CN202989270U - Non-vacuum step-by-step pass type fast selenizing device - Google Patents
Non-vacuum step-by-step pass type fast selenizing device Download PDFInfo
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- CN202989270U CN202989270U CN 201220696939 CN201220696939U CN202989270U CN 202989270 U CN202989270 U CN 202989270U CN 201220696939 CN201220696939 CN 201220696939 CN 201220696939 U CN201220696939 U CN 201220696939U CN 202989270 U CN202989270 U CN 202989270U
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Abstract
The utility model discloses a non-vacuum step-by-step pass type fast selenizing device which comprises a technological cavity, wherein the technological cavity is divided into a loading cavity, a heating cavity, an insulating cavity, a cooling cavity and an unloading cavity by gates, the loading cavity, the heating cavity, the insulating cavity, the cooling cavity and the unloading cavity are arranged in sequence, the heating cavity and the insulating cavity are provided with a heating unit, an air blast unit and an air exhaust unit, the heating unit comprises electric heating wires and an upper row and a lower row of halogen lamps, the electric heating wires are evenly distributed inside the heating cavity and the insulating cavity, and the air blast unit and the air exhaust unit are respectively provided with a grating plate used for gridding technological gas. With the non-vacuum step-by-step pass type fast selenizing device, the high-efficiency control on the flow field uniformity of diffusion gas can be realized, the high-efficiency control on the diffusion technology temperature and the temperature rise can be achieved, and on the premise of ensuring the large-area selenizing uniformity, the production efficiency can be greatly improved through fast selenizing.
Description
Technical field
The utility model relates to solar cell selenizing technical field, is specifically related to a kind of antivacuum stepping passing rapid selenium gasifying device.
Background technology
At present, selenizing device is one of important technological equipment that semi-conductor is adulterated, thereby dopant material is diffused into type, concentration and distribution that substrate changes and control material in material under hot conditions.Especially, in the standby copper, indium and selenium film solar cell process of selenizing legal system, selenizing device is the key equipment for rear selenizing technique, preparation high efficiency absorbed layer after the prefabricated metal layer.
The technological line that CIGS thin-film solar cell passes through in the world is selenizing method after vacuum vapor deposition method and preformed layer.Wherein, metal preformed layer after the prefabricated metal layer in the selenizing method generally adopts sputtering method, because sputtering method can obtain uniform large area film fast, and can realize accurate control to film thickness and element ratio by controlling sputtering power, operating air pressure, gas flow and sputter order, rear selenizing process namely contains in selenium atmosphere at high temperature carries out selenization with the metal preformed layer, main selenium source comprises Selenium hydride and solid-state selenium etc., increase sulfidation, finally can obtain more excellent absorption layer film.The difficult point of this processing method mainly concentrates on rear selenizing technique, as contains temperature homogeneity, gas flow and the utilization ratio of homogeneity, process environments of selenium atmosphere and process control etc.Therefore, be used for the function of selenizing device of rear selenizing technique and material structure and the electric property that performance is directly connected to the copper indium gallium selenide cell absorption layer.
The subject matter that existing selenizing device equipment faces has, and how to guarantee improving production capacity under battery high conversion efficiency prerequisite, how to guarantee guaranteeing even film layer under single cell area prerequisite.Make in the small size semi-conductor because existing selenizing device is multiplex, therefore in the application of CIS thin film solar cell, can't satisfy manufacturing and the consequent homogeneity difficult problem of area battery.Separately, take the patent US6703589 " Device and method for tempering at least one process good " of German shell Photovoltaics Com Inc. as example, the selenizing device of traditional burner formula structure is subject to long and processed offline mode of process time, impact online large-scale production application fast.And other as clear in Japan and WO2006/070745 A1 " about CIS absorbing layer of thin film solar cell preparation method's patent " Shell Co. Ltd is contained selenizing devices, although replace natural circulation by installing the fan pump circulation additional, inhomogeneity improvement does not reach ideal effect to the process cavity flow field.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of antivacuum stepping passing rapid selenium gasifying device, it is realizing the even distribution of atmosphere, improve accuracy and the large-area uniformity of the element proportioning of prepared material, thereby eliminated defective in the above-mentioned background technology.
For solving the problems of the technologies described above, the technical solution of the utility model is:
A kind of antivacuum stepping passing rapid selenium gasifying device, comprise processing chamber, described processing chamber utilization door lock is divided in turn the load chamber of arranging, heating chamber, incubation cavity, cooling chamber and unloading chamber, is provided with the live roll that cooperatively interacts, treat the selenizing substrate in order to carrying in described load chamber, heating chamber, incubation cavity, cooling chamber and unloading chamber;
Described heating chamber and incubation cavity are provided with heating unit, blasting unit and the unit of bleeding,
Described heating unit comprises nichrome wire and the two rows halogen lamp that is uniformly distributed in described heating chamber and incubation cavity inside;
Described blasting unit is arranged at a side of described heating chamber and incubation cavity, comprises the flase floor with the process gas gridding, and described flase floor is arranged in the chamber of described heating chamber and incubation cavity;
The described unit of bleeding is arranged at a described heating chamber side relative with described blasting unit with incubation cavity, comprise vacuum fan, flow deflector and flase floor, the inlet mouth of described vacuum fan utilizes flow deflector to cause in chamber, and the upstream position of flow deflector is provided with described flase floor.
As a kind of improvement, described processing chamber is slit shape.
In the utility model, described door lock is the upper end hinged.
As a kind of improvement, between described load chamber and heating chamber, door lock opening direction is to load chamber one side, and between described incubation cavity and cooling chamber, door lock opening direction is to cooling chamber one side, to guarantee that process gas can not leak.
As a kind of improvement, described heating chamber and incubation cavity are shaped with thermofin with heat-insulating heat-preserving material, the embedded equally distributed described nichrome wire of described thermofin, and heating is to keep the background temperature.
As a kind of improvement, described two rows halogen lamp is spaced apart, and lower row's halogen lamp is distributed in the live roll below, between each live roll.Reduce so to greatest extent the thermograde in process cavity, to realize the homogeneity of temperature distribution.Why adopting halogen lamp, is that electric conversion rate is high, the characteristics of quick heating because it has, and is suitable for thermal process process in short-term.
As a kind of improvement, the gas blower of described blasting unit utilizes flow deflector to connect described flase floor, processes thereby process gas is carried out gridding.
As a kind of improvement, the gas blower of described blasting unit is installed in each grid of described flase floor.
Based on same principle of work, above device can be used for sulfuration process.
A kind of selenizing method of utilizing antivacuum stepping passing rapid selenium gasifying device to realize comprises the steps:
(1) be filled with rare gas element in load chamber, heating chamber, incubation cavity, cooling chamber and unloading chamber, air pressure inside is higher than ambient pressure, and guarantee that load chamber, cooling chamber and unloading chamber internal gas pressure equate, and greater than heating chamber and with the incubation cavity of heating chamber equipressure;
(2) with the process gas preheating, utilize blasting unit and the unit of bleeding to realize that process gas is in described heating chamber and the inner pump circulation of incubation cavity; Electric-heating-wire-heating is warming up to 240-260 ℃, and namely making the thermofin temperature of described heating chamber and incubation cavity is 240-260 ℃, is preferably 250 ℃; Utilize heat by lalonge lamp to the interior temperature of the chamber of described heating chamber and incubation cavity to be 520-580 ℃;
(3) utilize substrate that live roll carrying treats selenizing in turn by load chamber, heating chamber, incubation cavity, cooling chamber and unloading chamber, namely obtain the substrate after selenizing; Described cooling chamber internal temperature is 200～350 ℃.
Substrate after selenizing will send out equipment by the unloading chamber, enter subsequent handling.
As a kind of improvement, described process gas comprises solid-state selenium steam or Selenium hydride.
As a kind of improvement, described rare gas element comprises nitrogen or argon gas.
Owing to having adopted technique scheme, the beneficial effects of the utility model are:
1. processing chamber utilization door lock of the present utility model is divided in turn the load chamber of arranging, heating chamber, incubation cavity, cooling chamber and unloading chamber, and between load chamber and heating chamber, door lock opening direction is to load chamber one side, between described incubation cavity and cooling chamber, door lock opening direction is to cooling chamber one side, based on this structure, can guarantee in processing chamber that air pressure inside is higher than ambient pressure, prevent that extraneous gas from entering, guarantee the cleanliness factor of processing chamber, simultaneously can guarantee that also process gas can not leak, improve the effect of substrate selenizing.
2. processing chamber of the present utility model adopts slit shape, can reduce the process gas consumption, can guarantee that also substrate is in the larger process gas atmosphere of concentration simultaneously, improves the homogeneity of selenizing.
3. heating chamber of the present utility model and incubation cavity are shaped with thermofin with heat-insulating heat-preserving material, the embedded equally distributed nichrome wire of described thermofin, based on this structure, utilize nichrome wire the thermofin temperature can be heated to 250 ℃, can the heat exchange of heating chamber and incubation cavity and environment be compensated, and the utility model people finds in practice, at this temperature, can prevent effectively that selenium steam from processing chamber internal surface deposition, playing beyond thought effect.
4. the utility model adopts heat by lalonge lamp, and the two rows halogen lamp is spaced apart, and lower row's halogen lamp is distributed in below live roll, between each live roll, to have an electric conversion rate high due to halogen lamp, the characteristics of quick heating, be suitable for thermal process process in short-term, based on said structure, the utility model can be increased to 520-580 ℃ with the temperature in heating chamber and incubation cavity in the short period, utility model people tests discovery repeatedly, the selenizing effect of this temperature hypocoxa is the best, and the utility model can reduce the thermograde in process cavity to greatest extent, to realize the homogeneity of temperature distribution.
5. the utility model is provided with blasting unit and the unit of bleeding, and be provided with flase floor, based on this structure, at first process gas is heavily shunted through first of flow deflector from a side of chamber, then process gas carries out the second heavily shunting through flase floor, has improved greatly the homogeneity of process gas, and then process gas reacts on the surface of substrate again, realize process gas current-sharing and stable, and can control the flow field uniformity in processing chamber.
6. the cooling chamber design temperature of the utility model setting is 200～350 ℃, thus substrate can obtain rapidly after out in incubation cavity cooling, and proof in practice, the substrate after selenizing is the cooling accurate proportioning of the element of realizing prepared material that is beneficial to rapidly.
In a word, the utility model has been realized the efficient control of diffusion gas flow field uniformity, has realized the efficient control of diffusion technique temperature and temperature rise, is guaranteeing to help the significantly lifting of production efficiency by quick selenizing under the inhomogeneity prerequisite of big area selenizing.
Description of drawings
Fig. 1 is the utility model selenizing device agent structure schematic diagram;
Fig. 2 is the structural representation of the utility model selenizing device heating chamber;
Fig. 3 is the cross-sectional view of the utility model selenizing device heating chamber;
Fig. 4 is the structural representation of the utility model selenizing device blasting unit and the unit of bleeding;
In figure: 1. load chamber, 2. heating chamber, 3. incubation cavity, 4. cooling chamber, 5. unloading chamber, 6. a lock, 7. live roll, 8. nichrome wire, 9. halogen lamp, 10. air inlet grille screen, 11. vacuum fan, the flow deflector 12. give vent to anger, 13. air outlet grate plates, 14. thermofins, 15. gas blowers, 16. air inlet flow deflectors.
Embodiment
For technique means, creation characteristic that the utility model is realized, reach purpose and effect is easy to understand, below in conjunction with specific embodiment, further set forth the utility model.
as shown in Figure 1, a kind of antivacuum stepping passing rapid selenium gasifying device, the processing chamber that comprises slit shape, described processing chamber utilization door lock 6 is divided in turn the load chamber 1 of arranging, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloading chamber 5, is provided with the live roll 7 that cooperatively interacts, treat the selenizing substrate in order to carrying in described load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloading chamber 5, Fig. 2 and Fig. 3 are the schematic diagram of heating chamber, in the utility model, heating chamber 2 is identical with the internal structure of incubation cavity 3, be provided with heating unit, blasting unit and the unit of bleeding, described heating unit comprises nichrome wire 8 and the two rows halogen lamp 9 that is uniformly distributed in described heating chamber 2 and incubation cavity 3 inside, described blasting unit is arranged at a side of described heating chamber 2 and incubation cavity 3, comprise the air inlet grille screen 10 with the process gas gridding, described air inlet grille screen 10 is arranged in the chamber of described heating chamber 2 and incubation cavity 3, the gas blower 15 of blasting unit utilizes air inlet flow deflector 16 to connect described air inlet grille screen 10, thereby process gas is carried out gridding to be processed, the described unit of bleeding is arranged at described heating chamber 2 side relative with described blasting unit with incubation cavity 3, comprise vacuum fan 11, give vent to anger flow deflector 12 and air outlet grate plate 13, the inlet mouth utilization of described vacuum fan 11 flow deflector 12 of giving vent to anger causes in chamber, and the upstream position of the flow deflector 12 of giving vent to anger is provided with described air outlet grate plate 10.
In the present embodiment, between described load chamber 1 and heating chamber 2, door lock 6 opening directions are to load chamber 1 one sides, and between described incubation cavity and cooling chamber, door lock opening direction is to cooling chamber one side, to guarantee that process gas can not leak.
The utility model is shaped with thermofin 14 in order to improve the selenizing effect at heating chamber 2 and incubation cavity 3 use heat-insulating heat-preserving materials, and embedded equally distributed described nichrome wire 8 heating of described thermofin 14 are to keep the background temperature.
Two rows halogen lamp 9 of the present utility model is spaced apart, and lower row's halogen lamp 9 is distributed in live roll 7 belows, between each live roll 7.Reduce so to greatest extent the thermograde in process cavity, to realize the homogeneity of temperature distribution.Why adopting halogen lamp 9, is that electric conversion rate is high, the characteristics of quick heating because it has, and is suitable for thermal process process in short-term.
In addition, as shown in Figure 4, the gas blower 15 of described blasting unit is installed in each grid of described air inlet grille screen 10, is more conducive to the homogeneity of process gas.Obviously, this moment, gas blower 15 should adopt the type of small volume.
Below for to utilize antivacuum stepping passing rapid selenium gasifying device of the present utility model to realize the specific embodiment of copper-indium-galliun-selenium (CIGS) thin film solar cell selenizing.
Embodiment 1
The quick selenizing method of antivacuum stepping passing comprises the steps:
(1) be filled with inert nitrogen gas in load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloading chamber 5, air pressure inside is higher than ambient pressure, and guarantee that load chamber 1, cooling chamber 4 and unloading chamber 5 internal gas pressures equate, and greater than heating chamber 2 and with the incubation cavity 3 of heating chamber 2 equipressures;
(2) with the solid-state selenium steam preheating of process gas, utilize blasting unit and the unit of bleeding to realize that process gas is in described heating chamber 2 and the inner pump circulation of incubation cavity 3, thermofin 14 temperature of utilizing nichrome wire 8 to be heated to described heating chamber 2 and incubation cavity 3 are 240 ℃, and the interior temperature of chamber of utilizing halogen lamp 9 to be heated to described heating chamber 2 and incubation cavity 3 is 520 ℃;
(3) utilize live roll 7 carryings to treat that the substrate of selenizing passes through in turn load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloads chamber 5, described cooling chamber 4 internal temperatures are 200 ℃.
Cooled substrate will send out equipment by unloading chamber 5, enter subsequent handling.
The quick selenizing method of antivacuum stepping passing comprises the steps:
(1) be filled with the rare gas element argon gas in load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloading chamber 5, air pressure inside is higher than ambient pressure, and guarantee that load chamber 1, cooling chamber 4 and unloading chamber 5 internal gas pressures equate, and greater than heating chamber 2 and with the incubation cavity 3 of heating chamber 2 equipressures;
(2) with the preheating of process gas Selenium hydride, utilize blasting unit and the unit of bleeding to realize that process gas is in described heating chamber 2 and the inner pump circulation of incubation cavity 3, thermofin 14 temperature of utilizing nichrome wire 8 to be heated to described heating chamber 2 and incubation cavity 3 are 250 ℃, and the interior temperature of chamber of utilizing halogen lamp 9 to be heated to described heating chamber 2 and incubation cavity 3 is 550 ℃;
(3) utilize live roll 7 carryings to treat that the substrate of selenizing passes through in turn load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloads chamber 5, described cooling chamber 4 internal temperatures are 300 ℃.
Cooled substrate will send out equipment by unloading chamber 5, enter subsequent handling.
Embodiment 3
The quick selenizing method of antivacuum stepping passing comprises the steps:
(1) be filled with inert nitrogen gas in load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloading chamber 5, air pressure inside is higher than ambient pressure, and guarantee that load chamber 1, cooling chamber 4 and unloading chamber 5 internal gas pressures equate, and greater than heating chamber 2 and with the incubation cavity 3 of heating chamber 2 equipressures;
(2) with the solid-state selenium steam preheating of process gas, utilize blasting unit and the unit of bleeding to realize that process gas is in described heating chamber 2 and the inner pump circulation of incubation cavity 3, thermofin 14 temperature of utilizing nichrome wire 8 to be heated to described heating chamber 2 and incubation cavity 3 are 260 ℃, and the interior temperature of chamber of utilizing halogen lamp 9 to be heated to described heating chamber 2 and incubation cavity 3 is 580 ℃;
(3) utilize live roll 7 carryings to treat that the substrate of selenizing passes through in turn load chamber 1, heating chamber 2, incubation cavity 3, cooling chamber 4 and unloads chamber 5, described cooling chamber 4 internal temperatures are 350 ℃.
Cooled substrate will send out equipment by unloading chamber 5, enter subsequent handling.
The utility model is not limited to above-mentioned embodiment, and all are based on technical conceive of the present utility model, and the structural improvement of having done all falls among protection domain of the present utility model.
Claims (7)
1. antivacuum stepping passing rapid selenium gasifying device, comprise processing chamber, described processing chamber utilization door lock is divided in turn the load chamber of arranging, heating chamber, incubation cavity, cooling chamber and unloading chamber, is provided with the live roll that cooperatively interacts, treat the selenizing substrate in order to carrying in described load chamber, heating chamber, incubation cavity, cooling chamber and unloading chamber;
It is characterized in that: described heating chamber and incubation cavity are provided with heating unit, blasting unit and the unit of bleeding, and described heating unit comprises nichrome wire and the two rows halogen lamp that is uniformly distributed in described heating chamber and incubation cavity inside;
Described blasting unit is arranged at a side of described heating chamber and incubation cavity, comprises the flase floor with the process gas gridding, and described flase floor is arranged in the chamber of described heating chamber and incubation cavity;
The described unit of bleeding is arranged at a described heating chamber side relative with described blasting unit with incubation cavity, comprise vacuum fan, flow deflector and flase floor, the inlet mouth of described vacuum fan utilizes flow deflector to cause in chamber, and the upstream position of flow deflector is provided with described flase floor.
2. a kind of antivacuum stepping passing rapid selenium gasifying device as claimed in claim 1, it is characterized in that: described processing chamber is slit shape.
3. a kind of antivacuum stepping passing rapid selenium gasifying device as claimed in claim 1, it is characterized in that: between described load chamber and heating chamber, door lock opening direction is to load chamber one side, and between described incubation cavity and cooling chamber, a door lock opening direction is to cooling chamber one side.
4. a kind of antivacuum stepping passing rapid selenium gasifying device as claimed in claim 1, it is characterized in that: described heating chamber and incubation cavity are shaped with thermofin with heat-insulating heat-preserving material, the embedded equally distributed described nichrome wire of described thermofin.
5. a kind of antivacuum stepping passing rapid selenium gasifying device as claimed in claim 1, it is characterized in that: described two rows halogen lamp is spaced apart, and lower row's halogen lamp is distributed in the live roll below, between each live roll.
6. a kind of antivacuum stepping passing rapid selenium gasifying device as claimed in claim 1 is characterized in that: the gas blower of described blasting unit utilizes flow deflector to connect described flase floor.
7. a kind of antivacuum stepping passing rapid selenium gasifying device as claimed in claim 1, it is characterized in that: the gas blower of described blasting unit is installed in each grid of described flase floor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220696939 CN202989270U (en) | 2012-12-15 | 2012-12-15 | Non-vacuum step-by-step pass type fast selenizing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220696939 CN202989270U (en) | 2012-12-15 | 2012-12-15 | Non-vacuum step-by-step pass type fast selenizing device |
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| CN202989270U true CN202989270U (en) | 2013-06-12 |
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| CN 201220696939 Expired - Fee Related CN202989270U (en) | 2012-12-15 | 2012-12-15 | Non-vacuum step-by-step pass type fast selenizing device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021823A (en) * | 2012-12-15 | 2013-04-03 | 山东孚日光伏科技有限公司 | Non-vacuum stepping pass-type rapid selenizing device and selenizing method implemented by same |
| CN108968790A (en) * | 2018-08-08 | 2018-12-11 | 王艳 | A kind of glass cleaning equipment |
-
2012
- 2012-12-15 CN CN 201220696939 patent/CN202989270U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021823A (en) * | 2012-12-15 | 2013-04-03 | 山东孚日光伏科技有限公司 | Non-vacuum stepping pass-type rapid selenizing device and selenizing method implemented by same |
| CN103021823B (en) * | 2012-12-15 | 2016-03-16 | 山东孚日光伏科技有限公司 | A kind of antivacuum stepping passing rapid selenium gasifying device and the selenizing method utilizing it to realize |
| CN108968790A (en) * | 2018-08-08 | 2018-12-11 | 王艳 | A kind of glass cleaning equipment |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130612 Termination date: 20141215 |
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| EXPY | Termination of patent right or utility model |