CN203099331U

CN203099331U - Ultra-pure gas recycling system

Info

Publication number: CN203099331U
Application number: CN 201220726171
Authority: CN
Inventors: 沈文
Original assignee: CHENGDU CHENGGANG MEISAIER GAS PRODUCTS Co Ltd
Current assignee: CHENGDU CHENGGANG MEISAIER GAS PRODUCTS Co Ltd
Priority date: 2012-12-26
Filing date: 2012-12-26
Publication date: 2013-07-31
Anticipated expiration: 2022-12-26

Abstract

The utility model discloses an ultra-pure gas recycling system. Membrane valves are arranged on a first busbar set, a third busbar set and a second busbar set, the membrane valves are connected with a filling bottle through pipelines, a vacuum pump is connected with the first busbar set, the third busbar set and the second busbar set through pipelines, the third busbar set is connected with the second busbar set through a booster pump, a filter is arranged in the booster pump, and the first busbar set is connected with the second busbar set through a purifier. Particles mixed in gas entering the booster pump can be filtered through the filter arranged in the booster pump, the granularity of filtered gas is smaller than 1mu, and the purity of boosted ultra-pure gas can reach to 99.9999%. The booster pump is used as a booster device so as to be small in occupied dead area and reduce ultra-pure gas loss in replacement.

Description

The hyperpure gas reclaiming system

Technical field

The utility model relates to a kind of superpurity gas recovery system.

Background technique

At present, can use supercharging device such as diaphragm type compressor to carry out the recovery of spirit for high-purity gas, but there is following problem in these supercharging devices: that 1, reclaims best in qualityly can only reach about 99.999%; 2, the dead volume of machine is big, and the air-loss amount that makes the displacement machine produce is very big; 3, granularity is not controlled in this class machinery processing procedure, easily sneaked into machinery oil particulate and a large amount of mechanical particle, so the gas that is pressurized can not satisfy some have requirement to particle application.

The model utility content

At deficiency of the prior art, the superpurity gas recovery system that the utility model provides has solved problems such as supercharging device dead volume gas purity big, that produce is low.

In order to reach the foregoing invention purpose, the technical solution adopted in the utility model is: a kind of hyperpure gas reclaiming system is provided, and it comprises the first cylinder manifold group, vacuum pump, the 3rd cylinder manifold group, membrane valve, suction booster and the second cylinder manifold group; The described first cylinder manifold group, the 3rd cylinder manifold group and the second cylinder manifold group are provided with membrane valve, and membrane valve is connected with filling bottle by pipeline; Described vacuum pump is connected with the first cylinder manifold group, the 3rd cylinder manifold group and the second cylinder manifold group by pipeline; Described the 3rd cylinder manifold group is connected with the second cylinder manifold group by suction booster, and described suction booster inside is provided with filter; The described first cylinder manifold group is connected with the second cylinder manifold group by purifying machine.

Preferably, the described first cylinder manifold group, the 3rd cylinder manifold group and the second cylinder manifold group are made up of several cylinder manifolds, connect by the VCR joint between the described cylinder manifold.

Preferably, the described first cylinder manifold group, the second cylinder manifold group, the 3rd cylinder manifold group are provided with pressure gauge.

Preferably, the described first cylinder manifold group, the 3rd cylinder manifold group and the second cylinder manifold group are electropolishing level gapless stainless steel tube.

The beneficial effects of the utility model are: the inner filter that is provided with of this hyperpure gas reclaiming system suction booster, can filter entering the particle that is mingled with in the gas in the suction booster, gas particles degree after the filtration＜1 μ, the purity of the hyperpure gas that reclaims after the supercharging can reach 99.9999%; Adopt suction booster as supercharging device, its dead volume that takies is little, makes the hyperpure gas amount of displacement loss few.

Description of drawings

Fig. 1 is the schematic representation of hyperpure gas reclaiming system.

Wherein, 1, the first cylinder manifold group; 2, pressure gauge; 3, vacuum pump; 4, the 3rd cylinder manifold group; 5, membrane valve; 6, filling bottle; 7, suction booster; 8, the second cylinder manifold group; 9, purifying machine.

Embodiment

As shown in Figure 1, this hyperpure gas reclaiming system comprises vacuum pump 3, membrane valve 5, suction booster 7 and the first cylinder manifold group 1, the 3rd cylinder manifold group 4 and the second cylinder manifold group 8 be made up of some cylinder manifolds that link together by the VCR joint; The described first cylinder manifold group 1, the 3rd cylinder manifold group 4 and the second cylinder manifold group 8 are provided with membrane valve 5, and membrane valve 5 is connected with filling bottle 6 by pipeline; Described vacuum pump 3 is connected with the second cylinder manifold group 8 with the first cylinder manifold group 1, the 3rd cylinder manifold group 4 by pipeline, and the pipeline of connection is provided with pressure gauge 2; Described the 3rd cylinder manifold group 4 is connected with the second cylinder manifold group 8 by suction booster 7, and described suction booster 7 inside are provided with filter; The described first cylinder manifold group 1 is connected with the second cylinder manifold group 8 by purifying machine 9.

Wherein, the described first cylinder manifold group 1, the 3rd cylinder manifold group 4 and the second cylinder manifold group 8 are electropolishing level gapless stainless steel tube.

The above only is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model principle; can also carry out some improvement to the utility model, these improvement also fall in the protection domain of the utility model claim.

Claims

1. a hyperpure gas reclaiming system is characterized in that: comprise the first cylinder manifold group (1), vacuum pump (3), the 3rd cylinder manifold group (4), membrane valve (5), suction booster (7) and the second cylinder manifold group (8); The described first cylinder manifold group (1), the 3rd cylinder manifold group (4) and the second cylinder manifold group (8) are provided with membrane valve (5), and membrane valve (5) is connected with filling bottle (6) by pipeline; Described vacuum pump (3) is connected with the first cylinder manifold group (1), the 3rd cylinder manifold group (4) and the second cylinder manifold group (8) by pipeline; Described the 3rd cylinder manifold group (4) is connected with the second cylinder manifold group (8) by suction booster (7), and described suction booster (7) inside is provided with filter; The described first cylinder manifold group (1) is connected with the second cylinder manifold group (8) by purifying machine (9).

2. hyperpure gas reclaiming system according to claim 1 is characterized in that: the described first cylinder manifold group (1), the 3rd cylinder manifold group (4) and the second cylinder manifold group (8) are made up of several cylinder manifolds, connect by the VCR joint between the described cylinder manifold.

3. hyperpure gas reclaiming system according to claim 1 and 2 is characterized in that: the described first cylinder manifold group (1), the second cylinder manifold group (8), the 3rd cylinder manifold group (4) are provided with pressure gauge (2).

4. hyperpure gas reclaiming system according to claim 3 is characterized in that: the described first cylinder manifold group (1), the 3rd cylinder manifold group (4) and the second cylinder manifold group (8) are electropolishing level gapless stainless steel tube.