CN202913049U - 真空镀膜用布气系统 - Google Patents
真空镀膜用布气系统 Download PDFInfo
- Publication number
- CN202913049U CN202913049U CN 201220096401 CN201220096401U CN202913049U CN 202913049 U CN202913049 U CN 202913049U CN 201220096401 CN201220096401 CN 201220096401 CN 201220096401 U CN201220096401 U CN 201220096401U CN 202913049 U CN202913049 U CN 202913049U
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- Prior art keywords
- gas distribution
- gas
- distribution pipe
- distributing pipe
- gas distributing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 17
- 238000009826 distribution Methods 0.000 claims abstract description 73
- 238000004519 manufacturing process Methods 0.000 claims description 21
- 238000005192 partition Methods 0.000 claims description 19
- 238000007747 plating Methods 0.000 claims description 7
- 208000002925 dental caries Diseases 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 2
- 125000006850 spacer group Chemical group 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220096401 CN202913049U (zh) | 2012-03-14 | 2012-03-14 | 真空镀膜用布气系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220096401 CN202913049U (zh) | 2012-03-14 | 2012-03-14 | 真空镀膜用布气系统 |
Publications (1)
Publication Number | Publication Date |
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CN202913049U true CN202913049U (zh) | 2013-05-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201220096401 Expired - Lifetime CN202913049U (zh) | 2012-03-14 | 2012-03-14 | 真空镀膜用布气系统 |
Country Status (1)
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CN (1) | CN202913049U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104973795A (zh) * | 2015-07-14 | 2015-10-14 | 武汉华星光电技术有限公司 | 曝气管、曝气盘及浸泡式蚀刻机 |
-
2012
- 2012-03-14 CN CN 201220096401 patent/CN202913049U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104973795A (zh) * | 2015-07-14 | 2015-10-14 | 武汉华星光电技术有限公司 | 曝气管、曝气盘及浸泡式蚀刻机 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Gas-distributing system for vacuum coating Effective date of registration: 20161107 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: 2016990000950 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191029 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: 2016990000950 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Gas-distributing system for vacuum coating Effective date of registration: 20191029 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: Y2019990000425 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210521 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2019990000425 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Air distribution system for vacuum coating Effective date of registration: 20210521 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2021990000453 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20130501 |
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CX01 | Expiry of patent term |