CN202871765U - Material absorbing tool and bonding machine - Google Patents
Material absorbing tool and bonding machine Download PDFInfo
- Publication number
- CN202871765U CN202871765U CN 201220620067 CN201220620067U CN202871765U CN 202871765 U CN202871765 U CN 202871765U CN 201220620067 CN201220620067 CN 201220620067 CN 201220620067 U CN201220620067 U CN 201220620067U CN 202871765 U CN202871765 U CN 202871765U
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- Prior art keywords
- suction
- bothrium
- frock
- mount pad
- grabbed
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- Expired - Lifetime
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Abstract
The utility model discloses a material absorbing tool and a bonding machine. The material absorbing tool comprises a tube shell tray, wherein a plurality of absorbing grooves are formed in the tube shell tray; a through hole is formed in the bottom wall of each absorbing groove; the bottom wall of each absorbing groove is a groove absorbing plane; an ellipse groove is formed in the bottom wall of each absorbing groove; and each through hole is formed in the bottom wall of a corresponding ellipse groove. The material absorbing tool has the advantages that the material absorbing tool is an expandable material absorbing device in which a plurality of chip microwave modules are automatically bonded, and special requirements that the material absorbing capability of the material absorbing device is highly required in batch production and multi-type automatic bonding, the installation and fixation mode is flexible, a special bottom structure can be absorbed in a vacuum mode and the like, are met.
Description
Technical field
The utility model relates to a kind of frock and the bonder of this frock is installed, and relates in particular to a kind of suction frock for multi-chip microwave module automated bonding and the bonder of this suction frock is installed.
Background technology
Bonding is the main method that is electrically connected at semiconductor chip top welding zone and hybrid integrated circuit and multi-chip microwave module substrate metal layer.In the automated bonding technique of high density integrated circuit, bonding process is will treat that by its device for suction material the bonding microwave module is fixed in the bothrium of shell pallet accurately, at high speed by the automated bonding machine, identifies rear realization high accuracy Bonding.
Traditional suction frock is generally the shell pallet of single suction groove structure, and the mode that adopts screw to install is fixed on the bonding machine worktable.The shell pallet offers some bothriums, and the bottom surface of each bothrium is the bothrium face, and this bothrium face is a plane, and each bothrium place-centric is offered a duct, this duct make this shell pallet by workbench with vacuumize air flue and be connected.Passing hole channel vacuumizes and produces suction and module is adsorbed on the bothrium of shell pallet when treating bonding module contact bothrium face, discharges vacuum behind Bonding, then module is taken off.
Progress and development along with semiconductor technology, the multi-chip microwave module automated bonding of mass, many kinds is had higher requirement to device for suction material, it is low to adopt conventional device for suction material to carry out the efficient that bonding produces, be mainly reflected in: on the one hand, the suction capacity (suction amount) of the shell pallet of employing single suction groove structural design is low, under batch module bonding operating mode, when changing module again identification key chalaza, chopper position reinitialize etc. and to have prolonged bonding time, reduced batch production efficiency of producing bonding; On the other hand, the automated bonding of many kinds microwave module requires frequent shell pallet, needs the repeated removal mounting screw, has affected equally automated bonding production efficiency, and the raising of production capacity has been caused obstacle.
Vacuum suction gas leakage is to treat that the bonding module affects one of subject matter of bonding precision in full-automatic bonding process, for the irregular microwave module of vacuum suction face, such as tube shell bottom plane and pin in one plane special microwave module not, adopt conventional shell pallet to carry out causing easily in the vacuum suction process gas leakage, and along with the corresponding thereupon increase of increase leak rate of sucker quantity, can't guarantee the precision of automated bonding.
The utility model content
Can learn by background technology: conventional device for suction material can't satisfy the automated bonding demand of many kinds, mass and special bottom surface structure microwave module, in the situation that satisfies the automated bonding basic demand, further increase the suction amount, simplify the design and the processing that install and fix mode, improve the combination clamping tooling of bothrium vacuum suction effect, consist of the particular problem that will solve required for the present invention.
Therefore, the bonder that the utility model provides a kind of suction frock and has this suction frock, this suction frock is the device for suction material expanded of multi-chip microwave module automated bonding, can satisfy mass, many kinds automated bonding to specific (special) requirements such as device for suction material suction capacity height, the reliable vacuum suction of the flexible and special bottom surface structure of the mode that installs and fixes.
The utility model is to realize like this, a kind of suction frock, it comprises the shell pallet, this shell pallet offers some bothriums, the diapire of each bothrium offers a through hole, the diapire of each bothrium is the bothrium face, and the diapire of each bothrium offers an oval groove, and each through hole is opened on the diapire of corresponding oval groove.
Wherein, be provided with soft layer on the diapire of each bothrium.
Wherein, this oval groove is arranged on the central area of this bothrium, and this through hole is arranged on the central area of this oval groove.
Wherein, two major axis of this through hole and this oval groove are tangent.
Wherein, the sidewall of this shell pallet offers two symmetrical gripping passages.
Wherein, this suction frock also comprises carriage, and this carriage comprises inhaling to grab mount pad and to be installed at least one suction that this suction grabs on the mount pad grabs, and this suction is grabbed by being pressed in this shell tray surface and located this shell pallet.
Wherein, this suction is grabbed and is installed in this suction by screw and grabs on the mount pad.
Wherein, this suction is grabbed and is infundibulate, and the larger end in its cross section is fixed on this suction and grabs on the mount pad.
The utility model also provides a kind of bonder, it is equipped with the suction frock, this suction frock comprises shell pallet and carriage, this shell pallet offers some bothriums, the diapire of each bothrium offers a through hole, the diapire of each bothrium is the bothrium face, and the diapire of each bothrium offers an oval groove, and each through hole is opened on the diapire of corresponding oval groove.This carriage comprises inhaling to grab mount pad and to be installed at least one suction that this suction grabs on the mount pad grabs, and this suction is grabbed by being pressed in the shell tray surface and located this shell pallet.
Wherein, this suction is grabbed and is installed in this suction by screw and grabs on the mount pad.
Wherein, this suction is grabbed and is infundibulate, and the larger end in its cross section is fixed on this suction and grabs on the mount pad.
Wherein, this bonder comprises workbench and two bearings, these two bearings are symmetricly set on the both sides of this workbench, and this suction is grabbed mount pad and offered some installing holes, and this suction is grabbed mount pad and adopted some screws to be fixed on these two bearings by these some installing holes.
The suction frock that the utility model provides and the advantage with bonder of this suction frock are: when adopting shell pallet in this frock to carry out clamping, and can be in many modules of absorption in fill process, Effective Raise automated bonding production capacity; Calculate according to reality, shell pallet with 4 * 2 bothrium structural designs is applied as example, time when finishing the automated bonding of 104 microwave modules except identification, bonding amounts to 689s, and used 1144s compares during with single groove structure, can save bonding time about 40%; Adopt the shell pallet after the design of soft step that the vacuum suction successful of module is improved, solved not in one plane the unreliable problem of vacuum suction of special microwave module of tube shell bottom plane and pin; Compare with the conventional screw mode of installing and fixing, when adopting abnormity in this device to inhale to grab assembled tool that the shell pallet is installed and fixed, can realize at 10s the replacing of pallet in the time, effectively shorten the lay day (adopting the replacing time of conventional four screw mounting meanss about 80s), Effective Raise production efficiency.
Description of drawings
The front view of the shell pallet of the suction frock that Fig. 1 provides for the utility model preferred embodiments.
Fig. 2 is the rearview of shell pallet among Fig. 1.
Fig. 3 be among Fig. 1 the shell pallet along the cutaway view of hatching line A-A.
The front view of the carriage of the suction frock that Fig. 4 provides for the utility model preferred embodiments.
Fig. 5 is the vertical view of carriage among Fig. 4.
Main symbol description: bothrium 1, gripping passage 2, soft layer 3, oval groove 4, inhale grab mount pad 5, inhale grab 7, through hole 8, installing hole 9.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
The utility model preferred embodiments provides a kind of suction frock, the carriage (such as Fig. 4 and shown in Figure 5) that it comprises shell pallet (such as Fig. 1, Fig. 2 and shown in Figure 3) and locates this shell pallet.The suction frock is applied on the bonder (not shown), and this bonder comprises workbench and two bearings, and these two bearings are symmetricly set on the both sides of this workbench.
Please one consult Fig. 1, Fig. 2 and Fig. 3, wherein, Fig. 3 be among Fig. 1 the shell pallet along the cutaway view of hatching line A-A.This shell pallet offers some bothrium 1(in the present embodiment, is illustrated take eight as example with the quantity of bothrium 1), each bothrium 1 can accommodating one be treated the bonding module, the diapire of each bothrium 1 is the bothrium face.The diapire of each bothrium 1 offers an oval groove 4, and the diapire of each oval groove 4 offers a through hole 8.Through hole 8 makes the workbench of this shell pallet by bonder and vacuumizes the air flue (not shown) and be connected for bothrium vacuum road, passing hole channel vacuumizes generation suction and will treat that the bonding module is adsorbed on the bothrium 1 of shell pallet when treating bonding module contact bothrium face, discharge vacuum behind Bonding, then the bonding module is taken off.
Can be provided with soft layer 3 on the diapire of each bothrium 1, preferably, this oval groove 4 is arranged on the central area of this bothrium 1, and this through hole 8 is arranged on the central area of this oval groove 4.This through hole 8 is as far as possible tangent with two major axis of this oval groove 4.
According to the shape of the shape decision bothrium 1 for the treatment of the bonding module, deeply determine the height of bothrium 1 according to the chamber for the treatment of the bonding module.For obtaining better heat-transfer effect (realizing the function of hot platform), shell pallet aluminium alloy material.For optimizing the vacuum suction effect, on the one hand, each bothrium 1 fluting around through hole is that the vacuum area is inhaled in oval groove 4 increases of 0.2mm deeply; The soft step that is about 0.05mm at bothrium 1 bottom design height on the other hand is soft layer 3, guarantees to treat that by infilling the contact of bonding module is reliable.
For convenient shell pallet after the heating is taken off operation, offer two groups of gripping passages 2 at the shell pallet and carry out gripping work for inserting carriage, adopt high-speed milling processing, guarantee the dimensional uniformity of all bothriums 1.Certainly, adopt alternate manner as also being passable to the shell pallet operation manually, adopt the carriage more convenient and quicker.
See also Fig. 4 and Fig. 5, carriage comprises inhaling to grab mount pad 5 and to be installed at least one suction that this suction grabs on the mount pad 5 grabs 7, and this suction is grabbed 7 and located this shell pallet by being pressed in the shell tray surface.This suction is grabbed 7 and is infundibulate, and the larger end in its cross section is fixed on this suction and grabs on the mount pad 5.
This suction is grabbed 7 and is installed in this suction by screw and grabs on the mount pad 5.This suction is grabbed mount pad 5 and is offered some installing holes 9, and this suction is grabbed mount pad 5 and adopted some screws to be fixed on these two bearings by these some installing holes 9.The carriage main application is at the fixing shell pallet of bonder, in the present embodiment, suction is grabbed mount pad 5 and is installed on two bearings of the other symmetry of bonding machine worktable by four φ 4.5 screw holes (being installing hole 9), there are four φ 3.5 screw holes on the top that mount pad 5 is grabbed in suction, can carry out as required one or two installations that suction is grabbed.Bearing can be realized by pneumatic control the rise/fall of fixed journey system, and the assembled tool that screw is mounted thereon is realized loosening/clamping the shell pallet thereupon.
The suction frock that the utility model proposes is the device for suction material expanded of multi-chip microwave module automated bonding, can expanded set attach together the folder frock, but comprise the shell pallet of array extending formula bothrium structural design and can expand abnormity and inhale and grab assembled tool (being carriage).Wherein, the abnormity suction is grabbed assembled tool and is used for installing and fixing the shell pallet.
Compared with prior art, the shell pallet in this suction frock can be according to treating bonding module overall dimension and batch product bonding demand, and the expanded type bothrium structural design that adopts a plurality of unit of every column/row to arrange is treated the bonding module for adsorbable many after once feeding; At the soft step of suction face (being the bothrium face) the poor 0.05mm of being approximately of design height of bothrium 1, when the shell back side lay on the step vacuum suction, pin was supported by lower slightly soft supporting face, guarantees to treat that by infilling the contact of bonding spare is reliable.Abnormity suction in the carriage is grabbed assembled tool and can be required installing and fixing that one/many suctions of the one-sided realization of shell pallet are grabbed according to actual production, realizes being applicable to the Portable replacing of many kinds microwave module shell pallet, increases the flexibility that it installs and fixes mode.
When adopting the shell pallet to carry out clamping, can in a fill process, adsorb many modules, Effective Raise automated bonding production capacity.Calculate according to reality, shell pallet with 4 * 2 bothrium structural designs is applied as example, time when finishing the automated bonding of 104 microwave modules except identification, bonding amounts to 689s, and used 1144s compares during with single groove structure, can save bonding time about 40%.Adopt the shell pallet after the design of soft step that the vacuum suction successful of module is improved, solved not in one plane the unreliable problem of vacuum suction of special microwave module of tube shell bottom plane and pin.Compare with the conventional screw mode of installing and fixing, when adopting abnormity in this device to inhale to grab assembled tool that the shell pallet is installed and fixed, can realize at 10s the replacing of pallet in the time, effectively shorten the lay day (adopting the replacing time of conventional four screw mounting meanss about 80s), Effective Raise production efficiency.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the protection range of the present utility model.
Claims (10)
1. suction frock, it comprises the shell pallet, this shell pallet offers some bothriums, the diapire of each bothrium offers a through hole, the diapire of each bothrium is the bothrium face, it is characterized in that the diapire of each bothrium offers an oval groove, each through hole is opened on the diapire of corresponding oval groove.
2. suction frock as claimed in claim 1 is characterized in that, is provided with soft layer on the diapire of each bothrium.
3. suction frock as claimed in claim 1 is characterized in that, this oval groove is arranged on the central area of this bothrium, and this through hole is arranged on the central area of this oval groove.
4. suction frock as claimed in claim 3 is characterized in that, two major axis of this through hole and this oval groove are tangent.
5. suction frock as claimed in claim 1 is characterized in that, the sidewall of this shell pallet is offered two symmetrical gripping passages.
6. suction frock as claimed in claim 1, it is characterized in that, this suction frock also comprises carriage, and this carriage comprises inhaling to grab mount pad and to be installed at least one suction that this suction grabs on the mount pad grabs, and this suction is grabbed by being pressed in this shell tray surface and located this shell pallet.
7. suction frock as claimed in claim 6 is characterized in that, this suction is grabbed and is installed in this suction by screw and grabs on the mount pad.
8. suction frock as claimed in claim 6 is characterized in that, this suction is grabbed and is infundibulate, and the larger end in its cross section is fixed on this suction and grabs on the mount pad.
9. a bonder is characterized in that, it is equipped with such as the described suction frock of any one in the claim 6 to 8.
10. bonder as claimed in claim 9, it is characterized in that, this bonder comprises workbench and two bearings, these two bearings are symmetricly set on the both sides of this workbench, this suction is grabbed mount pad and is offered some installing holes, and this suction is grabbed mount pad and adopted some screws to be fixed on these two bearings by these some installing holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220620067 CN202871765U (en) | 2012-11-21 | 2012-11-21 | Material absorbing tool and bonding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220620067 CN202871765U (en) | 2012-11-21 | 2012-11-21 | Material absorbing tool and bonding machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202871765U true CN202871765U (en) | 2013-04-10 |
Family
ID=48038458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220620067 Expired - Lifetime CN202871765U (en) | 2012-11-21 | 2012-11-21 | Material absorbing tool and bonding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202871765U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114783928A (en) * | 2022-04-29 | 2022-07-22 | 深圳格芯集成电路装备有限公司 | Material taking and placing device, material taking and placing method and chip production equipment |
-
2012
- 2012-11-21 CN CN 201220620067 patent/CN202871765U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114783928A (en) * | 2022-04-29 | 2022-07-22 | 深圳格芯集成电路装备有限公司 | Material taking and placing device, material taking and placing method and chip production equipment |
| CN114783928B (en) * | 2022-04-29 | 2023-02-14 | 深圳格芯集成电路装备有限公司 | Material taking and placing device, material taking and placing method and chip production equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130410 |