CN202812405U - High-vacuum system sealing device - Google Patents
High-vacuum system sealing device Download PDFInfo
- Publication number
- CN202812405U CN202812405U CN 201220448034 CN201220448034U CN202812405U CN 202812405 U CN202812405 U CN 202812405U CN 201220448034 CN201220448034 CN 201220448034 CN 201220448034 U CN201220448034 U CN 201220448034U CN 202812405 U CN202812405 U CN 202812405U
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- valve plate
- vacuum
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- high vacuum
- air cylinder
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Abstract
The utility model discloses a high-vacuum system sealing device. The device is characterized by comprising a vacuum chamber body, a high-vacuum turning plate valve, a low-temperature coil, a condensation cover and a diffusion pump, wherein the low-temperature coil is arranged in the condensation cover; the high-vacuum turning plate valve comprises a driving air cylinder, an air cylinder rotating arm, a valve plate fixing arm, a valve plate adjusting mechanism, a valve plate leveling shaft and a valve plate; and the driving air cylinder is automatically controlled to act and drives the air cylinder rotating arm and the valve plate fixing arm to act. The vacuum turning plate valve is opened and closed instantly in a vacuum state, the conduction ability is up to over 90 percent, the production efficiency is high, different conduction abilities can also be defined according to the requirements of production and equipment, if power failure or an accident occurs in an operation process, the valve plate is automatically closed, one end of the atmosphere of the vacuum chamber body is isolated from the oil diffusion pump and a cryogenic extinguishing and collecting device, a cryogenic system is protected, is not exposed in air and is not affected by raising temperature, and the pump oil of the vacuum diffusion pump is not oxidized.
Description
Technical field
The utility model relates to a kind of for vacuum system connection and cut-off air-flow field, especially a kind of high vacuum system seal arrangement.
Background technique
The most of oil diffusion pump adopts the structure of flapper valve at present, also has partial devices to adopt the structure of Flap valve.These structures have solved the vacuum seal problem, but low-temperature deep is pounced on collecting system can't play a protective role.There is following shortcoming in domestic Flap valve: without adjustment, seal ring is easily squeezed bad during (1) turnover panel, and amount of leakage is large; (2) seal ring is machined on the valve body, changes seal ring and need pull down hanging valve plate, affects manufacturing efficiency.
Summary of the invention
Goal of the invention of the present utility model is: for the problem of above-mentioned existence, provide a kind of and connect and the cut-off airflow apparatus for vacuum system.The advantage of this device is: vacuum flap valve is instantaneous finishing in the vacuum state opening-closing process, and the admittance ability reaches more than 90%, and manufacturing efficiency is high, also can according to the own needs of production and equipment, can define the admittance abilities of its different sizes.Have a power failure or accident if occur in the operating process; valve plate can be closed voluntarily; vacuum chamber body atmosphere one end and oil diffusion pump and deep cooling are pounced on acquisition means isolate, play safety protection cryogenic system be not exposed atmosphere and the impact that heats up, and protection vacuum diffusion pump pump oil is difficult for the effect of oxidation.
The technical solution adopted in the utility model is such: a kind of high vacuum system seal arrangement comprises vacuum chamber body, high vacuum Flap valve, low-temperature coil, condensing cover and K-800A diffusion pump.Be applicable to pressure and be lower than a barometric pressure to the 10-5Pa vacuum ranges.Can use at a distance control and the chain control of electrical equipment.The advantage of this device is: Flap valve is connected between vacuum chamber body and the condensing cover, plays to separate or the effect of communication chamber body and vacuum pumping system.Flap valve adopts and drives air cylinder driven, drives cylinder by electrical control, realizes auto-action; The cryogenic system low-temperature coil is housed in the condensing cover, mainly is for the oil vapor that makes diffusion pump can better cool off, reflux at pumping hole, and the water vapour in the coil pipe absorption high vacuum makes the larger exhaust capacity of pump performance.
Described high vacuum Flap valve comprises: drive cylinder, cylinder pivoted arm, valve plate fixed arm, valve plate regulating mechanism, valve plate levelling shaft, valve plate composition.Be applicable to pressure and be lower than a barometric pressure to the 10-5Pa vacuum ranges.Can use at a distance electrical control.
Described valve plate regulating mechanism mainly is comprised of die springs, adjustment screw mandrel, adjusting nut, fixed block, welded post.Adjust the screw mandrel spring that loads a die and be connected with adjusting nut and be connected with welded post, welded post is welded on the valve plate, regulates valve plate and compacted 's parallelism by tightening adjusting nut.Under the effect that drives cylinder, valve plate rotates around rotating center, when the valve plate rotation begins to close, valve plate is following to be contacted with sealed first, adjust adjusting nut this moment, and seal ring is not cut to standard by mill when adjusting to valve plate and closing, and slowly closes in valve plate and sealed plane, it is parallel by spring force valve plate plane and sealed plane to be adjusted automatically when closing, and reaches better sealing; And can make seal ring and sealed even contact, seal ring is stressed consistent, is in regime of elastic deformation, has prolonged the working life of seal ring.
Swallow-tail form seal groove processing is on valve plate, and seal ring belongs to easily damaged parts in this device, the processing of swallow-tail form seal groove after on the valve plate, replacing seal ring that can be easy and convenient when valve plate is in open mode.
In sum, owing to adopted technique scheme, the beneficial effects of the utility model are: vacuum flap valve is instantaneous finishing in the vacuum state opening-closing process, the admittance ability reaches more than 90%, manufacturing efficiency is high, also can according to the own needs of production and equipment, can define the admittance abilities of its different sizes.If occur to have a power failure in the operating process or unexpected, valve plate can be closed voluntarily, vacuum chamber body atmosphere one end and oil diffusion pump and deep cooling is pounced on acquisition means isolate, and plays the safety protection cryogenic system and is not warmed the effect that is difficult for oxidation with vacuum diffusion pump pump oil.
Description of drawings
Fig. 1 is that a kind of high vacuum system seal arrangement is always schemed.
Fig. 2 is a kind of high vacuum system seal arrangement side view.
Fig. 3 is a kind of high vacuum system seal arrangement plan view.
Fig. 4 is a kind of three embodiments of high vacuum system seal arrangement, is respectively closed condition-intermediateness-open mode.
Mark among the figure: 1 is the vacuum chamber body, and 2 is the high vacuum Flap valve, and 3 is low-temperature coil, and 4 is condensing cover, and 5 is diffusion pump, and 2-1 is for driving cylinder, and 2-2 is the cylinder pivoted arm, and 2-3 is the valve plate fixed arm, and 2-4 is the valve plate regulating mechanism, and 2-6 is the valve plate levelling shaft.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in detail.
In order to make the purpose of this utility model, technological scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
As shown in Figure 1, Flap valve 2 has an individual components of one's own, be connected between chamber body and the vacuum system, drive cylinder 2-1 by automatically controlling its stroke action, driving cylinder 2-1, driving cylinder pivoted arm 2-2, fixed arm 2-3, valve plate levelling shaft 2-5, valve plate 2-6 interconnect and are integral, and are driven by cylinder 2-1 and rotate around rotating center.
When Flap valve 2 was in closed condition, vacuum chamber body 1 separated with condensing cover 4, and chamber body 1 is atmospheric conditions;
When Flap valve 2 was in opening state, vacuum chamber body 1 was communicated with condensing cover 4, and chamber body 1 is vacuum state.
Such as Fig. 2: the dove-tail form seal groove is processed on valve plate 2-6, when turnover panel 2-6 opens to horizontal position, i.e. and conveniently replaced seal ring; Valve plate 2-6 is closing and sealed moment that contacts, and by regulating mechanism 2-4 self regulating valve Board position, makes valve plate 2-6 remain parallel with sealed face, and seal ring is stressed evenly, not only guarantees sealing but also increase the seal ring life-span.
Such as Fig. 3: valve plate 2-6 opens from the vertical position to horizontal position and can automatically control, and can be used for various working, and maximum can be opened to horizontal position (90 °), and the admittance ability is large, and bleed the time (being that secondary recovers the degree of vacuum time in the body of chamber) is short.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (3)
1. a high vacuum system seal arrangement is characterized in that, comprising: vacuum chamber body (1), high vacuum Flap valve (2), low-temperature coil (3), condensing cover (4) and diffusion pump (5), be equipped with low-temperature coil (3) in the described condensing cover (4); Described high vacuum Flap valve (2) comprising: drive cylinder (2-1), cylinder pivoted arm (2-2), valve plate fixed arm (2-3), valve plate regulating mechanism (2-4), valve plate levelling shaft (2-5), valve plate (2-6), described driving cylinder (2-1) is driven cylinder (2-1) and is driven cylinder pivoted arm (2-2) and valve plate fixed arm (2-3) action by automatic control action.
2. a kind of high vacuum system seal arrangement according to claim 1, it is characterized in that: described regulating mechanism (2-4) is comprised of die springs, adjustment screw mandrel, adjusting nut, fixed block, welded post, die springs and adjusting nut are installed in to be adjusted on the screw mandrel, adjust screw mandrel and be connected with welded post, welded post is welded on the valve plate (2-6); Valve plate (2-6) can rotate around rotating center.
3. a kind of high vacuum system seal arrangement according to claim 1, it is characterized in that: the swallow-tail form seal groove is processed on valve plate (2-6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220448034 CN202812405U (en) | 2012-09-05 | 2012-09-05 | High-vacuum system sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220448034 CN202812405U (en) | 2012-09-05 | 2012-09-05 | High-vacuum system sealing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202812405U true CN202812405U (en) | 2013-03-20 |
Family
ID=47871275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220448034 Expired - Fee Related CN202812405U (en) | 2012-09-05 | 2012-09-05 | High-vacuum system sealing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202812405U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104141111A (en) * | 2014-07-11 | 2014-11-12 | 苏州诺耀光电科技有限公司 | Vacuum online product sampling mechanism |
| CN107159724A (en) * | 2017-07-20 | 2017-09-15 | 河北工业大学 | A kind of sealing device of composite plate assembly process |
| CN110252738A (en) * | 2019-07-03 | 2019-09-20 | 江苏石川岛丰东真空技术有限公司 | A kind of rapid drying device and hydrocarbon cleaning system |
| CN111810833A (en) * | 2020-08-05 | 2020-10-23 | 杭州富士达特种材料股份有限公司 | Double-pass vacuum pumping system and method for vacuum multi-layer heat-insulation low-temperature container interlayer |
-
2012
- 2012-09-05 CN CN 201220448034 patent/CN202812405U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104141111A (en) * | 2014-07-11 | 2014-11-12 | 苏州诺耀光电科技有限公司 | Vacuum online product sampling mechanism |
| CN107159724A (en) * | 2017-07-20 | 2017-09-15 | 河北工业大学 | A kind of sealing device of composite plate assembly process |
| CN110252738A (en) * | 2019-07-03 | 2019-09-20 | 江苏石川岛丰东真空技术有限公司 | A kind of rapid drying device and hydrocarbon cleaning system |
| CN111810833A (en) * | 2020-08-05 | 2020-10-23 | 杭州富士达特种材料股份有限公司 | Double-pass vacuum pumping system and method for vacuum multi-layer heat-insulation low-temperature container interlayer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130320 Termination date: 20160905 |