CN202975383U - Light filter and infrared defect detector - Google Patents
Light filter and infrared defect detector Download PDFInfo
- Publication number
- CN202975383U CN202975383U CN 201220532226 CN201220532226U CN202975383U CN 202975383 U CN202975383 U CN 202975383U CN 201220532226 CN201220532226 CN 201220532226 CN 201220532226 U CN201220532226 U CN 201220532226U CN 202975383 U CN202975383 U CN 202975383U
- Authority
- CN
- China
- Prior art keywords
- optical filter
- monocrystalline silicon
- light filter
- infrared light
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model discloses a light filter and an infrared defect detector. The light filter is a monocrystalline silicon light filter. The light filter is manufactured by a monocrystalline silicon slice, and with respect of the infrared light, the silicon material is the transparent medium, and the light filter is made to be thick, furthermore the light filter is not easy to break, so that the light filter has a longer service life. The light filter is formed by directly cutting and polishing the monocrystalline silicon slice, the technology is simple, and the cost is low.
Description
Technical field
The utility model relates to the optical element design field, more particularly, relates to a kind of optical filter and infra-red inspection instrument.
Background technology
The infra-red inspection instrument is to utilize the optical devices such as infrared eye, infrared light supply to detect the Infrared that sees through crystalline material (as crystalline silicon), analysis infrared light loss, the final realization the analysis of the defectives such as the impurity in silicon materials, crackle, cavity, crystallite district and accurate location.The most external of its infrared light supply is equipped with optical filter, is used for the interference light of filtering Infrared other different wave lengths in addition, to guarantee the accuracy of test result.
The optical filter of existing infra-red inspection instrument adopts special glass substrate to be prepared from, in order to guarantee to filter preferably other stray lights (being generally the visible light in test environment), need to make filter layer through complicated operation on described glass substrate, complicated process of preparation makes cost high; Simultaneously, for fear of the loss of infrared light, its thinner thickness, easily broken, serviceable life is shorter.
The utility model content
For solving the problems of the technologies described above, the utility model provides a kind of optical filter and infra-red inspection instrument, and described optical filter is the monocrystalline silicon optical filter, and preparation technology is simple, has reduced cost, and is difficult for fragmentation, and serviceable life is longer.。
For achieving the above object, the utility model provides following technical scheme:
A kind of optical filter, described optical filter are the monocrystalline silicon optical filter.
Preferably, in above-mentioned optical filter, described optical filter is the rectangle optical filter.
Preferably, in above-mentioned optical filter, the length of described rectangle optical filter is 228.7 ± 0.02mm, and wide is 65.25 ± 0.1mm.
Preferably, in above-mentioned optical filter, spend and be 0.85mm-0.95mm.
The utility model also provides a kind of infra-red inspection instrument, comprising:
Infrared light supply;
The light source that is connected with described infrared light supply drives;
Drive with described light source the controller that is connected;
The infrared eye that is connected with described controller;
Wherein, the optical filter of described infrared light supply is the described optical filter of claim 1-4 any one.
Can find out from technique scheme, optical filter provided by the utility model is the monocrystalline silicon optical filter.Adopt monocrystalline silicon piece to make optical filter, silicon materials are transparent medium for infrared light, and that optical filter can be done is thicker, and then it is broken to make optical filter be difficult for, and make it have long serviceable life; And can directly have monocrystalline silicon piece cutting, polishing to make, technique is simple, and cost is lower.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The shape schematic diagram of a kind of optical filter that Fig. 1 provides for the utility model embodiment;
The structural representation of a kind of infra-red inspection instrument that Fig. 2 provides for the utility model embodiment;
The making schematic flow sheet of a kind of optical filter that Fig. 3 provides for the utility model embodiment.
Embodiment
The optical filter of existing infra-red inspection instrument is thinner glass filter, and easily broken, serviceable life is short; Simultaneously, its complicated process of preparation, cost is high; And when optical filter damages, need abroad to buy, procurement cycle is longer.
The inventor studies discovery, and silicon materials are transparent medium to infrared light, can effectively filter other light simultaneously, and the crystal structure of monocrystalline silicon rule, and infrared light be can be considered without absorbing, therefore can adopt monocrystalline silicon to prepare optical filter.
Because monocrystalline silicon piece is transparent medium to infrared light, so when the optical filter of infra-red inspection instrument was the monocrystalline silicon optical filter, its thickness can be thicker, and then make the intensity of optical filter larger, be difficult for fragmentation, have long serviceable life; And the manufacture craft of monocrystalline silicon optical filter is simple, will cut by monocrystalline silicon, polishing can be prepared from; Simultaneously, domestic have a high-purity, single crystal silicon production level, materials procurement easily and price comparatively cheap.
Based on above-mentioned research, the utility model provides a kind of optical filter, and this optical filter is the monocrystalline silicon optical filter.
The optical filter of the technical scheme that the utility model embodiment provides is the monocrystalline silicon optical filter, other light in the time of can effectively filtering the infra-red inspection detection.Be the transparent material of infrared light due to monocrystalline silicon, can prepare the monocrystalline silicon optical filter of thickness after, thereby extended the serviceable life of optical filter; Simultaneously, when adopting monocrystalline silicon to prepare infra-red inspection instrument optical filter, technique is simple, only need with monocrystalline silicon cut, polishing gets final product, production cost is low; And domestic have a more advanced monocrystalline silicon production technology, and the buying of monocrystalline silicon is easy, low price.
It is more than the application's core concept, below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
A lot of details have been set forth in the following description so that fully understand the utility model, but the utility model can also adopt other to be different from alternate manner described here and implement, those skilled in the art can be in the situation that do similar popularization without prejudice to the utility model intension, so the utility model is not subjected to the restriction of following public specific embodiment.
Secondly; the utility model is described in detail in conjunction with schematic diagram; when the utility model embodiment is described in detail in detail; for ease of explanation; the sectional view of indication device spare structure can be disobeyed general ratio and be done local the amplification; and described schematic diagram is example, and it should not limit the scope of the utility model protection at this.The three-dimensional space that should comprise in addition, length, width and thickness in actual fabrication.
Based on above-mentioned thought, the embodiment of the present application provides a kind of optical filter, and described optical filter is the monocrystalline silicon optical filter.
With reference to figure 1, Fig. 1 is the shape schematic diagram of the embodiment of the present application optical filter, and described optical filter is the rectangle optical filter, and its length is 228.7 ± 0.02mm, and wide is 65.25 ± 0.1mm.
The shape, length and the wide size that need to prove described optical filter are not limited to foregoing description, the shape of the described optical filter of the present embodiment and size are in order to mate with the filter supporter of infra-red inspection instrument, like this, need not the miscellaneous part of defectoscope is improved.
Because monocrystalline silicon is transparent medium to infrared light, can prepares the larger monocrystalline silicon optical filter of thickness, and can guarantee that it is to infrared light transmitance completely.The thickness of the described monocrystalline silicon optical filter of the present embodiment is 0.85mm-0.95mm, and at this moment, thickness is moderate, can make its intensity larger on the one hand, and is not fragile, guarantees that optical filter has long serviceable life; The opposing party can not cause installing and using because thickness is blocked up the problem such as inconvenience, cost be higher.
With reference to figure 2, the structural representation of a kind of infra-red inspection instrument that Fig. 2 provides for the embodiment of the present application.Described infra-red inspection instrument comprises: infrared light supply 1; The light source that is connected with described infrared light supply 1 drives 2; Drive 2 controllers that are connected 3 with described light source; The infrared eye 4 that is connected with described controller 3.
Wherein, described infrared eye 4 has identical horizontal median axis with described infrared light supply 1, to the reception of infrared light; The optical filter that the most external of described infrared light supply 1 is installed is the described monocrystalline silicon optical filter of present techniques scheme.
Crystal block to be measured (comprising: other can see through ultrared crystalline material monocrystalline silicon, polysilicon etc.) when carrying out defects detection, is positioned over crystal block 5 to be detected between described infrared light supply 1 and described infrared detector 4.
Infrared light supply emission infrared light, light source drive the 2 outgoing intensity levels that obtain through the infrared light of final outgoing after described monocrystalline silicon optical filter filtration, and send described outgoing intensity level to described controller 3.
Described infrared eye 4 obtains the test intensity level through the infrared light after crystal block 5 to be detected, and sends described test intensity level to described controller 3.
Can and move left and right described crystal block to be detected 5 by the up and down, whole crystal block 5 to be detected is scanned.
When there is defective in crystal block to be detected 5 somewheres, as defectives such as impurity, micro-crack, cavity and crystallite districts, the defective in crystal block 5 to be detected will produce to the infrared light of process absorption, reflection or scattering, thereby cause the loss of infrared light intensity.So the test intensity level of the current infrared light that receives when controller 3 can judge that there is defective in the position of current test during less than the outgoing intensity level.Can pass through the not position of the accurate location defect of test of coplanar.And accurately locate the crystal block defective locations, when being cut, crystal block can avoid the risk of scroll saw broken string and the crystal substrates quality after can guaranteeing to cut.
With reference to figure 3, Fig. 3 is the method for making process flow diagram of the described monocrystalline silicon optical filter of the application.At first to the monocrystalline pole cut into slices, polishing, obtain monocrystalline polishing disk.
Then carry out scribing by laser scribing means, and the optical filter that scribing obtains is detected, pick out the optical filter that meets established standards, can be directly installed on the filter supporter of infrared light supply and use; And non-compliant optical filter can melt down and re-starts the monocrystalline silicon ingot casting, preparation monocrystalline pole.
As seen, itself asks described monocrystalline silicon optical filter, and manufacture craft is simple, and cost is lower.
Adopting the described monocrystalline silicon optical filter of present techniques scheme its average life is 15 months, is only 100 yuan and play an average price, and the flaw detection accuracy is 100%; And adopt existing optical filter, and be 10 months its average life, its price is but up to 5000 yuan.As seen, itself please have long serviceable life, low price by described monocrystalline silicon optical filter.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from spirit or scope of the present utility model, realization in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (5)
1. an optical filter, be used for the infra-red inspection instrument, it is characterized in that, described optical filter is the monocrystalline silicon optical filter.
2. optical filter according to claim 1, is characterized in that, described optical filter is the rectangle optical filter.
3. optical filter according to claim 1, is characterized in that, the length of described rectangle optical filter is 228.7 ± 0.02mm, and wide is 65.25 ± 0.1mm.
4. optical filter according to claim 1, is characterized in that, thickness is 0.85mm-0.95mm.
5. an infra-red inspection instrument, is characterized in that, comprising:
Infrared light supply;
The light source that is connected with described infrared light supply drives;
Drive with described light source the controller that is connected;
The infrared eye that is connected with described controller;
Wherein, the optical filter of described infrared light supply is the described optical filter of claim 1-4 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220532226 CN202975383U (en) | 2012-10-17 | 2012-10-17 | Light filter and infrared defect detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220532226 CN202975383U (en) | 2012-10-17 | 2012-10-17 | Light filter and infrared defect detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202975383U true CN202975383U (en) | 2013-06-05 |
Family
ID=48516441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220532226 Expired - Lifetime CN202975383U (en) | 2012-10-17 | 2012-10-17 | Light filter and infrared defect detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202975383U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199802A (en) * | 2016-08-31 | 2016-12-07 | 上海兆九光电技术有限公司 | Optical filter |
| CN112903493A (en) * | 2021-01-27 | 2021-06-04 | 胡中建 | Concrete hardness detection device capable of accelerating solidification |
-
2012
- 2012-10-17 CN CN 201220532226 patent/CN202975383U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199802A (en) * | 2016-08-31 | 2016-12-07 | 上海兆九光电技术有限公司 | Optical filter |
| CN106199802B (en) * | 2016-08-31 | 2019-02-05 | 上海兆九光电技术有限公司 | Optical filter |
| CN112903493A (en) * | 2021-01-27 | 2021-06-04 | 胡中建 | Concrete hardness detection device capable of accelerating solidification |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW201101265A (en) | Optical display device manufacturing system and manufacturing method, and material roll set and method for manufacturing same | |
| CN203615905U (en) | Ceramic tile flatness automatic detection alarm device | |
| CN203277409U (en) | Triangular solar cell | |
| CN202975383U (en) | Light filter and infrared defect detector | |
| CN204142649U (en) | A kind of online vision inspection apparatus of container breach | |
| CN202259209U (en) | Detecting device for crystalline silicon cell slice | |
| CN202472022U (en) | 4530-nanometer band-pass infrared optical filter | |
| CN201589753U (en) | Detection device of large caliber optical element subsurface defect | |
| CN103592311B (en) | For detecting infrared detection device and the detection method of silico briquette internal flaw | |
| CN101881654B (en) | Laser power detection device and detection method thereof | |
| CN104483319B (en) | Sandwich biscuits defect detecting device and method | |
| CN203426595U (en) | Wafer laser cutting device | |
| CN202229736U (en) | System for detecting diameter of cutter steel wire | |
| CN103896203A (en) | MEMS infrared light source and preparation method thereof | |
| CN204479492U (en) | Optical element surface flaw inspection device | |
| CN205262990U (en) | Device of empty filter core integrality of inspection cylinder | |
| CN105784436A (en) | Detection method for minority carrier lifetime of silicon briquette | |
| CN103913417A (en) | Crystal orientation detection device of single crystal silicon rod and crystal orientation detection method thereof | |
| CN204800157U (en) | Piece formula resistance quadruplex position is detected and cutting device | |
| CN203464906U (en) | Lens center thickness optical detection instrument light path | |
| TWI461760B (en) | Polarizer film cutting method and system | |
| CN203069525U (en) | Novel photovoltaic module mirror surface detection worktable | |
| CN104316233A (en) | Surface stress measuring device | |
| KR20130099539A (en) | Illumination device for vision inspector of solar cell wafer | |
| CN209632323U (en) | A kind of lens of laser cutting head feux rouges detection protection and warning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130605 |
|
| CX01 | Expiry of patent term |