CN203101108U - Automatic sampling device - Google Patents
Automatic sampling device Download PDFInfo
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- CN203101108U CN203101108U CN 201320062120 CN201320062120U CN203101108U CN 203101108 U CN203101108 U CN 203101108U CN 201320062120 CN201320062120 CN 201320062120 CN 201320062120 U CN201320062120 U CN 201320062120U CN 203101108 U CN203101108 U CN 203101108U
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- closed container
- sampling
- sampling device
- stopple coupon
- controller
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Abstract
The utility model discloses an automatic sampling device which is used for automatically sampling liquid in a liquid storage tank in a platform. The automatic sampling device comprises a sampling pipe, a closed container, a sampling bottle, a control valve, a controller and a liquid level sensor used for detecting whether the liquid level reaches an appointed liquid level of the sampling bottle or not, wherein the upper end of the sampling pipe is tightly connected with a sampling port of the liquid storage tank, the controller is respectively connected with the control valve and the liquid level sensor, the controller is arranged on the sampling pipe, a through hole in which the lower end of the sampling pipe extends is formed in a top cover of the closed container, the top cover of the closed container is tightly and fixedly connected with the sampling pipe, and a door opening used for picking and placing the sampling bottle is formed in the closed container, and a movable door is arranged on the closed container. The automatic sampling device is capable of realizing automatic and accurate sampling, and is effectively increased in liquid sampling efficiency and precision.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of automatic sampling device.
Background technology
In semi-conductive manufacturing process, often need to use liquid and product to react, in the wet etching process as wafer, adopt the reaction of acid solution and wafer, to remove the certain thin films on the wafer.
The back side of existing etching machine is provided with the liquid storage groove, and acid tank for example is equipped with the acid solution of the wet etching that is used for wafer in it.Acid solution in the acid tank is after use a period of time, and the impurity metal ion in it can increase gradually, can adhere to crystal column surface as surpassing certain these impurity metal ions of amount, so that damage and erosion wafer.Therefore, usually every other month, will carry out sample analysis to the acid solution in the acid tank.When needing sampling, open the board back glass baffle plate at the board back side earlier, staff sample bottle of taking promptly exports facing to the lower end of stopple coupon, and another person's operation is installed on the operation valve on the stopple coupon, and two people co-operating together finish sampling work.Thus, not only waste time and energy, and the liquid sampling amount is bigger because of the manually-operated error ratio.
Therefore, how to provide a kind of can be automatically, the automatic sampling device of accurately sampling is the technical matters that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of this utility model is to provide a kind of automatic sampling device, can realize automatically, take a sample accurately, effectively improves liquid sampling efficient and precision.
To achieve the above object, the utility model adopts following technical scheme:
A kind of automatic sampling device, be used for the liquid of the liquid storage groove in the board is taken a sample automatically, comprise stopple coupon, closed container, sampling jar, operation valve, controller and being used to detects liquid level and whether arrives the level sensor that sampling jar is specified liquid level, the upper end of described stopple coupon is connected with the sample tap of liquid storage groove is airtight, described controller is connected with described level sensor with described operation valve respectively, described controller is arranged on the described stopple coupon, the top cover of described closed container is offered the through hole that stretches into for the lower end of described stopple coupon, the top cover of described closed container and described stopple coupon are sealedly and fixedly connected, offer the door opening that is used to pick and place described sampling jar on the described closed container, and on described closed container, be provided for opening or closing the dodge gate of described door opening.
Preferably, in above-mentioned automatic sampling device, also comprise flowmeter, described flowmeter is connected with described controller, and described flowmeter is installed on the described stopple coupon.
Preferably, in above-mentioned automatic sampling device, described dodge gate and described closed container are rotationally connected.
Preferably, in above-mentioned automatic sampling device, described dodge gate and described closed container are slidingly connected.
Preferably, in above-mentioned automatic sampling device, described level sensor is arranged in the described closed container, and described level sensor that the position is set is corresponding with the 3/5-4/5 altitude range of the described sampling jar that is positioned at described closed container.
Preferably, in above-mentioned automatic sampling device, described operation valve is installed on the junction of the top cover of described stopple coupon and described closed container.
Preferably, in above-mentioned automatic sampling device, the top cover of described closed container is a transparent panel.
Preferably, in above-mentioned automatic sampling device, the sidewall of described closed container is a transparent panel.
The automatic sampling device that the utility model provides, be installed on the below of stopple coupon, the upper end of described stopple coupon is connected with the sample tap of liquid storage groove is airtight, comprises closed container, sampling jar, operation valve, controller and be used to detect liquid level whether arrive the level sensor that sampling jar is specified liquid level.When needing sampling, as long as open dodge gate, sampling jar is aimed at the lower end of stopple coupon and put into closed container, shut dodge gate then, open controller, controller can be opened operation valve, make the liquid in the liquid storage groove flow in the sampling jar, when the liquid level in level sensor is sensed sampling jar arrived assigned address, the notice operation valve was closed, thereby realize automatic, accurate sampling, effectively improve liquid sampling efficient and precision.
In addition, the utility model is by setting up flowmeter on described stopple coupon, described flowmeter is connected with described controller, can know the flow of sampling liquid in pipe by flowmeter, when the flow of sampling liquid in pipe surpassed the higher limit of the setting in the controller, controller can notify operation valve to reduce flow, thereby can prevent that the excessive so that level sensor of flow from having little time reaction, sampling jar is just full of the problem of overflowing, and then pollution and the cleaning of avoiding the liquid outflow to cause.
Description of drawings
Automatic sampling device of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the automatic sampling device of the utility model one embodiment;
Fig. 2 is the control principle figure of the automatic sampling device of the utility model one embodiment.
Among the figure, 1-stopple coupon, 2-closed container, 21-door opening, 22-dodge gate, 3-sampling jar, 4-operation valve, 5-controller, 6-level sensor, 7-flowmeter, 8-interface unit, 9-board back glass baffle plate.
Embodiment
Below will be described in further detail automatic sampling device of the present utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the beneficial effects of the utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose of this utility model, feature are become apparent, embodiment of the present utility model is further described below in conjunction with accompanying drawing.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 1 and Fig. 2, wherein, shown in Figure 1 is the structural representation of the automatic sampling device of the utility model one embodiment, and shown in Figure 2 is the control principle figure of the automatic sampling device of the utility model one embodiment.
Present embodiment provides automatic sampling device, the liquid (for example acid solution in the acid tank in the wet etching board) that is used for the liquid storage groove in the board is taken a sample automatically, described automatic sampling device comprises stopple coupon 1, closed container 2, sampling jar 3, operation valve 4, controller 5 and being used to detects liquid level and whether arrives the level sensor 6 that sampling jar 3 is specified liquid levels, the upper end of described stopple coupon 1 is connected with the sample tap of liquid storage groove is airtight by interface unit 8, described controller 5 is connected with described level sensor 6 with described operation valve 4 respectively, described controller 5 is arranged on the described stopple coupon 1, the top cover of described closed container 2 is offered the through hole that stretches into for the lower end of described stopple coupon 1, the top cover of described closed container 2 and described stopple coupon 1 are sealedly and fixedly connected, offer the door opening 21 that is used to pick and place described sampling jar 3 on the described closed container 2, and on described closed container 2, be provided for opening or closing the dodge gate 22 of described door opening 21.
When needing sampling, open board back glass baffle plate 9 earlier, open dodge gate 22 again, closed container 2 is put in the lower end that sampling jar 3 is aimed at stopple coupon 1, shut dodge gate 22 then, open controller 5, controller 5 can be opened operation valve 4, makes that the liquid in the liquid storage groove flows in the sampling jar 3, when the liquid level in level sensor 6 is sensed sampling jar 3 arrives assigned address, notice operation valve 4 is closed, thereby realizes automatic, accurate sampling, effectively improves liquid sampling efficient and precision.
Preferable, in the present embodiment, the top cover of described closed container 2 is transparent panels, because the top cover of airtight container 2 is transparent materials, therefore, the internal part of airtight container 2 and structure are as seen.By top cover and the sidewall that adopts transparent panel to make, operating personnel can observe the ruuning situation in the closed container 2, so that operating personnel in time grasp the situation of this automatic sampling device.Equally, the sidewall of described closed container 2 is transparent panel preferably, so that operating personnel in time grasp the situation of this automatic sampling device.
Preferable, in the present embodiment, also comprising flowmeter 7, described flowmeter 7 is connected with described controller 5, and described flowmeter 7 is installed on the described stopple coupon 1.By on described stopple coupon 1, setting up flowmeter 7, described flowmeter 7 is connected with described controller 5, can know the flow of liquid in the stopple coupon 1 by flowmeter 7, during the higher limit of the setting in flow surpasses controller 5, controller 5 can reduce flow by notice operation valve 4, thereby can prevent that the excessive so that level sensor 6 of flow from having little time reaction, sampling jar 3 is just full of the problem of overflowing, thereby pollution and the cleaning of avoiding the liquid outflow to cause.
Preferable, in the present embodiment, described dodge gate 22 and described closed container 2 are rotationally connected.Certainly, described dodge gate 22 also can be slidingly connected with described closed container 2.Two kinds of structures are all fairly simple, use also more convenient.
Preferable, in the present embodiment, described level sensor 6 is arranged in the described closed container 2, and described level sensor 6 that the position is set is corresponding with the 3/5-4/5 altitude range of the described sampling jar 3 that is positioned at described closed container 2.That is to say that the horizontal level of described level sensor 6 is in the 3/5-4/5 altitude range of the described sampling jar 3 that is positioned at described closed container 2.In case level sensor 6 is sensed liquid, will send the signal that sampling finishes to controller 5, thereby finish automatic sampling.
Preferable, in the present embodiment, described operation valve 4 is installed on the junction of the top cover of described stopple coupon 1 and described closed container 2, thereby makes structure compact more.
In sum, the automatic sampling device that the utility model provides, be installed on the below of stopple coupon, the upper end of described stopple coupon is connected with the sample tap of liquid storage groove is airtight, comprise closed container, sampling jar, operation valve, controller and being used to detects liquid level and whether arrives the level sensor that sampling jar is specified liquid level, need sampling, as long as open dodge gate, sampling jar is aimed at the lower end of stopple coupon and put into closed container, shut dodge gate then, open controller, controller can be opened operation valve, makes that the liquid in the liquid storage groove flows in the sampling jar, when the liquid level in level sensor is sensed sampling jar arrives assigned address, the notice operation valve is closed, thereby realizes automatically, accurate sampling effectively improves liquid sampling efficient and precision.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (8)
1. automatic sampling device, be used for the liquid of the liquid storage groove in the board is taken a sample automatically, it is characterized in that: comprise stopple coupon, closed container, sampling jar, operation valve, controller and being used to detects liquid level and whether arrives the level sensor that sampling jar is specified liquid level, the upper end of described stopple coupon is connected with the sample tap of liquid storage groove is airtight, described controller is connected with described level sensor with described operation valve respectively, described controller is arranged on the described stopple coupon, the top cover of described closed container is offered the through hole that stretches into for the lower end of described stopple coupon, the top cover of described closed container and described stopple coupon are sealedly and fixedly connected, offer the door opening that is used to pick and place described sampling jar on the described closed container, and on described closed container, be provided for opening or closing the dodge gate of described door opening.
2. automatic sampling device according to claim 1 is characterized in that, also comprises flowmeter, and described flowmeter is connected with described controller, and described flowmeter is installed on the described stopple coupon.
3. automatic sampling device according to claim 1 is characterized in that, described dodge gate and described closed container are rotationally connected.
4. automatic sampling device according to claim 1 is characterized in that, described dodge gate and described closed container are slidingly connected.
5. automatic sampling device according to claim 1, it is characterized in that, described level sensor is arranged in the described closed container, and described level sensor that the position is set is corresponding with the 3/5-4/5 altitude range of the described sampling jar that is positioned at described closed container.
6. automatic sampling device according to claim 1 is characterized in that described operation valve is installed on the junction of the top cover of described stopple coupon and described closed container.
7. automatic sampling device according to claim 1 is characterized in that the top cover of described closed container is a transparent panel.
8. automatic sampling device according to claim 1 is characterized in that the sidewall of described closed container is a transparent panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320062120 CN203101108U (en) | 2013-02-01 | 2013-02-01 | Automatic sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320062120 CN203101108U (en) | 2013-02-01 | 2013-02-01 | Automatic sampling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203101108U true CN203101108U (en) | 2013-07-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320062120 Expired - Fee Related CN203101108U (en) | 2013-02-01 | 2013-02-01 | Automatic sampling device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910849A (en) * | 2016-06-30 | 2016-08-31 | 四川行之知识产权运营服务有限公司 | Sampling method for nuclear industry |
| CN106950085A (en) * | 2017-05-31 | 2017-07-14 | 俊杰机械(深圳)有限公司 | A kind of electroplate liquid sampler and its sampling method |
| CN110068482A (en) * | 2019-04-23 | 2019-07-30 | 中国海洋大学 | A kind of automatic water sampling device of laboratory timing |
-
2013
- 2013-02-01 CN CN 201320062120 patent/CN203101108U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910849A (en) * | 2016-06-30 | 2016-08-31 | 四川行之知识产权运营服务有限公司 | Sampling method for nuclear industry |
| CN105910849B (en) * | 2016-06-30 | 2019-06-18 | 四川行之知识产权运营服务有限公司 | A kind of sampling method for nuclear industry |
| CN106950085A (en) * | 2017-05-31 | 2017-07-14 | 俊杰机械(深圳)有限公司 | A kind of electroplate liquid sampler and its sampling method |
| CN110068482A (en) * | 2019-04-23 | 2019-07-30 | 中国海洋大学 | A kind of automatic water sampling device of laboratory timing |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130731 Termination date: 20190201 |
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| CF01 | Termination of patent right due to non-payment of annual fee |