CN202909576U - Vacuum system filter for single crystal furnace - Google Patents
Vacuum system filter for single crystal furnace Download PDFInfo
- Publication number
- CN202909576U CN202909576U CN 201220396667 CN201220396667U CN202909576U CN 202909576 U CN202909576 U CN 202909576U CN 201220396667 CN201220396667 CN 201220396667 CN 201220396667 U CN201220396667 U CN 201220396667U CN 202909576 U CN202909576 U CN 202909576U
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- China
- Prior art keywords
- filter
- filter core
- single crystal
- tank body
- vacuum system
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Abstract
The utility model relates to a filtering device and aims at providing a vacuum system filter for a single crystal furnace. The filter comprises a tank body as well as a gas inlet and a gas outlet, wherein the gas inlet and the gas outlet are formed in the tank body; a supporting ring is welded at the tank bottom; a filter core supporting circular plate is arranged on the supporting ring; a plurality of gas exhaust holes are formed in the filter core supporting circular plate; a filter core is correspondingly mounted in each gas exhaust hole; the filter core supporting circular plate, the supporting ring and the tank bottom form a clean region of the filter; and the gas outlet is formed in the bottom of the tank body and the opening position of the gas outlet is formed within the supporting ring. According to the utility model, the filtering area is increased, a filtering effect is enhanced, the blockage probability is low and the cleaning frequency is reduced. Problems of the traditional filter that the filtering effect is poor, more frequent cleaning is needed, the blockage probability is high, the cleaning is troublesome and product quality is affected are solved; a vacuum suction effect in the single crystal furnace is guaranteed and single crystal yield is guaranteed to a certain degree; and through adoption of a rocking arm mechanism, a top cover is conveniently assembled and disassembled, so that a special air filter core assembly is conveniently cleaned.
Description
Technical field
The utility model relates to filter, the filter of vacuum system of single-crystal furnace that particularly uses in a kind of single crystal growing furnace production process.
Background technology
The production of pulling of crystals, need under the high-temperature vacuum state, carry out, can produce many vaporization at high temperature things in the single crystal growing furnace, if these vaporization at high temperature things directly enter in the vavuum pump, can pollute pumping fluid, affect the safe operation of vavuum pump, therefore, filter of vacuum system of single-crystal furnace is set, in order to the Purge gas vacuum.Existing filter of vacuum system of single-crystal furnace is by filtering rack, be welded on the bracing ring that filters the rack two ends, be looped around and filter on the rack and the circular screen pack that is connected with bracing ring consists of.The filter effect of this structure is bad, needs to clear up comparatively frequently filter, otherwise easily stops up, and reduces air extracting function; Cleaning comparatively bothers in addition.General every crystal-pulling 5 ~ 6 stoves just need to change pumping fluid, affect suction and the suction effect of vavuum pump, even affect monocrystalline yield rate and product quality.
The utility model content
The purpose of this utility model is to solve the problems referred to above that prior art exists, and a kind of convenient disassembly is provided, and good filtration effect, can prevent that dust, vaporization at high temperature thing etc. in the single crystal growing furnace from entering the filter of vacuum system in the vavuum pump.
The technical scheme that the utility model is taked is:
A kind of filter of vacuum system for single crystal growing furnace is provided, comprises tank body and air inlet and the gas outlet be located on the tank body; Be connected to a support ring at the tank back welding, establish the filter core support disk on the support ring; Offer some steam vents on the filter core support disk, filter core of the corresponding installation of each steam vent; Consist of the clean area of filter at the bottom of filter core support disk, support ring and the tank, described gas outlet is located at tank base and its aperture position is within the support ring.
As a kind of improvement, described air inlet is located at the middle and upper part of tank body side.
As a kind of improvement, be welded with in the steam vent on the described filter core support disk for the fixing T-shaped screw rod of filter core.
As a kind of improvement, be welded with a pair of handle on the described filter core support disk.
As a kind of improvement, described filter core is divided into two sections.
As a kind of improvement, described gas outlet is provided with one 90 ° elbow, and direction is relative with air inlet.
As a kind of improvement, described tank body upper end is opening-like, is furnished with top cover; Between top cover and the flange periphery tank body sealing ring is set, and tight by the double end clip; The tank body side is fixedly welded with a rocker arm body, and rocker arm body links to each other with top cover by screw rod.
The beneficial effects of the utility model are:
At first, owing to adopting element kit, become a plurality of special filter cores by traditional single filter core, increased filter area, strengthened filter effect, and be difficult for stopping up, reduced clearing times.Solve existing filter filter effect bad, needed comparatively frequently cleaning, and easily stopped up, cleared up trouble, affected the problem of product quality.
Secondly, a plurality of filter cores and steam vent have been guaranteed not affect the suction of vavuum pump to have guaranteed vacuum draw effect in the single crystal growing furnace, have guaranteed to a certain extent the monocrystalline yield rate.
At last, rocker arm body is so that the top cover easy accessibility, thereby made things convenient for the cleaning to special air filtering core assembly.
Description of drawings
Fig. 1 is schematic diagram of the present utility model (only having showed a filter core).
Fig. 2 is that A of the present utility model is to view.
Fig. 3 is B-B cutaway view of the present utility model.
Reference numeral among the figure: air inlet 1, tank body 2, filter core 3, filter core support disk 4, tank body supporting component 5, top cover 6, rocker arm body 7, gas outlet 8, support ring 9.
The specific embodiment
As shown in the figure, this filter of vacuum system of single-crystal furnace comprises air inlet 1, tank body 2, filter core 3, filter core support disk 4, tank body supporting component 5, top cover 6, rocker arm body 7, gas outlet 8, support ring 9; Tank body 2 tops are provided with top cover 6 and rocker arm body 7, and rocker arm body 7 is connected with top cover 6 by a screw rod, can around its support bar rotating 360 degrees, be used for the cleaning filter.Middle and upper part in tank body 2 one sides is provided with air inlet 1, is provided with the gas outlet 8 that 90 ° of elbow connects in the bottom of tank body 2, and direction is relative with air inlet 1.
Using method:
Turn on the clamping device double end card between tank body 2 and the top cover 6, utilize rocker arm body 7 that top cover 6 is removed, filter core 3 is installed on the filter core support disk 4, then carry two handles, filter core 3 and filter core support disk 4 are placed on the support ring 9.Like this, just formed clean area at the bottom of filter core support disk 4, support ring 9 and the tank, again top cover 6 has been covered on tank body 2, tight with the double end clip.When body of heater was carried out vacuum filter, air inlet 1 linked to each other with the body of heater main vacuum manifold, and gas outlet 8 links to each other with vavuum pump.Gas enters from air inlet 1, will have the vaporization at high temperature thing in the body of heater to be blocked in filter core 3 places through filter core 3, and clean gas arrives clean area by the steam vent on the support disk 4, is discharged by vavuum pump from the gas outlet 8 of tank base at last.
Claims (7)
1. a filter of vacuum system that is used for single crystal growing furnace comprises tank body and air inlet and the gas outlet be located on the tank body; It is characterized in that, be connected to a support ring at the tank back welding, establish the filter core support disk on the support ring; Offer some steam vents on the filter core support disk, filter core of the corresponding installation of each steam vent; Consist of the clean area of filter at the bottom of filter core support disk, support ring and the tank, described gas outlet is located at tank base and its aperture position is within the support ring.
2. the filter of vacuum system for single crystal growing furnace according to claim 1 is characterized in that, described air inlet is located at the middle and upper part of tank body side.
3. the filter of vacuum system for single crystal growing furnace according to claim 1 is characterized in that, described gas outlet is provided with one 90 ° elbow, and direction is relative with air inlet.
4. according to claim 1 to the filter of vacuum system that is used for single crystal growing furnace described in 3 any one, it is characterized in that, described tank body upper end is opening-like, is furnished with top cover; Between top cover and the flange periphery tank body sealing ring is set, and tight by the double end clip; The tank body side is fixedly welded with a rocker arm body, and rocker arm body links to each other with top cover by screw rod.
5. the filter of vacuum system for single crystal growing furnace according to claim 4 is characterized in that, is welded with in the steam vent on the described filter core support disk for the fixing T-shaped screw rod of filter core.
6. the filter of vacuum system for single crystal growing furnace according to claim 4 is characterized in that, is welded with a pair of handle on the described filter core support disk.
7. the filter of vacuum system for single crystal growing furnace according to claim 4 is characterized in that, described filter core is divided into two sections.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220396667 CN202909576U (en) | 2012-08-10 | 2012-08-10 | Vacuum system filter for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220396667 CN202909576U (en) | 2012-08-10 | 2012-08-10 | Vacuum system filter for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202909576U true CN202909576U (en) | 2013-05-01 |
Family
ID=48157924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220396667 Expired - Fee Related CN202909576U (en) | 2012-08-10 | 2012-08-10 | Vacuum system filter for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202909576U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102824798A (en) * | 2012-08-10 | 2012-12-19 | 上虞晶信机电科技有限公司 | Filter for vacuum system of single crystal furnace |
| CN105056646A (en) * | 2015-07-28 | 2015-11-18 | 侯继伟 | Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace |
| CN107213722A (en) * | 2017-06-08 | 2017-09-29 | 浙江晶盛机电股份有限公司 | Automatic dedusting filtering device |
-
2012
- 2012-08-10 CN CN 201220396667 patent/CN202909576U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102824798A (en) * | 2012-08-10 | 2012-12-19 | 上虞晶信机电科技有限公司 | Filter for vacuum system of single crystal furnace |
| CN105056646A (en) * | 2015-07-28 | 2015-11-18 | 侯继伟 | Automatic dust collector for vacuum tail gas of monocrystal silicon growing furnace |
| CN107213722A (en) * | 2017-06-08 | 2017-09-29 | 浙江晶盛机电股份有限公司 | Automatic dedusting filtering device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130501 Termination date: 20190810 |