CN202936518U - Slot etching machine - Google Patents
Slot etching machine Download PDFInfo
- Publication number
- CN202936518U CN202936518U CN 201220290486 CN201220290486U CN202936518U CN 202936518 U CN202936518 U CN 202936518U CN 201220290486 CN201220290486 CN 201220290486 CN 201220290486 U CN201220290486 U CN 201220290486U CN 202936518 U CN202936518 U CN 202936518U
- Authority
- CN
- China
- Prior art keywords
- etching
- fixed
- etching tank
- tank
- machine body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Micromachines (AREA)
- ing And Chemical Polishing (AREA)
Abstract
The utility model provides an slot etching machine, comprising a machine body, a circulation cooling etching tank, a coil pipe cooling etching tank, a normal temperature etching tank, a fast discharging slot, a cam shake mechanism, a manipulator, an acid storage tank, a piping system and a work platform, wherein the machine body is a rectangular solid, the work platform is fixed at the middle portion of the machine body; the circulation cooling etching tank, the coil pipe cooling etching tank, the normal temperature etching tank and the fast discharging slot are fixed on the work platform; the cam shake mechanism is fixed on the upper portion of the machine body; the manipulator is connected with the cam shake mechanism; the piping system is fixed at the bottom of the machine body; and the acid storage tank is an individual cabinet and is connected with the machine body through the piping system. The slot etching machine is additionally provided with a refrigeration system, has good etching effect, increases rate of finished products. The silicon chips can be shaken automatically under the liquid surface by using the manipulator; the silicon chips are etched uniformly; and labor intensity of an operator is lightened; erosion toward human of toxic gases is reduced; and at the same time, work efficiency is greatly increased.
Description
Technical field
The utility model relates to etching machine, relates in particular to a kind of open channels etching machine.
Background technology
Existing etching tank refrigeration is with ice cube or water refrigeration, and cooling time is long, and temperature is irregular, poor effect and wasting time and energy; Silicon chip is manual carrying from etching tank to fast emissions groove, and the shake silicon chip is also manual, wastes time and energy, and effect is bad; Storage acid tank liquid level is controlled by approach switch, and approach switch often is corroded, and is easily bad.
The utility model content
The technical problems to be solved in the utility model is to overcome existing defective, and a kind of open channels etching machine is provided, and adds a cover refrigeration system, and corrosive effect is good, has improved yield rate.
In order to solve the problems of the technologies described above, the utility model provides following technical scheme:
A kind of open channels etching machine of the utility model, comprise body, circulating cooling etching tank, the cooling etching tank of coil pipe, normal temperature etching tank, fast emissions groove, cam shaker mechanism, mechanical manipulator, storage acid tank, piping system and workplatform, described body is rectangular parallelepiped, is fixed with workplatform in the middle part of body; Described circulating cooling etching tank, the cooling etching tank of coil pipe, normal temperature etching tank are fixed on workplatform with fast emissions groove; Described circulating cooling etching tank is fixed in the front end of workplatform, and the cooling etching tank of coil pipe is fixed in the middle part of workplatform, and the normal temperature etching tank is fixed in the end of workplatform, and fast emissions groove is fixed in the bottom of workplatform; Described cam shaker mechanism is fixed in body upper part; Described mechanical manipulator connects the cam shaker mechanism; Described piping system is fixed on organism bottom; Described storage acid tank is that an independent cabinet is connected with body by piping system.
Further, the quantity of described fast emissions groove is 3.
Further, the material of described circulating cooling etching tank and the cooling etching tank of coil pipe is PVDF.
Further, the material of described normal temperature etching tank is PVC.
Further, the material of described fast emissions groove is NPP.
A kind of open channels etching machine that the utility model provides, add a cover refrigeration system, corrosive effect is good, improved yield rate, utilize mechanical manipulator to silicon chip under liquid level automatically up and down the shake, with silicon chip from etching tank by the automatic conveyance of mechanical manipulator to fast emissions groove, silicon slice corrosion is even, and alleviated operator's labour intensity, reduced the erosion of toxic gas to the people, greatly improved working efficiency simultaneously.
Description of drawings
Accompanying drawing is used to provide further understanding of the present utility model, and consists of the part of specification sheets, is used from explanation the utility model with embodiment one of the present utility model, does not consist of restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the structural representation of a kind of open channels etching machine of the utility model;
Fig. 2 is the structural representation of facing of a kind of open channels etching machine of the utility model;
Fig. 3 is the backsight structural representation of a kind of open channels etching machine of the utility model.
Embodiment
Below in conjunction with accompanying drawing, preferred embodiment of the present utility model is described, should be appreciated that preferred embodiment described herein only is used for description and interpretation the utility model, and be not used in restriction the utility model.
As shown in Figure 1, 2, 3, a kind of open channels etching machine of the utility model, comprise body 1, circulating cooling etching tank 2, the cooling etching tank 3 of coil pipe, normal temperature etching tank 4, fast emissions groove 5, cam shaker mechanism 6, mechanical manipulator 7, storage acid tank 8, piping system 9 and workplatform 10, described body 1 is rectangular parallelepiped, and body 1 middle part is fixed with workplatform 10;
Described circulating cooling etching tank 2, the cooling etching tank 3 of coil pipe, normal temperature etching tank 4 are fixed on workplatform 10 with fast emissions groove 5; Described circulating cooling etching tank 2 is fixed in the front end of workplatform 10, and the cooling etching tank 3 of coil pipe is fixed in the middle part of workplatform 10, and normal temperature etching tank 4 is fixed in the end of workplatform 10, and fast emissions groove 5 is fixed in the bottom of workplatform 10; Described cam shaker mechanism 6 is fixed in body 1 upper part; Described mechanical manipulator 7 connects cam shaker mechanism 6; Described piping system 9 is fixed on body 1 bottom; Described storage acid tank 8 is that an independent cabinet is connected with body 1 by piping system 9.
A kind of open channels etching machine that the utility model provides, add a cover refrigeration system, corrosive effect is good, improved yield rate, utilize mechanical manipulator to silicon chip under liquid level automatically up and down the shake, with silicon chip from etching tank by the automatic conveyance of mechanical manipulator to fast emissions groove, silicon slice corrosion is even, and alleviated operator's labour intensity, reduced the erosion of toxic gas to the people, greatly improved working efficiency simultaneously.
The above is only preferred embodiment of the present utility model, be not limited to the utility model, although with reference to previous embodiment, the utility model is had been described in detail, for a person skilled in the art, it still can be modified to the technical scheme that aforementioned each embodiment puts down in writing, and perhaps part technical characterictic wherein is equal to replacement.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (5)
1. open channels etching machine, comprise body, circulating cooling etching tank, the cooling etching tank of coil pipe, normal temperature etching tank, fast emissions groove, cam shaker mechanism, mechanical manipulator, storage acid tank, piping system and workplatform, it is characterized in that: described body is rectangular parallelepiped, is fixed with workplatform in the middle part of body;
Described circulating cooling etching tank, the cooling etching tank of coil pipe, normal temperature etching tank are fixed on workplatform with fast emissions groove;
Described circulating cooling etching tank is fixed in the front end of workplatform, and the cooling etching tank of coil pipe is fixed in the middle part of workplatform, and the normal temperature etching tank is fixed in the end of workplatform, and fast emissions groove is fixed in the bottom of workplatform;
Described cam shaker mechanism is fixed in body upper part;
Described mechanical manipulator connects the cam shaker mechanism; Described piping system is fixed on organism bottom;
Described storage acid tank is that an independent cabinet is connected with body by piping system.
2. a kind of open channels etching machine according to claim 1, it is characterized in that: the quantity of described fast emissions groove is 3.
3. a kind of open channels etching machine according to claim 1, it is characterized in that: the material of described circulating cooling etching tank and the cooling etching tank of coil pipe is PVDF.
4. a kind of open channels etching machine according to claim 1, it is characterized in that: the material of described normal temperature etching tank is PVC.
5. a kind of open channels etching machine according to claim 1, it is characterized in that: the material of described fast emissions groove is NPP.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220290486 CN202936518U (en) | 2012-06-19 | 2012-06-19 | Slot etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220290486 CN202936518U (en) | 2012-06-19 | 2012-06-19 | Slot etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202936518U true CN202936518U (en) | 2013-05-15 |
Family
ID=48320766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220290486 Expired - Fee Related CN202936518U (en) | 2012-06-19 | 2012-06-19 | Slot etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202936518U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107478569A (en) * | 2017-09-26 | 2017-12-15 | 南通华林科纳半导体设备有限公司 | A kind of hydronic trench etching machine |
| CN111180325A (en) * | 2019-12-31 | 2020-05-19 | 杭州中欣晶圆半导体股份有限公司 | Method for improving operating efficiency of etching machine |
-
2012
- 2012-06-19 CN CN 201220290486 patent/CN202936518U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107478569A (en) * | 2017-09-26 | 2017-12-15 | 南通华林科纳半导体设备有限公司 | A kind of hydronic trench etching machine |
| CN111180325A (en) * | 2019-12-31 | 2020-05-19 | 杭州中欣晶圆半导体股份有限公司 | Method for improving operating efficiency of etching machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203334255U (en) | Shallow-box-type large-sized bionic water surface blue algae removing equipment | |
| CN202936518U (en) | Slot etching machine | |
| CN104264738B (en) | Water circulating system for glass industry | |
| CN202902724U (en) | Cooling water circulating device | |
| CN202962292U (en) | Device for preparing urea solution by constant volume process | |
| CN204282438U (en) | A kind of glass industry water circulation system | |
| CN203884472U (en) | Wireless automatic oxygenation equipment for fishponds | |
| CN202438254U (en) | Waste gas treatment device | |
| CN202933632U (en) | Device for preparing urea solution with weighing method | |
| CN204335553U (en) | The cultivation structure of a kind of fry | |
| CN201842656U (en) | Evaporation equipment for preparing potassium chloride with alkali dreg and potassium feldspar | |
| CN205219474U (en) | Cooling water system of silicon chip cutting machine | |
| CN203887354U (en) | Solar battery piece series welding machine | |
| CN102968134A (en) | Fountain circulation water supply automatic control device | |
| CN202255074U (en) | Water cooling circulation device | |
| CN202591179U (en) | Oil pipe cleaning tool | |
| CN204195397U (en) | Height Intelligentized cooling system special in a kind of machining | |
| CN202803212U (en) | Phosphorus melting tank | |
| CN201811606U (en) | Cooling device for biomass pyrolyzate | |
| CN204648784U (en) | A kind of ice maker | |
| CN202335334U (en) | Secondary utilization system of food cooking water | |
| CN202934835U (en) | Discharging structure on oil expeller | |
| CN203976514U (en) | A kind of circular water treating system | |
| CN204014948U (en) | A kind of beef pond that thaws | |
| CN204957437U (en) | Heating device for be used for industrial chemicals bucket |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130515 Termination date: 20160619 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |