CN202987951U - High purity water nitrogen sealed water tank with throttle device - Google Patents
High purity water nitrogen sealed water tank with throttle device Download PDFInfo
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- CN202987951U CN202987951U CN 201220749811 CN201220749811U CN202987951U CN 202987951 U CN202987951 U CN 202987951U CN 201220749811 CN201220749811 CN 201220749811 CN 201220749811 U CN201220749811 U CN 201220749811U CN 202987951 U CN202987951 U CN 202987951U
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- water tank
- water
- nitrogen
- high purity
- air bag
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Abstract
The utility model relates to a high purity water nitrogen sealed water tank with a throttle device. Nitrogen of an existing high purity water nitrogen sealed water tank can be exhausted into the atmosphere along with variation of water level in the high purity water nitrogen sealed water tank, and is wasted. The high purity water nitrogen sealed water tank with the throttle device comprises a water tank, wherein the water tank is provided with a water inlet and a water outlet, the water tank is connected with the throttle device, the throttle device comprises an air duct and a closed soft air bag, one end of the air duct is communicated with the top portion of the water tank, the other end of the air duct is communicated with the air bag, the air duct achieves throttle function through deformation of the air bag and gas storage. The high purity water nitrogen sealed water tank with the throttle device is added with the air bag which is communicated with an original high purity water nitrogen sealed water tank based on the structure of the original high purity water nitrogen sealed water tank, stores the nitrogen which is squeezed out because water level in the water tank rises by utilizing the characteristics of variable volume of an inner cavity of the air bag, and transports the nitrogen back to the water tank when the water level falls, thereby achieving reutilization of the nitrogen, effectively reducing consumption of the nitrogen, reducing production cost, being further capable of reducing bottle change frequency, prevents a snuff out situation from happening, and effectively improving production efficiency.
Description
Technical field
The utility model relates to a kind of semiconductor equipment, is specifically related to a kind of high purity water nitrogen-sealed water tank.
Background technology
In the prior art, high purity water all has the characteristics of insulation, is usually used in washing down semiconductor components and devices.In use, the pure water that in pure water tank, electrical resistivity is lower is through the EDI(continuous electrodeionization device) transform after the formation high purity water, and the high purity water nitrogen-sealed water tank that high purity water input is filled with nitrogen is stored, utilize the insulating effect of nitrogen to realize high purity water and air, carbon dioxide, impurities, guarantee that high purity water remains higher electrical resistivity.existing high purity water nitrogen-sealed water tank comprises water tank, coolant inlet pipe, coolant outlet pipe and the air supply pipe that is used for the nitrogen circulation, freeing pipe, coolant inlet pipe is provided with the switching mode valve, be provided with the pressure inductor of measuring water level in water tank, in use, pressure inductor is arranged in a normal water level scope, when the water level in water tank during lower than the minimum of normal water level scope, valve open, flow in water tank through the high purity water that EDI processes, when water level returns back to the peak of normal water level scope, valve closing, the high purity water of processing through EDI is back to the pure water water tank by the bifurcated pipeline, there is following defective in the high purity water nitrogen-sealed water tank of this structure: when the water level in the high purity water nitrogen-sealed water tank reduces, it is large that the space of water tank upper becomes, need to input nitrogen this moment by air inlet pipe, guarantee the high-insulativity of high purity water, when water level during lower than the minimum of normal water level scope, valve open, high purity water is poured in water tank, this moment is because water level rises, the water tank upper space diminishes gradually, nitrogen overstocks to contract and enters in air by freeing pipe, cause the nitrogen waste, improved use cost, and nitrogen adopts bottled mode to store mostly, because consumption is large, change bottle frequency and become large, cause to produce and interrupt, affect production efficiency.
The utility model content
In order to solve the deficiencies in the prior art, the utility model provides a kind of high purity water nitrogen-sealed water tank that reduces nitrogen discharge by choking system, and further purpose of the present utility model is to provide and a kind ofly can makes the reusable high purity water nitrogen-sealed water tank of nitrogen.
The utility model is realized in the following manner: a kind of high purity water nitrogen-sealed water tank with choking system, comprise water tank, described water tank is provided with a water inlet and a water outlet, be connected with a choking system on described water tank, described choking system comprises a ventilation flue and an airtight soft air bag, described ventilation flue's one end is communicated with described tank top, and the other end is communicated with described air bag, realizes the solar term function by air bag deformation and accommodating gas.Set up an air bag that is communicated with it on the architecture basics of original high purity water nitrogen-sealed water tank, utilize the variable characteristics of air bag cavity volume, to store because of the nitrogen that water level rising in water tank is extruded, and in when water level descends, nitrogen being fed back to water tank, realize the nitrogen recycling, effectively reduce the consumption of nitrogen, reduce production costs, can also reduce and change a bottle frequency, the situation that prevents from dying occurs, and effectively enhances productivity.
As preferably, described tank top is provided with a security solenoid valve.The switch of security solenoid valve is associated with gaseous tension in water tank, guarantees the safe in operation of air bag and water tank by the switch of security solenoid valve.
As preferably, described water tank is located at its top by one and is communicated with a self-operated type air inlet system with the air supply pipe of valve.The self-operated type air inlet system can provide nitrogen for water tank, the switch of described valve is associated with gaseous tension in casing, guarantee that in water tank, nitrogen pressure is constant, prevent from occuring because the nitrogen pressure deficiency causes the situation that high purity water contacts with air, carbon dioxide, impurity, can effectively guarantee the high resistivity of high purity water in water tank.
As preferably, described air bag is built in an expansion box.Expansion box had both played the effect of the soft air bag of protection, can also utilize its hard wall to prevent the air bag over expansion, guaranteed airbag safety.
As preferably, described ventilation flue's one end is communicated with tank top, and the other end passes described expansion box and is communicated with described air bag bottom.Ventilation flue's one end is connected with tank top, prevents that effectively high purity water from flowing in air bag, guarantees the gas storage capability of air bag; Ventilation flue's other end is connected bottom air bag, to water tank, guarantees the nitrogen amount in water tank by air bag self gravitation compressing nitrogen reflux, effectively isolated air, carbon dioxide and dust.
As preferably, to state water outlet and be positioned at described water tank bottom, described water outlet and water inlet all connect outward by a water pipe with valve.The water outlet that is arranged in water tank bottom is conducive to the high purity water outflow of water tank, and the valve of described water outlet water pipe is controlled by the user, and the valve switch on described water inlet water pipe just is associated with the interior high purity water water level of water tank.
As preferably, the intracavity bottom of described water tank is provided with a pressure sensor.Pressure sensor plays the effect of high purity water water level in the induction water tank.
The beneficial effects of the utility model: set up an air bag that is communicated with it on the architecture basics of original high purity water nitrogen-sealed water tank, utilize the variable characteristics of air bag cavity volume, realize the nitrogen recycling, effectively reduce the consumption of nitrogen, reduce production costs, can also reduce and change a bottle frequency, the situation that prevents from dying occurs, and effectively enhances productivity.
Description of drawings
Fig. 1 is the cross-sectional view of the utility model when being in the high value of normal water level scope;
Fig. 2 is the cross-sectional view of the utility model when being in the lower value of normal water level scope;
In figure: 1, water tank, 2, water inlet, 3, water outlet, 4, the ventilation flue, 5, air bag, 6, security solenoid valve, 7, air supply pipe, 8, the self-operated type air inlet system, 9, expansion box, 10, valve, 11, pressure sensor.
The specific embodiment
Below in conjunction with specification drawings and specific embodiments, substantive distinguishing features of the present utility model is further described.
A kind of high purity water nitrogen-sealed water tank with choking system as shown in Figure 1, comprise water tank 1, described water tank 1 is provided with a water inlet 2 and a water outlet 3, be connected with a choking system on described water tank 1, described choking system comprises a ventilation flue 4 and an airtight soft air bag 5, described ventilation flue's 4 one ends are communicated with described water tank 1 top, and the other end is communicated with described air bag 5, realize the solar term function by air bag 5 deformation and accommodating gas; Described water tank 1 top is provided with a security solenoid valve 6; Described water tank 1 is located at its top by one and is communicated with a self-operated type air inlet system 8 with the air supply pipe 7 of valve 10; Described air bag 5 is built in an expansion box 9; Described ventilation flue's 4 one ends are communicated with water tank 1 top, and the other end passes described expansion box 9 and is communicated with described air bag 5 bottoms; State water outlet 3 and be positioned at described water tank 1 bottom, described water outlet 3 and water inlet 2 all connect outward by a water pipe with valve 10; The intracavity bottom of described water tank 1 is provided with a pressure sensor 11.
When using the utility model, enable by following steps:
1, fill nitrogen in water tank 1 and air bag 5, air bag 5 is for heaving state;
2, open valve 10 on coolant inlet pipe, high purity water is inputted in water tank 1;
3, along with water level rises, air bag 5 is for heaving state, and nitrogen is compressed, and pressure increases, until the security solenoid valve 6 that sets out, unnecessary nitrogen is discharged from;
4, water level rises to the maxim of normal water level scope, closes the valve 10 on coolant inlet pipe, and this moment, nitrogen pressure was constant, and air bag 5 is for heaving state.
Realize that by above step water tank 1 enables, and prepare at any time stand-by.
In use, when the high purity water that is in high water level flows out by water outlet 3, along with water level reduces, nitrogen in air bag 5 is back to (as shown in Figure 2) in water tank 1 by defeated, when water level during lower than the minimum of normal water level scope, the valve 10 at water inlet 2 places is opened, and is that water tank 1 replenishes high purity water.
In practical operation, when the deficiency of the nitrogen in water tank 1 needs to fill, realize by following steps:
1, open valve 10 on coolant inlet pipe, make water level rise to the maxim of normal water level scope, cause air bag 5 not fully to be heaved because nitrogen amount is not enough this moment;
2, open valve 10 on air supply pipe 7, and input nitrogen, make the nitrogen pressure in water tank 1 return to normal value.
Realize the interior nitrogen pressurization of water tank 1 by above step.
In practical operation, the response pressure value of security solenoid valve 6 should less than the safe pressure value of air bag 5, be guaranteed air bag 5 safety with this.
In concrete operations, air bag 5 materials are soft material, and the resistance when being conducive to reduce air bag 5 distortion guarantees that the interior nitrogen pressure of water tank 1 is constant, and identical with barometric pressure.
Claims (7)
1. high purity water nitrogen-sealed water tank with choking system, comprise water tank (1), described water tank (1) is provided with a water inlet (2) and a water outlet (3), it is characterized in that being connected with a choking system on described water tank (1), described choking system comprises a ventilation flue (4) and an airtight soft air bag (5), described ventilation flue's (4) one ends are communicated with described water tank (1) top, the other end is communicated with described air bag (5), realizes the solar term function by air bag (5) deformation and accommodating gas.
2. a kind of high purity water nitrogen-sealed water tank with choking system according to claim 1 is characterized in that described water tank (1) top is provided with a security solenoid valve (6).
3. a kind of high purity water nitrogen-sealed water tank with choking system according to claim 2, is characterized in that described water tank (1) is communicated with a self-operated type air inlet system (8) by an air supply pipe (7) of being located at its top and band valve (10).
4. a kind of high purity water nitrogen-sealed water tank with choking system according to claim 1, is characterized in that described air bag (5) is built in an expansion box (9).
5. a kind of high purity water nitrogen-sealed water tank with choking system according to claim 1 is characterized in that described ventilation flue's (4) one ends are communicated with water tank (1) top, and the other end passes described expansion box (9) and is communicated with described air bag (5) bottom.
6. a kind of high purity water nitrogen-sealed water tank with choking system according to claim 1, is characterized in that stating water outlet (3) and be positioned at bottom described water tank (1), and described water outlet (3) and water inlet (2) all connect outward by the water pipe of a band valve (10).
7. a kind of high purity water nitrogen-sealed water tank with choking system according to claim 6, is characterized in that the intracavity bottom of described water tank (1) is provided with a pressure sensor (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220749811 CN202987951U (en) | 2012-12-31 | 2012-12-31 | High purity water nitrogen sealed water tank with throttle device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220749811 CN202987951U (en) | 2012-12-31 | 2012-12-31 | High purity water nitrogen sealed water tank with throttle device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202987951U true CN202987951U (en) | 2013-06-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220749811 Expired - Fee Related CN202987951U (en) | 2012-12-31 | 2012-12-31 | High purity water nitrogen sealed water tank with throttle device |
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| CN (1) | CN202987951U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109489764A (en) * | 2018-12-18 | 2019-03-19 | 中国矿业大学(北京) | A kind of laboratory scale gas volume self-measuring device and method |
| CN109956209A (en) * | 2019-03-20 | 2019-07-02 | 广东嘉元科技股份有限公司 | Copper foil production pure water tank with dynamic seal structure |
| CN113309185A (en) * | 2021-05-27 | 2021-08-27 | 三一重型装备有限公司 | Water storage device |
| CN113879714A (en) * | 2021-09-27 | 2022-01-04 | 安徽天地高纯溶剂有限公司 | Tank for containing high-purity solvent |
-
2012
- 2012-12-31 CN CN 201220749811 patent/CN202987951U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109489764A (en) * | 2018-12-18 | 2019-03-19 | 中国矿业大学(北京) | A kind of laboratory scale gas volume self-measuring device and method |
| CN109956209A (en) * | 2019-03-20 | 2019-07-02 | 广东嘉元科技股份有限公司 | Copper foil production pure water tank with dynamic seal structure |
| CN109956209B (en) * | 2019-03-20 | 2023-10-27 | 广东嘉元科技股份有限公司 | Pure water tank with dynamic sealing structure for copper foil production |
| CN113309185A (en) * | 2021-05-27 | 2021-08-27 | 三一重型装备有限公司 | Water storage device |
| CN113879714A (en) * | 2021-09-27 | 2022-01-04 | 安徽天地高纯溶剂有限公司 | Tank for containing high-purity solvent |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160503 Address after: 312030 Zhejiang city of Shaoxing province Keqiao Jianhu Road No. 1809 Patentee after: Zhejiang Jinggong Science & Technology Co., Ltd. Address before: 312028 Zhejiang city of Shaoxing province Shaoxing County Yangxunqiao Shaoxing Jinggong electromechanical Co. Ltd. Patentee before: Shaoxing Jinggong Electromechanical Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130612 Termination date: 20161231 |