CN203034082U

CN203034082U - Segmentation photomask for vapor plating of organic light emitting display

Info

Publication number: CN203034082U
Application number: CN 201220660680
Authority: CN
Inventors: 赵建明; 蒋谦; 王春飞
Original assignee: IRICO FOSHAN FLAT PANEL DISPLAY CO Ltd
Current assignee: IRICO FOSHAN FLAT PANEL DISPLAY CO Ltd
Priority date: 2012-12-04
Filing date: 2012-12-04
Publication date: 2013-07-03
Anticipated expiration: 2022-12-04

Abstract

The utility model relates to a segmentation photomask for vapor plating of an organic light emitting display. The segmentation photomask for the vapor plating of the organic light emitting display comprises a photomask body and is characterized in that the photomask body is formed by at least two small photomasks (1) and at least a supporting strip (6); gap covering strips (7) are arranged between the two small photomasks; and the supporting strip (6) is fixedly connected with the small photomasks (1) and the gap covering strips (7) to form into a whole. The segmentation photomask for the vapor plating of the organic light emitting display is segmented into strips from a whole photomask which is utilized by the existing industry and has the advantages of only enabling a strip to be changed when a problem is occurred, being convenient to operate, reducing the production cost, solving the problem that the segmentation photomask is poor in intensity and gaps are formed between two strips of photomasks when the photomask is pasted on a frame and completely achieving a same utilization effect as a common whole photomask by adding the supporting strip and the gap covering strips.

Description

Display of organic electroluminescence evaporation dicing masks version

Technical field

The utility model relates to display of organic electroluminescence evaporation dicing masks version.

Background technology

Display of organic electroluminescence (OLED) is emerging a kind of flat-panel monitor, because it has active illuminating, the contrast gradient height, the energy slimming, plurality of advantages such as response speed is fast, be acknowledged as the third generation indicating meter that substitutes LCD, its principle of luminosity is some layers of organic materials of cord wood evaporation (comprising luminous organic material) between two electrodes, and direct current makes it luminous on logical between two electrodes.In display of organic electroluminescence is made, in order to obtain effective pixel cell, need to use the evaporation mask, this mask thickness is at 0.030～0.100mm, and the technology manufacture difficulty is bigger, and yield is lower, and have only minority producer to produce, therefore expensive.

In whole display of organic electroluminescence manufacturing cost, the mask expense accounts for more than 10% of manufacturing cost, is the principal element that directly influences the device manufacturing cost.

The utility model content

The purpose of this utility model provides a kind of display of organic electroluminescence evaporation dicing masks version, can realize reducing cost and the purpose of impact effect not.

A kind of display of organic electroluminescence evaporation dicing masks version, comprise the mask body, its special feature is: wherein the mask body is made up of at least two little mask, and between per two little masks, be equipped with and hide the seam bar, comprise that also at least one is supported bar, this supports bar and all little mask and screening are stitched bar and are all fixedlyed connected and be integral.

Wherein hide the seam bar and support that bar is stainless steel.

Wherein support the width of bar at 0.5～10mm, hide the width of seam bar at 0.1～10mm.

The thickness of wherein said support bar hides the thickness of seam bar at 0.02～0.1mm at 0.02～0.1mm.

This practicality newly provide a kind of cutting apart (type) mask, whole the mask that present industry is generally adopted is divided into strip-type, in order to only change this band when there is problem in the somewhere, not only handled easily but also reduce manufacturing cost, but there is undercapacity in the Splittable mask, between two mask certain slit is arranged when pasting on the framework simultaneously, the utility model has have been increased the support bar and has hidden the seam bar, cooperates the Splittable mask to use and all can enough reach and whole the common result of use that mask is identical.

Description of drawings

Accompanying drawing 1 is that evaporation in the background technology is with the structural representation of conventional monoblock type mask;

Accompanying drawing 2 is Splittable mask plate structure synoptic diagram of the present utility model;

Accompanying drawing 3 is to use the synoptic diagram that hides seam bar (7) and support bar (6) in the utility model;

Accompanying drawing 4 is to use the synoptic diagram that hides seam bar (7) in the utility model.

Embodiment

Shown in Fig. 2,3,4, a kind of display of organic electroluminescence evaporation dicing masks version, comprise the mask body, wherein the mask body is made up of at least two little mask 1, and between per two little masks, be equipped with and hide seam bar 7, comprise that also at least one is supported bar 6, this supports bar 6 and all little mask 1 and screening are stitched bar 7 and are all fixedlyed connected and be integral.

Wherein hide seam bar 7 and support that bar 6 is SUS (steel use stainless) stainless steel, support the width of bar 6 at 0.5～10mm, hide the width of seam bar 7 at 0.1～10mm, and the thickness of supporting bar 6 hides the thickness of seam bar 7 at 0.02～0.1mm at 0.02～0.1mm.

Usually the 730*460 substrate uses the quantity of supporting bar 6 generally at 4～7, the 730*460 substrate is Splittable mask bar number-1 with the quantity that hides seam bar 7, several slits are namely arranged just with several screening seam bars 7, the width difference that requires on the precision to support bar 6 hides the width difference of seam bar 7 less than 50um less than 50um.

Technical characterstic of the present utility model is: the display of organic electroluminescence evaporation must cooperate assistant strip just can obtain desirable evaporation effect with the Splittable mask, just can give full play to the purpose of using the Splittable mask to reduce the mask use cost.And Splittable mask assistant strip of the present utility model comprises two portions: the one, support bar 6, two, and hide seam bar 7.Use and support bar 6 to strengthen Splittable mask intensity, effectively control its deformation in use, guarantee that the evaporation position is accurate, improve positional precision repeatability.Use to hide seam bar 7 to cover the slit that the Splittable mask produces in putting up, avoid deposition material steaming in the zone that does not need steaming by the slit.

Claims

1. display of organic electroluminescence evaporation dicing masks version, comprise the mask body, it is characterized in that: wherein the mask body is made up of at least two little mask (1), and between per two little masks, be equipped with and hide seam bar (7), comprise that also at least one is supported bar (6), this supports bar (6) and all little mask (1) and screening are stitched bar (7) and are all fixedlyed connected and be integral.

2. display of organic electroluminescence evaporation dicing masks version as claimed in claim 1 is characterized in that: wherein hide seam bar (7) and support bar (6) to be stainless steel.

3. display of organic electroluminescence evaporation dicing masks version as claimed in claim 1 or 2 is characterized in that: wherein support the width of bar (6) at 0.5～10mm, hide the width of seam bar (7) at 0.1～10mm.

4. display of organic electroluminescence evaporation dicing masks version as claimed in claim 1 or 2 is characterized in that: the thickness of wherein said support bar (6) hides the thickness of seam bar (7) at 0.02～0.1mm at 0.02～0.1mm.