectively eliminate ducted bubble; In addition, it is little that liquid-gas separation device described in the utility model takes up an area of the space, and filth-discharging effect is good, has better economic, is worthy of popularization.
[description of drawings]
Fig. 1 is structural representation of the present utility model;
Fig. 2 is application principle schematic diagram of the present utility model;
Among the figure: 1, gas vent 2, liquid outlet 3, gas-liquid two-phase import 4, air guide die cavity 5, catheter 6, liquid level sensor 7, operated pneumatic valve 8, sewage draining exit 9, blowdown control valve 10, gas phase section 11, hydrops section 12, the section of being separated substantially.
[specific embodiment]
Further specify below below in conjunction with accompanying drawing the utility model being done:
As shown in drawings, the utility model comprises: the separator body of tubulose, the separator bodies top is provided with gas vent 1 and liquid outlet 2, separator body side is provided with gas-liquid two-phase import 3, gas vent 1 connects air guide die cavity 4, liquid outlet 2 connects catheter 5, catheter 5 passes air guide die cavity 4 and extends to separator body bottom, catheter 5 separates with air guide die cavity 4, liquid level sensor 6 is equipped with in gas-liquid two-phase import 3 belows, separator body side, gas vent 1 place is provided with operated pneumatic valve 7, liquid level sensor 6 connects operated pneumatic valve 7 by PLC, separator body bottom is provided with sewage draining exit 8, and sewage draining exit 8 places are provided with blowdown control valve 9, and sewage draining exit 8 connects blow-off line.
The utility model based on principle be: utilize the different of the different gravity that are subjected to gas density of liquid, thereby realize that liquid gas separates, and mainly is arranged to whole liquid-gas separation device the section of being separated, gravity settling section and hydrops section substantially.Wherein, the section of being separated is mainly carried out control and the elimination of two-phase mixed liquor kinetic energy substantially, avoids flow-disturbing to the influence of separating effect; Gravity settling section mainly carries out the sedimentation of two phase flow separation and liquid phase; The hydrops section respectively derived score from after no gas-liquid and draw isolated gas simultaneously, do not allow them that the chance of blending is again arranged each other.
The utility model at first calculates according to the relevant parameter of the sedimentation flow velocity that floats, fluid density, gas density and making material, to obtain minimum diameter, gas phase height, liquid phase height and the biphase gas and liquid flow entry altitude of liquid-gas separation device.The pressure pipe that the separator body of this liquid-gas separation device uses perfluoroalkoxy resin to make is made, the liquid outlet of isolated gas vent and the degassing is separately positioned on the top of separator body, flow to into height according to the gas-liquid mixed that calculates, the gas-liquid two-phase import of separator body is arranged in the side, simultaneously in the bottom blow-off line is set, whole separator will present vertical state, and namely separator body diameter and separator body length ratio are not less than 1:8.
In the utility model, will have the section of being separated substantially 12 that reduces flow velocity and be realized by amplifying caliber by the concentric reducer that is arranged on the gas-liquid two-phase entrance location; Separate the centre position at whole liquid gas and arrange that the catheter connection has the hydrops section 11 of the chemicals derivative ac-tion that will degas, and pass the air guide cavity structure in separator bodies top gas vent position, form the gas-liquid export area of mutually noninterfere; At separator body gas-liquid two-phase entrance location arranged beneath liquid level sensor, make the operated pneumatic valve interaction of itself and gas outlet by PLC, thereby the height of gas phase section 10 in the control liquid-gas separator avoids high the spending of hydrops section lowly can't obtain effective Gravity Separation space; Warning function when in addition, the liquid level sensor also stops with the supply of liquid gas mixed liquor simultaneously.
Claims (4)
1. chemicals supply system liquid-gas separation device, it is characterized in that: the separator body that comprises tubulose, described separator bodies top is provided with gas vent (1) and liquid outlet (2), described separator body side is provided with gas-liquid two-phase import (3), described gas vent (1) connects air guide die cavity (4), described liquid outlet (2) connects catheter (5), described catheter (5) passes air guide die cavity (4) and extends to separator body bottom, and described catheter (5) separates with air guide die cavity (4).
2. liquid-gas separation device as claimed in claim 1, it is characterized in that: liquid level sensor (6) is equipped with in described separator body side gas-liquid two-phase import (3) below, described gas vent (1) locates to be provided with operated pneumatic valve (7), and described liquid level sensor (6) connects operated pneumatic valve (7) by PLC.
3. liquid-gas separation device as claimed in claim 1 or 2 is characterized in that: described separator body bottom is provided with sewage draining exit (8), and described sewage draining exit (8) locates to be provided with blowdown control valve (9), and described sewage draining exit (8) connects blow-off line.
4. liquid-gas separation device as claimed in claim 3 is characterized in that: the pressure pipe that described separator body adopts perfluoroalkoxy resin to make is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220726741 CN203108276U (en) | 2012-12-25 | 2012-12-25 | Liquid-gas separating device for chemical dispensing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220726741 CN203108276U (en) | 2012-12-25 | 2012-12-25 | Liquid-gas separating device for chemical dispensing system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203108276U true CN203108276U (en) | 2013-08-07 |
Family
ID=48888656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220726741 Expired - Fee Related CN203108276U (en) | 2012-12-25 | 2012-12-25 | Liquid-gas separating device for chemical dispensing system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203108276U (en) |
-
2012
- 2012-12-25 CN CN 201220726741 patent/CN203108276U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130807 Termination date: 20191225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |