CN202825516U - Tablet machine - Google Patents
Tablet machine Download PDFInfo
- Publication number
- CN202825516U CN202825516U CN201220422222.9U CN201220422222U CN202825516U CN 202825516 U CN202825516 U CN 202825516U CN 201220422222 U CN201220422222 U CN 201220422222U CN 202825516 U CN202825516 U CN 202825516U
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- fixed
- plate
- tablet
- end portions
- machine frame
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- Expired - Lifetime
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model relates to a tablet machine. A bottom plate is fixed on a bottom foot, a cooling disc is fixed on the bottom plate, a plurality of support columns are fixed on the bottom plate outside the cooling disc, machine frame lower plates are fixed on the top end portions of the support columns, inner plate beams are fixed on the inner end portions of the machine frame lower plates, and outer plate beams are fixed on the outer end portions of the machine frame lower plates. Machine frame upper plates are fixed on the top end portions of the inner plate beams and the lower plate beams, tablet cylinders are fixed on the machine frame upper plates, joint bearings are sleeved on the lower end portions of piston rods of the tablet cylinders, and tablet discs are fixed on the joint bearings. By the adoption of the joint bearings, round pressing discs swing all around to press toward a chip, so that the problem that a bubble is reserved between the chip and a wax layer by traditional manpower pressing and attaching is solved, and the purpose that the wax layer is evenly attached with the surface of the chip is achieved.
Description
Technical field
The utility model relates to the semiconductor processing field, especially a kind of tablet press machine.
Background technology
Industries such as photoelectricity, semiconductor, mould now, use the surface accuracy of part (as mill, cut after the processing workpiece) to require all day by day to improve for it, therefore, the precise fine processing of carrying out grinding and polishing in surface of the work has been the present main flow process technology of development.Want to realize the high precision plane grinding and polishing of workpiece, except the precision that will guarantee the grinding and polishing dish, also will guarantee the even applying of workpiece and grinding and polishing dish upper surface, pressure is identical everywhere to make surface of the work, and grinding and polishing speed is identical everywhere.
Wafer need be waxed before grinding and polishing and be overlayed processing, concrete operations are: ceramic disk is put on the heater heats a period of time, evenly be applied in solid wax on the ceramic disk again, and cutter scrapes off unnecessary wax by hand, then form the thin wax layer of one deck on the ceramic disk, at last manual the overlaying of wafer finished the wafer operation of waxing on ceramic disk.Because manual operations causes being applied to the wax layer skewness on the ceramic disk, or leaves bubble between wafer and the wax layer, in follow-up grinding and polishing, cause wafer easily to break and flatness is poor becomes serious problem.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, the tablet press machine that provides a kind of wafer after can realizing waxing to wax layer good uniformity.
The technical scheme that provides according to the utility model, described tablet press machine, be fixed with base plate at footing, be fixed with cooler pan at base plate, base plate in the cooler pan outside is fixed with some support columns, top ends at support column is fixed with the frame lower plate, inner end in the frame lower plate is fixed with interior plate-girder, the outer end of frame lower plate is fixed with outer plate-girder, top ends at interior plate-girder and outer plate-girder is fixed with the frame upper plate, be fixed with the compressing tablet cylinder at the frame upper plate, overlapping in the piston-rod lower end section of compressing tablet cylinder has oscillating bearing, is fixed with the compressing tablet dish at oscillating bearing.
Lower surface at cooler pan offers cooling bath.
The utlity model has following advantage:
The utility model adopts cylinder to promote the circle platen wafer layer of waxing to be carried out mechanical compaction, the manual wax layer that is applied on the ceramic disk is evenly distributed;
The utility model adopts oscillating bearing, makes round platen universal swing press to wafer, and the solution Traditional Man overlays and causes staying alveolate problem between wafer and the wax layer, reaches the purpose that wax layer and wafer surface are evenly fitted.
Description of drawings
Fig. 1 is front view of the present utility model.
Fig. 2 is left view of the present utility model.
The specific embodiment
The utility model is described in further detail below in conjunction with concrete drawings and Examples.
As shown in the figure: this tablet press machine, be fixed with base plate 2 at footing 1, be fixed with cooler pan 3 at base plate 2, base plate 2 in cooler pan 3 outsides is fixed with some support columns 4, top ends at support column 4 is fixed with frame lower plate 5, inner end in frame lower plate 5 is fixed with interior plate-girder 6, the outer end of frame lower plate 5 is fixed with outer plate-girder 7, top ends at interior plate-girder 6 and outer plate-girder 7 is fixed with frame upper plate 8, be fixed with compressing tablet cylinder 9 at frame upper plate 8, piston-rod lower end section cover at compressing tablet cylinder 9 has oscillating bearing 10, is fixed with compressing tablet dish 11 at oscillating bearing 10.
Lower surface at cooler pan 3 offers cooling bath 12.
During work, in the cooling bath 12 of cooler pan 3, pass into cooling water, the ceramic disk that will post again wafer is positioned over the upper surface of cooler pan 3, start compressing tablet cylinder 9, the piston rod drive oscillating bearing 10 of compressing tablet cylinder 9 is moved downward, thereby the compressing tablet dish 11 that makes oscillating bearing 10 bottoms presses to the wafer on ceramic disk top, by the universal adjustment of oscillating bearing 10, wafer and wax layer is evenly fitted.
Claims (2)
1. tablet press machine, it is characterized in that: be fixed with base plate (2) at footing (1), be fixed with cooler pan (3) at base plate (2), base plate (2) in cooler pan (3) outside is fixed with some support columns (4), top ends at support column (4) is fixed with frame lower plate (5), inner end in frame lower plate (5) is fixed with interior plate-girder (6), the outer end of frame lower plate (5) is fixed with outer plate-girder (7), top ends at interior plate-girder (6) and outer plate-girder (7) is fixed with frame upper plate (8), be fixed with compressing tablet cylinder (9) at frame upper plate (8), piston-rod lower end section cover at compressing tablet cylinder (9) has oscillating bearing (10), is fixed with compressing tablet dish (11) at oscillating bearing (10).
2. tablet press machine as claimed in claim 1, it is characterized in that: the lower surface at cooler pan (3) offers cooling bath (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220422222.9U CN202825516U (en) | 2012-08-23 | 2012-08-23 | Tablet machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220422222.9U CN202825516U (en) | 2012-08-23 | 2012-08-23 | Tablet machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202825516U true CN202825516U (en) | 2013-03-27 |
Family
ID=47937308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220422222.9U Expired - Lifetime CN202825516U (en) | 2012-08-23 | 2012-08-23 | Tablet machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202825516U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107314837A (en) * | 2017-06-29 | 2017-11-03 | 济南大学 | Piezoelectric quartz multidimensional force measurement crystalline substance group producing device |
-
2012
- 2012-08-23 CN CN201220422222.9U patent/CN202825516U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107314837A (en) * | 2017-06-29 | 2017-11-03 | 济南大学 | Piezoelectric quartz multidimensional force measurement crystalline substance group producing device |
| CN107314837B (en) * | 2017-06-29 | 2019-09-10 | 济南大学 | Piezoelectric quartz multidimensional force measurement crystalline substance group producing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130327 |
|
| CX01 | Expiry of patent term |