CN203053853U - Auxiliary device for accurately calibrating light beams for spectrum equipment - Google Patents
Auxiliary device for accurately calibrating light beams for spectrum equipment Download PDFInfo
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- CN203053853U CN203053853U CN 201220652379 CN201220652379U CN203053853U CN 203053853 U CN203053853 U CN 203053853U CN 201220652379 CN201220652379 CN 201220652379 CN 201220652379 U CN201220652379 U CN 201220652379U CN 203053853 U CN203053853 U CN 203053853U
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- catoptron
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Abstract
The utility model relates to an auxiliary device for accurately calibrating light beams for spectrum equipment. A spatial position adjusting mechanism consists of a space adjusting mechanism capable of adapting to a plurality of optical paths, and a reflector supporting device, and a V-shaped optical path adjusting mechanism consists of two rotatable angle reflectors and a variable optical path fixed angle reflector. According to the device provided by the utility model, the direction of propagation of the original optical path can not be changed, and the optical path between reflecting light on the surface of a sample and a detector is increased, thereby improving the accuracy of optical path calibration of the spectrum equipment.
Description
Technical field
This patent relates to a kind of optical instrument alignment aid, particularly the light intensity calibration before the reflective spectrum Equipment Inspection.
Background technology
At present, all kinds of spectroscopy equipments become all kinds of optical properties and detect one of important means, and these checkout equipments comprise Fourier transform spectrometer,, ellipsometer etc.They all are to be made of several sections such as light source, light-dividing device, detectors.Reflective spectrum equipment ultimate principle after light beam process light source and the beam splitter, enters into detector afterwards with detected sample effect as shown in Figure 1.Light intensity is changed to the foundation of Data Detection before and after detecting.
The detector response of light path 2 and light beam cover to illustrate and are provided by Fig. 2 among Fig. 1.Generally, the incident beam light spot shape can not overlap fully with the detector diaphragm, the size of sample and thickness all can impact incident beam hot spot and detector diaphragm registration in addition, therefore need collimate before each the use, guarantee the corresponding maximization of detector response as far as possible.It is relevant that all kinds of detector responses and light beam cover the detector probe area, and it is more big that light beam covers on the detecting device area, and then the light intensity that responds of detecting device is more big, and test accuracy is more high.And some spectroscopy equipment tends to integrated, miniaturization day by day now, causes coverage between light source and the detecting device (light path 2 among Fig. 1) too short, and the accuracy that produces when human eye and manual calibration operation descends.
Summary of the invention
This patent provides a kind of for improving light spectrum detecting apparatus light beam calibration accuracy servicing unit in order to solve above-mentioned technical deficiency.Be used for guaranteeing not changing the direction of propagation of incident beam under the various light path situations, only change the light path of beam propagation.
The technical solution of this patent is as follows:
Light spectrum detecting apparatus close adjustment servicing unit comprises the first height control mechanism, the second height control mechanism and first horizontal adjusting mechanism, second horizontal adjusting mechanism, a catoptron bracing or strutting arrangement that is positioned on the horizontal adjusting mechanism.Characteristics are that its formation is:
The described first height control mechanism and the parallel placement of the second height control mechanism are as the bracing or strutting arrangement of whole optical devices.First horizontal adjusting mechanism, second horizontal adjusting mechanism adopt nut to be installed in the first height control mechanism and the second height control mechanism left and right sides.First horizontal adjusting mechanism, second horizontal adjusting mechanism are adjustable up and down in height control mechanism, are used for adapting to the different light paths height and position.
At described first horizontal adjusting mechanism, parallel placement catoptron bracing or strutting arrangement on second horizontal adjusting mechanism is as the support of entire emission mirror group.The catoptron bracing or strutting arrangement adopts nut to be installed on first horizontal adjusting mechanism, second horizontal adjusting mechanism, and can slide before and after horizontal adjustment frame one dimension, is used for adapting to the horizontal level of different light paths.
On described optical devices catoptron bracing or strutting arrangement, place first catoptron successively, second catoptron, the first catoptron rotating mechanism, the second catoptron rotating mechanism.The first catoptron rotating mechanism, the second catoptron rotating mechanism are individually fixed in optical devices catoptron bracing or strutting arrangement near the first height control mechanism end face left and right sides.First catoptron, second catoptron are installed in the first catoptron rotating mechanism respectively, on the second catoptron rotating mechanism, and can be along with the catoptron rotating mechanism changes angle between 0 to 360 degree.
The fixed placement light path is regulated slide rail, the 3rd catoptron between described first catoptron, second catoptron.Light path is regulated slide rail and is positioned at first catoptron and position, the second catoptron middle, and parallel with first horizontal adjusting mechanism, second horizontal adjusting mechanism.The 3rd mirror mirror is regulated slide rail perpendicular to light path and is placed, and can slide before and after light path is regulated the slide rail one dimension.
Described first catoptron, second catoptron, the 3rd catoptron are formed the V-arrangement folded optical path, be used for guaranteeing that outgoing beam is consistent with the direction of propagation of incident beam, and the light path of beam propagation are adjustable.
Utilize the above-mentioned accurate alignment aid of spectroscopy equipment light path that spectroscopy equipment is calibrated, comprise the following steps:
1. adjust the optical devices height and position: adjust described first horizontal adjusting mechanism, the height of second horizontal adjusting mechanism in the first height control mechanism and the second height control mechanism, guarantee that the center height of incident beam and first catoptron is consistent.
2. adjust the optical devices horizontal level: adjust the horizontal level of described optical devices catoptron bracing or strutting arrangement on first horizontal adjusting mechanism, second horizontal adjusting mechanism, guarantee that the horizontal center of incident beam and first catoptron is consistent.
3. by adjusting the position of the 3rd catoptron on light path adjusting slide rail, obtain required light path.
4. by rotating the described first mirror angle adjusting mechanism, guarantee incident beam over against the first catoptron center position, guarantee that simultaneously reflection ray on first catoptron is over against the 3rd catoptron center position.Rotate the second mirror angle adjusting mechanism, guarantee that the emergent ray on second catoptron is consistent with the incident beam direction.
The technique effect of this patent:
It is too short that this patent has proposed the existing spectroscopy equipment light path of a kind of solution, cause light beam with the low problem of process alignment procedure accuracy of detector collimation.Suppose to reach under the perfect condition at equipment, there are the deviation of 0.1mm in existing beam and focus and detector probe registration, and the sample position of some spectroscopy equipment is to being the 15-20cm distance between the detector probe, through calculating, will be at 0.2mm adjusting manually that the end tolerable departs from.If adopt the device calibration of this patent, adjust the position of the 3rd catoptron on light path adjusting slide rail, make that sample position is 100cm to optical path length between the detector probe, depart to be amplified to 1mm in the tolerable of manual adjustment end.
Description of drawings
Fig. 1 is reflective spectrum checkout equipment ultimate principle figure.
Fig. 2 is that detector response and light beam cover synoptic diagram.
Fig. 3 is the structural representation of reflective spectrum checkout equipment light beam calibrating installation this patent embodiment 1.
Fig. 4 is the structural representation of light beam calibrating installation this patent embodiment 2 on the ellipse inclined to one side equipment.
Embodiment
Below in conjunction with example and accompanying drawing this patent is described further, still should limit the protection domain of this patent with this.
See also Fig. 3 earlier, the reflective spectrum equipment of Fig. 3 light beam calibrating installation is the structural representation of this patent.As seen from Figure 3, the reflective spectrum checkout equipment of this patent light beam calibrating installation comprises 1, the second height control mechanism 2 of the first height control mechanism and first horizontal adjusting mechanism 10,11, one of second horizontal adjusting mechanisms are positioned at the catoptron bracing or strutting arrangement 9 on the horizontal adjustment frame.Its formation is:
The described first height control mechanism 1 and the 2 parallel placements of the second height control mechanism are as the support of whole optical devices.First horizontal adjusting mechanism 10, second horizontal adjusting mechanism 11 adopt nut to be fixed on the first height control mechanism 1 and the second height control mechanism about 2.First horizontal adjusting mechanism 10, second horizontal adjusting mechanism 11 in the first height control mechanism 1, the second height control mechanism, 2 upper-lower positions are adjustable, be used for to adapt to the different light paths height and position.Catoptron bracing or strutting arrangement 9 adopts nut to be fixed on the horizontal adjusting mechanism 10,11, and can move by the one dimension straight line on horizontal adjusting mechanism 10,11 planes of living in.
On described optical devices catoptron bracing or strutting arrangement 9, place first catoptron, 3, the second catoptrons, 5, the first catoptron rotating mechanisms, 6, the second catoptron rotating mechanisms 7 successively.The first catoptron rotating mechanism 6, the second catoptron rotating mechanism 7 are individually fixed in optical devices catoptron bracing or strutting arrangement near the first height control mechanism, the 1 end face left and right sides.First catoptron 3, second catoptron 5 are installed in respectively on the first catoptron rotating mechanism, 6, the second catoptron rotating mechanisms 7, and can rotate between 0 to 360 angle.
The fixed placement light path is regulated slide rail 8, the three catoptrons 4 between described first catoptron 3, second catoptron 5.Light path is regulated slide rail 8 and is positioned at first catoptron 3 and position, second catoptron, 4 middle, and parallel with the first horizontal adjustment frame 13, the second horizontal adjustment frame 14, constitutes V-arrangement symmetrical structure folded optical path (seeing frame of broken lines).The 3rd catoptron 4 minute surfaces are regulated slide rail 8 perpendicular to light path and are placed, and can regulate slide rail 8 one dimension front and back positions along light path and slide.
See also Fig. 4, Fig. 4 is the structural representation of this patent embodiment 3, is the structural representation for reflected light spectral pattern ellipsometer light path calibrating installation.
12 is the ellipsometer light source among Fig. 4, adopt the exportable spectral range of hernia lamp source be 300nm to 2500nm, 14 is the ellipsometer detector.The ellipsometer light source produces reflected light light beam 16 after sending the 13 surface reflections of light beam 15 process samples.Among Fig. 4, first catoptron 3, second catoptron 5,4 couples of spectral range 300nm of the 3rd catoptron be to the high reflection of light beam of 2500nm, can adopt to be coated with the argent film and to realize.
Regulate the height and position of first horizontal adjusting mechanism, 10, the second horizontal adjusting mechanisms 11 in the first height control mechanism 1 and the second height control mechanism 2, make catoptron 3 height and positions of winning consistent with folded light beam 16.The position of accommodation reflex mirror bracing or strutting arrangement 9 on first horizontal adjusting mechanism, 10, the second horizontal adjusting mechanisms 11 makes catoptron 3 horizontal levels of winning consistent with folded light beam 16, and this moment, folded light beam 16 was over against the 3 center incidents of first catoptron.
Regulate the position of the 3rd catoptron 4 on light path adjusting slide rail 8, obtain corresponding light path.Rotate first catoptron 3 in the angle of the first catoptron rotating mechanism 6, make reflected light 17 over against the 4 center incidents of the 3rd catoptron.Light beam 18 incides on second catoptron 5, rotates the angle of second catoptron 5 on the second catoptron rotating mechanism 7, makes outgoing beam 19 consistent with the direction of incident beam 16.
It is the monox single thin film that this embodiment tests testing sample, and sample adopts electron beam evaporation to be coated with, and the film thickness of preparation is about 800nm, and rate of sedimentation is 2nm/s.
Use:
Specifically describe the actual use of this calibrating installation below.At first testing sample is placed on the sample platform 13 that ellipsometer carries, this sample platform 13 can carry out pitch regulation.By the calibration beam 15 of computer control ellipsometer light source 12 output 500nm wavelength, light beam 15 is applied on the sample, obtains reflected light light beam 16.Under the situation that does not increase light spectrum detecting apparatus light beam calibrating installation, reflected light 16 will directly enter into detector 14.The luffing angle that can manually adjust sample platform 13 this moment comes accommodation reflex light beam 16 and detector 14 hot spot registrations.When the corresponding light intensity of detector is maximum, represents folded light beam 16 and enter into the inner hot spot maximum of detector, the light path of folded light beam 16 from the sample surfaces to the detector of this moment is approximately 20cm.Reading corresponding detector induction light intensity magnitude on the computing machine is 4.12.
Between sample platform 13 and detector 14, increase light spectrum detecting apparatus light beam alignment aid.Regulate the height and position of first horizontal adjusting mechanism, 10, the second horizontal adjusting mechanisms 11 in the first height control mechanism 1 and the second height control mechanism 2, make catoptron 3 height and positions of winning consistent with folded light beam 16.The position of accommodation reflex mirror bracing or strutting arrangement 9 on first horizontal adjusting mechanism, 10, the second horizontal adjusting mechanisms 11 makes catoptron 3 horizontal levels of winning consistent with folded light beam 16, and this moment, folded light beam 16 was over against the 3 center incidents of first catoptron.
Regulate the position of the 3rd catoptron 4 on light path adjusting slide rail 8, make the 3rd catoptron 4 and first catoptron, 3 distances be 50cm, obtain light path and be approximately 100cm.Rotate the angle of first catoptron 3 in the angle of the first catoptron rotating mechanism 6, make reflected light 17 over against the 4 center incidents of the 3rd catoptron, rotate the angle of angle on the second catoptron rotating mechanism 7 of second catoptron 5, make outgoing beam 19 consistent with the direction of incident beam 16.
Folded light beam 19 will be continued to use incident beam 16 directions and enter into detector at this moment.The pitch position of manual adjustments sample platform 13 guarantees that corresponding light intensity reaches maximum on the detector, namely folded light beam 19 hot spots with to detector 14 inner registration maximums, reading corresponding light intensity on this computer-chronograph is 4.38.
After calibration is finished, take off light spectrum detecting apparatus light beam calibrating installation, begin to carry out corresponding ellipsometry.
Calibration result:
By adopting light spectrum detecting apparatus light beam calibrating installation, make reflected light 16 from about 20-30cm, bring up to 100cm to actual light path between the detector 14.When the sample platform 13 pitch position calibration of manual adjustment, tolerable adjustment deviation will be amplified 5 times, obtains light intensity and promotes about 8%.Can further amplify tolerable adjustment deviation by regulating the 3rd catoptron 4 in the position that light path is regulated on the slide rail 8, reach further the accurately purpose of calibration.
Claims (4)
1. one kind is used for the accurately servicing unit of calibration of spectroscopy equipment light beam, comprise the first vertical direction governor motion (1), the second vertical direction governor motion (2), first horizontal adjusting mechanism (10), second horizontal adjusting mechanism (11) and be used for to place entire emission mirror light path element and the catoptron bracing or strutting arrangement (9) of slide rail is characterized in that:
Go up vertical placement first level(l)ing mechanism (10) and second level(l)ing mechanism (11) at the described first vertical direction governor motion (1) with the second vertical direction governor motion (2), height and position is adjustable up and down for it, to satisfy the needs that the different light paths height and position is adjusted;
Place described catoptron bracing or strutting arrangement (9) at described first level(l)ing mechanism (10) and second level(l)ing mechanism (11), described catoptron bracing or strutting arrangement (9) is adjustable at first level(l)ing mechanism (10) and the last horizontal level of second level(l)ing mechanism (11), to satisfy different light paths horizontal position adjustment needs;
Place the 3rd catoptron (4) and light path adjusting slide rail (8) at described catoptron bracing or strutting arrangement (9), being used for obtaining different calibration light paths need; Place first catoptron (3), second catoptron (5), the first catoptron rotating mechanism (6), the second catoptron rotating mechanism (7), satisfy different light paths incident after, do not change direction of beam propagation output.
2. according to claim 1 for the accurate servicing unit of calibrating of spectroscopy equipment light beam, it is characterized in that: described first catoptron (3), second catoptron (5) are the angle rotatable mirror.
3. according to claim 1 for the accurate servicing unit of calibrating of spectroscopy equipment light beam, it is characterized in that: described 3 catoptrons (3,4,5) position is the design of V-type symmetrical structure, forms the light beam adjusting mechanism, satisfies the output that does not change direction of beam propagation.
4. according to claim 1 for the accurate servicing unit of calibrating of spectroscopy equipment light beam, it is characterized in that: described the 3rd catoptron (4) has along light path regulates the mechanism that slide rail (8) one dimension direction moves, and satisfies the variable needs of light path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220652379 CN203053853U (en) | 2012-11-30 | 2012-11-30 | Auxiliary device for accurately calibrating light beams for spectrum equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220652379 CN203053853U (en) | 2012-11-30 | 2012-11-30 | Auxiliary device for accurately calibrating light beams for spectrum equipment |
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| CN203053853U true CN203053853U (en) | 2013-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220652379 Withdrawn - After Issue CN203053853U (en) | 2012-11-30 | 2012-11-30 | Auxiliary device for accurately calibrating light beams for spectrum equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103018175A (en) * | 2012-11-30 | 2013-04-03 | 中国科学院上海技术物理研究所 | Auxiliary device for accurately calibrating light beams of spectrum equipment |
| CN110837202A (en) * | 2018-08-17 | 2020-02-25 | 欧菲影像技术（广州）有限公司 | Calibration method for camera analysis force test |
| CN111417868A (en) * | 2018-06-28 | 2020-07-14 | 深圳市元征科技股份有限公司 | Advanced driving assistance calibration equipment for vehicle |
-
2012
- 2012-11-30 CN CN 201220652379 patent/CN203053853U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103018175A (en) * | 2012-11-30 | 2013-04-03 | 中国科学院上海技术物理研究所 | Auxiliary device for accurately calibrating light beams of spectrum equipment |
| CN111417868A (en) * | 2018-06-28 | 2020-07-14 | 深圳市元征科技股份有限公司 | Advanced driving assistance calibration equipment for vehicle |
| CN111417868B (en) * | 2018-06-28 | 2023-07-25 | 深圳市易检车服科技有限公司 | Advanced auxiliary driving calibration equipment for vehicle |
| CN110837202A (en) * | 2018-08-17 | 2020-02-25 | 欧菲影像技术（广州）有限公司 | Calibration method for camera analysis force test |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20130710 Effective date of abandoning: 20141015 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20130710 Effective date of abandoning: 20141015 |
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