CN203089081U - Handheld micro-electro-mechanical-system (MEMS) optical scanning device - Google Patents
Handheld micro-electro-mechanical-system (MEMS) optical scanning device Download PDFInfo
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- CN203089081U CN203089081U CN 201320051252 CN201320051252U CN203089081U CN 203089081 U CN203089081 U CN 203089081U CN 201320051252 CN201320051252 CN 201320051252 CN 201320051252 U CN201320051252 U CN 201320051252U CN 203089081 U CN203089081 U CN 203089081U
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Abstract
The utility model discloses a handheld micro-electro-mechanical-system (MEMS) optical scanning device which comprises a handle, a probe, a connection pipe and a photoelectrical connection wire of the connection pipe. The photoelectrical connection wire is used for being connected with an optical coherence tomography (OCT) system, a channel penetrates through the inside of the handle, a concave cavity is formed at the tail end of the handle, a socket is arranged in the concave cavity, and the photoelectrical connection wire is in breakover connection with the socket. The tail end of the probe is connected with a plug capable of being connected with the socket, an optical fiber cable and an electric connection wire are respectively arranged in the probe and the connection pipe, the optical fiber cable and the electric connection wire are connected with the plug, the probe is connected with the connection pipe and then is embedded in the handle, and the plug is connected with the socket to achieve breakover of photoelectricity. According to the handheld MEMS optical scanning device, the scanning probe is replaceable, requirements for scanning imaging in different angles can be met through a mode of one handle with multiple probes, real-time imaging scanning of tissue of various areas like the oral cavity, skin, and surgery is realized, operation difficulty of doctors is reduced, and diagnosis imaging scanning time is greatly reduced.
Description
Technical field
This utility model belongs to the armarium technical field, relates to a kind of sample arm of OCT imaging system, more specifically, relates to a kind of hand-held MEMS optical scanner.
Background technology
With micro electro mechanical system (MEMS) technology (microelectromechanical systems, abbreviation MEMS) scanning micro-mirror and optical coherent chromatographic imaging (Optical Coherence Tomography, OCT) technology combines and carries out the exploitation of OCT imaging system, has become a kind of method that the armarium technical field generally adopts in carrying out the endoscopic imaging system development process.
Patent documentation US7, a kind of MEMS-OCT endoscope probe is disclosed in 450244, this probe is first MEMS-OCT endoscope probe in the world, research and develop in calendar year 2001, this endoscope adopts the one dimension MEMS scanning micro-mirror of electrothermal drive, has successfully showed the two-dimensional section OCT image of live body Vesica sus domestica.A kind of endoscope micro-optical probe is also disclosed in patent documentation CN201110367454.9, this optic probe also is to adopt the MEMS micro mirror, changed the internal structure of probe base and the assembling mode of parts, processing is simple, helps mass and realizes disposable probe.
But above-mentioned two endoscope probes and handle are all non-dismountable, a handle can only fix with a probe, and cannot change scanheads, use inconvenience, improved cost, and can not satisfy the scanning imagery of different angles, can not realize the oral cavity, the scanning of the realtime imaging of each regional organization such as skin, surgery has increased doctor's operation easier, has prolonged diagnosing image sweep time.
In addition, above-mentioned two probes all are that it is bigger to take up room with fixing being connected of MEMS micro mirror and circuit board of the gluing mode of upside-down mounting, and the gluing mode of upside-down mounting is poor slightly with respect to fixedly connected stability.Described probe is used for based endoscopic imaging scanning, is subjected to the restriction in working environment endoscope duct, and integral body must be soft and less than the diameter in endoscope duct; The image scanning inconvenience that is used for outside oral cavity, skin histology.
Based on foregoing description, need badly and want a kind of MEMS optical scanner of realizing changing scanheads, satisfy the scanning imagery of different angles with the multi-probe occupation mode of a handle, realize the oral cavity, the realtime imaging scanning of each regional organization such as skin, surgery, reduce doctor's operation easier, reduce diagnosing image sweep time.
Summary of the invention
Based on the problems referred to above, the purpose of this utility model is to provide a kind of hand-held MEMS optical scanner, can only fix with a probe to solve a handle, and cannot change scanheads, uses inconvenient problem.This scanning means satisfies the scanning imagery of different angles with the multi-probe occupation mode of a handle, realizes the oral cavity, and the realtime imaging scanning of each regional organizations such as skin, surgery has reduced doctor's operation easier, significantly reduces diagnosing image sweep time.
For solving the problems of the technologies described above, this utility model by the following technical solutions:
A kind of hand-held MEMS optical scanner, the photoelectricity connecting line that comprises handle, probe, connection tube and be used for being connected with the OCT system, shown in handle inside one passage that runs through is arranged, end has a cavity, and socket is installed in the cavity; Described photoelectricity connecting line is connected with the socket conducting; Be provided with optical fiber cable and the electric connection line that is connected with plug in the terminal plug that can be connected that is connected with of described probe, probe and connection tube with socket, probe be embedded in after connection tube is connected handle interior after, plug is connected with socket, realizes photoelectric conducting.
As preferably, be provided with pedestal, circuit board and optical module in the described probe, to put on the pedestal and be provided with cavity, the below is provided with down cavity, and following cavity front end has a groove, and a skewed slot that becomes special angle with the pedestal end face is arranged on the groove baseplane; Described circuit board is installed in the recessed intracavity of pedestal, and the one end is consistent with angle of bevel, and described MEMS micro mirror is fixedly mounted in the skewed slot, and the pad conduction of the other end of described electric connection line and circuit board end is connected; Described optical module is installed in the fovea superior intracavity of pedestal, and the other end of described optical fiber cable is connected with optical module; The outer surface of probing shell has a window, and window is installed on the window.
As preferably, described probe adopts side direction scanning work mode, scan forward working method, side scan forward working method or ring circumferential scanning working method.
As preferably, described skewed slot and pedestal end face angulation are 15 to spend to 75 degree.
As preferably, described circuit board directly forms on the following cavity baseplane of pedestal, draws pad and then is positioned on the skewed slot sidewall.
As preferably, the pad of described MEMS micro mirror is inserted in the skewed slot, and MEMS micro mirror pad and the electric connection mode of circuit board adopt that routing is connected, welding or conductive adhesive.
As preferably, also comprise a probe over cap that is used to protect probe.
As preferably, described connection tube front end is one warp architecture or multiple tracks warp architecture, and probe window and bending direction homonymy or heteropleural adapt to different occasion needs.
As preferably, shown in the front end of handle passage one cavity is arranged, a cavity and a plastic sheath form interference fit closely, the plastic sheath center have one run through and and the endoporus that matches of probe external surface shape, described probe passes the plastic sheath endoporus and is connected with socket with handle passage, realizes photoelectric conducting.
As preferably, shown in the right-hand member of photoelectricity connecting line one plug is arranged, plug is connected with socket is detachable, and optical fiber cable and electric connection line in the probe are connected in the OCT system by socket.
The beneficial effects of the utility model are; because this utility model adopts handle; plastic sheath; probe; the probe over cap; socket; over cap; photoelectricity connecting line etc. fits together; scanheads is by the socket in the handle; being transferred in the OCT system of the photoelectric effective that probe is inner; finish reliable photoelectricity and derive connection; and the plug and socket in the probe is detachable connection; so can realize changing scanheads; satisfy the scanning imagery of different angles with the multi-probe occupation mode of a handle; realize the oral cavity; skin; the scanning of the realtime imaging of each regional organization such as surgery has reduced doctor's operation easier, significantly reduces diagnosing image sweep time.Because the handle tail end has an over cap, thus the cleaning of optic electric interface can be guaranteed under the state that does not have to connect at probe, in order to avoid produce noise.Because the MEMS optical scanner has a probe over cap, so can protect probe safety non-pollution under off working state.Because the connection tube of scanheads can be a bending, so can realize the imaging of tissue scanning of complex region.Owing to can the MEMS micro mirror be installed by the mode of straight cutting or routing, reduced the MEMS micro mirror needed space has been installed, improved the power that is mounted to of MEMS micro mirror, shortened installation period, rejected the gluing micro mirror connected mode of upside-down mounting, improve the success rate of MEMS micro mirror installation and the stability of work relatively, carried out the external structure design in conjunction with oral cavity and outside organization's environment again, can being applied in oral cavity and the scanning of external skin imaging of tissue with MEMS optical scanning probe specialty.Because the mode that the MEMS micro mirror also can adopt spun gold to weld straight cutting is again assembled, and under the prerequisite that has above mounting means advantage, can realize the installation of multiple contour structures MEMS micro mirror, realizes different sweep limitss.Owing to can change the established angle of MEMS micro mirror, so can change the scanning direction by changing the angle of bevel that the MEMS micro mirror is installed in the probe base groove.
Description of drawings
The hand-held MEMS optical scanner sketch map that Fig. 1 provides for this utility model;
The profile that Fig. 2 provides for this utility model is columned hand-held MEMS optical scanner sketch map;
The explosive view of the hand-held MEMS optical scanner that Fig. 3 provides for this utility model;
The hand-held MEMS optical scanner photoelectricity connection layout that Fig. 4 provides for this utility model;
The hand hold transducer appearance integral structure that Fig. 5 provides for this utility model;
The probe cutaway view that Fig. 6 provides for this utility model;
The probe body figure that Fig. 7 provides for this utility model;
The probe body explosive view that Fig. 8 provides for this utility model;
The MEMS micro mirror routing mounting means sketch map that Fig. 9 provides for this utility model;
The structural representation of the MEMS micro mirror that Figure 10 provides for this utility model.
Among the figure:
1, probe; 101, probing shell; 102, window; 103, window; 11, plug; 12, light pricker line; 13, electric connection line; 131, scolding tin link; 14, optical module; 141, end face; 15, circuit board; 16, pedestal; 161, following cavity; 162, go up cavity; 163, skewed slot; 17, MEMS micro mirror; 171, silicon frame; 172, minute surface; 173, two thin film connectors; 174, pad; 18, connection tube; 2, hands handle; 21, over cap; 22, socket; 3, photoelectricity connecting line; 31, plug; 4, probe over cap; 5, plastic sheath; 6, connection tube.
The specific embodiment
Further specify the technical solution of the utility model below by the specific embodiment.
The hand-held MEMS optical scanner sketch map that Fig. 1 provides for this utility model; The explosive view of the hand-held MEMS optical scanner that Fig. 3 provides for this utility model; The hand-held MEMS optical scanner photoelectricity connection layout that Fig. 4 provides for this utility model; The hand hold transducer appearance integral structure that Fig. 5 provides for this utility model.Fig. 1 to Fig. 5 has provided a kind of embodiment of the present utility model, and as shown in the figure, the hand-held MEMS optical scanner of this kind adopts modular structural design that it is divided into the two large divisions, and effectively combines.MEMS optical scanner primary structure is by the handle 2 that is used for the gripping effect; the plastic sheath 5 that is used for interconnect function; can form the probe 1 of face scan action; be used for being embedded in the interior connection tube 6 of handle 2 after being connected with probe 1; be used to protect the probe over cap 4 of probe; can form the socket 22 of photoelectricity interconnect function, have the over cap 21 that seals cleaning action, and can realize being connected the photoelectricity connecting line 3 of realizing scan action and form with the OCT system.
Concrete, shown in handle 2 its inside one passage that runs through is arranged, handle 2 ends have a cavity, install in it to be used to derive photoelectric socket 22.Described handle 2 front ends have a cavity, and cavity and plastic sheath 5 left ends form interference fit closely, and plastic sheath 5 centers have one to run through and and the probe 1 external surface shape duct of matching.
A probe end of 1 be embedded in the handle 2 after connection tube 6 is connected, the end of connection tube 6 is provided with plug 11, probe 1 is provided with optical fiber cable 12 and the electric connection line 13 that is connected with plug 11 with the inside of connection tube 6, and optical fiber cable 12 and electric connection line 13 are respectively applied for photoelectricity transmission.
In present embodiment, as preferably, described connection tube 6 front ends are one warp architecture or multiple tracks warp architecture, and probe window and bending direction homonymy or heteropleural adapt to different occasion needs.
Described photoelectricity connecting line 3 is that light pricker and electric wire are in the same place by the insulant wrapping, its right-hand member has a plug 31, plug 31 is that detachable conducting is connected with socket 22 left ends, optical fiber cable 12 and electric connection line 13 in the probe 2 are connected in the OCT system by socket 22, but the imaging system of realization early diagnosis.
In present embodiment, as a kind of preferred, the MEMS optical scanner also comprises a probe over cap 4 that is used to protect probe 1.
In present embodiment, as a kind of preferred, be provided with an over cap 21 that plays the sealing cleaning action at the afterbody of handle 2, a hole of passing for photoelectricity connecting line 3 is arranged on the described over cap 21, photoelectricity connecting line 3 passes this hole and enters handle 2 and be inserted on the socket 22.
The above pops one's head in 1 replaceable, and the plug 11 of connection tube 6 tail ends is separated with socket 22, extracts promptly replaceable required probe from handle 2.Satisfy the scanning imagery of different angles with the multi-probe occupation mode of a handle, realize the oral cavity, the realtime imaging scanning of each regional organizations such as skin, surgery has reduced doctor's operation easier, significantly reduces diagnosing image sweep time.
In present embodiment, shown in the shape of handle 2 can be circular or oval, also can be for having the rectangle of fillet.Grip and use with convenient.Shown in being shaped as circle, ellipse or having the rectangle of fillet of probe 1, also can be bending, with the image scanning at assurance oral cavity, each position of skin histology.As shown in Figure 2, promptly profile is columned hand-held MEMS optical scanner.
The probe cutaway view that Fig. 5 provides for this utility model; The probe body figure that Fig. 6 provides for this utility model; The probe body explosive view that Fig. 7 provides for this utility model.Fig. 5 to Fig. 7 has constituted a kind of embodiment of this utility model probe.
To shown in Figure 7, probe is made of MEMS micro mirror 17, optical module 14, circuit board 15, pedestal 16, light pricker line 12, electric connection line 13, plug 31, connection tube 18, probing shell 101, window 102, window 103 etc. as Fig. 5.
Concrete, be provided with pedestal 16 in the described probing shell 101, put on the pedestal 16 and be provided with cavity 162, the below is provided with down cavity 161, following cavity 161 front ends have a groove, and a skewed slot 163 that becomes special angle with the pedestal end face is arranged on the groove baseplane, and its angular range is spent between 75 degree 15.
The pad step of 17 one-tenth certain depth of described MEMS micro mirror inserts in the skewed slot 163 of probe base 16, blended rubber water is fixed, be connected with electric connection line 13 conductions, outside electric current can effectively be transferred on the MEMS micro mirror by the pad on electric connection line 13 and the circuit board 15, but forms the micro mirror of face scanning.MEMS micro mirror 17 pads and the electric connection mode of circuit board can adopt also that routing is connected, welding or conductive adhesive.Described probe 1 can change the scanning direction by changing the angle of the skewed slot 163 of special angle on the pedestal 16, realizes that side direction scanning and side the place ahead are to scanning.
Described optical module 14 is installed in the last cavity 162 of pedestal 16, and its end face 141 is concordant with the end face of the last cavity 162 of pedestal 16, and adds glue fix in last cavity 162, guarantees that light beam can beat accurately on the MEMS micro mirror 17 of doing face scanning.
The optical fiber cable 12 that optical module 14 rear ends connect, and the electric connection line 13 that is connected with circuit board 15 all is connected with socket 22, with 1 required photoelectricity and the outside conducting of popping one's head in.
Each part is fixed on the pedestal 16 in the described probe 1, and airtight being fixed in probing shell 101 and the connection tube 18.One step is arranged on the window 102, and the fluid sealant hydropexis of window 103 usefulness bio-compatibles forms whole airtight image scanning probe in window 102 steps.This device can form the condenser lens of focused beam, and focused beam is beaten on the MEMS micro mirror 17 of doing face scanning, realizes realtime imaging scanning by scanning window 103 in conjunction with the OCT system.
In present embodiment, MEMS micro mirror 17 also can with the routing mounting means be fixed in the skewed slot 163 with circuit board 15 on.The MEMS micro mirror routing mounting means sketch map that Fig. 8 provides for this utility model.As shown in Figure 8, the mode that MEMS micro mirror 17 is sticked with glue is fixed on the table plane of circuit board 15, and this circuit board 15 is the routing circuit board.Then the method by the spun gold welding is connected the pad of MEMS micro mirror 17 with the pad conducting of routing circuit board 15, is transported on the pad of its lower end; The routing circuit board 15 that the mode of reuse straight cutting will be worked in coordination with MEMS micro mirror 17 inserts in the skewed slot 163 of pedestals 16 and is connected with circuit board 15, realizes conducting function, but the MEMS micro mirror that the formation face scans.
The structural representation of the MEMS micro mirror that Fig. 9 provides for this utility model.As shown in Figure 9, the MEMS micro mirror adopts that pad is monolateral arranges, the changeable frame mode of global shape, and its profile can be circular, square or other forms.Its basic structure is by being positioned at MEMS micro mirror 17 silicon frame 171 all around, can in the silicon frame 171 around the MEMS micro mirror 17, do various rule swing minute surfaces 172 by driving control, be used for fixedly two thin film connectors 173 of silicon substrates in minute surface 172 and the silicon frame 171 of bridge joint, MEMS micro mirror 17 is encapsulated, and the pad 174 that is used for MEMS micro mirror 17 is electrically connected is formed.Under the support of silicon frame 171, electricity is transported to two thin film connectors 173, realizes the motion of electrothermal drive MEMS micro mirror 17 minute surfaces 172 by pad 174.
In present embodiment, probe 1 is replaceable in the described MEMS optical scanner, also can adopt side direction scanning work mode, scan forward working method, side scan forward working method or ring circumferential scanning working method.
Know-why of the present utility model has below been described in conjunction with specific embodiments.These are described just in order to explain principle of the present utility model, and can not be interpreted as the restriction to this utility model protection domain by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other specific embodiment of the present utility model, and these modes all will fall within the protection domain of the present utility model.
Claims (10)
1. hand-held MEMS optical scanner, it is characterized in that: the photoelectricity connecting line (3) that comprises handle (2), probe (1), connection tube (6) and be used for being connected with the OCT system, shown in handle (2) inside one passage that runs through is arranged, end has a cavity, and socket (22) is installed in the cavity; Described photoelectricity connecting line (3) is connected with socket (22) conducting; Described probe (1) end is connected with the plug (31) that can be connected with socket (22), be provided with optical fiber cable (12) and the electric connection line (13) that is connected with plug (31) in probe (1) and the connection tube (6), probe (1) be embedded in after connection tube (6) is connected handle (2) interior after, plug (11) is connected with socket (22), realizes photoelectric conducting.
2. hand-held MEMS optical scanner according to claim 1, it is characterized in that: be provided with pedestal (16), circuit board (15) and optical module (14) in the described probe (1), pedestal (16) top is provided with cavity (162), the below is provided with down cavity (161), following cavity (161) front end has a groove, and a skewed slot (163) that becomes special angle with the pedestal end face is arranged on the groove baseplane; Described circuit board (15) is installed in the following cavity (161) of pedestal (16), the one end is consistent with skewed slot (163) angle, described MEMS micro mirror (17) is fixedly mounted in the skewed slot (163), and the other end of described electric connection line (13) is connected with the terminal pad conduction of circuit board (15); Described optical module (14) is installed in the last cavity (162) of pedestal (16), and the other end of described optical fiber cable (12) is connected with optical module (14); The outer surface of probing shell (101) has a window (102), and window (103) is installed on the window.
3. hand-held MEMS optical scanner according to claim 1 is characterized in that: described probe adopts side direction scanning work mode, scan forward working method, side scan forward working method or ring circumferential scanning working method.
4. hand-held MEMS optical scanner according to claim 2 is characterized in that: described skewed slot (163) and pedestal end face angulation be 15 spend to 75 the degree.
5. hand-held MEMS optical scanner according to claim 2 is characterized in that: described circuit board (15) directly forms on the following cavity baseplane of pedestal (16), draws pad and then is positioned on skewed slot (163) sidewall.
6. hand-held MEMS optical scanner according to claim 2, it is characterized in that: the pad of described MEMS micro mirror (17) is inserted in the skewed slot (163), and the electric connection mode of MEMS micro mirror (17) pad and circuit board adopts that routing is connected, welding or conductive adhesive.
7. hand-held MEMS optical scanner according to claim 1 is characterized in that: also comprise a probe over cap (4) that is used for protection probe (1).
8. hand-held MEMS optical scanner according to claim 1 is characterized in that: described connection tube (6) front end is one warp architecture or multiple tracks warp architecture, and probe window (102) and bending direction homonymy or heteropleural adapt to different occasion needs.
9. hand-held MEMS optical scanner according to claim 1, it is characterized in that: shown in the front end of handle (2) passage one cavity is arranged, a cavity and a plastic sheath (5) form interference fit closely, plastic sheath (5) center have one run through and and the endoporus that matches of (1) external surface shape of popping one's head in, described probe (1) passes plastic sheath (5) endoporus and is connected with socket (22) with handle (2) passage, realizes photoelectric conducting.
10. hand-held MEMS optical scanner according to claim 1, it is characterized in that: shown in the right-hand member of photoelectricity connecting line (3) plug (31) is arranged, plug (31) and detachable connection of socket (22), optical fiber cable (12) and electric connection line (13) in will pop one's head in (1) are connected in the OCT system by socket (22).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320051252 CN203089081U (en) | 2013-01-29 | 2013-01-29 | Handheld micro-electro-mechanical-system (MEMS) optical scanning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320051252 CN203089081U (en) | 2013-01-29 | 2013-01-29 | Handheld micro-electro-mechanical-system (MEMS) optical scanning device |
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| CN203089081U true CN203089081U (en) | 2013-07-31 |
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| CN 201320051252 Withdrawn - After Issue CN203089081U (en) | 2013-01-29 | 2013-01-29 | Handheld micro-electro-mechanical-system (MEMS) optical scanning device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103082998A (en) * | 2013-01-29 | 2013-05-08 | 无锡微奥科技有限公司 | Handheld micro-electromechanical system (MEMS) optical scanning device |
| CN105832305A (en) * | 2016-06-20 | 2016-08-10 | 上海交通大学 | Head-wearing OCT (optical coherence tomography) imaging system for free moving animal |
| CN109998486A (en) * | 2019-04-02 | 2019-07-12 | 宁波频泰光电科技有限公司 | Spatial digitizer in hand-held mouth |
| CN110251260A (en) * | 2019-06-28 | 2019-09-20 | 苏州佳世达光电有限公司 | Oral cavity scanning machine |
| WO2023225833A1 (en) * | 2022-05-24 | 2023-11-30 | Shenzhen Genorivision Technology Co., Ltd. | Imaging systems using light guides |
-
2013
- 2013-01-29 CN CN 201320051252 patent/CN203089081U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103082998A (en) * | 2013-01-29 | 2013-05-08 | 无锡微奥科技有限公司 | Handheld micro-electromechanical system (MEMS) optical scanning device |
| CN105832305A (en) * | 2016-06-20 | 2016-08-10 | 上海交通大学 | Head-wearing OCT (optical coherence tomography) imaging system for free moving animal |
| CN105832305B (en) * | 2016-06-20 | 2018-10-16 | 上海交通大学 | Wear-type optical coherence tomography system for free movement animal |
| CN109998486A (en) * | 2019-04-02 | 2019-07-12 | 宁波频泰光电科技有限公司 | Spatial digitizer in hand-held mouth |
| CN109998486B (en) * | 2019-04-02 | 2022-02-11 | 宁波频泰光电科技有限公司 | Hand-held intraoral three-dimensional scanner |
| CN110251260A (en) * | 2019-06-28 | 2019-09-20 | 苏州佳世达光电有限公司 | Oral cavity scanning machine |
| CN110251260B (en) * | 2019-06-28 | 2022-05-17 | 苏州佳世达光电有限公司 | Oral cavity scanner |
| WO2023225833A1 (en) * | 2022-05-24 | 2023-11-30 | Shenzhen Genorivision Technology Co., Ltd. | Imaging systems using light guides |
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| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130731 Effective date of abandoning: 20151216 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |