Metal vacuum chamber electric insulation seal arrangement
Technical field
The utility model relates to insulation seal device, particularly a kind of metal vacuum chamber electric insulation seal arrangement.
Background technique
The conventional apparatus of transmitting simultaneously gas seal between the metallic conduit of dc high voltage and cooling water and metallic cavity, electric insulation, water leakage in the carbon dioxide gas laser metal vacuum cavity is made the electric insulation device mainly with epoxy rods, plate, adopt the O RunddichtringO of a plurality of different sizes as seals, use metal bolts to be fastenedly connected and form.
Chinese invention patent " but cooling semiconductor laser apparatus and the seal arrangement thereof of the degree of depth " (application number: 201010570383.8) disclosedly be: a kind of seal arrangement of semiconductor laser, comprise: vacuum cap, consisted of by top and sidewall, have vacuum interface and connector assembly hole on the vacuum cap top, vacuum cap sidewall below has outward extending lower edge, the below of lower edge has a groove, be plugged with seal ring in groove, have the outward extending light pipe that goes out on the vacuum cap sidewall, the end that goes out light pipe is light output port; Pedestal, along consisting of, wherein vacuum cap and pedestal can surround vacuum chamber by base station and susceptor edge.This invention can prevent under low temperature at the laser tube surface sweating, temperature being even lower, and effectively avoids temperature drift.
One needs the constant metal sealing cavity of air pressure, as the CO2 laser optical cavity, to the metallic water pipe turnover metallic cavity of low-temperature circulating cooling water will be led to, metallic water pipe causes high-tension electricity in the chamber as conductor again and works simultaneously, like this, draw port and just have simultaneously the anti-electric high-voltage insulation of metallic water pipe and cavity and two problems of gas seal.
Solved this two problems, be that a special-purpose high voltage water pipe joint assembly of cover respectively is installed at cavity water inlet and outlet pore place in the past.The steel flange close contact that welds on the insulated flange that this assembly is done by epoxy rods and chamber hole, cover has the copper plumbing of insulation tube to pass the axis small sircle hole of insulated flange, the little seat board central axis hole of stainless steel is closely passed exposed water pipe section and is pressed in the great circle of insulated flange, the supported flange that adds epoxy sheet material on little seat board, add fastening screw supported flange, little seat board and insulated flange are fastened on the metal flange of cavity, then be added on little seat board by copper plumbing with the copper pressure strip in coaxial aperture.All use corresponding O shape rubber seal press seal between each interface that combines.The gas seal of copper plumbing Outlet and the insulation of copper plumbing and cavity have been completed in the assembling of these parts.
This assembly is installed the copper water nozzle seat in hole, right angle, coaxial footpath on the copper pressure strip, its end is enclosed within the copper plumbing port, the water nozzle that the other end precession is connected with hose, the double layer O-shaped rubber seal is equipped with at water nozzle seat and copper plumbing, copper pressure strip interface, and on the water nozzle seat, the diagonal angle screw is fixed on water nozzle seat, pressure strip on little seat board.So just completed the sealing that in the chamber, recirculated cooling water advances (going out) port.
This assembly uses screw in compression on copper water nozzle seat in the high voltage transmission line nose, and high voltage supply is inputted thus.Because of the fastening screw trip bolt distance that connects cavity with the water nozzle seat of high-tension electricity and limited, therefore each screw headgear one epoxy tube insulating boot cements.Avoid closely electrion.
Existing apparatus is of a tightly knit structure, and it has completed High-Voltage Insulation under the ideal operation state and gas, water-stop problem.But have the following disadvantages: due to the insulation seal device complex structure that forms, coordinate the interface many, installation time is long, and assembly precision requires high, gas, water leakage very easily occur; Due to the less (3mm~5mm) in the metal body interval that needs electric insulation in this structure of the restriction of assembly space, and water temperature lower (6 ℃~8 ℃) in metal tube, easily cause apparatus surface dewfall conduction when ambient humidity is larger, destroy electric insulation, cause and cause equipment failure by electrion.
Summary of the invention
Deficiency for background technique, the utility model is by being processed into the right circular cone that matches with frustum seal profile outside silicone rubber at inner conical drogue flange seat endoporus, the outer frustum seal of silicone rubber is packed in the taper hole of stainless steel inner conical drogue flange seat, and by clamping bolt, insulated flange lid and the outer frustum seal of silicone rubber are tightened together, realize the functions such as gas seal, electric insulation, water leakage between power supply water supply metal tube and metal vacuum cavity, be particularly useful for carbon dioxide gas laser.
The technical solution of the utility model is: a kind of metal vacuum chamber electric insulation seal arrangement, comprise the inner conical drogue flange seat, the outer frustum seal of silicone rubber, power supply water supply metal tube and insulated flange lid, power supply water supply metal tube frustum seal center hole outside silicone rubber passes, again with the coaxial power supply water supply metal tube that passes, it is characterized in that: described inner conical drogue flange seat endoporus is processed into the right circular cone that matches with the outer frustum seal profile of silicone rubber, and the outer frustum seal of silicone rubber is packed in the taper hole of stainless steel inner conical drogue flange seat.Its beneficial effect is: realize High-Voltage Insulation between laser metal vacuum cavity and power supply water supply metal tube.
Metal vacuum as above chamber electric insulation seal arrangement, it is characterized in that: it also comprises clamping bolt, described clamping bolt is fastened on insulated flange lid and the outer frustum seal of silicone rubber on stainless steel inner conical drogue flange seat.Its beneficial effect is: the outer frustum seal of silicone rubber is converted to lateral pressure with suffered positive pressure, make between the outer frustum seal of silicone rubber and stainless steel inner conical drogue flange seat, the outer frustum seal of silicone rubber and power supply water supply metal tube and be squeezed, utilize the good elasticity of silicone rubber to reach between stainless steel inner conical drogue flange seat, the outer frustum seal of silicone rubber, power supply water supply metal tube and closely cooperate, realized gas seal.
Metal vacuum as above chamber electric insulation seal arrangement, it is characterized in that: it also comprises tightening nut, described tightening nut is fastened on insulated flange lid and the outer frustum seal of silicone rubber on band outside thread stainless steel inner conical drogue flange seat.
Metal vacuum as above chamber electric insulation seal arrangement is characterized in that: also comprise PLL right angle quick inserting joint, the outlet of power supply water supply metal tube is insertion PLL right angle quick inserting joint directly.Its beneficial effect is: utilize in power supply water supply metal tube Water Pressure to make between power supply water supply metal tube and PLL right angle quick inserting joint and realize closely cooperating, the PLL right angle quick inserting joint the other end is connected with water supply line again, and then has realized in the vacuum chamber without leaking the target that supplies water.
Metal vacuum as above chamber electric insulation seal arrangement is characterized in that: it also comprises water pipe insulating bush, high voltage link card, and water pipe insulating bush and high voltage link card are arranged on the power supply water supply metal tube that passes cavity.Its beneficial effect is: realized that the external world connects and insulation with the electric of metal vacuum cavity.
Metal vacuum as above chamber electric insulation seal arrangement is characterized in that: described water pipe insulating bush length is greater than the arcing distance between metal vacuum cavity when the specific high direct voltage and power supply water supply metal tube.
Metal vacuum as above chamber electric insulation seal arrangement is characterized in that: stainless steel inner conical drogue flange seat is welded in metal vacuum cavity port.
Metal vacuum as above chamber electric insulation seal arrangement is characterized in that: described power supply water supply metal tube is copper pipe.
Description of drawings
Fig. 1 is metal vacuum chamber electric insulation seal arrangement (fastening scheme 1) sectional view.
Fig. 2 is metal vacuum chamber electric insulation seal arrangement (fastening scheme 2) sectional view
Embodiment:
Accompanying drawing 1 description of symbols: 1-PLL right angle quick inserting joint, 2-high voltage link card, 3-water pipe insulating bush, 4-insulated flange lid, 5-stainless steel inner conical drogue flange seat, the outer frustum seal of 6-silicone rubber, 7-clamping bolt, 8-bolt insulating bush, 9-power supply water supply copper pipe, 10-metal vacuum cavity, the 11-high-voltage power-line.
Accompanying drawing 2 description of symbols: 1-PLL right angle quick inserting joint, 2-high voltage link card, 3-water pipe insulating bush, 4-insulated flange lid, 5-stainless steel inner conical drogue flange seat, the outer frustum seal of 6-silicone rubber, 12-tightening nut, 9-power supply water supply copper pipe, 10-metal vacuum cavity, 11-high-voltage power-line
As shown in Figure 1, this device is by the outer frustum seal 6 of stainless steel inner conical drogue flange seat 5, silicone rubber, insulated flange lid 4, high voltage link card 2, PPL right angle quick inserting joint 1, and clamping bolt 7, bolt insulating bush 8, water pipe insulating bush 3, power supply water supply copper pipe 9 form.
Stainless steel inner conical drogue flange seat 5 is welded in metal vacuum cavity 10 ports.Stainless steel inner conical drogue flange seat 5 endoporus are processed into the right circular cone that matches with outer frustum seal 6 profiles of silicone rubber, the outer frustum seal 6 of silicone rubber is packed in the taper hole of stainless steel inner conical drogue flange seat 5, power supply water supply copper pipe 9 frustum seal 6 center holes outside silicone rubber pass, more coaxial insulated flange lid 4 is passed power supply water supply copper pipe 9.
By clamping bolt 7, insulated flange lid 4 and the outer frustum seal 6 of silicone rubber are fastened on stainless steel inner conical drogue flange seat 5, also can coordinate to realize with rotation with outside thread stainless steel inner conical drogue flange seat 5 with tightening nut 12, as shown in Figure 2.The outer frustum seal 6 of silicone rubber is converted to lateral pressure with suffered positive pressure, make between the outer frustum seal 6 of silicone rubber and stainless steel inner conical drogue flange seat 5, the outer frustum seal 6 of silicone rubber and power supply water supply copper pipe 9 and be squeezed, utilize the good elasticity of silicone rubber to reach between stainless steel inner conical drogue flange seat 5, the outer frustum seal 6 of silicone rubber, power supply water supply copper pipe 9 and closely cooperate, realized gas seal.Utilize simultaneously the electrical insulation properties of silicone rubber excellence to realize again electric insulation between metal vacuum cavity 10 and conduction water supply copper pipe 9.
The power supply water supply copper pipe 9 that passes cavity is installed water pipe insulating bush 3 and high voltage link card 2 at the regulation place, and high-voltage power-line 11 termination copper cash noses are pressed under the fastening screw trip bolt of high voltage link card 2, realize extraneously connecting and insulation with the electric of metal vacuum cavity 10.
The water supply copper pipe 9 of powering exports directly insertion PLL right angle quick inserting joint 1, utilize power supply water supply copper pipe 9 interior Water Pressures that power supply water supply copper pipe 9 and 1 realization of PLL right angle quick inserting joint are closely cooperated, the PLL right angle quick inserting joint the other end is connected with water supply line again, and then has realized to metal vacuum cavity 10 interior without leaking the target that supplies water.
Water pipe insulating bush 3 of the present utility model is preferably 10mm, and water pipe insulating bush length is greater than the arcing distance between metal vacuum cavity when the specific high direct voltage and power supply water supply metal tube.The metal tube that power supply water supply copper pipe 9 also can select other to conduct electricity very well.
The device the key technical indexes:
1, metal vacuum cavity 10 air-tightness: 24 hours pressure variation≤30Pa;
2, High-Voltage Insulation performance: Accelerated Life VDC 2700 V~3000V, 8 hours without puncturing; Add work VDC 1750~1900V and use for a long time the discharge off phenomenon;
3, water circulation system withstand voltage properties: Accelerated Life hydraulic pressure 0.1 MPa~0.6MPa, pressure was constant in 5 minutes, ne-leakage; Add work hydraulic pressure 0.2MPa and use for a long time ne-leakage;
4, designs simplification: original-pack 15 kinds totally 27 of the assemblies that are equipped with, the utility model is only 8 kinds 13, and assembling difficulty reduces, and installation time reduces, and is simple in structure, reliable operation.